Patents Assigned to The Research Corporation
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Publication number: 20140088799Abstract: Flight management systems and control methods for meeting a required time of arrival (RTA) with reduced fuel burn. The method can account for probabilistic wind forecast uncertainty in RTA calculations by reformulating the speed and thrust profile problem as a multi-stage stochastic program, using a wind forecast uncertainty model to generate scenario sets for the fuel optimization problem. The method can iteratively calculate a fuel-efficient advised air speed for achieving an RTA over a flight path with an arbitrary number of recourse points. Methods for creating wind forecast uncertainty models applicable to a variety of routes through a given airspace, and for use with the flight management systems and control methods. An example wind forecast uncertainty model can be position-specific, data-driven and based on a Markov chain representing error values between historical wind speed data and forecasted wind speed data long a planned flight route or between an origin-destination pair.Type: ApplicationFiled: September 21, 2012Publication date: March 27, 2014Applicant: Georgia Tech Research CorporationInventors: Clayton Patrick Tino, John-Paul Barrington Clarke
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Publication number: 20140087488Abstract: A showerhead electrode assembly for use in a capacitively coupled plasma processing apparatus comprising a heat transfer plate. The heat transfer plate having independently controllable gas volumes which may be pressurized to locally control thermal conductance between a heater member and a cooling member such that uniform temperatures may be established on a plasma exposed surface of the showerhead electrode assembly.Type: ApplicationFiled: September 24, 2012Publication date: March 27, 2014Applicant: Lam Research CorporationInventors: Sang Ki Nam, Rajinder Dhindsa, Ryan Bise
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Patent number: 8678995Abstract: Described and depicted are pelvic sling implant and delivery systems. The sling implants can be used in treating stress incontinence and other pelvic floor disorders. The sling systems can include a mesh extension or support portion and one or more tip anchors. A delivery tool can include a handle (61), a needle (62) and a sheath (70), with the sheath having an elongate shaft portion slidable along at least a portion of the needle. The sheath can further include a distal hood portion having opposed flared portions (78) defining interior pleat channels adapted to selectively seat tine ends of the anchors.Type: GrantFiled: August 5, 2009Date of Patent: March 25, 2014Assignee: AMS Research CorporationInventor: Scott Crawford
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Patent number: 8677590Abstract: A method for manufacturing a plasma processing system is provided. The method includes providing a movable plasma-facing structure configured to surround a plasma that is generated during processing of a substrate. The method also includes disposing a movable electrically conductive structure outside of the movable plasma-facing structure, wherein both structures configured to be deployed and retracted as a single unit to facilitate handling of the substrate. The movable electrically conductive structure is radio frequency (RF) grounded during the plasma processing. During processing, the RF current from the plasma flows to the movable electrically conductive structure through the movable plasma-facing structure during the plasma processing. The method further includes coupling a set of conductive straps to the movable electrically conductive structure.Type: GrantFiled: September 9, 2013Date of Patent: March 25, 2014Assignee: Lam Research CorporationInventors: Eric Hudson, Andreas Fischer
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Patent number: 8677586Abstract: A method of installing an elastomer band as a protective edge seal around a portion of a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber, which includes expanding an elastomer band into a circular shape having a diameter greater than a diameter of a mounting groove within the substrate support; clamping the elastomer band in the expanded shape between a base ring and a clamp ring; placing the elastomer band over the substrate support in the expanded shape; and releasing the elastomer band from between the base and clamp rings, which contracts the elastomer band into the mounting groove of the substrate support.Type: GrantFiled: April 4, 2012Date of Patent: March 25, 2014Assignee: Lam Research CorporationInventor: Neal Newton
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Patent number: 8679442Abstract: In various embodiments, the present disclosure describes fullerene derivatives that are capable of photocatalytically generating reactive oxygen species in the presence of ultraviolet and/or visible light. In some embodiments, the fullerene derivatives are aminofullerenes containing a plurality of amine-terminated moieties covalently bonded to the fullerene cage. The fullerene derivatives may optionally be covalently bonded to a substrate surface for use in photocatalytic disinfection systems for removing various contaminants including, for example, bacteria, viruses, protozoa and chemical pollutants. Methods using the present fullerene and aminofullerene derivatives in various purification processes are also described herein.Type: GrantFiled: June 24, 2010Date of Patent: March 25, 2014Assignees: William Marsh Rice University, Georgia Tech Research CorporationInventors: Pedro J. J. Alvarez, Jaesang Lee, Lon J. Wilson, Yuri Mackeyev, Jaehong Kim
