Patents Assigned to The Institute of Microelectronics, Chinese Academy of Sciences
  • Patent number: 11251183
    Abstract: A semiconductor arrangement includes: a substrate; fins formed on the substrate and extending in a first direction; gate stacks formed on the substrate and each extending in a second direction crossing the first direction to intersect at least one of the fins, and dummy gates composed of a dielectric and extending in the second direction; spacers formed on sidewalls of the gate stacks and the dummy gates; and dielectric disposed between first and second ones of the gate stacks in the second direction to electrically isolate the first and second gate stacks. The dielectric is disposed in a space surrounded by respective spacers of the first and second gate stacks which extend integrally. At least a portion of an interval between the first and second gate stacks in the second direction is less than a line interval achievable by lithography in a process of manufacturing the semiconductor arrangement.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: February 15, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Huilong Zhu, Yanbo Zhang, Huicai Zhong
  • Patent number: 11245074
    Abstract: A RRAM and a method for fabricating the same, wherein the RRAM comprises: a bottom electrode; an oxide layer containing a bottom electrode metal, disposed on the bottom electrode; a resistance-switching layer, disposed on the oxide layer containing a bottom electrode metal, wherein the resistance-switching layer material is a nitrogen-containing tantalum oxide; an inserting layer, disposed on the resistance-switching layer, wherein the inserting layer material comprises a metal or a semiconductor; a top electrode, disposed on the inserting layer. By providing the to resistance-switching layer with a nitrogen-containing tantalum oxide, compared with Ta2O5, the RRAM of the present disclosure has a low activation voltage and a high on-off ratio, and can enhance the control capability over the device resistance by the number of oxygen vacancies.
    Type: Grant
    Filed: May 26, 2017
    Date of Patent: February 8, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Hangbing Lv, Ming Liu, Shibing Long, Qi Liu
  • Patent number: 11245035
    Abstract: A multi-gate FinFET including a negative capacitor connected to one of its gates, a method of manufacturing the same, and an electronic device comprising the same are disclosed. In one aspect, the FinFET includes a fin extending in a first direction on a substrate, a first gate extending in a second direction crossing the first direction on the substrate on a first side of the fin to intersect the fin, a second gate opposite to the first gate and extending in the second direction on the substrate on a second side of the fin opposite to the first side to intersect the fin, a metallization stack provided on the substrate and above the fin and the first and second gates, and a negative capacitor formed in the metallization stack and connected to the second gate.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: February 8, 2022
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huilong Zhu, Zhengyong Zhu
  • Patent number: 11223013
    Abstract: The present disclosure provides a conductive bridge semiconductor device and a method of manufacturing the same. The conductive bridge semiconductor device includes a lower electrode, a resistive switching functional layer, an ion barrier layer and an active upper electrode from bottom to top, wherein the ion barrier layer is provided with certain holes through which active conductive ions pass. Based on this structure, the precise designing of the holes on the barrier layer facilitates the modulation of the quantity, size and density of the conduction paths in the conductive bridge semiconductor device, which enables that the conductive bridge semiconductor device can be modulated to be a nonvolatile conductive bridge resistive random access memory or a volatile conductive bridge selector. Based on the above method, ultra-low power nonvolatile conductive bridge memory and high driving-current volatile conductive bridge selector with controllable polarity are completed.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: January 11, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Qi Liu, Xiaolong Zhao, Sen Liu, Ming Liu, Hangbing Lv, Shibing Long, Yan Wang, Facai Wu
  • Patent number: 11215652
    Abstract: A method for obtaining a contact resistance of a planar device includes: obtaining a contact resistance of a planar device by using a potential measurement method, in the measurement of the surface potential distribution, the planar device is in a state of current flowing, a certain voltage drop is formed at a junction area of the device; extracting the voltage drop measured through the Kelvin microscope by using a linear fitting method; and dividing the measured voltage drop by the current flowing through the device, thereby accurately calculating the magnitude of the contact resistance at the junction area of the planar device. With the present invention, the contact resistance of the planar device can be precisely measured, which is suitable for the contact resistance measurement experiments of devices such as thin film transistors and diodes.
    Type: Grant
    Filed: December 25, 2015
    Date of Patent: January 4, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Guangwei Xu, Zhiheng Han, Wei Wang, Congyan Lu, Lingfei Wang, Ling Li, Ming Liu
  • Patent number: 11217493
    Abstract: There are provided a semiconductor device, a method of manufacturing the same, and an electronic device including the device. According to an embodiment, the semiconductor device may include a substrate; a first source/drain layer, a channel layer and a second source/drain layer stacked on the substrate in sequence, wherein the second source/drain layer comprises a first semiconductor material which is stressed; and a gate stack surrounding a periphery of the channel layer.
