Patents Assigned to Vanguard International Semiconductor Corporation
  • Publication number: 20200335616
    Abstract: A semiconductor device is provided. The semiconductor device includes a channel layer disposed on a substrate, a barrier layer disposed on the channel layer, and a nitride layer disposed on the barrier layer. The semiconductor device also includes a compound semiconductor layer that includes an upper portion and a lower portion, wherein the lower portion penetrates through the nitride layer and a portion of the barrier layer. The semiconductor device also includes a spacer layer conformally disposed on a portion of the barrier layer and extending onto the nitride layer. The semiconductor device further includes a gate electrode disposed on the compound semiconductor layer, and a pair of source/drain electrodes disposed on opposite sides of the gate electrode. The pair of source/drain electrodes extends through the spacer layer, the nitride layer, and at least a portion of the barrier layer.
    Type: Application
    Filed: April 17, 2019
    Publication date: October 22, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Chih-Yen Chen, Chang-Xiang Hung
  • Publication number: 20200328288
    Abstract: A method for forming a high electron mobility transistor (HEMT) includes forming a buffer layer on a transparent substrate. The method further includes forming a barrier layer on the buffer layer. A channel region is formed in the buffer layer adjacent to the interface between the buffer layer and the barrier layer. The method further includes forming a dielectric layer on the barrier layer. The method further includes forming source/drain electrodes through the dielectric layer and the barrier layer and disposed on the buffer layer. The method further includes forming a shielding layer conformally covering the dielectric layer and the source/drain electrodes. The method further includes performing a thermal process on the source/drain electrodes.
    Type: Application
    Filed: June 25, 2020
    Publication date: October 15, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Cheng-Wei CHOU, Hsin-Chih LIN
  • Patent number: 10804385
    Abstract: A semiconductor device includes a substrate, a channel layer, a barrier layer, a compound semiconductor layer, a source/drain pair, a fluorinated region, and a gate. The channel layer is disposed over the substrate. The barrier layer is disposed over the channel layer. The compound semiconductor layer is disposed over the barrier layer. The source/drain pair is disposed over the substrate, wherein the source and the drain are located on opposite sides of the compound semiconductor layer. The fluorinated region is disposed in the compound semiconductor layer. The gate is disposed on the compound semiconductor layer.
    Type: Grant
    Filed: December 28, 2018
    Date of Patent: October 13, 2020
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventor: Chih-Yen Chen
  • Publication number: 20200321284
    Abstract: An alignment mark pattern is provided. The alignment mark pattern includes a first region that includes a first line and a first space having different widths therebetween, a second region that includes a second line and a second space having different widths therebetween, a third region that includes a third line and a third space having different widths therebetween, and a fourth region that includes a fourth line and a fourth space having different widths therebetween. The first and second lines extend in a first direction. The third and fourth lines extend in a second direction perpendicular to the first direction. The first region is diagonal to the second region. The third region is diagonal to the fourth region. The third region is adjacent to the first and second regions. The fourth region is adjacent to the first and second regions.
    Type: Application
    Filed: April 2, 2019
    Publication date: October 8, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Jun-Che WU, Jing-Hua CHIANG, Wen-Keir LIANG, Ming-Yu CHEN
  • Publication number: 20200321328
    Abstract: An electrostatic discharge protection device includes a first well region, a second well region, a first doped region, and a first heavily doped region. The first well region and the second well region are disposed in a semiconductor substrate. The first doped region is disposed in the first well region and the second well region. The first heavily doped region is disposed in the first doped region in the first well region. The first well region and the first doped region have a first conductivity type, and the second well region and the first heavily doped region have a second conductivity type that is the opposite of the first conductivity type.
    Type: Application
    Filed: April 2, 2019
    Publication date: October 8, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Yeh-Ning JOU, Hsien-Feng LIAO, Jia-Rong YEH
  • Patent number: 10790143
    Abstract: A semiconductor structure, a high electron mobility transistor (HEMT), and a method for fabricating a semiconductor structure are provided. The semiconductor structure includes a substrate, a flowable dielectric material pad layer, a reflow protection layer, and a GaN-based semiconductor layer. The substrate has a pit exposed from a top surface of the substrate. The flowable dielectric material pad layer is formed in the pit, and a top surface of the flowable dielectric material pad layer is below the top surface of the substrate. The reflow protection layer is formed on the substrate and the top surface of the flowable dielectric material pad layer. The GaN-based semiconductor layer is disposed over the substrate.