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Patent number: 8680751Abstract: A generator includes a bio-compatible substrate onto which one mechanical generating unit is disposed. A plurality of elongated piezoelectric fibers each have a first end that is in electrical communication with a first electrode and an opposite second end that is in electrical communication with a second electrode. An insulative layer covers the first electrode, the second electrode and the elongated piezoelectric fibers. A third electrode and a fourth electrode are each disposed on the bio-compatible substrate opposite from the mechanical generating unit. A proton conducting member is in contact with both the third electrode and the fourth electrode. A glucose catalyzing enzyme is electrically coupled to the third electrode. An oxidase enzyme is electrically coupled to the fourth electrode. The third electrode is in electrical communication with each first electrode and the fourth electrode is in electrical communication with each second electrode.Type: GrantFiled: December 2, 2011Date of Patent: March 25, 2014Assignee: Georgia Tech Research CorporationInventors: Zhong L. Wang, Caofeng Pan, Ben Hansen, Ying Liu
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Patent number: 8679252Abstract: An actively heated aluminum baffle component such as a thermal control plate or baffle ring of a showerhead electrode assembly of a plasma processing chamber has an exposed outer aluminum oxide layer which is formed by an electropolishing procedure. The exposed outer aluminum oxide layer minimizes defects and particles generated as a result of differential thermal stresses experienced by the aluminum component and outer aluminum oxide layer during plasma processing compared to an identically shaped component having a Type III anodized surface.Type: GrantFiled: September 23, 2005Date of Patent: March 25, 2014Assignee: Lam Research CorporationInventors: Hong Shih, G. Grant Peng, Daxing Ren
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Patent number: 8679359Abstract: The present invention is directed to a method and apparatus for etching various metals that may be used in semiconductor or integrated circuit processing through the use of non-halogen gases such as hydrogen, helium, or combinations of hydrogen and helium with other gases such as argon. In one exemplary embodiment of the present invention, in a reaction chamber, a substrate having a metal interconnect layer deposited thereon is exposed to a plasma formed of non-halogen gas. The plasma generated is maintained for a certain period of time to provide for a desired or expected etching of the metal. In some embodiments, the metal interconnect layer may be copper, gold or silver.Type: GrantFiled: May 10, 2011Date of Patent: March 25, 2014Assignee: Georgia Tech Research CorporationInventors: Fangyu Wu, Dennis W. Hess, Galit Levitin
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Patent number: 8680441Abstract: A heating plate for a substrate support assembly in a semiconductor plasma processing apparatus, comprises multiple independently controllable planar heater zones arranged in a scalable multiplexing layout, and electronics to independently control and power the planar heater zones. Each planar heater zone includes one or more heater element made of an insulator-conductor composite. A substrate support assembly in which the heating plate is incorporated includes an electrostatic clamping electrode and a temperature controlled base plate. Methods for manufacturing the heating plate include bonding together ceramic having planar heater zones, power supply lines, power return lines and vias.Type: GrantFiled: August 29, 2013Date of Patent: March 25, 2014Assignee: Lam Research CorporationInventor: Harmeet Singh
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Patent number: 8678991Abstract: A method of treating anal incontinence in a patient comprises providing a sling having a central portion and first and second arms, creating a subcutaneous tunnel between a first buttock incision and a second buttock incision in the patient, mechanically widening the subcutaneous tunnel to create a pocket for the central portion of the sling, grasping the first arm of the sling and pulling the sling through the subcutaneous tunnel such that the central portion of the sling rests underneath the ano-rectum, inserting an introducer needle through a first thigh incision formed in the patient and advancing the introducer needle through the first buttock incision, pulling the first sling arm through the first thigh incision, inserting the introducer needle through a second thigh incision formed in the patient and advancing the introducer needle through the second buttock incision, and pulling the second sling aim through the second thigh incision.Type: GrantFiled: April 3, 2012Date of Patent: March 25, 2014Assignee: AMS Research CorporationInventor: Peter L. Rosenblatt
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Patent number: 8680752Abstract: The present invention comprises systems, apparatuses, and methods for harvesting ambient mechanical energy at a lower frequency and transforming the harvested energy into electrical energy at a higher frequency. Transforming the energy from relatively lower input frequency energy to relatively higher output frequency energy can help realize greater efficiencies found at higher frequencies. Because the input plane of the ambient mechanical energy is not always predictable, some embodiments of the present invention comprise both in-plane and out-of-plane energy harvesters that produce an electrical output in multiple planes.Type: GrantFiled: February 13, 2012Date of Patent: March 25, 2014Assignee: Georgia Tech Research CorporationInventors: Farrokh Ayazi, Logan Sorenson, Jenna Fu
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Patent number: 8680998Abstract: A structure breach may be determined. A sensor, provided in the structure, may be driven with a constant frequency signal. The sensor may comprise a first conductive element and a second conductive element. The first conductive element may be substantially parallel with the second conductive element. A standing wave pattern may be induced on the sensor by the constant frequency signal reflecting off a termination point of the sensor. A least one characteristic of the sensor caused by the voltage standing wave pattern may be measured. A breach occurrence in the structure may be determined when the measured at least one characteristic varies from a previously determined value by a predetermined amount. The first conductive element and the second conductive element may be sandwiched between two layers comprising the structure. The structure may comprise a shipping container floor. The detected breach may comprise an opening greater than nine square inches.Type: GrantFiled: January 19, 2007Date of Patent: March 25, 2014Assignee: Georgia Tech Research CorporationInventors: Thomas Michaels, Jennifer Michaels