    Type: Grant
    Filed: April 28, 2020
    Date of Patent: January 4, 2022
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 11205750
    Abstract: The present disclosure provides a 1S1R memory integrated structure and a method for fabricating the same, wherein the 1S1R memory integrated structure includes: a word line metal, a resistive material layer, a selector lower electrode, a selector material layer, a selector upper electrode, an interconnection wire, and a bit line metal; wherein the selector material layer is in a shape of a groove, and the selector upper electrode is formed in the groove. According to the 1S1R memory integrated structure and its fabricating method in the present disclosure, by the change of the integrated position of the selector, the device area of the selector is much larger than the device area of the memory, which significantly reduces the requirement for the on-state current density of the selector.
    Type: Grant
    Filed: February 10, 2020
    Date of Patent: December 21, 2021
    Assignee: Institute of Microelectronics Chinese Academy of Sciences
    Inventors: Qing Luo, Hangbing Lv, Ming Liu, Xiaoxin Xu, Cheng Lu
  • Patent number: 11195765
    Abstract: There are provided a semiconductor device, a method of manufacturing the same, and an electronic device including the device. According to an embodiment, the semiconductor device may include a substrate, and a first device and a second device formed on the substrate. Each of the first device and the second device includes a first source/drain layer, a channel layer and a second source/drain layer stacked on the substrate in sequence, and also a gate stack surrounding a periphery of the channel layer. The channel layer of the first device and the channel layer of the second device are substantially co-planar with each other, and the respective second source/drain layers of the first device and the second device are stressed differently.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: December 7, 2021
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 11189345
    Abstract: An operation method for integrating logic calculations and data storage based on a crossbar array structure of resistive switching devices. The calculation and storage functions of the method are based on the same hardware architecture, and the data storage is completed while performing calculation, thereby realizing the fusion of calculation and storage. The method includes applying a pulse sequence to a specified word line or bit line by a controller, configuring basic units of resistive switching devices to form different serial-parallel structures, such that three basic logic operations, i.e. NAND, OR, and COPY, are implemented and mutually combined on this basis, thereby implementing 16 types of binary Boolean logic and full addition operations, and on this basis, a method for implementing a parallel logic and full addition operations is provided.
    Type: Grant
    Filed: January 22, 2018
    Date of Patent: November 30, 2021
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Qi Liu, Wei Wang, Sen Liu, Feng Zhang, Hangbing Lv, Shibing Long, Ming Liu
  • Patent number: 11158547
    Abstract: A semiconductor device including a first source/drain region at a lower portion thereof, a second source/drain region at an upper portion thereof, a channel region between the first source/drain region and the second source/drain region and close to peripheral surfaces thereof, and a body region inside the channel region. The semiconductor device may further include a gate stack formed around a periphery of the channel region.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: October 26, 2021
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 11152516
    Abstract: There are provided a nanometer semiconductor device with a high-quality epitaxial layer and a method of manufacturing the same. According to an embodiment, the semiconductor device may include: a substrate; at least one nanowire spaced apart from the substrate; at least one semiconductor layer, each formed around a periphery of respective one of the at least one nanowire to at least partially surround the corresponding nanowire, wherein the semiconductor layer(s) formed around the respective nanowire(s) are separated from each other; an isolation layer formed on the substrate, exposing the at least one semiconductor layer; and a gate stack formed on the isolation layer and intersecting the at least one semiconductor layer, wherein the gate stack includes a gate dielectric layer at least partially surrounding a periphery of respective one of the at least one semiconductor layer and a gate conductor layer.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: October 19, 2021
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 11127783
    Abstract: A Magnetic Random Access Memory (MRAM), a method of manufacturing the same, and an electronic device including the same are provided. The MRAM includes a substrate, an array of memory cells arranged in rows and columns, bit lines, and word lines. The memory cells each include a vertical switch device and a magnetic tunnel junction on the switch device and electrically connected to a first terminal of the switch device. An active region of the switch device at least partially includes a single-crystalline semiconductor material. Each of the memory cell columns is disposed on a corresponding bit line, and a second terminal of each of the respective switch devices in the memory cell column is electrically connected to the corresponding bit line. Each of the word lines is electrically connected to a control terminal of the respective switch devices of the respective memory cells in a corresponding memory cell row.
    Type: Grant
    Filed: November 1, 2018
    Date of Patent: September 21, 2021
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Huilong Zhu, Junjie Li, Chao Zhao
  • Patent number: 11107932
    Abstract: There are provided a nanometer semiconductor device with a high-quality epitaxial layer and a method of manufacturing the same. According to an embodiment, the semiconductor device may include: a substrate; at least one nanowire spaced apart from the substrate; at least one semiconductor layer, each formed around a periphery of respective one of the at least one nanowire to at least partially surround the corresponding nanowire, wherein the semiconductor layer(s) formed around the respective nanowire(s) are separated from each other; an isolation layer formed on the substrate, exposing the at least one semiconductor layer; and a gate stack formed on the isolation layer and intersecting the at least one semiconductor layer, wherein the gate stack includes a gate dielectric layer at least partially surrounding a periphery of respective one of the at least one semiconductor layer and a gate conductor layer.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: August 31, 2021
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 11101321
    Abstract: A nonvolatile resistive switching memory comprising an insulating substrate, a lower electrode, a lower graphene barrier layer, a resistive switching functional layer, an upper graphene barrier layer, and an upper electrode, wherein the lower and/or the upper graphene barrier layer is/are capable of preventing the metal ions/atoms in the lower/upper metal electrode from diffusing into the resistive switching functional layer under an applied electric field.