    Type: Grant
    Filed: July 3, 2019
    Date of Patent: September 29, 2020
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Yung-Fong Lin, Cheng-Tao Chou
  • Patent number: 10790365
    Abstract: An LDMOS includes a body region disposed in the substrate and having a first conductivity type; a drift region disposed in the substrate and having a second conductivity type; a source region disposed in the body region and having the second conductivity type; a drain region disposed in the drift region and having the second conductivity type; an isolation region disposed in the drift region between the source region and the drain region; a gate disposed on the body region and the drift region; a source field plate electrically connected to the source region; a drain field plate electrically connected to the drain region; and a first gate plate electrically connected to the gate. The first gate plate is correspondingly disposed above the gate. The shapes of the first gate plate and the gate are substantially the same when viewed from a top view.
    Type: Grant
    Filed: February 23, 2018
    Date of Patent: September 29, 2020
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Wen-Hsin Lin, Yu-Hao Ho, Shin-Cheng Lin, Cheng-Tsung Wu
  • Publication number: 20200303441
    Abstract: A semiconductor device is provided. The semiconductor device includes a substrate and a light-collimating layer. The substrate has a plurality of pixels. The light-collimating layer is disposed on the substrate, and the light-collimating layer includes a transparent material layer, a first light-shielding layer, a second light-shielding layer and a plurality of transparent pillars. The transparent material layer covers the pixels. The first light-shielding layer is disposed on the substrate and the first light-shielding layer has a plurality of holes corresponding to the pixels. The second light-shielding layer is disposed on the first light-shielding layer. The transparent pillars are disposed in the second light-shielding layer.
    Type: Application
    Filed: March 22, 2019
    Publication date: September 24, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Chung-Ren LAO, Chih-Cherng LIAO, Shih-Hao LIU, Wu-Hsi LU, Ming-Cheng LO, Wei-Lun CHUNG, Chih-Wei LIN
  • Patent number: 10784252
    Abstract: An ESD protection circuit, which protects a subject NMOS transistor coupled between an I/O pad and a ground, includes a first discharge device arranged between the I/O pad and the ground, having a trigger-on voltage that is lower than a breakdown voltage of the subject NMOS transistor; and a gate voltage control device, including a discharge NMOS transistor coupled to the ground and a gate of the subject NMOS transistor; a first PMOS transistor connected to the gate of the subject NMOS transistor and a connection node; and a first NMOS transistor connected to the connection node and the ground. The connection node is connected to the gate of the discharge NMOS transistor, and the gate of the first PMOS transistor and the gate of the first NMOS transistor are connected to each other.
    Type: Grant
    Filed: September 20, 2018
    Date of Patent: September 22, 2020
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Shao-Chang Huang, Li-Fan Chen, Chih-Hsuan Lin, Yu-Kai Wang, Hung-Wei Chen, Ching-Wen Wang, Ting-You Lin, Chun-Chih Chen
  • Patent number: 10770602
    Abstract: An optical sensor includes pixels disposed in a substrate and a light collimating layer disposed on the substrate. The light collimating layer includes a first light-shielding layer, first transparent pillars, a second light-shielding layer, and second transparent pillars. The first light-shielding layer is disposed on the substrate. The first transparent pillars through the first light-shielding layer are correspondingly disposed on the pixels. The second light-shielding layer is disposed on the first light-shielding layer and the first transparent pillars. The second transparent pillars through the second light-shielding layer are correspondingly disposed on the first transparent pillars. The top surface area of each of the first transparent pillars is not equal to the bottom surface area of each of the second transparent pillars.
    Type: Grant
    Filed: February 20, 2019
    Date of Patent: September 8, 2020
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Hsin-Hui Lee, Han-Liang Tseng, Jiunn-Liang Yu, Kwang-Ming Lin, Yin Chen, Si-Twan Chen, Hsueh-Jung Lin, Wen-Chih Lu, Ting-Jung Lu
  • Patent number: 10770555
    Abstract: The present disclosure relates to a semiconductor device. The semiconductor device includes a gate structure disposed on a semiconductor substrate, a sidewall spacer disposed on sidewalls of the gate structure, a lightly-doped source/drain region formed in the semiconductor substrate on opposite sides of the gate structure, a source/drain region formed in the semiconductor substrate on opposite sides of the sidewall spacer, a halo implant region formed in the semiconductor substrate below the gate structure and adjacent to the lightly-doped source/drain region, and a counter-doping region formed in the semiconductor substrate below the gate structure and between the lightly-doped source/drain region and the halo implant region. The dopant concentration of the counter-doping region is lower than the dopant concentration of the halo implant region.
