Patents Assigned to VTI Technologies Oy
  • Patent number: 8922098
    Abstract: A device (100) harvests energy from vibration and/or strain and utilizes both capacitive (102a, 102b) and piezoelectric elements (105). The principle of operation is out-of-plane capacitive harvester, where the bias voltage for the capacitive element is generated with a piezoelectric element (105). The device utilizes a thin dielectric film (104) between the capacitor plates (102a, 102b) maximizing the harvested energy and enabling the harvester operation in semi-contact mode so that short circuits are prevented. For example when utilized in a wheel or the like, the capacitor is closed and opened at every strike or every turn of a wheel being thus independent of the harvester's mechanical resonance frequency.
    Type: Grant
    Filed: October 8, 2010
    Date of Patent: December 30, 2014
    Assignees: VTI Technologies Oy, Toyota Motor Corporation
    Inventors: Anna-Maija Karkkainen, Jukka Kyynarainen, Leif Roschier, Heikki Kuisma
  • Patent number: 8794047
    Abstract: A method and apparatus for the precise measuring operation of a micromechanical rotation rate sensor, including at least one deflectively suspended seismic mass, at least one drive device for driving the seismic mass, and at least one first and one second trimming electrode element, which are jointly assigned directly or indirectly to the seismic mass, a first electrical trimming voltage (UTO1, UTLO1, UTRO1) being set between the first trimming electrode element and the seismic mass, and a second electrical trimming voltage (UTO2, UTLO2, UTRO2) being set between the second trimming electrode element and the seismic mass, the first and the second electrical trimming voltages being set at least as a function of a quadrature parameter (UT) and a resonance parameter (Uf).
    Type: Grant
    Filed: April 28, 2010
    Date of Patent: August 5, 2014
    Assignees: Continental Teves AG & Co. oHG, VTI Technologies Oy
    Inventors: Stefan Günthner, Roland Hilser, Ramnath Sivaraman, Bernhard Schmid, Petri Klemetti
  • Patent number: 8229700
    Abstract: Embodiments of the invention provide a method and a device for measuring the progress of a moving person. The method calculating at least one of the following quantities describing the progress of the moving person: speed, step rate, step count, step length, distance and way of progress, based on values of a vertical acceleration of a body of the moving person measured by an acceleration sensor over a measured time.
    Type: Grant
    Filed: April 6, 2011
    Date of Patent: July 24, 2012
    Assignee: VTI Technologies Oy
    Inventor: Ulf Meriheinä
  • Publication number: 20120118062
    Abstract: A method and apparatus for the precise measuring operation of a micromechanical rotation rate sensor, including at least one deflectively suspended seismic mass, at least one drive device for driving the seismic mass, and at least one first and one second trimming electrode element, which are jointly assigned directly or indirectly to the seismic mass, a first electrical trimming voltage (UTO1, UTLO1, UTRO1) being set between the first trimming electrode element and the seismic mass, and a second electrical trimming voltage (UTO2, UTLO2, UTRO2) being set between the second trimming electrode element and the seismic mass, the first and the second electrical trimming voltages being set at least as a function of a quadrature parameter (UT) and a resonance parameter (Uf).
    Type: Application
    Filed: April 28, 2010
    Publication date: May 17, 2012
    Applicants: VTI Technologies OY, Continental Teves AG & Co., OHG
    Inventors: Stefan Günthner, Roland Hilser, Ramnath Sivaraman, Bernhard Schmid, Petri Klemetti
  • Patent number: 8176779
    Abstract: Embodiments of the invention relate to measuring devices used in measuring angular velocity and, more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to an embodiment of the invention is adapted to measure angular velocity in relation to two or three axes, and at the least two seismic masses (34-36, 52-53, 71-75) of the sensor of angular velocity are adapted to be activated into primary motion vibration by a common mode. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small size vibrating micro-mechanical sensors of angular velocity.
    Type: Grant
    Filed: April 15, 2009
    Date of Patent: May 15, 2012
    Assignee: VTI Technologies Oy
    Inventor: Anssi Blomqvist
  • Publication number: 20120085167
    Abstract: The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.
    Type: Application
    Filed: December 16, 2011
    Publication date: April 12, 2012
    Applicant: VTI Technologies Oy
    Inventors: Petri KLEMETTI, Kaisa NERA, Antti LIPSANEN, Anssi BLOMQVIST, Altti TORKKELI
  • Patent number: 8124435
    Abstract: The invention relates to microelectromechanical components, like microelectromechanical gauges used in measuring e.g. acceleration, angular acceleration, angular velocity, or other physical quantities. The microelectromechanical component, according to the invention, comprises a microelectromechanical chip part, sealed by means of a cover part, and an electronic circuit part, suitably bonded to each other. The aim of the invention is to provide an improved method of manufacturing a microelectromechanical component, and to provide a microelectromechanical component, which is applicable for use particularly in small microelectromechanical sensor solutions.
