Abstract: To realize a nitride semiconductor light-emitting element having excellent lifespan characteristics in addition to improved light emission efficiency compared with conventional elements. A nitride semiconductor light-emitting element having a light-emitting layer obtained by alternately stacking a well layer comprising a nitride semiconductor and a barrier layer comprising a nitride semiconductor between an n-type nitride semiconductor layer and a p-type nitride semiconductor layer, wherein a final barrier layer, which is the barrier layer formed at a position in contact with the p-type nitride semiconductor layer, contains n-type impurities, and the concentration of n-type impurities at the interface with the p-type nitride semiconductor layer is 4×1017/cm3 or less.

Abstract: Provided is a short arc discharge lamp that includes: a body including therein a reflection surface and having a front opening; a cathode and an anode opposed to each other in discharge space defined by the reflection surface surrounding the discharge space; a window member provided in front of the body and covering the front opening; and a window supporting member including an inner ring section, an outer ring section, and a coupling section. The inner ring section is configured to allow a circumferential side surface of the window member to be fixed thereto, the outer ring section is larger in diameter than the inner ring section, and the coupling section connects the inner ring section and the outer ring section together. The inner ring section includes, in front of the window member, a front edge section having a shape bent in a radial direction of the window member.

Abstract: A method manufactures a structure having a first fine pattern on a substrate. The method includes forming a resist layer on the substrate, dividing a laser beam into two branch beams, and causing the branch beams to cross each other at an interference angle thereby generating a first interference beam. The method also includes exposing the resist layer with the first interference beam. The method also includes producing a second interference beam from the branch beams such that the second interference beam crosses the first interference beam at a predetermined angle, and exposing the resist layer with the second interference beam. The method also includes removing those areas of the resist layer which are irradiated with the first and second interference beams, thereby forming a second fine pattern in the resist layer. The method also includes etching the substrate with the second fine pattern of the resist layer.

Abstract: A method manufactures a light emitting element of a fluorescent light source. The method includes forming a photosensitive material layer on a fluorescent substrate, and dividing a coherent beam into branch beams. The method includes causing the branch beams to cross each other thereby generating a first interference beam, and applying an exposure process to the photosensitive material layer with the first interference beam. The method includes producing a second interference beam, and applying the exposure process to the photosensitive material with the second interference beam. The method includes removing those areas of the photosensitive material layer which are irradiated with the first and second interference beams, thereby forming a fine pattern in the photosensitive material layer. The method includes applying an etching process to the fluorescent substrate with the fine pattern of the photosensitive material layer, thereby creating a photonic structure on the fluorescent substrate.

Abstract: A discharge lamp includes an emitter other than thorium, which is added to a cathode in a luminous tube. Early depletion of the emitter due to excessive vaporization of the emitter from the cathode is prevented, while achieving stable lighting even at the start-up of the lighting. A main body part (31) of the cathode (3) is made from a high-melting-point metal material that contains no thorium, and a front end part (32) thereof is made from a high-melting-point metal material that contains an emitter (other than thorium). A sintered compact (34), which contains an emitter (other than thorium) at a concentration higher than the emitter contained in the front end part (32), is buried in a sealed space (33) that is formed within the main body part (31) and/or the front end part (32). The sintered compact (34) abuts against the front end part (32).

Abstract: An apparatus capable of performing a photo alignment process on a plate-shaped member and realizing high productivity is provided. An irradiating unit irradiates an irradiated area with polarized light, and a stage movement mechanism transports first and second stages on which substrates are mounted alternately to the irradiated area and returns the same. A space larger than a length by which the substrate on the second stage passes through the irradiated area is secured between the first stage positioned at a first substrate mounting-and-collecting position and the irradiated area, and a space larger than a length by which the substrate on the first stage passes through the irradiated area is secured between the second stage positioned at a second substrate mounting-and-collecting position and the irradiated area.

