Patents Assigned to The Research Corporation
  • Publication number: 20140088799
    Abstract: Flight management systems and control methods for meeting a required time of arrival (RTA) with reduced fuel burn. The method can account for probabilistic wind forecast uncertainty in RTA calculations by reformulating the speed and thrust profile problem as a multi-stage stochastic program, using a wind forecast uncertainty model to generate scenario sets for the fuel optimization problem. The method can iteratively calculate a fuel-efficient advised air speed for achieving an RTA over a flight path with an arbitrary number of recourse points. Methods for creating wind forecast uncertainty models applicable to a variety of routes through a given airspace, and for use with the flight management systems and control methods. An example wind forecast uncertainty model can be position-specific, data-driven and based on a Markov chain representing error values between historical wind speed data and forecasted wind speed data long a planned flight route or between an origin-destination pair.
    Type: Application
    Filed: September 21, 2012
    Publication date: March 27, 2014
    Applicant: Georgia Tech Research Corporation
    Inventors: Clayton Patrick Tino, John-Paul Barrington Clarke
  • Publication number: 20140087488
    Abstract: A showerhead electrode assembly for use in a capacitively coupled plasma processing apparatus comprising a heat transfer plate. The heat transfer plate having independently controllable gas volumes which may be pressurized to locally control thermal conductance between a heater member and a cooling member such that uniform temperatures may be established on a plasma exposed surface of the showerhead electrode assembly.
    Type: Application
    Filed: September 24, 2012
    Publication date: March 27, 2014
    Applicant: Lam Research Corporation
    Inventors: Sang Ki Nam, Rajinder Dhindsa, Ryan Bise
  • Patent number: 8678995
    Abstract: Described and depicted are pelvic sling implant and delivery systems. The sling implants can be used in treating stress incontinence and other pelvic floor disorders. The sling systems can include a mesh extension or support portion and one or more tip anchors. A delivery tool can include a handle (61), a needle (62) and a sheath (70), with the sheath having an elongate shaft portion slidable along at least a portion of the needle. The sheath can further include a distal hood portion having opposed flared portions (78) defining interior pleat channels adapted to selectively seat tine ends of the anchors.
    Type: Grant
    Filed: August 5, 2009
    Date of Patent: March 25, 2014
    Assignee: AMS Research Corporation
    Inventor: Scott Crawford
  • Patent number: 8677590
    Abstract: A method for manufacturing a plasma processing system is provided. The method includes providing a movable plasma-facing structure configured to surround a plasma that is generated during processing of a substrate. The method also includes disposing a movable electrically conductive structure outside of the movable plasma-facing structure, wherein both structures configured to be deployed and retracted as a single unit to facilitate handling of the substrate. The movable electrically conductive structure is radio frequency (RF) grounded during the plasma processing. During processing, the RF current from the plasma flows to the movable electrically conductive structure through the movable plasma-facing structure during the plasma processing. The method further includes coupling a set of conductive straps to the movable electrically conductive structure.
    Type: Grant
    Filed: September 9, 2013
    Date of Patent: March 25, 2014
    Assignee: Lam Research Corporation
    Inventors: Eric Hudson, Andreas Fischer
  • Patent number: 8677586
    Abstract: A method of installing an elastomer band as a protective edge seal around a portion of a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber, which includes expanding an elastomer band into a circular shape having a diameter greater than a diameter of a mounting groove within the substrate support; clamping the elastomer band in the expanded shape between a base ring and a clamp ring; placing the elastomer band over the substrate support in the expanded shape; and releasing the elastomer band from between the base and clamp rings, which contracts the elastomer band into the mounting groove of the substrate support.
    Type: Grant
    Filed: April 4, 2012
    Date of Patent: March 25, 2014
    Assignee: Lam Research Corporation
    Inventor: Neal Newton
  • Patent number: 8679442
    Abstract: In various embodiments, the present disclosure describes fullerene derivatives that are capable of photocatalytically generating reactive oxygen species in the presence of ultraviolet and/or visible light. In some embodiments, the fullerene derivatives are aminofullerenes containing a plurality of amine-terminated moieties covalently bonded to the fullerene cage. The fullerene derivatives may optionally be covalently bonded to a substrate surface for use in photocatalytic disinfection systems for removing various contaminants including, for example, bacteria, viruses, protozoa and chemical pollutants. Methods using the present fullerene and aminofullerene derivatives in various purification processes are also described herein.
    Type: Grant
    Filed: June 24, 2010
    Date of Patent: March 25, 2014
    Assignees: William Marsh Rice University, Georgia Tech Research Corporation
    Inventors: Pedro J. J. Alvarez, Jaesang Lee, Lon J. Wilson, Yuri Mackeyev, Jaehong Kim
  • Patent number: 8680751
    Abstract: A generator includes a bio-compatible substrate onto which one mechanical generating unit is disposed. A plurality of elongated piezoelectric fibers each have a first end that is in electrical communication with a first electrode and an opposite second end that is in electrical communication with a second electrode. An insulative layer covers the first electrode, the second electrode and the elongated piezoelectric fibers. A third electrode and a fourth electrode are each disposed on the bio-compatible substrate opposite from the mechanical generating unit. A proton conducting member is in contact with both the third electrode and the fourth electrode. A glucose catalyzing enzyme is electrically coupled to the third electrode. An oxidase enzyme is electrically coupled to the fourth electrode. The third electrode is in electrical communication with each first electrode and the fourth electrode is in electrical communication with each second electrode.
