Abstract: A pressure detection gage for a semiconductor pressure sensor includes a gage portion, a pair of lead out portions, and an isolation layer. The gage portion is formed on the upper surface of a semiconductor substrate of the first conductivity type, has a predetermined sheet resistance, and serves as a piezoelectric region. The pair of lead out portions are formed as heavily doped semiconductor regions of the second conductivity type on the surface of the semiconductor substrate and are electrically connected to two ends of the gage portion. The isolation layer is formed from a lightly doped semiconductor region of the second conductivity type formed in the semiconductor substrate to surround the lead out portions.

Abstract: A unique data processing method and a fuzzy smoothing filter are disclosed which employ a three-dimensional elliptic membership function based on the fuzzy logic to remove noises from data including a sequence of measured points for evaluating the linearity of the measured points. The evaluation is carried out by superimposing the center of an ellipse represented by an elliptic membership function on a substantial central portion of inputted data, evaluating a factor representing the linearity of the inputted data by summing the degrees of membership derived at respective inputted data, calculating the ratio of the factor to a factor representing an ideal linearity of the inputted data, rotating the ellipse by a predetermined angular distance to derive the ratio at that position, repeating the rotating step until the peak is found, and determining the ratio when the peak is found as the linearity of the inputted data.

Abstract: In an electromagnetic flowmeter for obtaining a signal corresponding to flow rate of conductive fluid in a magnetic field, a noise detector detects a noise superimposed on the fluid, and a timing signal generator produces timing of generating an exciting current to produce the magnetic field and timing of sampling electrical potential generated in electrodes in the fluid, based on the noise detected by the noise detector.

Abstract: The area of a cross-section perpendicular to a flow direction in a flow path for guiding a sample gas to a detector is set to be larger than that of a cross-section perpendicular to the flow direction in a hollow portion of a base under a membrane of the detector so as to set the volume of the flow path near the hollow portion to be larger than that of the hollow portion. One or both of a thermal conductivity of the gas and its change are measured with high sensitivity and high precision.

Abstract: A capacitive pressure sensor includes first and second substrates, a groove, and first and second electrodes. The first substrate consists of an electrical insulating material. The second substrate consists of the same material as that for the first substrate and has a peripheral portion directly bonded to the first substrate. The groove is formed in a central portion of the surface of one of the first and second substrates. The first and second substrates oppose each other through the groove. The first electrode is coupled to a surface, of the first substrate, which opposes the second substrate so as to be movable together with the first substrate. The second electrode is arranged on a surface, of the second substrate, which opposes the first substrate so as to be parallel to the first electrode. The first and second substrate may consist of quartz glass or sapphire.

Abstract: The present invention provides a method and apparatus for calculating thermal sensitivity and predicted mean thermal sensitivity felt by a person in an environment. According to the apparatus of the present invention, an air temperature Ta, a clothing thermal resistance Icl, and a sensor temperature Tcr of a sensor within the environment are provided as input to an input section of the apparatus. Upon receiving these values, a set temperature calculating section of the apparatus calculates a set temperature .theta..sub.(th). A thermal energy control means supplies thermal energy information H.theta..sub.(th) to a heater so as to heat the sensor in order to maintain the sensor temperature Tcr at the calculated set temperature .theta..sub.(th). An equivalent temperature calculating section then calculates an equivalent temperature Teq.sup.* so that a predicted mean thermal sensitivity PMV.sup.* can then calculated on the basis of the obtained equivalent temperature Teq.sup.*.

Abstract: A carbon dioxide gas detection element includes a solid electrolyte of a sodium ion conductor made of a ceramic/glass composite material.

Abstract: In a method of correcting temperature characteristics of a flow velocity sensor, the flow velocity sensor having a heater and a pair of temperature-measuring sensors arranged on both sides thereof is set such that the temperature-measuring sensors are located at upper and lower vertical positions along the flow of a target gas to be measured. A difference in self-heat amount is set between one of the temperature-measuring sensors, located on an upstream side of the flow of the gas, and the other temperature-measuring sensor located on a downstream side of the flow of the gas.

Abstract: An electromagnetic flowmeter for obtaining a detection signal by sampling voltages generated from electrodes in contact with a conductive fluid flowing in a magnetic field at a predetermined timing includes an external noise detecting section, a pseudo-noise signal generating section, and a timing signal generating section. The external noise detecting section detects external noise, superposed on the fluid, from the electrodes. The pseudo-noise generating section supplies a pseudo-noise signal for a predetermined period of time if the external noise detecting section determines that no external noise signal is detected.

Abstract: A measuring apparatus of the present invention measures the constituent concentration of a specimen after loading into the apparatus a test piece having a test material which develops coloring as a result of a reaction with the constituents of a specimen. When the apparatus detects that the test piece having the test material has been loaded, it automatically begins to measure the constituent concentration of the specimen. That is, after the loading of the test piece is detected, a predetermined time period is measured. During this time measurement, the time period is displayed at a predetermined time interval. After the time measurement of this predetermined time period is terminated, the test material is irradiated with a light, and the intensity of the light from the test material is detected. The constituent concentration of the specimen applied to the test material can be determined on the basis of the reflected light intensity thus detected.