Abstract: A non-reflection type grid polarizing element can stably provide a desired polarizing effect even when the grid polarizing element is used under conditions such as in an oxidizing environment (e.g., when the polarizing element is used to polarize the ultraviolet light). The grid polarizing element is easy to fabricate. The grid polarizing element selectively transmits particular polarized light among incident light through the polarizing element to polarize the incident light. The grid polarizing element includes a transparent substrate and a grid disposed on the transparent substrate. The grid has a plurality of linear portions arranged like a stripe. Each of the linear portions has a dominant layer made from titanium nitride or titanium oxynitride. The linear portions contain no simple metal layers.

Abstract: Provided is an excimer lamp having a simple and small structure, which can be used in, for example, a refrigerator, and can emit ultraviolet light at a wavelength effective in disinfection processing without generating ozone in a surrounding atmosphere, without leaving gas impurities and moisture in an electrical discharge vessel, and without causing a steep illuminance decrease. A fluorescent substance is disposed on an inner face of the electrical discharge vessel for converting ultraviolet light emitted upon excimer electrical discharge of a light emitting gas to ultraviolet light having a longer wavelength. An inner electrode has a coil shape. A tight winding portion is formed at a certain area of the interior electrode which extends in the center axial direction of the interior electrode such that the coil is tightly wound in the tight winding portion. A getter is attached to the tight winding portion.

Abstract: A discharge lamp includes a cathode in a luminous tube, and an emitter, other than thorium, is added to the cathode. The emitter is prevented from being excessively vaporized from the cathode and depleted soon. Smooth lighting is enabled even at start-up. A main body part (31) of the cathode (3) is made from a metallic material having a high melting point and containing no thorium. A front end (32) is made from a metallic material having a high melting point and containing an emitter (excepting thorium). Inside a sealed space (33) formed in the main body part (31) and/or the front end part (32) is received a sintered compact (34) containing an emitter (excepting thorium) that is higher in concentration than the emitter contained in the front end part (32).

Abstract: An ashing apparatus includes a treatment chamber having an object to be processed therein, and a lamp chamber having an ultraviolet lamp that radiates the object with an ultraviolet beam. The ashing apparatus is configured to accurately maintain an irradiation distance between a light source and the object. Thus, it is possible to efficiently remove a smear from a wiring board. The treatment chamber and the lamp chamber are moved relative to each other and in parallel to a surface of the object to be processed. The treatment chamber has a stage that supports the object, a gas inlet opening for supplying a treatment gas into the treatment chamber, and a gas outlet opening for discharging the treatment gas. An ultraviolet transmitting window member that partitions the treatment chamber and the lamp chamber from each other is fixed to the treatment chamber.

Abstract: A mercury-free discharge lamp includes a luminous tube, and a pair of electrodes in the luminous tube such that the electrodes face each other in the luminous tube. The discharge lamp also includes a pair of thermal insulation films formed on an outer surface of the luminous tube around the electrodes, respectively. Zinc, halogen, and a noble gas are sealed in the luminous tube. A metal is also sealed in the luminous tube. The metal has a lower ionization energy than zinc. A ratio of a molar density of the metal to a molar density of zinc is 0.001 to 0.05. The mercury-free discharge lamp has a long life and can emit an ultraviolet beam in a short wavelength range (200-350 nm) at a high output and a high luminous efficacy without causing devitrification of the luminous tube.

Abstract: A high-voltage discharge lamp illumination device comprises a pulse generation part which generates pulse waves, and a power supply part which receives a DC voltage and converts the DC voltage into the AC current in correspondence to a frequency of the pulse waves so as to supply the AC current to the lamp. The pulse generation part repeats a cycle of outputting a first pulse wave over a first period, and thereafter outputting a second pulse wave having a lower frequency than the first pulse wave over a second period shorter than the first period. The pulse generation part returns to the cycle after outputting a third pulse wave having a frequency which is further lower than the second pulse wave in place of the second pulse wave, at a predetermined timing.

Abstract: Disclosed herein are a microchip provided with a titanium oxide film between a glass substrate and a metal thin film; and a method for forming the metal thin film and the titanium oxide film on the glass substrate of the microchip. The microchip has a second microchip substrate that has the metal thin film inside a channel, and the titanium oxide film, which has a low extinction coefficient, is provided as a buffer layer between the substrate and the metal thin film such as a gold film.