    Type: Grant
    Filed: December 2, 2011
    Date of Patent: March 25, 2014
    Assignee: Georgia Tech Research Corporation
    Inventors: Zhong L. Wang, Caofeng Pan, Ben Hansen, Ying Liu
  • Patent number: 8679252
    Abstract: An actively heated aluminum baffle component such as a thermal control plate or baffle ring of a showerhead electrode assembly of a plasma processing chamber has an exposed outer aluminum oxide layer which is formed by an electropolishing procedure. The exposed outer aluminum oxide layer minimizes defects and particles generated as a result of differential thermal stresses experienced by the aluminum component and outer aluminum oxide layer during plasma processing compared to an identically shaped component having a Type III anodized surface.
    Type: Grant
    Filed: September 23, 2005
    Date of Patent: March 25, 2014
    Assignee: Lam Research Corporation
    Inventors: Hong Shih, G. Grant Peng, Daxing Ren
  • Patent number: 8679359
    Abstract: The present invention is directed to a method and apparatus for etching various metals that may be used in semiconductor or integrated circuit processing through the use of non-halogen gases such as hydrogen, helium, or combinations of hydrogen and helium with other gases such as argon. In one exemplary embodiment of the present invention, in a reaction chamber, a substrate having a metal interconnect layer deposited thereon is exposed to a plasma formed of non-halogen gas. The plasma generated is maintained for a certain period of time to provide for a desired or expected etching of the metal. In some embodiments, the metal interconnect layer may be copper, gold or silver.
    Type: Grant
    Filed: May 10, 2011
    Date of Patent: March 25, 2014
    Assignee: Georgia Tech Research Corporation
    Inventors: Fangyu Wu, Dennis W. Hess, Galit Levitin
  • Patent number: 8680441
    Abstract: A heating plate for a substrate support assembly in a semiconductor plasma processing apparatus, comprises multiple independently controllable planar heater zones arranged in a scalable multiplexing layout, and electronics to independently control and power the planar heater zones. Each planar heater zone includes one or more heater element made of an insulator-conductor composite. A substrate support assembly in which the heating plate is incorporated includes an electrostatic clamping electrode and a temperature controlled base plate. Methods for manufacturing the heating plate include bonding together ceramic having planar heater zones, power supply lines, power return lines and vias.
    Type: Grant
    Filed: August 29, 2013
    Date of Patent: March 25, 2014
    Assignee: Lam Research Corporation
    Inventor: Harmeet Singh
  • Patent number: 8678991
    Abstract: A method of treating anal incontinence in a patient comprises providing a sling having a central portion and first and second arms, creating a subcutaneous tunnel between a first buttock incision and a second buttock incision in the patient, mechanically widening the subcutaneous tunnel to create a pocket for the central portion of the sling, grasping the first arm of the sling and pulling the sling through the subcutaneous tunnel such that the central portion of the sling rests underneath the ano-rectum, inserting an introducer needle through a first thigh incision formed in the patient and advancing the introducer needle through the first buttock incision, pulling the first sling arm through the first thigh incision, inserting the introducer needle through a second thigh incision formed in the patient and advancing the introducer needle through the second buttock incision, and pulling the second sling aim through the second thigh incision.
    Type: Grant
    Filed: April 3, 2012
    Date of Patent: March 25, 2014
    Assignee: AMS Research Corporation
    Inventor: Peter L. Rosenblatt
  • Patent number: 8680752
    Abstract: The present invention comprises systems, apparatuses, and methods for harvesting ambient mechanical energy at a lower frequency and transforming the harvested energy into electrical energy at a higher frequency. Transforming the energy from relatively lower input frequency energy to relatively higher output frequency energy can help realize greater efficiencies found at higher frequencies. Because the input plane of the ambient mechanical energy is not always predictable, some embodiments of the present invention comprise both in-plane and out-of-plane energy harvesters that produce an electrical output in multiple planes.
    Type: Grant
    Filed: February 13, 2012
    Date of Patent: March 25, 2014
    Assignee: Georgia Tech Research Corporation
    Inventors: Farrokh Ayazi, Logan Sorenson, Jenna Fu
  • Patent number: 8680998
    Abstract: A structure breach may be determined. A sensor, provided in the structure, may be driven with a constant frequency signal. The sensor may comprise a first conductive element and a second conductive element. The first conductive element may be substantially parallel with the second conductive element. A standing wave pattern may be induced on the sensor by the constant frequency signal reflecting off a termination point of the sensor. A least one characteristic of the sensor caused by the voltage standing wave pattern may be measured. A breach occurrence in the structure may be determined when the measured at least one characteristic varies from a previously determined value by a predetermined amount. The first conductive element and the second conductive element may be sandwiched between two layers comprising the structure. The structure may comprise a shipping container floor. The detected breach may comprise an opening greater than nine square inches.