    Type: Grant
    Filed: November 19, 2008
    Date of Patent: February 28, 2012
    Assignee: VTI Technologies Oy
    Inventor: Heikki Kuisma
  • Patent number: 8104343
    Abstract: The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.
    Type: Grant
    Filed: October 3, 2008
    Date of Patent: January 31, 2012
    Assignee: VTI Technologies Oy
    Inventors: Petri Klemetti, Kaisa Nera, Antti Lipsanen, Anssi Blomqvist, Altti Torkkeli
  • Patent number: 8102224
    Abstract: The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectromechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator in which the width of the spring elements (3), (23-24), (27-30) is greater than the width of the electrode fingers (5-9), (25-26), (31-34), said widths specifically dimensioned so that the sensitivity of the resonant frequency change with respect to dimensional manufacturing variations d(??0/?0)/d? approaches zero. The improved structure is frequency robust to manufacturing variations and enables reliable frequency referencing with good performance, particularly in small size solutions.
    Type: Grant
    Filed: January 23, 2009
    Date of Patent: January 24, 2012
    Assignee: VTI Technologies Oy
    Inventor: Ville Kaajakari
  • Patent number: 7982291
    Abstract: The invention relates to microelectromechanical components, like microelectromechanical gauges used in measuring e.g. acceleration, angular acceleration, angular velocity, or other physical quantities. The microelectromechanical component, according to the invention, comprises a microelectromechanical chip part, sealed by means of a cover part, and an electronic circuit part, suitably bonded to each other. The aim of the invention is to provide an improved method of manufacturing a microelectromechanical component, and to provide a microelectromechanical component, which is applicable for use particularly in small microelectromechanical sensor solutions.
    Type: Grant
    Filed: May 9, 2006
    Date of Patent: July 19, 2011
    Assignee: VTI Technologies Oy
    Inventor: Heikki Kuisma
  • Patent number: 7962309
    Abstract: The invention relates to measuring devices to be used in physical measuring, and more particularly, to a method and a device for measuring the progress of a moving person. In the solution according to the invention the quantities describing the progress of the moving person can be calculated based on vertical acceleration values of the body measured by means of an acceleration sensor, and on the measured time. The invention aims at providing a solution, better and simpler than prior solutions, for measuring the progress of a moving person, which solution is applicable for use in a multitude of measuring solutions for ways of locomotion of various types.
    Type: Grant
    Filed: December 19, 2007
    Date of Patent: June 14, 2011
    Assignee: VTI Technologies Oy
    Inventor: Ulf Meriheinä
  • Patent number: 7932568
    Abstract: The invention relates to microelectromechanical components, like microelectromechanical gauges used in measuring e.g. acceleration, angular acceleration, angular velocity, or other physical quantities. The microelectromechanical component, according to the invention, comprises, suitably bonded to each other, a microelectromechanical chip part sealed by a cover part, and at least one electronic circuit part. The aim of the invention is to provide an improved method of manufacturing a microelectromechanical component, and to provide a microelectromechanical component, which is applicable for use particularly in small microelectromechanical sensor solutions.
    Type: Grant
    Filed: November 22, 2006
    Date of Patent: April 26, 2011
    Assignee: VTI Technologies OY
    Inventors: Heikki Kuisma, Jiri Niemistö
  • Patent number: 7716983
    Abstract: The invention relates to measuring devices used in the measuring of acceleration and, more specifically, to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention contains a movable electrode (5) supported at an axis of rotation (7). The capacitance change in the pair of electrodes of the acceleration sensor, according to the present invention, is enhanced. The acceleration sensor structure, according to the present invention, enables improving the capacitance sensitivity of the pair of electrodes based on rotational motion and measuring acceleration with good performance in capacitive acceleration sensor designs.
    Type: Grant
    Filed: February 10, 2004
    Date of Patent: May 18, 2010
    Assignee: VTI Technologies Oy
    Inventor: Tuomo Lehtonen
  • Patent number: 7682861
    Abstract: The present invention relates to measuring devices used in measuring physical quantities, such as acceleration, angular acceleration, or angular velocity, and, more precisely, to micromechanical motion sensors. The area, in the wafer plane, of a motion sensor component according to the present invention is smaller than the area of the motion sensor component having been dice cut and turned by 90°. Correspondingly, the height of the motion sensor component according to the present invention, the component having been turned by 90°, is smaller, in the direction of the joint, than the thickness of the wafer stack formed by the joined wafers. The object of the invention is to provide an improved method of manufacturing a micromechanical motion sensor, and to provide a micromechanical motion sensor suitable, in particular, for use in small micromechanical motion sensor solutions.
