Abstract: A method for flushing gas pockets from a manifold that forms a part of a liquid sampling system that is compatible with a chemical-mechanical polishing system is described. A flushing liquid, e.g., ultra pure water, is introduced into, and expelled from, the manifold to expel gas pockets from the manifold. The method comprises the steps of opening a manifold vent, filling the manifold with the flushing liquid, and closing the vent to increase the velocity of the flushing liquid flowing through the manifold. The introduction of the flushing liquid is discontinued, and thereafter, resumed. The discontinuation and resumption steps are preferably repeated The manifold is thus flushed of gas pockets.

Abstract: A method and system for liquefaction monitoring of a gas in a gas piping system in which pressure and temperature information about the gas is gathered and the liquefaction status of the gas is determined and reported.

Abstract: Methods of providing ozone at a selected pressure above atmospheric pressure include supplying a purge gas supply (22) pressurized above the selected pressure to at least one ozone adsorption apparatus (12); desorbing ozone from the ozone adsorption apparatus (12) with the pressurized purge gas supply (22); and delivering a mixture of ozone and the purge gas supply (24) at the selected pressure without further compression.

Abstract: The present invention provides generally a method and apparatus for purifying a liquid. More particularly, purification of a bulk liquid is performed by introducing a liquid stream to a purification vessel, which comprises both a distillation chamber for forming a purified vapor and an annular chamber for collecting a purified liquid that is condensed from the purified vapor. A refrigerant system provides thermodynamic efficiency in the purification method by directing waste heat generated in one part of the refrigerant system for heating duty in another part of the refrigerant system. The method and apparatus can be applied to producing purified carbon dioxide, nitrous oxide, ammonia and fluorocarbons.

Abstract: A method of heating a surface susceptible to oxidation or reduction includes generating a central, generally cylindrical, fuel-rich particulate jet, and a coaxial, annular, supersonic velocity, oxidant-rich jet having an auto-thermal ignition temperature greater than the temperature of the fuel-rich particulate jet, directed toward the surface to be heated, the velocity of the fuel-rich particulate jet being less than the velocity of the oxidant-rich jet; allowing the supersonic oxidant-rich jet and the fuel-rich particulate jet to coact to form a coherent particulate fuel-rich and fuel-lean jet having a central particulate fuel-rich region and a coaxial annular fuel-lean region; impinging the coherent particulate fuel-rich and fuel-lean jet upon the surface to be heated for forming a turbulent reaction zone at the surface; and controlling oxidation and reduction reactions at the turbulent reaction zone by adjusting properties of the supersonic oxidant-rich jet and/or the fuel-rich particulate jet.

Abstract: The invention provides a method and apparatus for producing nitrogen trifluoride. The invention involves passing a working fluid through a heat engine cycle and using the mechanical energy generated by the working fluid to produce sufficient mixing intensity within a nitrogen trifluoride reactor. The method utilizes a working fluid vapor jet, such as a hydrogen fluoride vapor jet, to impart sufficient energy to the mixing zone of a reactor in order to disperse gaseous fluorine within a liquid ammonium acid fluoride melt. A gaseous reaction product stream is removed from the reactor, the reaction product stream comprising nitrogen trifluoride and a working fluid vapor. The working fluid is then separated from the nitrogen trifluoride and recycled for reuse in the process, thereby completing a heat engine cycle.

Abstract: An improvement in a magnetic resonance method for determining the mass of samples wherein the samples include powdered solid materials, including applying a first magnetic field in a first direction in an interrogation zone for creating a net magnetisation within a sample located within the interrogation zone; applying an alternating magnetic field in a second direction in the interrogation zone for temporarily changing the net magnetisation of the sample; monitoring energy emitted by the sample as the net magnetisation of the sample returns to its original state and generating an output signal having a characteristic which is proportional to the energy emitted; comparing the output signal characteristic with like data obtained from at least one similar sample of known mass; and, determining the mass of the sample; the improvement being one of generating the static magnetic field having a field strength in the range of about 0.1 T to about 1.3 T, or disposing the samples within a distance of about 0.

Abstract: An improved crucible cover for multiple pocket electron beam sources has been invented. The invention provides selection between one of the multiple pockets for evaporative heating and a noncontacting, line-of-sight blocking baffle between heated and unheated pockets. In one embodiment, the baffle is formed by the cooperation of a crucible surface groove with a cover feature that extends into the groove. In a second embodiment, the baffle is formed by a barrier extending upwards from the crucible surface between pockets that cooperates with a cover to form the line-of-sight baffle. The crucible and cover in these embodiments accommodate deposits without hindering the ability of the baffle to reduce contamination or interfere with the operation of the source. Additionally, the cover and crucible may be operated separately, with a cover lifting mechanism that lowers the cover to form a baffle and raises the cover to allow the separately controlled rotation of the crucible.

Abstract: Magnetic resonance measurement methods for determining the mass of samples are provided in which magnetic field homogeneity is determined, compensation is provided for potential drifts in the measuring system, and the presence of metal in samples is determined. The methods include applying a magnetic field in a first direction in an interrogation zone for creating a net magnetisation within a sample located within the interrogation zone; applying an alternating magnetic field in a second direction in the interrogation zone for temporarily changing the net magnetisation of the sample located within the interrogation zone; monitoring energy emitted by the sample as the net magnetisation of the sample returns to its original state and generating an output signal having a characteristic which is proportional to the energy emitted; and comparing the output signal of the monitoring with other data.

Abstract: The thickness of a silicon wafer (3) within a processing vacuum enclosure (1) is measured or monitored by an optical apparatus (50) via a window (4). The optical apparatus (5) comprises a laser which is tuneable across a range of wavelengths while maintaining a narrow bandwidth. The optical apparatus (5) also includes a detector receiving reflected light. The wavelength variation produces interference effects which are used, by examination of the detector output, to give a measure of thickness or other parameters.

