Patents Assigned to The Institute of Microelectronics, Chinese Academy of Sciences
  • Publication number: 20230104404
    Abstract: A computing-in-memory circuit includes a Resistive Random Access Memory (RRAM) array and a peripheral circuit. The RRAM array comprises a plurality of memory cells arranged in an array pattern, and each memory cell is configured to store a data of L bits, L being an integer not less than 2. The peripheral circuit is configured to, in a storage mode, write more than one convolution kernels into the RRAM array, and in a computation mode, input elements that need to be convolved in a pixel matrix into the RRAM array and read a current of each column of memory cells, wherein each column of memory cells stores one convolution kernel correspondingly, and one element of the convolution kernel is stored in one memory cell correspondingly, and one element of the pixel matrix is correspondingly input into a word line that a row of memory cells connect.
    Type: Application
    Filed: July 23, 2020
    Publication date: April 6, 2023
    Applicant: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCES
    Inventors: Feng ZHANG, Renjun SONG
  • Patent number: 11616150
    Abstract: A semiconductor device with C-shaped channel portion and an electronic apparatus including the semiconductor device are disclosed. According to the embodiments, the semiconductor device may include a first semiconductor element and a second semiconductor element adjacent in a first direction. The first semiconductor element and the second semiconductor element may respectively include: a channel portion on a substrate, the channel portion including a curved nano-sheet or nano-wire with a C-shaped section; source/drain portions at upper and lower ends of the channel portion with respect to the substrate, respectively; and a gate stack surrounding a periphery of the channel portion. The channel portion of the first semiconductor element and the channel portion of the second semiconductor element may be substantially coplanar.
    Type: Grant
    Filed: January 20, 2021
    Date of Patent: March 28, 2023
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 11611353
    Abstract: A quantizer for a sigma-delta modulator, a sigma-delta modulator, and a method of shaping noise are provided. The quantizer includes: an integrator configured to generate, in a Kth sampling period, a quantization error signal for a Kth period according to an internal signal, a quantization error signal for a (K?1)th period, a filtered quantization error signal for the (K?1)th period and a filtered quantization error signal for a (K?2)th period; an integrating capacitor configured to store the quantization error signal for the Kth period, to weight the internal signal in a (K+1)th sampling period; a passive low-pass filter configured to acquire the quantization error signal for the Kth period in a Kth discharge period, and feed back the filtered quantization error signal to the integrator in a (K+1)th sampling period and a (K+2)th sampling period; and a comparator configured to quantize the quantization error signal for the Kth period.
    Type: Grant
    Filed: June 4, 2021
    Date of Patent: March 21, 2023
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Kunyu Wang, Li Zhou, Jie Chen, Minghui Chen, Ming Chen, Wenjing Xu, Chengbin Zhang
  • Patent number: 11594608
    Abstract: A gate-all-around nanowire device and a method for forming the gate-all-around nanowire device. A first fin and a dielectric layer on the first fin are formed on a substrate. The first fin includes the at least one first epitaxial layer and the at least one second epitaxial layer that are alternately stacked. The dielectric layer exposes a channel region of the first fin. A doping concentration at a lateral surface of the channel region and a doping concentration at a central region of the channel region are different from each other in the at least one second epitaxial layer. After the at least one first epitaxial layer is removed from the channel region, the at least one second epitaxial layer in the channel region serves as at least one nanowire. A gate surrounding the at least one nanowire is formed.
    Type: Grant
    Filed: September 5, 2019
    Date of Patent: February 28, 2023
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huaxiang Yin, Jiaxin Yao, Qingzhu Zhang, Zhaohao Zhang, Tianchun Ye
  • Publication number: 20230046423
    Abstract: A magnetoresistive memory cell includes a first magnetic tunnel junction, a second magnetic tunnel junction and a metal layer. The first magnetic tunnel junction and the second magnetic tunnel junction each are disposed on the metal layer; the metal layer is configured to pass write current, a projection line of an easy axis of the first magnetic tunnel junction on a plane where the metal layer is located forms a first angle against a direction of the write current, and a projection line of an easy axis of the second magnetic tunnel junction on the plane where the metal layer is located forms a second angle against a direction opposite to the direction of the write current; the first angle and the second angle are all less than 90°; the first magnetic tunnel junction and the second magnetic tunnel junction are configured to pass read current.
