Abstract: A wafer cassette transfer mechanism is disclosed which transfers a wafer cassette from a transfer arm to an elevator. The elevator moves vertically, up or down, so as to move the wafer cassette to a second transfer arm. The second transfer arm can then move the wafer cassette to after processing equipment.

Abstract: In a sensitive analytical instrument having an optical bench carried by a base member, new and improved vibration and shock isolation apparatus which includes three spaced pneumatic mounts interposed between the optical bench and the base member to provide vibration and shock isolation therebetween, each of the mounts having a preselected optimum linear range of operation, a source of pressurized gas, apparatus for individually controlling the inflation and deflation of each of the mounts with pressurized gas to maintain actual operation of each of the mounts within its preselected optimum linear operating range.

Abstract: There is disclosed a ring field relay optical system incorporating concave spherical mirrors and including magnification achieved, at least partially, by a convex spherical mirror. In further modifications, aberrations introduced by the convex mirror are controlled by lens groups formed from fused silica. The system is usable from the visible through the deep ultraviolet portion of the spectrum.

Abstract: An optical system for illuminating an arcuate field efficiently and uniformly using a short arc source. A first light source having a length along its axis of symmetry emits light with angular uniformity 360.degree. in azimuth about its axis of symmetry. This light is divided into a plurality of sections of equal angular extent in azimuth and recombined to form adjacent secondary light sources while preserving the uniformity of angular uniformity in each section and simultaneously orienting the sections of light about parallel remote from the first source of light which has a length axes in each section. This forms a second source of light equal to the sum of the lengths of the secondary sources of light with uniform angular distribution over an angular extent of nearly 360.degree. divided by the number of the secondary light sources. By appropriate selection of parameters the difference in the numerical apertures of the illuminated arcuate field is selectable.

Abstract: An integrated semiconductor source of high-power, single spatial mode, narrow spectral mode modulated radiation. A frequency selective feedback laser diode is disposed on the same semiconductor crystal with a power amplifier having a diverging active area which causes emitted light to be distributed over a large exit facet area.

Abstract: An imaging coherent radiometer incorporating a Fabry-Perot interferometer which is scanned or nutated, for detecting and determining location and wavelength of coherent radiation or the coherent absence of radiation in the presence of non-coherent ambient radiation.

Abstract: A composite wire useful for arc gun spraying is formed of an alloy sheath comprising iron, nickel, or cobalt, and a core comprising boron-containing powder of boron and/or boron carbide sufficiently fine in size such that the boron is substantially dissolved in a coating produced by arc gun spraying the composite wire. Where the boron substance includes boron, the core should further comprise fine carbon powder less than 20 microns in size blended with the boron powder. Preferably a substantial portion of the boron-containing powder is less than 20 microns. In a particularly desirable embodiment, the sheath is formed of mild steel and the core comprises boron carbide and an alloy powder such as ferromolybdenum.

Abstract: An improved power supply system of smaller size and lower cost than prior art supplies is described for starting and maintaining the running of a deuterium arc lamp at a constant current level; by use of switching circuitry with solid-state components the necessity of transformers, relays and timing circuits has been obviated with a resultant major reduction in size, cost and cooling requirements of the supply; an improved starting sequence lengthens lamp cathode life.

Abstract: A spectrophotometer includes means for ensuring that the active area of a detector is always filled regardless of the resolution aperture setting of the instrument.

Abstract: A photo sensor circuit including an LED (12) and a phototransistor (14) coupled together by resistors (R.sub.1, R.sub.2) and connected to a drive and sense network (16) including resistors (R.sub.B, R.sub.3, R.sub.4), a source of positive voltage (+Vcc) and a PNP transistor (20) by a single conductor wire (W.sub.1). When the light path between the LED (12) and the phototransistor (14) is blocked, the circuit standby current is low and the transistor (20) is OFF, but when the light blockage is removed, the increase in current through the LED (12), triggered by an increase in current through the phototransistor (14) quickly drives the transistor (20) into saturation. The phototransistor (14) will keep full current flowing through the LED (12) as long as the light blockage is removed.