Abstract: An apparatus and method for surface crust freezing of a food product utilizes a refrigeration shell enclosing a freezing chamber, the freezing chamber having a cavity shaped to substantially accommodate the shape of the exterior surface of the food product; the cavity communicating with the refrigeration shell; a transport substrate to carry the food product into the freezing chamber; a cryogen supply; and a gas circulation device in the refrigeration shell in communication with the cryogen supply to introduce a cooling flow of gas containing cryogen into the cavity so as to contact the food product along its exterior surface.

Abstract: A batch process and apparatus for producing a pressurized liquid carbon dioxide stream includes distilling a feed stream of carbon dioxide vapor off of a liquid carbon dioxide supply; introducing the carbon dioxide vapor feed stream into at least one purifying filter; condensing the purified feed stream within a condenser to form an intermediate liquid carbon dioxide stream; introducing the intermediate liquid carbon dioxide stream into at least one high-pressure accumulation chamber; heating the high pressure accumulation chamber to pressurize the liquid carbon dioxide contained therein to a delivery pressure; delivering a pressurized liquid carbon dioxide stream from the high-pressure accumulation chamber; and, discontinuing delivery of the pressurized liquid carbon dioxide stream for replenishing the high pressure accumulation chamber.

Abstract: A system for use with a plating cell configured to plate objects in a plating process. At least one byproduct is created in a plating substance used in the plating cell. The system includes a purification system configured to remove at least a portion of the at least one byproduct from the plating substance. The purification system comprises at least a first processing vessel, a second processing vessel, and a flow path providing flow from the first processing vessel to the second processing vessel. The flow path may be configured such that the flow from the first vessel to the second vessel is caused by gravity. A method is also provided for removing at least a portion of at least one byproduct from a plating substance used in a plating cell.

Abstract: A system, apparatus and method is disclosed for providing a consistent liquid mixture according to a predetermined recipe for use at a point of use. The apparatus includes a plurality of liquid component reservoirs in which a constant gas pressure is maintained. A plurality of valves are provided, with individual valves connected to an outlet port of each reservoir. An electronic controller controls the valve actuation in a repetitive sequence to discharge predetermined doses of selected liquid components for mixing to form the consistent liquid mixture. A mixing section receives the sequence of doses to mix them together to form the liquid mixture.

Abstract: Food products are frozen or cooled within a housing chamber defined by side walls between an ceiling and floor and having a cryogen supply, a food products conveyor extending into the chamber disposed between the ceiling and floor, by transporting the food products on the conveyor; the chamber containing at least one impingement hood disposed above the conveyor; the impingement hood including a shell including a top, opposed edges and opposed side walls supporting an impinger containing openings. Gas and solid or liquid cryogen are mixed within the impingement hood, the mixture of gas and cryogen are directed to the impinger, and impingement jets of the mixture are directed through an impingement plate onto the food products transported on the conveyor.

Abstract: This invention relates to the control of etch and deposition processes in the manufacture of semiconductor devices, microelectronic machines (MEMs), and waveguides.

Abstract: The present invention is a system for protecting, for example, electronic, mechanical, or other components from contamination in a processing environment and includes a distribution manifold, a pressurized fluid in fluid communication with the manifold, and a plurality of apparatuses, such as sensors, which are connected to the manifold by respective conduits throughwhich the pressurized fluid flows to maintain a positive pressure at each of the apparatuses to prevent the processing environment from contacting the plurality of apparatus.

Abstract: An apparatus and method for recovering and recycling a tracer gas from a leak testing process. The apparatus comprises a leak testing section, a gas recovery/blending section, and a gas analysis/recycle section. The leak testing section operates to perform various leak testing functions and comprises a plurality of test parts, a plurality of gas supply valves, and a plurality of gas discharge valves. The gas recovery/blending section functions to blend gases together and comprises a virgin gas storage means associated with a flow control means and a recovered gas storage means having a pressure analysis means and recovered gas analysis means. The gas analysis/recycle section operates to analyze, store, and deliver a tracer gas and comprises compressor, blended gas storage means, blended gas analysis means, pressure analysis/adjustment means, and temperature analysis means.

Abstract: A semiconductor-manufacturing tool has two load locks, one for semiconductor wafers entering the tool for processing and the other for wafers leaving the tool after being processed. The load locks are of a new generation capable of being evacuated or vented in shorter times than load locks of the prior art, and permit high throughput. The tool is associated with three atmospheric wafer-handling robots to obtain the high throughput permitted by the load locks. One robot transfers wafers to be processed from a supply to a wafer pre-aligner, another robot transfers wafers from the wafer pre-aligner to the load lock for wafers entering the tool, and the third transfers processed wafers from the load lock for wafers leaving the tool back to the supply.

Abstract: An apparatus and method for processing a microelectronic substrate comprises a main chamber and a movable boundary. The main chamber comprises a main chamber wall enclosing a main chamber interior. The movable boundary is disposed within the main chamber interior, and is movable between a first position and a second position. At the first position, the movable boundary at least partially defines a sub-chamber in which a substrate can be processed. The sub-chamber is fluidly isolated from the main chamber interior, and provides an environment suitable for a high-pressure processing of the substrate such as cleaning or surface preparation. The sub-chamber can be maintained at a high pressure while the main chamber is maintained at either a low pressure, an atmospheric pressure, or at a vacuum. The apparatus can be directly coupled to an external substrate handling and/or fabrication module, such that the main chamber interior provides a buffer between the sub-chamber and the external module.