    Type: Application
    Filed: August 23, 2022
    Publication date: February 16, 2023
    Applicant: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCES
    Inventors: Guozhong XING, Long LIU, Di WANG, Huai LIN, Ming LIU
  • Patent number: 11569388
    Abstract: A multi-gate FinFET including a negative capacitor connected to one of its gates, a method of manufacturing the same, and an electronic device comprising the same are disclosed. In one aspect, the FinFET includes a fin extending in a first direction on a substrate, a first gate extending in a second direction crossing the first direction on the substrate on a first side of the fin to intersect the fin, a second gate opposite to the first gate and extending in the second direction on the substrate on a second side of the fin opposite to the first side to intersect the fin, a metallization stack provided on the substrate and above the fin and the first and second gates, and a negative capacitor formed in the metallization stack and connected to the second gate.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: January 31, 2023
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huilong Zhu, Zhengyong Zhu
  • Publication number: 20230015379
    Abstract: A HfO2-based ferroelectric capacitor and a preparation method therefor, and a HfO2-based ferroelectric memory, relating to the technical field of microelectronics. The purpose of enlarging the memory window of the ferroelectric memory is achieved by inserting an Al2O3 intercalation layer having a coefficient of thermal expansion smaller than TiN between a dielectric layer and an upper electrode (TiN) of the ferroelectric capacitor. The HfO2-based ferroelectric capacitor comprises a substrate layer, a lower electrode, a dielectric layer, an Al2O3 intercalation layer, an upper electrode and a metal protection layer from bottom to top. The memory window can be increased, information misreading is effectively prevented, and therefore, the reliability of the memory is improved.
    Type: Application
    Filed: July 9, 2020
    Publication date: January 19, 2023
    Applicant: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCES
    Inventors: Qing Luo, Pengfei JIANG, Hangbing LV, Yuan Wang, Ming Liu
  • Publication number: 20230005836
    Abstract: A metallization stack and a method of manufacturing the same, and an electronic device including the metallization stack are provided. The metallization stack may include at least one interconnection line layer and at least one via hole layer arranged alternately on a substrate. At least one pair of adjacent interconnection line layer and via hole layer in the metallization stack includes: an interconnection line in the interconnection line layer, and a via hole in the via hole layer. The interconnection line layer is closer to the substrate than the via hole layer. A peripheral sidewall of a via hole on at least part of the interconnection line does not exceed a peripheral sidewall of the at least part of the interconnection line.
    Type: Application
    Filed: November 6, 2020
    Publication date: January 5, 2023
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Publication number: 20220416023
    Abstract: Disclosed are a semiconductor apparatus, a manufacturing method therefor, and an electronic equipment comprising the semiconductor apparatus. According to the embodiments, the semiconductor apparatus includes a first device and a second device on a substrate that are opposite each other. The first device and the second device each include a channel portion, source/drain portions on both sides of the channel portion that are connected to the channel portion, and a gate stack overlapping the channel portion. The channel portion includes a first portion extending in a vertical direction relative to the substrate and a second portion extending from the first portion in a transverse direction relative to the substrate. The second portion of the channel portion of the first device and the second portion of the channel portion of the second device extend toward or away from each other.
    Type: Application
    Filed: November 26, 2020
    Publication date: December 29, 2022
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 11532753
    Abstract: A nanowire semiconductor device having a high-quality epitaxial layer and a method of manufacturing the same are provided. According to an embodiment, the semiconductor device may include: a substrate; one or more nanowires spaced apart from the substrate, wherein the nanowires each extend along a curved longitudinal extending direction; and one or more semiconductor layers formed around peripheries of the respective nanowires to at least partially surround the respective nanowires, wherein the respective semiconductor layers around the respective nanowires are spaced apart from each other.