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Patent number: 8679288Abstract: Showerhead electrode assemblies are disclosed, which include a showerhead electrode adapted to be mounted in an interior of a vacuum chamber; an optional backing plate attached to the showerhead electrode; a thermal control plate attached to the backing plate or to the showerhead electrode at multiple contact regions across the backing plate; and at least one interface member separating the backing plate and the thermal control plate, or the thermal control plate and showerhead electrode, at the contact regions, the interface member having a thermally and electrically conductive gasket portion and a particle mitigating seal portion. Methods of processing semiconductor substrates using the showerhead electrode assemblies are also disclosed.Type: GrantFiled: June 9, 2008Date of Patent: March 25, 2014Assignee: Lam Research CorporationInventors: Tom Stevenson, Rajinder Dhindsa
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Publication number: 20140081356Abstract: A system for controlling temperatures during medical procedures is disclosed. The system can include a high-thermal conductivity matrix with embedded thermal capacitors. The matrix can be a cream or gel, for example, and can enable the system to be easily applied to the skin, or other area to be treated. The thermal capacitors can include phase change materials, polymers, fats, or other materials that undergo an endothermic physico-chemical transformation above a first predetermined temperature (e.g., room temperature), but below a second predetermined temperature (e.g., the patient's pain threshold). The system can further include one or more thickeners to provide the desired rheological properties for application. The system can also include one or more lubricants to ease some operations during the medical procedure.Type: ApplicationFiled: March 15, 2013Publication date: March 20, 2014Applicant: GEORGIA TECH RESEARCH CORPORATIONInventors: Andrei G. Fedorov, Craig Elkton Green
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Publication number: 20140078238Abstract: Systems and methods for providing remote assistance to a user are disclosed. A remote assistance system may communicate with a mobile device operated by the user and may manipulate devices configured on the mobile device, such as a camera, an illumination device, a projection device, or any other types of devices. Images may be captured with a camera of the mobile phone and transmitted by the mobile phone to the remote assistance system. A remote assistant may transmit images or other visual data to the mobile phone that are then overlaid upon images presented on the mobile phone. Various image manipulation and stabilization means and methods are disclosed, as well as various ways of obtaining and providing remote assistance.Type: ApplicationFiled: November 19, 2013Publication date: March 20, 2014Applicant: Georgia Tech Research CorporationInventor: Peter Roach, Jr.
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Publication number: 20140080255Abstract: Ultra-low power single metallic single-wall-nano-tube (SWNT) interconnects for sub-threshold circuits are provided. According to some embodiments, an interconnect structure for use in electronic circuits can generally comprise a first substrate, a second substrate, and an interconnect. The first substrate can be spaced apart from the second substrate. The interconnect is preferably a single wall carbon nanotube (SWNT) interconnect. The SWNT interconnect can be disposed between the first and second substrates to electrically connect the substrates. The substrates can form parts of electrical components (e.g., a transistor, processor, memory, filters, etc.) operating in a subthreshold operational state. Other aspects, features, and embodiments are claimed and described.Type: ApplicationFiled: May 9, 2013Publication date: March 20, 2014Applicant: Georgia Tech Research CorporationInventor: Georgia Tech Research Corporation
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Publication number: 20140076353Abstract: A plasma ashing process for removing photoresist, polymers and/or residues from a substrate, the process includes placing the substrate including the photoresist, polymers, and/or residues into a reaction chamber; generating a plasma from a gas mixture comprising oxygen gas (02) and/or an oxygen containing gas; suppressing and/or reducing fast diffusing species in the plasma by adding an atomic oxygen scavenging gas to the gas mixture; and exposing the substrate to the plasma to selectively remove the photoresist, polymers, and/or residues from the substrate, wherein the plasma is substantially free from fast diffusing species.Type: ApplicationFiled: November 18, 2013Publication date: March 20, 2014Applicant: Lam Research CorporationInventors: Ivan L. Berry, Carlo Waldfried, Shijian Luo, Orlando Escorcia
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Patent number: 8672828Abstract: A slotted shield for a surgical tack, including a body adapted to engage a tack head. The shield has at least one slot having a width, defined by the body. Optionally, the shield is mounted on a tack head on which said shield is mounted.Type: GrantFiled: March 22, 2007Date of Patent: March 18, 2014Assignee: AMS Research CorporationInventors: Boaz Harari, Mordechay Beyar, Oren Globerman
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Patent number: D701408Type: GrantFiled: October 4, 2013Date of Patent: March 25, 2014Assignee: New Dimensions Research CorporationInventors: Timothy L. Mason, Jeffrey V. Mason, Fred A. Capitelli