    Type: Grant
    Filed: September 6, 2015
    Date of Patent: August 24, 2021
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Writam Banerjee, Ming Liu, Qi Liu, Hangbing Lv, Haitao Sun, Kangwei Zhang
  • Patent number: 11081484
    Abstract: There are provided an Integrated Circuit (IC) unit, a method of manufacturing the same, and an electronic device including the IC unit. According to an embodiment, the IC unit includes a first source/drain layer, a channel layer and a second source/drain layer for a first device and a first source/drain layer, a channel layer and a second source/drain layer for a second device stacked in sequence on a substrate. In the first device, the channel layer includes a first portion and a second portion separated from each other. The first source/rain layer and the second source/drain layer each extend integrally to overlap both the first portion and the second portion of the channel layer. The IC unit further includes a first gate stack surrounding a periphery of the first portion and also a periphery of the second portion of the channel layer of the first device, and a second gate stack surrounding a periphery of the channel layer of the second device.
    Type: Grant
    Filed: March 5, 2020
    Date of Patent: August 3, 2021
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huilong Zhu, Zhengyong Zhu
  • Patent number: 11069808
    Abstract: A negative capacitance field effect transistor (NCFET) and a manufacturing method thereof. The NCFET includes: a substrate structure, including a MOS region; a gate insulating dielectric structure, covering the MOS region; and a metal gate stack layer, covering the gate insulating dielectric structure. The gate insulating dielectric structure includes an interface oxide layer, a HfO2 layer, a doping material layer, and a ferroelectric material layer, which are sequentially stacked along a direction away from the substrate structure. A ferroelectric material in the ferroelectric material layer is HfxA1-xO2, A represents a doping element, and 0.1?x?0.9. A material forming the doping material layer is AyOz or A, and a ratio of y/z is equal to 1/2, 2/3, 2/5 or 1/1. Ferroelectric characteristics, material stability, and material reliability of the NCFET are improved by increasing domain polarity of the ferroelectric material.
    Type: Grant
    Filed: December 19, 2019
    Date of Patent: July 20, 2021
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huaxiang Yin, Qingzhu Zhang, Zhaohao Zhang, Tianchun Ye
  • Patent number: 11056580
    Abstract: A semiconductor device comprise a substrate, source/drain regions, a channel region, a gate dielectric layer and a gate conductive layer, wherein the gate dielectric layer comprises a barrier layer, a storage layer, a first interface layer, a tunneling layer, a second interface layer. In accordance with the semiconductor device and the manufacturing method of the present invention, an interface layer is added between the storage layer and tunneling layer in the gate dielectric by adjusting process step, and the peak concentration and peak location of nitrogen can be flexibly adjusted, effectively improving the quality of the interface between the storage layer and the tunneling layer in the gate dielectric layer, increasing process flexibility, improving device reliability and current characteristics.
    Type: Grant
    Filed: November 23, 2015
    Date of Patent: July 6, 2021
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Tianchun Ye
  • Patent number: 11038057
    Abstract: A semiconductor device having a high-quality epitaxial layer and a method of manufacturing the same are provided. According to an embodiment, the semiconductor device may include: a substrate; a first fin-shaped semiconductor layer spaced apart from the substrate, wherein the first semiconductor layer extends along a curved longitudinal extending direction; and a second semiconductor layer at least partially surrounding a periphery of the first semiconductor layer.
    Type: Grant
    Filed: June 27, 2016
    Date of Patent: June 15, 2021
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Publication number: 20210175355
    Abstract: A semiconductor device with a U-shaped channel and a manufacturing method thereof and an electronic apparatus including the semiconductor device are disclosed. According to embodiments, the semiconductor device may include: a channel portion extending vertically on a substrate and having a U-shape in a plan view; source/drain portions located at upper and lower ends of the channel portion and along the U-shaped channel portion; and a gate stack overlapping the channel portion on an inner side of the U shape.
    Type: Application
    Filed: December 3, 2020
    Publication date: June 10, 2021
    Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong ZHU
  • Patent number: 11031469
    Abstract: A semiconductor device, a manufacturing method thereof, and an electronic device including the same are provided. According to an embodiment, the semiconductor device may include a substrate; a first source/drain region, a channel region and a second source/drain region stacked on the substrate in sequence and contiguous to each other, and a gate stack formed surrounding a periphery of the channel region; wherein spacers are respectively provided between the gate stack and the first source/drain region and between the gate stack and the second source/drain region in a form of surrounding the periphery of the channel region.
    Type: Grant
    Filed: January 31, 2020
    Date of Patent: June 8, 2021
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu