Abstract: A gas chromatography system having a chromatography column, a detector for analyzing sample components with a detection chamber connected to the column outlet, and a switching assembly for selectively alternately filling the detector chamber with carrier gas for a base line measurement and with effluent for analysis. The switching assembly includes a gas chamber connected to the detector chamber, a source of carrier gas and hot wire filament for selectively heating gas in the gas chamber to cause the carrier to be expelled from the gas chamber to fill the detection chamber for a base line measurement and for cooling gas in the gas chamber to withdraw the carrier gas from the detection chamber so as to draw effluent from the column outlet to thereby fill the detection chamber for an analytical measurement.

Abstract: A plasma gun for spraying in a recessed region comprises a cathode member and a tubular anode arranged with the cathode member to generate a plasma stream. An elongated tubular extension including a tubular wall with an axial plasma duct therein extends forwardly from the anode. A transverse plasma duct causes the plasma stream to exit transversely from the tubular extension. Channeling for fluid coolant is in the tubular wall and extends substantially the length of the axial plasma duct. A first external pipe connected to the tubular extension forwardly of the transverse duct directs fluid coolant to the channeling. A powder injector injects spray powder rearwardly into the exiting plasma stream. A second external pipe from a powder source is connected to the powder injector.

Abstract: An arc spray gun is adapted to spray coatings in confined areas. An arc spray deflector includes a nozzle body with a nozzle seat thereon and a hole therein receptive of a flow of compressed gas. A first nozzle insert is sealingly insertable in the hole and has a first flanged end with a first thickness positioned on the nozzle seat and further has an orifice therein to direct a lateral deflecting jet of the gas toward the point of contact of the arcing wires. A second nozzle insert is sealingly insertable in the hole and has a second flanged end with a second thickness. The first and the second inserts are adapted to be interchanged whereby selection of the distance from a respective exit point to the point of contact is effected.

Abstract: Apparatus is set forth for prealigning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and .THETA. from a desired orientation is determined. Rotation of the wafer is stopped when its angular position reaches a desired orientation. The wafer chuck of the transport stage is then displaced to compensate for any deviation of the wafer in the X and Y directions from a desired rectilinear orientation. This permits the wafer stage to present the wafer to the exposure station of a lithographic system aligned in the X, Y and .theta. directions.

Abstract: An ionization detector for gas chromatography employs as an electron source a film (66) of gold deposited on an ultra-violet lamp (64) within a cylindrical glass body (60) closed at the ends by PTFE plugs (62 and 68). A jet anode (72) receiving effluent from a chromatographic column has its nozzle (74) adjacent the lamp (64) with a triode collector ring (78) between them. A ground wire (80) is connected to the gold film (66). Ultra-violet radiation from the lamp (64) produces a cloud of gold electrons and the consequent ionization of sample molecules from the jet (72) with a corresponding current when voltage is applied.

Abstract: A thermal spray gun includes a first burner for producing a first fan-shaped flame, a second burner for producing a second fan-shaped flame parallel to the first in sufficient proximity to commingle into a combined fan-shaped flame. Powder is dispersed into a fan-shaped powder spray entrained between the first and second flames. The gun body has a fan-shaped powder chamber with an open side opening forwardly from the gun body between the first flame and the second flame and with an apex location opposite the open side. First and second powder ducts each terminate at the apex location with a common axis perpendicular to the fan-shaped chamber such as to mutually impinge the first and second powder streams into a combined powder stream dispersing through the fan-shaped powder chamber into the fan-shaped powder spray.

Abstract: Disclosed is a guard ring (20) in a particle beam lithography system (10) of a pressurized gas surrounding a seal apparatus (14) and concentric therewith so that the guard ring (20) of gas is located between the seal apparatus (14) and ambient pressure in which the remainder of the workpiece (12) is located and forms a curtain of gas surrounding the seal apparatus (14) to reduce contamination of the seal apparatus (14) and beam column (16). In one embodiment, the guard ring (20) is formed by a ring of small ports (60) connected to a source of pressurized gas so that gas at a pressure higher than the ambient pressure is directed toward the workpiece (12). In a second embodiment, the guard ring (20) is formed by a small width groove (72) connected by gas ports (60) to a source of pressurized gas (64) by which gas is introduced into the groove (72).

Abstract: This invention is directed to an improvement in an x-ray lithography system having an x-ray point source of radiation, a wafer disposed in spaced relationship with respect to the source, and a mask disposed between the source and the wafer whereby radiation from the source passes through the mask to the wafer, said improvement comprising the provision of an x-ray absorbent element mounted between the source and the wafer, said element having a radial absorption gradient profile to compensate for radial flux variation of the x-rays.

Abstract: A novel iron based alloy is disclosed which is characterized by high resistance to wear and corrosion. The alloy consists essentially of 0 to 40% chromium, 1 to 40% molybdenum, 1 to 15% copper, 0.2 to 5% boron, and 0.01 to 2% carbon; the balance being incidental impurities and at least 30% iron, with the molydenum being at least 10% if the boron is greater than 2%. The alloy is preferably in the form of a powder for thermal spraying, and coatings produced thereby may have an amorphous structure.

Abstract: A novel solid state array detector is useful in an optical spectrometer of the type that includes a crossed dispersion system receptive of radiation for producing a pair of two dimensional displays of spectral lines characteristic of at least one atomic element. One display is ultraviolet and the other is visible. A solid-state chip has on the front surface a two dimensional array of photosensitive pixels receptive of radiation of selected spectral lines and proximate background radiation. The pixels are arranged in a plurality of sub-arrays with each sub-array consisting of at least one of the pixels and are positioned at a projection location on the front surface of at least one of the selected spectral lines. Electronic components formed on the chip among the sub-arrays are operatively connected to the pixels for producing readout signals correlating with intensities of the selected spectral lines.

Abstract: An induction plasma system comprises a torch and an induction coil. A sample substance is injected into the plasma at an axial position that is adjustable while the plasma is being energized. The plasma-forming gas flows through the induction coil prior to passing through the plasma torch. A piezoelectric crystal is used for initiating the plasma. An oscillator network generates radio frequency power at a first frequency, and an output LC network that includes the induction coil is tuned to a second frequency higher than the first frequency. Means for maintaining constant power to the plasma includes an AC circuit for duty cycling AC power input to a DC power supply in response to a feedback signal relative to the rectified voltage. Thus a change in the rectified voltage effects an inverse change in the duty cycling such as to nullify the change in the rectified voltage.

Abstract: Disclosed is a particle beam lithography system (10) having a workpiece loading/unloading position to one side of a particle beam (32) and beam column (12) where a workpiece (14), to be processed, is placed in a vacuum chuck (100) to eliminate any irregularity or warpage of the workpiece (14). At this same position, the workpiece (14) is oriented and fixed at a preselected distance from a standard by gap setting means (162, 162b). This distance correlates with a preselected gap (G) between a seal apparatus (16) and the workpiece (14) during workpiece processing. The workpiece (14) and chuck (100) are then moved beneath the seal apparatus (16) and beam column (12) for workpiece processing. After processing, the workpiece (14) and chuck (100) are returned to the loading/unloading position to be removed from the lithography system (10).

Abstract: The basic concept of this invention involves the use of a wire or capillary tube as a template strand. The outside diameter and shape of the template strand correspond to the inside diameter and shape of a desired separation capillary. A detector may be incorporated by providing a pair of electrode wires, or the ends of a pair of optical fibers, and pressing them against opposite sides of the template. As plastic is then polymerized around this asssembly by casting or molding. The template is then removed, leaving a capillary channel with a sidewall incorporating the wire electrodes and optical fibers. Using this method, it is possible to form a single unit including a separation capillary, conductivity detector, and spectroscopy detector.

Abstract: A thermal conductivity cell is described whose elements are well protected against short term temperature fluctuations, changes in flow rates, leaks, and vapor pressures of construction materials. The sample and reference chambers are formed within a relatively large copper block with a controlled thermal time constant. The thermal elements are isolated from the gas flow paths by porous metal plugs which are thermally "clamped" to the block. Element feed-throughs are potted in thermally conductive epoxy to minimize the effect of temperature gradients.

Abstract: A direct-imaging, monochromatic electron microscope includes an objective lens for collecting a substantial portion of emitted electrons from an area across a sample surface, a first transfer lens for collimating the electrons into beams, an energy filter receptive of the beams to transit monochromatic beams, and a second transfer lens receptive of the monochromatic beams for refocusing the same through a projection lens to effect an image of the plurality of spots in a projection plane. The objective lens is formed of a magnetic toroidal coil having a central hole therein with a dish-shaped magnetically permeable member cupped coaxially over the toroidal coil. The permeable member has a neck portion protruding through the central hole. The sample surface is interposed proximate the objective lens between the objective lens and the energy filter.

Abstract: An apparatus and method for detecting and analyzing the emissions or effluents from gas or oil combustion so as to discriminate between them. A spectrometer detects the spectra of a combustion effluent or exhaust. Identifying features of carbon dioxide and water vapor are selected at predetermined wavenumbers. The ratio of the relative intensities of the identifying features of carbon dioxide and water vapor is then computed, which results in the discrimination between oil and gas effluents.

Abstract: An apparatus and method for the generation of patterns on large optics. A coating layer is deposited on the surface of a large substrate, whereupon a photoresist layer is deposited on the coating layer in relatively small localized areas. A flexible mask is fabricated embodying the pattern to be generated. This flexible mask is then aligned with any desired point on the substrate and brought into contact with the photoresist layer. The photoresist layer is then exposed and each localized area is developed and the underlying coating layer is etched. After the excess photoresist material is washed away the pattern, etched into the coating layer, remains.

Abstract: An energy analyzer for electrons comprises three spherically configured cylindrically symmetric members. An outer member is a hollow spherical section having a first inlet edge. A first inner member is a spherical portion disposed concentrically within the outer member with a defined space therebetween, and has a second inlet edge cooperative with the first inlet edge to form an inlet opening receptive of electrons from a conical lens. A second inner member is a spherical segment disposed concentrically within the outer member and has a second outlet edge cooperative with a first outlet edge of the first inner member to define an exit slot for egress of charged particles having selected trajectories in the defined space. A cylindrical detector is situated within the spherical members for detecting the egressed charged particles. The inlet opening and the exit slot are such that the angle subtended by the selected trajectories between the inlet opening and the exit slot is preferably between about 0.8.pi.

Abstract: An improved optical direction of arrival sensor in which incoming radiation passes through a cylindrical lens placed through a top mask and is focused in the gap between the lens and a detector array concentric about the back of the lens. The focal line then expands and falls on the detector array which embodies an encoding scheme. The output from the encoded detector is then processed to determine the angle of incidence of the incoming radiation with the top mask.

Abstract: A photolithography exposure control system tolerant of noisy pulsed light sources having a controllable variable attenuator. A detector monitors the exposure dose of a light pulse enabling a controller to trigger another light pulse, when a predetermined attenuator is positioned in its path. A high degree of exposure control is achieved with a minimum number of light pulses or shots.