Abstract: Inert gas is supplied to a closed reagent reservoir for reagent dosing in producing gaseous measuring samples according to the "hydride method". Thereby, reagent is pressed into a sample vessel through a reagent dosing conduit. A manometric switch is provided at the inert gas connecting conduit to produce a defined reagent flow, by means of which manometric switch a valve located in the connecting conduit is driven into its closed position, if a preset pressure has been reached.

Abstract: There are disclosed gas chromatographic ionization detectors of the argon and electron capture types. The free electrons required for the functioning of the detectors is achieved by irradiating a solid photoemissive element with ultraviolet radiation.

Abstract: The present invention is directed to an energy analysis and detection system for surface chemical analysis which includes an input lens system for receiving charged particles, said lens system having a first lens stage for definition of analysis area and angular acceptance and a second lens stage for energy adjustment with an aperture assembly interposed between the first lens stage and second lens stage, a spherical capacitor energy analyzer for receiving the output from the input lens system and performing spectroscopic energy resolution, and a detector assembly for receiving the output from the spherical capacitor energy analyzer and detecting the charged particles.

Abstract: An assembly having a compensator plate positional control mechanism includes an optical beamsplitter and a compensator plate which plate is pivoted to vary the pathlength of beams passing therethrough. By varying these pathlengths, the arms of an interferometer can be quite exactly equalized.

Abstract: An imaging coherent radiometer for detecting and determining the location and wavelength of coherent radiation or coherent lack of radiation in the presence of non-coherent ambient radiation. The apparatus includes an unequal path interferometer which divides incoming radiation containing coherent and non-coherent radiation into a first beam path and a second beam path through which a first beam and a second beam, respectively, travel. The optical path length difference between the first beam path and the second beam path are greater than the coherence length of the non-coherent radiation, but substantially less than the coherence length of the coherent radiation or coherent lack of radiation. Modulation means are provided to cause a predetermined difference in the optical frequencies between the first beam and the second beam proportional to a modulation signal. The first and second beams are then recombined into a recombined beam.

Abstract: A precision lens mounting assembly which includes a plurality of lens cells and a plurality of lenses which correspond to the plurality of lens cells. The lens cells have an annular shape. Flexure means are disposed within the inner diameter of the lens cell which hold the lens in a predetermined spatial relation at a datum temperature to the lens cell. The flexure means return the lenses to this predetermined spatial relation following temperature excursions away from, then back to, the datum temperature. The outer diameter of the lens cells in the assembly are all substantially equal and substantially concentric about the optical axis of the lenses they hold. The upper and lower surfaces of the lens cell each have three or more precision surfaces disposed on a plane. The plane are perpendicular to the optical axis of the lens and have a predetermined spatial relation to the apex of the lens.

Abstract: A light transformer for converting light from a short arc lamp into an arcuate shape of uniform intensity. Mirror means associated with the short arc lamp projects light from the short arc lamp as a plurality of separate images conforming to the desired arcuate shape onto a plurality of reflecting facets also formed in the desired arcuate shape. Light pipe means formed in the desired arcuate shape is disposed at one end to receive light images via the facets and to emit light at the other end in the desired arcuate shape.

Abstract: The present invention is directed to apparatus for monitoring epitaxial crystalline growth mounted in a vacuum chamber, said apparatus including a support for mounting a single crystal substrate surface, a device for applying epitaxial material to the substrate surface, a device for impinging an electron beam upon the substrate surface to emit secondary electrons therefrom, and a system for detecting the secondary electrons emitted and for outputting a corresponding signal.

Abstract: In a system and a method for measuring the rate at which powdered material flows from a container wherein a first analog signal representing the weight of the container is produced, the analog signal is differentiated to obtain a second signal corresponding to the flow rate and the second signal is passed through an adaptive filter. The adaptive filter includes a first low pass filter having a first time constant for producing a third signal and a second low-pass filter to produce a fourth signal.

Abstract: A very wide spectral coverage grating spectrometer which gathers light from a scene being viewed and collimates that light. A mosaic grating is disposed in collimated space which disperses the collimated light. The dispersed light is focused onto a detector array.