Abstract: An extreme ultraviolet light source device includes a raw material supplying mechanism. The raw material supplying mechanism includes a disk-shaped rotor, a motor for causing the rotor to rotate, a cover-shaped structure surrounding the rotor via a gap, and a first reservoir provided inside the cover-shaped structure for reserving a liquid high temperature plasma raw material. When the rotor rotates, a portion of the surface on the rotor becomes coated with the liquid high temperature plasma raw material. A portion of the cover-shaped structure has an aperture exposing that surface of the rotor which coated with the high temperature plasma raw material. The high temperature plasma raw material is irradiated with an energy beam from an energy beam supply device through the aperture, and generates EUV radiation.

Abstract: Provided is a nitride light emitting element which achieves a high light extraction efficiency even at a low operation voltage and which can be manufactured by means of a simple process. A nitride light emitting element 1 has, on a support substrate 11, an n-type layer 35, a p-type layer 31, and a light emitting layer 33 formed at a position interposed between the n-type layer 35 and the p-type layer 31. The n-type layer 35 is constituted of AlxGa1-xN (0<x?1) having a carrier concentration higher than the dopant Si concentration.

Abstract: Disclosed herein are a filament lamp for heating a disk-shaped workpiece in such a way that the filament lamp rotates relative to the workpiece and radiates light thereonto. Further, the present invention provides a structure that enables the filament lamps to uniformly heat the workpiece even with respect to the radial direction of the workpiece. For this, the filament lamp includes an arc-shaped emitting part which extends in a circumferential direction of the relative rotation, and an auxiliary emitting part which is disposed inside a circle extending along the arc-shaped emitting part and extends from the arc-shaped emitting part in a direction crossing the circle. In addition, the present invention is configured such that areas of the workpiece that correspond to spaces between the arc-shaped emitting parts of the adjacent filament lamps pass just below the corresponding auxiliary emitting parts.

Abstract: A generation device and the like for generating long-life antibody chips which can be produced and held in stock is a generation device and the like for generating an antibody chip by binding antibody to a cup, including an antibody solution holder that holds antibody solution having antibody, a buffer solution holder that holds buffer solution, and an injector that injects solution into the cup. The injector has an inlet out of which solution is injected. The injector injects the buffer solution held by the buffer solution holder. The injector injects the antibody solution held by the antibody solution holder with the inlet in the buffer solution in the cup.

Abstract: A method for controlling a discharge plasma-based radiation source for stabilizing a radiation dose emitted in a pulsed manner is disclosed. A calibration function is determined from a relationship between values of an input quantity and values of an operating parameter of the source by applying different values of the input quantity to the source. Reference value selected from the values of the operating parameter is brought about during a pulse of the source. The value of a test quantity is acquired at each pulse. Any quantity influencing the emitted radiation dose can be selected as test quantity. A statistical value is formed from a defined quantity of values of the test quantity. A deviation between the statistical value and the reference value is determined. A result of a comparison of the deviation with a predefined tolerance range determines whether the method is repeated.

Abstract: A light irradiating apparatus includes: an excimer lamp including a high voltage side electrode and a low voltage side electrode; a cooling mechanism configured to cool the high voltage side electrode using a cooling medium; and a leak current discharge circuit. The cooling mechanism includes a passage and a conductor, in which the passage allows the cooling medium to flow through, and the conductor is in contact with the cooling medium, and the conductor is electrically connected to the leak current discharge circuit.

Abstract: Provided is an LED element which achieves high light extraction efficiency even at low operating voltages and which can be produced using a simple process. The LED element has a first semiconductor layer made of a p-type nitride semiconductor, a light-emitting layer made of a nitride semiconductor formed on the upper layer of the first semiconductor layer, a second semiconductor layer made of an n-type nitride semiconductor formed on the upper layer of the light-emitting layer, and a transparent electrode formed on the whole surface of the second semiconductor layer. The second semiconductor layer in at least a region that is in contact with the transparent electrode is made of AlnGa1-nN (0<n<1) and has an n-type impurity concentration larger than 1×1019/cm3.