    Type: Grant
    Filed: March 10, 2021
    Date of Patent: December 20, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 11532756
    Abstract: A C-shaped active area semiconductor device and a method of manufacturing the same and electronic device including the semiconductor device are provided. According to embodiments, the semiconductor device includes: a channel portion extending vertically on a substrate; source/drain portions located at upper and lower ends of the channel portion relative to the substrate and along the channel portion, wherein the source/drain portion extends toward a side of the channel portion in a lateral direction relative to the substrate, so that the source/drain portions and the channel portion constitute a C-shaped structure; a gate stack that overlaps the channel portion on an inner sidewall of the C-shaped structure, wherein the gate stack has a portion surrounded by the C-shaped structure; and a back gate stack overlapping the channel portion on an outer sidewall of the C-shaped structure.
    Type: Grant
    Filed: December 4, 2020
    Date of Patent: December 20, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 11532743
    Abstract: A semiconductor device with a U-shaped channel and a manufacturing method thereof and an electronic apparatus including the semiconductor device are disclosed. According to embodiments, the semiconductor device may include: a channel portion extending vertically on a substrate and having a U-shape in a plan view; source/drain portions located at upper and lower ends of the channel portion and along the U-shaped channel portion; and a gate stack overlapping the channel portion on an inner side of the U shape.
    Type: Grant
    Filed: December 3, 2020
    Date of Patent: December 20, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Publication number: 20220393034
    Abstract: A semiconductor device and a method of manufacturing the same, and an electronic apparatus including the semiconductor device are provided. The semiconductor device includes: an active region, on a substrate, extending substantially in a vertical direction; a gate stack formed around at least a part of a periphery of the active region, the active region including a channel region opposite to the gate stack, and a first source/drain region and a second source/drain region, and the gate stack including a gate dielectric layer, a work function tuning layer and a gate electrode material layer, and the work function tuning layer being between the gate electrode material layer and the channel region; and a first low-k dielectric layer extending from a first end of the work function tuning layer to surround a first corner of an end portion, on a side facing the channel region, of the gate electrode material layer.
    Type: Application
    Filed: June 6, 2022
    Publication date: December 8, 2022
    Applicants: Beijing Superstring Academy of Memory Technology, Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 11508809
    Abstract: The present disclosure discloses a semiconductor device and a preparation method thereof. The semiconductor device includes: an N+ substrate, a plurality of openings opening toward a back surface formed in the N+ substrate; an N? epitaxial layer formed on the N+ substrate, the N? epitaxial layer including: an active area epitaxial layer including a plurality of P++ area rings and a plurality of groove structures, wherein single groove structure is formed on single P++ area ring; a terminal area epitaxial layer including an N+ field stop ring and a plurality of P+ guard rings; a Schottky contact formed on the active area epitaxial layer, a passivation layer formed on the terminal area epitaxial layer, and ohmic contacts formed on the back surface of the N+ substrate and in the plurality of openings.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: November 22, 2022
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Yidan Tang, Xinyu Liu, Yun Bai, Shengxu Dong, Chengyue Yang
  • Patent number: 11502184
    Abstract: The present disclosure provides a semiconductor device and a manufacturing method thereof, and an electronic device including the semiconductor device. The semiconductor device includes: a substrate; an active region including a first source/drain region, a channel region and a second source/drain region stacked sequentially on the substrate and adjacent to each other; a gate stack formed around an outer periphery of the channel region; and spacers formed around the outer periphery of the channel region, respectively between the gate stack and the first source/drain region and between the gate stack and the second source/drain region; wherein the spacers each have a thickness varying in a direction parallel to a top surface of the substrate.