Abstract: A photoelectric conversion apparatus includes a pair of opposite electrodes, and an amorphous silicon film. The amorphous silicon film is sandwiched between the pair of opposite electrodes and serves to perform photoelectric conversion of light including light from a target object. At least one of the pair of opposite electrodes is divided into a set of pattern electrodes respectively connected to the amorphous silicon film in electrically positive and negative directions so as to form a spatial filter electrode. The respective pattern electrodes respectively connected in the positive and negative directions are irregularly arranged on the amorphous silicon film.

Abstract: A moisture sensitive device includes a polymer capacitive moisture sensitive element and a heater. The polymer capacitive moisture sensitive element is formed by sequentially stacking a lower electrode, a moisture sensitive film made of an organic polymer resin material, and an upper electrode on an insulating substrate. The heater serves to heat the moisture sensitive film to restore the original characteristics thereof.

Abstract: A thermal conductivity detector includes a thin diaphragm, a heat-generating portion, and a pair of boundary holes. The thin diaphragm is obtained by forming a space in part of a base. The heat-generating portion is formed in the diaphragm. The boundary holes are formed to surround the heat-generating portion.

Abstract: A facility management apparatus includes a display unit for designating a facility system and selectively displaying a corresponding individual facility system screen. The individual facility system screen includes a point display section and an associated screen pull-down section. The point display section is used to designate each control monitor point in the facility system and to display detailed information of the designated point on a screen upon a pull-down operation. The associated screen pull-down section is used to designate an associated menu in the facility system and to display detailed information of the designated menu on the screen upon a pull-down operation.

Abstract: A diaphragm-type sensor is disclosed which comprises a substrate including a cavity, a diaphragm formed on the cavity and supported by the substrate, a heater element arranged on the diaphragm, two sensor elements arranged on both sides of the heater means and slits between the heater means and the respective sensor means. The slits are effective in completely preventing the deformation of the diaphragm due to a heat propagated from the heater element, from influencing the sensor elements, whereby the diaphragm-type sensor exhibits stable output characteristics.

Abstract: In a capacitive pressure sensor and a method of manufacturing the same, first and second grooves are formed in one and the other surfaces of a substrate, respectively. A first sacrificial layer is embedded in the first groove. First insulating films are formed on the substrate in which the first sacrificial layer is formed. The first insulating films have a first film electrode stacked therebetween. A second sacrificial layer having a predetermined shape is stacked on the first insulating film. Second insulating films are formed on the first insulating film on which the second sacrificial layer is formed. The second insulating films have a second film electrode stacked therebetween. A pressure introducing hole is formed in the second groove formed in the other surface of the substrate to reach the first sacrificial layer. First and second hollow portions are formed by removing the first and second sacrificial layers.

Abstract: The present invention is an apparatus for measuring the constituent concentration of a specimen on the basis of the color change in a test material housed in a test piece, which has reacted because of the specimen. The apparatus irradiates the test material which is a test piece loaded in the apparatus's main body and detects the intensity of the light reflected by the test material. A detection signal detected in the above way is sampled in a time period before and after the measurement timing at which the test material changes in color because of the specimen. An average value of the sampled detection signals is determined. The constituent concentration of the specimen is computed by referring to a stored conversion table on the basis of the average value determined in the above way.

Abstract: A flow meter is provided which employs a thermal flow sensor and a correcting flow meter, for example, a Karman vortex flow meter such that the output from the thermal flow sensor is corrected by the Karman vortex flow meter, thereby making it possible to accurately and stably measure the flow rate of fluids in a wide range even if the composition of fluids changes.

Abstract: According to a method and apparatus for calculating thermal sensitivity, a set temperature .theta..sub.(th) is calculated on the basis of an air temperature Ta and a clothing thermal resistance Icl. Thermal energy H.theta..sub.(th) is supplied to a heater capable of adjusting a sensor temperature Tcr so as to set the sensor temperature Tcr to be equal to the set temperature .theta..sub.(th). The thermal sensitivity is calculated on the basis of the air temperature Ta, the clothing thermal resistance Icl, the set temperature .theta..sub.(th), and the thermal energy H.theta..sub.(th).

Abstract: According to a capacitive pressure sensor and a method of manufacturing the same, first and second grooves are formed in one and the other surfaces of a substrate, respectively. A sacrificial layer is embedded in the first groove. Insulating films are formed on the substrate, on which the sacrificial layer is formed, to sandwich an electrode. Etching is performed to form a pressure introducing hole through the substrate to reach the sacrificial layer. A hollow portion is formed by removing the sacrificial layer through the pressure introducing hole.