Abstract: To maintain the shape of the projection on the electrodes of the tip end for a long time to extend the lifetime of a discharge lamp, a lighting device lighting a high pressure discharge lamp supplies alternating current such that an alternating current with a basic frequency at the time of the steady state lighting selected from a range between 60 and 1000 Hz and a low frequency of a half cycle with a frequency lower than the basic frequency are generated alternatingly. The alternating current is supplied such that the waveform with one polarity of the low frequency appears consecutively at least twice. It is also possible for the alternately generated low frequency to be lower than the basic frequency in a range from 5 to 200 Hz, and for the interval during which the basic frequency is supplied to be gradually increased and decreased at specified times.

Abstract: A deterioration of the collector performance in an extreme ultraviolet light source device due to a heat deformation of the collector mirror assembly is to be prevented. The collector mirror assembly used in the extreme ultraviolet light source device comprises a plurality of reflective shells 21 with different diameters which are shaped as ellipsoids of revolution or hyperboloids of revolution, wherein the reflective shells 21 are arranged in a nested shape and the ends thereof are held by a holding structure 22. A cooling channel, through which a cooling medium flows is mounted at the reflective shell 21 in the axial direction of the reflective shell on the face being the back side of the reflective surface. This cooling channel acts as a reinforcement material and is able to suppress a heat deformation of the reflective shell 21.

Abstract: A device for generating short-wavelength electromagnetic radiation based on a gas discharge plasma calls for suppressing droplet formation of liquid coating material that is applied to disk electrodes rotated at high rotational frequencies and ensuring a uniform layer thickness. The device has two rotating disk electrodes, each having two lateral surfaces and a circumferential surface, provided with a reservoir with liquid coating material and a wiper for removing excess coating material. The wiper, which has a U-shaped form comprising two legs parallel to the lateral surfaces of the disk electrode and a crosspiece transversely over the circumferential surface, is at least axially movably supported and has impingement elements at the legs so that it is automatically axially adjustable by means of the coating material which is transported on the lateral surfaces and pressed into the gap during the rotation of the disk electrode.

Abstract: A double-capped short arc flash lamp includes an arc tube, a pair of main electrodes disposed in the arc tube, and a pair of auxiliary electrodes disposed in the arc tube. The flash lamp also includes inner leads and outer leads associated with the two auxiliary electrodes, respectively. The flash lamp also includes a first sealing tube and a second sealing tube provided at opposite ends of the arc tube. A sealing glass tube is partly received in the second sealing tube. Grooves are formed in the outer surface of the sealing glass tube in a region where the sealing glass tube overlaps the second sealing tube. The grooves extend in the axial direction of the sealing glass tube, and are configured to receive the inner leads and the outer leads. Metallic foils electrically connect the inner leads with the outer leads, respectively.

Abstract: An arrangement for handling a liquid metal for cooling revolving components of a radiation source based on a radiation-emitting plasma has the handling arrangement for the liquid metal comprises a reservoir of liquid metal in a vessel, a tempering device for adjusting the temperature moderately above the melting point of the metal, a pump unit for moving the liquid metal in circulation. The handling unit containing the reservoir and the pump unit is provided for transporting the metal into a separated source module via a feed pipe and a return pipe for guiding highly heated metal back from the source module into the reservoir. The return pipe is formed as a straight pipe slightly inclined to the reservoir to guide the heated metal back by action of gravity in a substantially laminar flow.

Abstract: Disclosed is a method for fabricating a wavelength conversion device that is capable of suppressing unintended and random polarization reversal due to heating thereby achieving higher wavelength conversion efficiency. The method includes: forming an insulating layer on one place of a crystal substrate naturally and uniformly polarized in a thickness direction; forming an insulating layer pattern with line-and-space by photolithography; then supplying conductive fluid to both planes of the crystal substrate to apply voltage to the crystal substrate, thereby a wavelength conversion device that is periodically polarization-reversed is fabricated. When temperature of the crystal substrate decreases after heating, an ionizer supplies ions to a surface of the crystal substrate, negative ions collect on +z plane, and positive ion collect on ?z plane, thereby unintended and random polarization reversal is suppressed.