    Type: Grant
    Filed: December 4, 2020
    Date of Patent: November 15, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Publication number: 20220352460
    Abstract: The present disclosure provides a storage unit, a data writing method and a data reading method thereof, a memory and an electronic device. The storage unit includes a semiconductor substrate, a first insulating medium layer, a ferroelectric thin film layer, a bottom electrode, a tunnel junction, a first metal interconnection portion, a second metal interconnection portion, a third metal interconnection portion and a fourth metal interconnection portion. The first insulating medium layer is formed on the semiconductor substrate, the ferroelectric thin film layer is disposed on the first insulating medium layer, the bottom electrode is formed on the ferroelectric thin film layer, and the tunnel junction is formed on the bottom electrode. The first metal interconnection portion is connected to a first end of the bottom electrode, and the third metal interconnection portion is connected to a second end of the bottom electrode.
    Type: Application
    Filed: October 6, 2021
    Publication date: November 3, 2022
    Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Meiyin YANG, Jun LUO, Yan CUI, Jing XU
  • Patent number: 11482627
    Abstract: A C-shaped active area semiconductor device and a method of manufacturing the same and electronic device including the semiconductor device are provided. According to embodiments, the semiconductor device includes: a channel portion extending vertically on a substrate; source/drain portions located at upper and lower ends of the channel portion relative to the substrate and along the channel portion, wherein the source/drain portion extends toward a side of the channel portion in a lateral direction relative to the substrate, so that the source/drain portions and the channel portion constitute a C-shaped structure; and a gate stack that overlaps the channel portion on an inner sidewall of the C-shaped structure, wherein the gate stack has a portion surrounded by the C-shaped structure.
    Type: Grant
    Filed: December 4, 2020
    Date of Patent: October 25, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 11482279
    Abstract: A Static Random Access Memory (SRAM) cell that may include a first pull-up transistor, a second pull-up transistor, a first pull-down transistor, a second pull-down transistor, a first pass-gate transistor and a second pass-gate transistor provided at two levels on a substrate. The respective transistors may be vertical transistors. The first pull-up transistor and the second pull-up transistor may be provided at a first level, and the first pull-down transistor, the second pull-down transistor, the first pass-gate transistor and the second pass-gate transistor may be provided at a second level different from the first level. A region where the first pull-up transistor and the second pull-up transistor are located and a region where the first pull-down transistor, the second pull-down transistor, the first pass-gate transistor and the second pass-gate transistor are located may at least partially overlap in a vertical direction with respect to an upper surface of the substrate.
    Type: Grant
    Filed: October 31, 2019
    Date of Patent: October 25, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Publication number: 20220328275
    Abstract: The present disclosure discloses a power device including at least one vacuum packaged unit structure. The unit structure comprises a silicon substrate (100) and an emitter (200), a light modulator (300) and a collector (400) formed on the silicon substrate (100). On the one hand, the unified silicon-based process is compatible with the existing commercial process, so that it is easy for integration, simple for manufacture, and low in cost; on the other hand, the light modulator (300) is introduced and formed on the silicon substrate by a silicon-based process, which enhances field emission efficiency of the emitter (200), offsets the inconsistency of distances between the tips of the emitters (200) and the collector (400) caused by unevenness of the emitters, and increases the process redundancy of the cold cathode emitter.
    Type: Application
    Filed: January 20, 2021
    Publication date: October 13, 2022
    Applicant: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCES
    Inventors: Fazhan ZHAO, Jianhui BU, Jiajun LUO
  • Publication number: 20220320424
    Abstract: The disclosure discloses a selector and a preparation method thereof. The selector includes: a substrate 1; an alternating layer 2 provided on the substrate 1, the alternating layer 2 being alternately formed by a bottom electrode layer 21 and an insulating layer 22; the alternating layer 2 is provided with a U-shaped groove; a selective layer 3 and a dielectric layer 4 being sequentially deposited in a direction from an inner wall of the U-shaped groove to a center of the U-shaped groove; and a top electrode layer 5 is filled in a concave space defined by the dielectric layer 4. The selector and the preparation method according to one or more embodiments of the disclosure can address the technical problem of high leakage current of the selector in existing technology and provide a selector with low leakage current.
    Type: Application
    Filed: December 14, 2020
    Publication date: October 6, 2022
    Applicant: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCES
    Inventors: Qing LUO, Yaxin DING, Hangbing LV, Ming LIU