    Type: Grant
    Filed: July 25, 2017
    Date of Patent: September 8, 2020
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Chung-Hsuan Wang, Kan-Sen Chen, Sing-Lin Wu, Yung-Lung Chou, Yun-Chou Wei, Chia-Hao Lee, Chih-Cherng Liao
  • Patent number: 10770396
    Abstract: A semiconductor structure includes a substrate, an epitaxial layer disposed on the substrate, a conductive feature disposed in the epitaxial layer having a protruding portion that is higher than the epitaxial layer, and a diffusion barrier layer disposed on sidewalls of the conductive feature.
    Type: Grant
    Filed: December 28, 2018
    Date of Patent: September 8, 2020
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Fang-Ming Lee, Sheng-Wei Fu, Chung-Yeh Lee
  • Patent number: 10763288
    Abstract: A semiconductor device is provided. The semiconductor device includes a substrate. The substrate includes a plurality of pixels. The semiconductor device also includes a light collimator layer disposed on the substrate. The light collimator layer includes a transparent connection feature disposed on the substrate, and a plurality of transparent pillars disposed on the transparent connection feature. The plurality of transparent pillars cover the plurality of pixels, and the transparent connection feature connects to the plurality of transparent pillars. The plurality of transparent pillars and the transparent connection feature are made of a first material which includes a transparent material. The light collimator layer also includes a plurality of first light-shielding features disposed on the transparent connection feature. The top surface of one of the transparent pillars is level with the top surface of one of the first light-shielding features.
    Type: Grant
    Filed: February 15, 2019
    Date of Patent: September 1, 2020
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Hsin-Hui Lee, Han-Liang Tseng, Jiunn-Liang Yu, Kwang-Ming Lin, Yin Chen, Si-Twan Chen, Hsueh-Jung Lin, Wen-Chih Lu, Ting-Jung Lu
  • Publication number: 20200273976
    Abstract: A semiconductor device includes a first composite III-V group compound semiconductor layer disposed on a composite substrate, and a second III-V group compound semiconductor layer disposed on the first composite III-V group compound semiconductor layer. The semiconductor device also includes a gate structure disposed on the second III-V group compound semiconductor layer, and a source electrode and a drain electrode disposed on the second III-V group compound semiconductor layer and at opposite sides of the gate structure. The semiconductor device further includes a field plate disposed between the gate structure and the drain electrode, and a conductive structure penetrating through the second III-V group compound semiconductor layer and the first composite III-V group compound semiconductor layer, wherein the field plate is electrically connected to the composite substrate through the conductive structure.
    Type: Application
    Filed: February 21, 2019
    Publication date: August 27, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Cheng-Wei CHOU, Hsin-Chih LIN, Yu-Chieh CHOU
  • Publication number: 20200266226
    Abstract: A semiconductor device is provided. The semiconductor device includes a substrate. The substrate includes a plurality of pixels. The semiconductor device also includes a light collimator layer disposed on the substrate. The light collimator layer includes a transparent connection feature disposed on the substrate, and a plurality of transparent pillars disposed on the transparent connection feature. The plurality of transparent pillars cover the plurality of pixels, and the transparent connection feature connects to the plurality of transparent pillars. The plurality of transparent pillars and the transparent connection feature are made of a first material which includes a transparent material. The light collimator layer also includes a plurality of first light-shielding features disposed on the transparent connection feature. The top surface of one of the transparent pillars is level with the top surface of one of the first light-shielding features.
    Type: Application
    Filed: February 15, 2019
    Publication date: August 20, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Hsin-Hui LEE, Han-Liang TSENG, Jiunn-Liang YU, Kwang-Ming LIN, Yin CHEN, Si-Twan CHEN, Hsueh-Jung LIN, Wen-Chih LU, Ting-Jung LU
  • Publication number: 20200266305
    Abstract: An optical sensor includes pixels disposed in a substrate and a light collimating layer disposed on the substrate. The light collimating layer includes a first light-shielding layer, first transparent pillars, a second light-shielding layer, and second transparent pillars. The first light-shielding layer is disposed on the substrate. The first transparent pillars through the first light-shielding layer are correspondingly disposed on the pixels. The second light-shielding layer is disposed on the first light-shielding layer and the first transparent pillars. The second transparent pillars through the second light-shielding layer are correspondingly disposed on the first transparent pillars. The top surface area of each of the first transparent pillars is not equal to the bottom surface area of each of the second transparent pillars.
    Type: Application
    Filed: February 20, 2019
    Publication date: August 20, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Hsin-Hui LEE, Han-Liang TSENG, Jiunn-Liang YU, Kwang-Ming LIN, Yin CHEN, Si-Twan CHEN, Hsueh-Jung LIN, Wen-Chih LU, Ting-Jung LU
  • Patent number: 10741666
    Abstract: A method for forming a high electron mobility transistor (HEMT) includes forming a buffer layer on a transparent substrate. The method further includes forming a barrier layer on the buffer layer. A channel region is formed in the buffer layer adjacent to the interface between the buffer layer and the barrier layer. The method further includes forming a dielectric layer on the barrier layer. The method further includes forming source/drain electrodes through the dielectric layer and the barrier layer and disposed on the buffer layer. The method further includes forming a shielding layer conformally covering the dielectric layer and the source/drain electrodes. The method further includes performing a thermal process on the source/drain electrodes.
    Type: Grant
    Filed: November 19, 2018
    Date of Patent: August 11, 2020
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Cheng-Wei Chou, Hsin-Chih Lin
  • Publication number: 20200251506
    Abstract: An optical sensor includes pixels disposed in a substrate. A light collimating layer is disposed on the substrate and includes a transparent layer, a light-shielding layer, and transparent pillars. The transparent layer blanketly disposed on the substrate covers the pixels and the region between the pixels. The light-shielding layer is disposed on the transparent layer and between the transparent pillars. The transparent pillars penetrating through the light-shielding layer are correspondingly disposed on the pixels.
    Type: Application
    Filed: February 1, 2019
    Publication date: August 6, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Hsin-Hui LEE, Han-Liang TSENG, Jiunn-Liang YU, Kwang-Ming LIN, Yin CHEN, Si-Twan CHEN, Hsueh-Jung LIN, Wen-Chih LU, Ting-Jung LU
  • Publication number: 20200249490
    Abstract: An optical sensor includes a plurality of pixels disposed in a substrate and a light collimating layer. The light collimating layer is disposed on the substrate. The light collimating layer includes a light-shielding layer, a plurality of transparent pillars, and a plurality of first dummy transparent pillars. The light-shielding layer is disposed on the substrate. The plurality of transparent pillars pass through the light-shielding layer and are disposed correspondingly on the plurality of pixels. The plurality of first dummy transparent pillars that pass through the light-shielding layer are disposed on a first peripheral region of the light collimating layer, wherein the plurality of first dummy transparent pillars surround the plurality of transparent pillars from a top view.
    Type: Application
    Filed: January 31, 2019
    Publication date: August 6, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Hsin-Hui LEE, Han-Liang TSENG, Jiunn-Liang YU, Kwang-Ming LIN, Yin CHEN, Si-Twan CHEN, Hsueh-Jung LIN, Wen-Chih LU, Ting-Jung LU
  • Publication number: 20200235287
    Abstract: An electrical contact structure and a method for forming the electrical contact structure are provided. The method includes forming a thin film material layer on a substrate, forming a first barrier layer on the thin film material layer and forming a metal layer on the first barrier layer. The method further includes patterning the metal layer to form a metal pattern, forming a spacer on a sidewall of the metal pattern and covering a portion of the first barrier layer. The method further includes etching the first barrier layer, wherein the portion of the first barrier layer located under the spacer is not completely etched. The method further includes removing the spacer and exposing the sidewall of the metal pattern to form an electrical contact structure on the thin film material layer, wherein the first barrier layer has a protrusion part exceeding the sidewall of the metal pattern.
    Type: Application
    Filed: April 1, 2020
    Publication date: July 23, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Chien-Hui LI, Chien-Hsun WU, Yung-Hsiang CHEN