Abstract: A light measuring arrangement maintains the initial filtering function of an optical filter having a dye dispersed therein. The light measuring arrangement includes a measuring unit configured to measure an intensity of light emitted from a measurement target at a predetermined wavelength. The light measuring arrangement also includes the optical filter unit having the dye. The light measuring arrangement also includes a dye diffusion restricting unit configured to restrict diffusion of the dye from the optical filter unit. The optical filter unit constitutes part of an optical path for the light traveling from the measurement target to the light measuring unit.

Abstract: The wavelength of fundamental wave light emitted from a semiconductor laser is converted by a wavelength conversion element, and the wavelength-converted light is emitted. A power supply circuit feeds electric power to the semiconductor laser. A control part controls an amount of electric power to be fed to a heater such that the wavelength conversion element becomes a temperature that optimizes the wavelength conversion efficiency. Temperatures detected by an element temperature detector and a light source part temperature detector are introduced to the control part, and the control part takes a wavelength conversion element temperature, at which a temperature detected by the light source part temperature detector is minimum, as a set temperature that makes the wavelength conversion efficiency optimal, and feedback-controls the wavelength conversion element temperature such that the wavelength conversion element temperature is at the set temperature by controlling the heating quantity of the heater.

Abstract: A coherent light source apparatus includes a coherent light source, a first optical system, a light deflection unit, a second optical system and a light mixing unit disposed in that order. The coherent light source forms a first light emission region, and light projected therefrom forms a second light emission region near the light deflection unit, which deflects light flux from the second light emission region. The second optical system forms a third light emission region which is conjugate to the second light emission region near an input end of the light mixing unit, which mixes angle and a position components of incident light. The light deflection unit is configured to continuously changing a direction in which the light flux is deflected, thereby reducing speckling in light emitted from the light mixing unit.

Abstract: In a lighting apparatus containing a high pressure discharge lamp, an alternating current supplied to the discharge lamp at the time of steady lighting of the frequency (basic frequency) selected from a range between 60 and 1000 Hz and a low frequency having a frequency selected from a range between 5 and 200 Hz lower than the basic frequency is generated alternately. The frequency of the low frequency wave is changed in response to the change of the lighting voltage of the discharge lamp. The supply period of the basic frequency is increased and decreased little by little by every predetermined time.

Abstract: A coherent light source apparatus comprises a first optical system, which has a first light emission region formed by a coherent light source, and which projects light from the first light emission region to form a second light emission region, a light deflection unit which deflects light flux in connection with formation of the second light emission region; a second optical system, which forms a third light emission region in response to the light flux which has been deflected by the light deflection unit, a light mixing unit for mixing a component of an incident light angle and that of a position thereof, and a light deflection unit drive circuit for receiving a periodic optical deflection synchronization signal, thereby driving the light deflection unit, wherein the light deflection unit operates to continuously change a direction in which the light flux is deflected while synchronizing with the optical deflection synchronization signal.

Abstract: A first excimer lamp includes: a quartz glass-made light-emitting tube containing an excimer emission gas sealed therein; and a pair of electrodes for generating dielectric barrier discharge. One of the pair of electrodes is disposed in the inner space of the light-emitting tube so as to extend in the direction of a tube axis of the light-emitting tube, and the other one of the pair of electrodes is embedded in the tube wall of the light-emitting tube so as to extend in the direction of the tube axis of the light-emitting tube. The one electrode is electrically connected to a conductive foil hermetically embedded in an end portion of the light-emitting tube.

Abstract: A power supply for providing HV power to a lithography illumination source comprising a HV power source arranged to provide the HV power, a HV power transmission line arranged to transmit the HV energy from the HV power source and one or more RF terminations provided on one or more of an input end of the transmission line or an output end of the transmission line. The one or more RF terminations terminate the transmission line to reduce reflection of RF energy at the end of the transmission line.