    Type: Grant
    Filed: June 16, 2006
    Date of Patent: March 23, 2010
    Assignee: VTI Technologies Oy
    Inventor: Anssi Blomqvist
  • Patent number: 7555950
    Abstract: The present invention relates to measuring devices for use in physical measuring, and in particular to capacitive sensors. In the sensor according to the invention, the shape of the stationary electrode (3), (4), (12), (17-20), (27-28) is stepped. Through the invention, a method for manufacturing a capacitive sensor with improved linearity is achieved, as well as a capacitive sensor suitable for use particularly in small capacitive sensor solutions.
    Type: Grant
    Filed: September 23, 2005
    Date of Patent: July 7, 2009
    Assignee: VTI Technologies Oy
    Inventors: Jaakko Ruohio, Risto Mutikainen
  • Patent number: 7516038
    Abstract: The invention relates to measurement devices used in the measurement of acceleration, and more specifically, to micromechanical acceleration sensors. The invention seeks to offer an improved method for the measurement of acceleration directed to three or two dimensions using a micromechanical acceleration sensor as well as an improved micromechanical acceleration sensor. Using this invention, the functional reliability of a sensor can be monitored in constant use, and it is suitable for use particularly in small-sized micromechanical acceleration sensor solutions measuring in relation to several axes.
    Type: Grant
    Filed: May 23, 2006
    Date of Patent: April 7, 2009
    Assignee: VTI Technologies Oy
    Inventors: Tuomo Lehtonen, Risto Mourujärvi, Teemu Salo, Jens Thurau
  • Patent number: 7454971
    Abstract: The invention relates to measuring devices used in measuring angular velocity, and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensor of angular velocity according to the present invention seismic masses (1), (2), (36), (37) are connected to support areas by means of springs or by means of springs and stiff auxiliary structures, which give the masses (1), (2), (36), (37) a degree of freedom in relation to an axis of rotation perpendicular to the plane of the wafer formed by the masses, and in relation to at least one axis of rotation parallel to the plane of the wafer. The structure of the sensor of angular velocity according to the present invention enables reliable and efficient measuring particularly in compact oscillating micro-mechanical sensors of angular velocity.
    Type: Grant
    Filed: December 28, 2005
    Date of Patent: November 25, 2008
    Assignee: VTI Technologies Oy
    Inventor: Anssi Blomqvist
  • Patent number: 7426863
    Abstract: The present invention relates to measuring devices used in measuring acceleration and, more precisely, to capacitive acceleration sensors. The object of the invention is to provide an improved method of manufacturing a capacitive acceleration sensor, and to provide a capacitive acceleration sensor, which is applicable for use in small capacitive acceleration sensor solutions, and which, in particular, is applicable for use in small and extremely thin capacitive acceleration sensor solutions measuring acceleration in relation to several axes.
    Type: Grant
    Filed: June 16, 2006
    Date of Patent: September 23, 2008
    Assignee: VTI Technologies Oy
    Inventor: Heikki Kuisma
  • Patent number: 7398683
    Abstract: The invention relates to measuring devices used in the measurement of acceleration and, more specifically, to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention contains a movable electrode (5) of the acceleration sensor supported at an axis of rotation (7). Several pairs of electrodes are utilized in the acceleration sensor according to the present invention. Advantages of symmetry are achieved with the acceleration sensor structure according to the present invention, and it enables reliable and efficient measuring of acceleration, in particular in small capacitive acceleration sensor designs.
    Type: Grant
    Filed: February 10, 2004
    Date of Patent: July 15, 2008
    Assignee: VTI Technologies Oy
    Inventor: Tuomo Lehtonen
  • Patent number: 7340955
    Abstract: The present invention relates to measuring devices used in measuring acceleration, and, more specifically, to capacitive acceleration sensors. The improved sensor arrangement of the invention enables reliable and effective measuring of acceleration, in small capacitive acceleration sensor designs, in particular. The acceleration sensor arrangement measuring circuitry of the present invention can also be applied for multi-terminal sensors, such as, for example, acceleration sensors with three axes, by using time division signal multiplexing.
    Type: Grant
    Filed: June 23, 2004
    Date of Patent: March 11, 2008
    Assignee: VTI Technologies Oy
    Inventor: Hannu Manninen