Abstract: A chemical vapor deposition method and apparatus is disclosed. The process is carried out in an apparatus having a number reactive zones, each surrounded by a corresponding exhaust zone, all of which are both contained within a buffer zone. Pressure relationships are controlled such that buffer gas from the buffer zone flows into the exhaust zones and reactive gas from the reactive zones flow into the exhaust zones. As a result, cross-contamination of gases between the reactive zones is avoided.

Abstract: A method of manufacturing vacuum plasma treated workpieces includes the steps of introducing at least one workpiece to be treated into a vacuum chamber; treating the workpiece in the vacuum chamber, thereby establishing a plasma discharge in the vacuum chamber by a supply signal with maximum energy at a first frequency which is at least in the Hf frequency range; removing the workpiece treated from the vacuum chamber; performing a cleaning inside the vacuum chamber, thereby establishing the plasma discharge by a supply signal with maximum energy at a second frequency higher than the Hf frequency; and repeating these steps at least one time. A system for vacuum plasma treating workpieces includes an evacuatable vacuum recipient. A gas inlet arrangement in the vacuum recipient is connectable to a first gas supply and to a second gas supply. A plasma generating arrangement in the recipient has an electric input to an electrode.

Abstract: A sample substrate adapted for use with electromagnetic excitation light includes a base and a layer system. The layer system includes a multilayer interference coating with at least two layers wherein the thicknesses of the layers ensure that light emitted by a fluorescent sample material disposed on top of said multilayer interference coating is reflected. Light directed to a fluorescent sample material disposed on the substrate causes light to be emitted from the sample. The layer system includes a multilayer interference coating with at least two layers wherein thicknesses of the layers cause separation of the excitation light from the emitted light.

Abstract: A magnetron sputtering source includes a plurality of electrodes and a switching circuit. The switching circuit sequentially connects each of the plurality of electrodes to a ground reference, making it anodic, while connecting the remaining of the plurality of electrodes as cathodes. A method of operating the magnetron sputtering source includes steps of: providing a plurality of target arrangements; causing each of the plurality of target arrangements to act as a cathode; and sequentially causing each of the plurality of cathodes to temporarily act as an anode.

Abstract: A method of assembling a light handling device that includes a plurality of separate walls for reflecting and that is tolerant of elevated heat and heating cycles. The method provides a fast-set adhesive to portions of the walls that are to be secured together. The method also secures the walls in a temporary fixation device for a time period needed for the fast-set adhesive to set, and removes the walls from the temporary fixation device subsequent to the setting of the fast-set adhesive such that the walls are secured together by the fast-set adhesive. The method also provides another means of securing the walls together that is resistant to degradation caused by elevated heat and heating cycles.

Abstract: A work piece or structural component is coated with a system of film layers at least one of which is composed of (AlyCr1-y) X, where X=N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO or CBNO and 0.2?y<0.7, with the composition within said film being either essentially constant or varying over the thickness of the film continually or in steps, as well as a process for producing it.

Abstract: The invention relates to an optical component (1) consisting of a base unit (3) which supports a substrate (5) with a substrate region (7) that encompasses an optically functional surface, and a coating (9) which covers the substrate region (7) and at least part of the base unit (3). The substrate region (7) and a reference point (13) in the base unit (3) are oriented relative to each other in predefined fashion. The optical component (1) is produced by assembling the base unit (3) and the substrate (5) prior to the coating process, preferably by means of an assembly device (17). The assembled component is subsequently coated by employing a vacuum coating technique.