Abstract: Vacuum ultraviolet light with a wavelength of 200 nm or less is applied on the joining surfaces of first and second workpieces made from a crystal substrate and a glass substrate, or a glass substrate and a glass substrate from a light irradiation unit. The workpieces are conveyed to a workpiece cleaning and laminating mechanism by a conveyance mechanism, the joining surfaces are subjected to mega-sonic cleaning as needed, and the workpieces are aligned with the joining surfaces thereof facing each other, and laminated such that the joining surfaces are in contact with each other. After being laminated, the laminated workpieces are conveyed to a workpiece heating mechanism and heated to increase the workpiece temperature to a predetermined temperature, and this temperature is maintained until joining is completed. The laminated workpieces are brought into a thermally expanded state upon heating, and are joined in this state.

Abstract: A flash lamp comprises an arc tube in which a pair of electrodes are provided there inside, a reflective film formed on an outer surface of the arc tube, a trigger wire arranged along the arc tube outside the reflective film, wherein ceramic material is used for the reflective film, and at an end of at least one of end portions of the arc tube, an end edge of the reflective film in a longitudinal direction is located in a front side of the electrode.

Abstract: A light-emitting device is provided that can extract light in all directions and that has wide directivity. This light-emitting device includes: an elongated bar-shaped package extending sideways, the package being formed such that a plurality of leads are formed integrally with a first resin with part of the leads exposed; a light-emitting element that is fixed onto at least one of the leads and that is electrically connected to at least one of the leads; and a second resin sealing the light-emitting element. In the light-emitting device, the first resin and the second resin are formed of optically transparent resin, and the leads have outer lead portions used for external connection and protruding sideways from both left and right ends of the package.

Abstract: A light irradiation device for dental implants, which is capable of reliably performing a required ultraviolet ray irradiation treatment to screw type dental implants, is provided. The light irradiation device for dental implants irradiates screw type dental implants with ultraviolet rays wherein each of the screw type implants has a screw part comprising a spiral protrusion. The light irradiation device comprises a casing, a stage that is provided within the casing, in which the plurality of dental implants are disposed and held so as to be aligned in one direction, and an ultraviolet ray irradiation lamp that is disposed within the casing, wherein the entire surface of the protrusion that forms the screw part of each of the plurality of dental implants held on the stage is irradiated with the ultraviolet rays emitted from the ultraviolet ray irradiation lamp.

Abstract: A light source device is disclosed that can be regarded as a point light source and that emits vacuum ultraviolet light at a sufficiently high optical intensity. The device has a lamp housing to house a flash lamp and a parabolic mirror. Light emitted from the flash lamp is converted to parallel light by the parabolic mirror, and the parallel light exits the lamp housing from a quartz window. The flash lamp has a pair of electrodes, and the distance between the electrodes is 12.5 mm or less. The filler gas pressure is between 2 atm and 8 atm. A current is fed to the flash lamp from an electricity feeding unit. This current requires 8 ?s or less from the start of discharge until the current value reaches the peak value. The peak current value is 1500 A or more. The flash lamp emits light including vacuum ultraviolet light.

Abstract: A linear light source includes an LED, an LED drive circuit substrate disposed on a frame, a flexible substrate on which an electric supply pattern is formed and to which the LED is attached at one end and the LED drive circuit is attached at the other end, a linear light guide and a heat sink. The one end of the flexible substrate is attached to the heat sink. A face of the heat sink covered by the LED and a face of the one end of the flexible substrate are perpendicular to the light guide and to a substrate face of the LED drive circuit substrate, while a face of the other end of the flexible substrate is parallel to the light guide and a substrate face of the LED drive circuit substrate. A bent portion is formed between the two ends of the flexible substrate.

Abstract: Provided is a dye-sensitized solar cell module that includes: a plurality of cylindrical dye-sensitized solar cells each including a photoelectrode, a counter electrode, an electrolyte layer, and a cylindrical transparent tube, in which the photoelectrode has a dye, the electrolyte layer is provided between the photoelectrode and the counter electrode, and the transparent tube accommodates therein the photoelectrode, the counter electrode, and the electrolyte layer; and one or more frames configured to retain the cylindrical dye-sensitized solar cells at positions that are side-by-side and separated away from one another.