Abstract: A thin-film bulk acoustic wave delay line device providing true-time delays and a method of fabricating same. An exemplary device can comprise several thin-film layers including thin-film transducer layers, thin-film delay layers, and stacks of additional thin-film materials providing acoustic reflectors and matching networks. The layer material selection and layer thicknesses can be controlled to improve impedance matching between transducers and the various delay line materials. For example, the transducer layers and delay layers can comprise piezoelectric and amorphous forms of the same material. The layers can be deposited on a carrier substrate using standard techniques. The device can be configured so that mechanical waves propagate solely within the thin films, providing a substrate-independent device. The device, so constructed, can be of a small size, e.g. 40 ?m per side, and capable of handling high power levels, potentially up to 20 dBm, with low insertion loss of approximately 3 dB.

Abstract: A CO2-facilitated transport membrane of excellent carbon dioxide permeability and CO2/H2 selectivity, which can be applied to a CO2 permeable membrane reactor, is stably provided. The CO2-facilitated transport membrane is formed such that a gel layer 1 obtained by adding cesium carbonate to a polyvinyl alcohol-polyacrylic acid copolymer gel membrane is supported by a hydrophilic porous membrane 2. More preferably, a gel layer supported by a hydrophilic porous membrane 2 is coated with hydrophilic porous membranes 3 and 4.

Abstract: In one embodiment, a plasma processing device may include a plasma processing chamber, a plasma region, an energy source, and a corrosion resistant component. The plasma processing chamber can be maintained at a vacuum pressure and can confine a plasma processing gas. The energy source can transmit energy into the plasma processing chamber and transform at least a portion of the plasma processing gas into plasma within the plasma region. The corrosion resistant component can be located within the plasma processing chamber. The corrosion resistant component can be exposed to the plasma processing gas and is not coincident with the plasma region. The corrosion resistant component may include an inner layer of stainless steel that is coated with an outer layer of Tantalum (Ta).

Abstract: An apparatus for generating and storing electric energy, the apparatus including a fiber, an electric energy generation unit disposed on the fiber, and an electric energy storage unit disposed on the fiber.

Abstract: A first system and method relates to an analog current-mode method using branch systems. In the analog current-mode implementation, multiple branches systems can be scaled according to filter coefficients and switched using known data points. Positive coefficients can add current to the summing node, while negative coefficients can remove current from the summing node. Switches can be implemented with quick charge/discharge paths in order to operate at very high data rates. A second system and method relates to a digital look-up table based high-speed implementation. In the digital implementation, outputs can be pre-calculated as an n-bit output word that drives an n-bit DAC. Each bit of the n-bit word can then described as an independent function of the known data points. Each such function can be implemented as a high-speed combinational logic block. Both systems and methods enable the implementation of pulse shaping filters for multi-gigabit per second data transmission.

Abstract: An apparatus for etching features in an etch layer is provided. A plasma processing chamber is provided, comprising a chamber wall, a chuck, a pressure regulator, an electrode or coil, a gas inlet, and a gas outlet. A gas source comprises a fluorine free deposition gas source and an etch gas source. A controller comprises at least one processor and computer readable media, comprising computer readable code for providing a conditioning for a patterned pseudo-hardmask, wherein the conditioning comprises computer readable code providing a fluorine free deposition gas comprising a hydrocarbon gas, computer readable code for forming a plasma, computer readable code for providing a bias less than 500 volts, and computer readable code for forming a deposition on top of the patterned pseudo-hardmask, computer readable code for etching the etch layer, and computer readable code for cyclically repeating the conditioning and etching at least twice.

Abstract: In a method of assembling a laser probe tip, an optical fiber comprising an optical fiber core and silica glass cladding surrounding the core is provided. A fiber cap formed of silica glass is also provided. Silicone oil is applied to a surface of the cladding at a distal end of the optical fiber or an interior surface of the fiber cap. The distal end of the optical fiber is inserted into the interior cavity of the fiber cap. The silicone oil is then converted into silica glass, which bonds the fiber cap to the optical fiber.

Abstract: A showerhead electrode and assembly useful for plasma etching includes cam locks which provide improved thermal contact between the showerhead electrode and a backing plate. The cam locks include cam shafts in the backing plate which engage enlarged heads of studs mounted on the showerhead electrode. The assembly can include an annular shroud surrounding the showerhead electrode and eight of the cam shafts in the backing plate can be operated such that each cam shaft simultaneously engages a stud on the annular shroud and a stud in an outer row of studs on the showerhead electrode. Another eight cam shafts can be operated such that each cam shaft engages a pair of studs on inner and middle rows of the studs mounted of the showerhead electrode.

Abstract: A method for assessing health status of a processing chamber is provided. The method includes executing a recipe. The method also includes receiving processing data from a set of sensors during execution of the recipe. The method further includes analyzing the processing data utilizing a set of multi-variate predictive models. The method yet also includes generating a set of component wear data values. The method yet further includes comparing the set of component wear data values against a set of useful life threshold ranges. The method moreover includes generating a warning if the set of component wear data values is outside of the set of useful life threshold ranges.

Abstract: Systems and methods of correlating potential transmitters with received radio signals is provided. Image data is provided including paths traveled by potential transmitter. Potential transmitters are identified within the image data along with path segments traveled by potential transmitters. A first and second transmitter calculate certain parameters of received signals assuming that signals originated along the path segments. The calculated signal parameters are then compared to measured signal parameter to determine whether a transmitter is associated with a particular path.