    Type: Grant
    Filed: January 19, 2007
    Date of Patent: March 25, 2014
    Assignee: Georgia Tech Research Corporation
    Inventors: Thomas Michaels, Jennifer Michaels
  • Patent number: 8679288
    Abstract: Showerhead electrode assemblies are disclosed, which include a showerhead electrode adapted to be mounted in an interior of a vacuum chamber; an optional backing plate attached to the showerhead electrode; a thermal control plate attached to the backing plate or to the showerhead electrode at multiple contact regions across the backing plate; and at least one interface member separating the backing plate and the thermal control plate, or the thermal control plate and showerhead electrode, at the contact regions, the interface member having a thermally and electrically conductive gasket portion and a particle mitigating seal portion. Methods of processing semiconductor substrates using the showerhead electrode assemblies are also disclosed.
    Type: Grant
    Filed: June 9, 2008
    Date of Patent: March 25, 2014
    Assignee: Lam Research Corporation
    Inventors: Tom Stevenson, Rajinder Dhindsa
  • Publication number: 20140081356
    Abstract: A system for controlling temperatures during medical procedures is disclosed. The system can include a high-thermal conductivity matrix with embedded thermal capacitors. The matrix can be a cream or gel, for example, and can enable the system to be easily applied to the skin, or other area to be treated. The thermal capacitors can include phase change materials, polymers, fats, or other materials that undergo an endothermic physico-chemical transformation above a first predetermined temperature (e.g., room temperature), but below a second predetermined temperature (e.g., the patient's pain threshold). The system can further include one or more thickeners to provide the desired rheological properties for application. The system can also include one or more lubricants to ease some operations during the medical procedure.
    Type: Application
    Filed: March 15, 2013
    Publication date: March 20, 2014
    Applicant: GEORGIA TECH RESEARCH CORPORATION
    Inventors: Andrei G. Fedorov, Craig Elkton Green
  • Publication number: 20140078238
    Abstract: Systems and methods for providing remote assistance to a user are disclosed. A remote assistance system may communicate with a mobile device operated by the user and may manipulate devices configured on the mobile device, such as a camera, an illumination device, a projection device, or any other types of devices. Images may be captured with a camera of the mobile phone and transmitted by the mobile phone to the remote assistance system. A remote assistant may transmit images or other visual data to the mobile phone that are then overlaid upon images presented on the mobile phone. Various image manipulation and stabilization means and methods are disclosed, as well as various ways of obtaining and providing remote assistance.
    Type: Application
    Filed: November 19, 2013
    Publication date: March 20, 2014
    Applicant: Georgia Tech Research Corporation
    Inventor: Peter Roach, Jr.
  • Publication number: 20140080255
    Abstract: Ultra-low power single metallic single-wall-nano-tube (SWNT) interconnects for sub-threshold circuits are provided. According to some embodiments, an interconnect structure for use in electronic circuits can generally comprise a first substrate, a second substrate, and an interconnect. The first substrate can be spaced apart from the second substrate. The interconnect is preferably a single wall carbon nanotube (SWNT) interconnect. The SWNT interconnect can be disposed between the first and second substrates to electrically connect the substrates. The substrates can form parts of electrical components (e.g., a transistor, processor, memory, filters, etc.) operating in a subthreshold operational state. Other aspects, features, and embodiments are claimed and described.
    Type: Application
    Filed: May 9, 2013
    Publication date: March 20, 2014
    Applicant: Georgia Tech Research Corporation
    Inventor: Georgia Tech Research Corporation
  • Publication number: 20140076353
    Abstract: A plasma ashing process for removing photoresist, polymers and/or residues from a substrate, the process includes placing the substrate including the photoresist, polymers, and/or residues into a reaction chamber; generating a plasma from a gas mixture comprising oxygen gas (02) and/or an oxygen containing gas; suppressing and/or reducing fast diffusing species in the plasma by adding an atomic oxygen scavenging gas to the gas mixture; and exposing the substrate to the plasma to selectively remove the photoresist, polymers, and/or residues from the substrate, wherein the plasma is substantially free from fast diffusing species.
    Type: Application
    Filed: November 18, 2013
    Publication date: March 20, 2014
    Applicant: Lam Research Corporation
    Inventors: Ivan L. Berry, Carlo Waldfried, Shijian Luo, Orlando Escorcia
  • Patent number: 8672828
    Abstract: A slotted shield for a surgical tack, including a body adapted to engage a tack head. The shield has at least one slot having a width, defined by the body. Optionally, the shield is mounted on a tack head on which said shield is mounted.
    Type: Grant
    Filed: March 22, 2007
    Date of Patent: March 18, 2014
    Assignee: AMS Research Corporation
    Inventors: Boaz Harari, Mordechay Beyar, Oren Globerman
  • Patent number: D701408
    Type: Grant
    Filed: October 4, 2013
    Date of Patent: March 25, 2014
    Assignee: New Dimensions Research Corporation
    Inventors: Timothy L. Mason, Jeffrey V. Mason, Fred A. Capitelli