Abstract: A disclosed device for use with an electrostatic chuck configured to hold a substrate in a plasma environment comprises an edge ring configured to be placed either in contact with portions of only a ceramic top piece, a base plate, or coupled to the base plate through a plurality of pins and pin slots. The edge ring is further configured to be concentric with the ceramic top piece. In one embodiment, the edge ring includes an inner edge having an edge step arranged to provide mechanical coupling between the edge ring and the outer periphery of the ceramic top piece. The edge ring further includes an outer edge and a flat portion located between the inner edge and the outer edge. The flat portion is arranged to be both horizontal when the edge ring is placed around the outer periphery of the ceramic top piece and parallel to the substrate.

Abstract: A method for etching a line pattern in an etch layer disposed below an antireflective coating (ARC) layer below a patterned mask is provided. The method includes opening the ARC layer, in which an ARC opening gas comprising CF3I, a fluorocarbon (including hydrofluorocarbon) containing gas, and an oxygen containing gas are provided, a plasma is formed from the ARC opening gas to open the ARC layer, and providing the ARC opening gas is stopped. Line pattern features are etched into the etch layer through the opened ARC layer.

Abstract: Carbon molecular sieves (CMS) membranes having improved thermal and/or mechanical properties are disclosed herein. In one embodiment, a carbon molecular sieve membrane for separating a first and one or more second gases from a feed mixture of the first gas and one or more second gases comprises a hollow filamentary carbon core and a thermally stabilized polymer precursor disposed on at least an outer portion of the core. In some embodiments, the thermally stabilized polymer precursor is created by the process of placing in a reaction vessel the carbon molecular sieve membrane comprising an unmodified aromatic imide polymer, filling the reaction vessel with a modifying agent, and changing the temperature of the reaction vessel at a temperature ramp up rate and ramp down rate for a period of time so that the modifying agent alters the unmodified aromatic imide polymer to form a thermally stabilized polymer precursor.

Abstract: A top plate assembly is positioned above and spaced apart from the substrate support, such that a processing region exists between the top plate assembly and the substrate support. The top plate assembly includes a central plasma generation microchamber and a plurality of annular-shaped plasma generation microchambers positioned in a concentric manner about the central plasma generation microchamber. Adjacently positioned ones of the central and annular-shaped plasma generation microchambers are spaced apart from each other so as to form a number of axial exhaust vents therebetween. Each of the central and annular-shaped plasma generation microchambers is defined to generate a corresponding plasma therein and supply reactive constituents of its plasma to the processing region between the top plate assembly and the substrate support.

Abstract: Conditions in a power grid are detected by sampling a voltage in the grid. A normal condition hypothesis is modeled as a sinusoid, and a transient condition hypothesis is modeled as a sum of damped sinusoids. The samples are used to construct probability density function. A likelihood ratio based on the pdf and the hypotheses is compared to a threshold to determine whether the condition is normal or transient.

Abstract: Methods and devices for dispersion of clusters of somatic plant embryos suspended in a liquid are disclosed. The methods comprise i) subjecting the clusters of embryos to fluid dynamics forces causing axially extensional strain and radially compressional strain and ii) subjecting the clusters of embryos to fluid dynamics forces causing axially compressional strain and radially extensional strain fluid dynamics and iii) repeating said steps in sequence until the individual embryos are separated from each other. The devices may comprise a flow channel including at least one constriction, such that clusters of embryos flowing through the flow channel are first subjected to axially extensional strain and radially compressional strain, and then to axially compressional strain and radially extensional strain from fluid dynamics forces.

Abstract: A circumferential electrode includes a moisture-containing layer comprising a first side and an electrically conductive layer on the moisture-containing layer, the electrically conductive layer including a second side and a third side opposite the second side, the third side of the electrically conductive layer contacting the first side of the moisture-containing layer. The circumferential electrode further includes a barrier layer on the electrically conductive layer, the barrier layer including a fourth side adjacent to the second side of the electrically conductive layer. The circumferential electrode further includes a bulk region and a border region, the border region completely surrounding the bulk region, and the electrically conductive layer is in the bulk region but is not in the border region. The circumferential electrode can be part of an electrotherapy system which can be used to apply various current waveforms to patients in order to treat a variety of ailments and conditions.

Abstract: A method for forming MRAM (magnetoresistive random access memory) devices is provided. A bottom electrode assembly is formed. A magnetic junction assembly is formed, comprising, depositing a magnetic junction assembly layer over the bottom electrode assembly, forming a patterned mask over the magnetic junction assembly layer, etching the magnetic junction assembly layer to form the magnetic junction assembly with gaps, gap filling the magnetic junction assembly, and planarizing the magnetic junction assembly. A top electrode assembly is formed.

Abstract: Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.

Abstract: A detection circuit arrangement in a plasma processing chamber having movable lower electrode is provided. The arrangement includes flexible connector having a first flexible connector end, a second flexible connector end and at least a slit. At least portion of the slit is disposed in a direction parallel to a line drawn between two flexible connector ends. One end is coupled to the movable lower electrode and another end is coupled to a component of the plasma processing chamber. Flexible connector provides low impedance current path between the movable lower electrode and the component of the plasma processing chamber. The arrangement also includes means for detecting current flow through conductor material disposed on one side of the slit. The means for detecting includes at least a coil wound around the conductor material and a detector circuit coupled to the coil for detecting the current flow interruption due to a tear.