Patents Assigned to Zygo Corporation
  • Patent number: 10962348
    Abstract: A method for measuring a property of a test object with an interferometer includes: a) providing calibration information relating a focus setting for the interferometer to a position of the test object relative to a reference surface of the interferometer; b) determining the position of the test object relative to the reference surface; and c) using the interferometer to collect interferometric images of the test object for use in measuring the property of the test object.
    Type: Grant
    Filed: July 11, 2019
    Date of Patent: March 30, 2021
    Assignee: Zygo Corporation
    Inventor: Leslie L. Deck
  • Patent number: 10890428
    Abstract: A method for measuring a property of a test object with an interferometer includes: a) providing calibration information relating a focus setting for the interferometer to a position of the test object relative to a reference surface of the interferometer; b) determining the position of the test object relative to the reference surface; and c) using the interferometer to collect interferometric images of the test object for use in measuring the property of the test object.
    Type: Grant
    Filed: November 8, 2017
    Date of Patent: January 12, 2021
    Assignee: Zygo Corporation
    Inventor: Leslie L. Deck
  • Patent number: 10845251
    Abstract: Method and apparatus for determining the wavelength of a light beam are provided. An input light beam is received, and light from the input light beam is distributed to multiple channels. At a first pair of interferometer cavities that has a first free spectral range, two of the multiple channels of light are received. The intensity of light reflected from the first pair of cavities is measured, and a first estimate of the wavelength or optical frequency of the input light beam is determined based on measurements of interference signals from the first pair of cavities and an initial estimate of the wavelength or optical frequency. At a second pair of cavities that has a second free spectral range smaller than the first free spectral range, another two of the multiple channels of light are received.
    Type: Grant
    Filed: June 24, 2019
    Date of Patent: November 24, 2020
    Assignee: Zygo Corporation
    Inventor: Leslie L. Deck
  • Patent number: 10591284
    Abstract: Techniques for removing interferometry signal phase variations caused by distortion and other effects in a multi-layer stack include: providing an electronic processor sample interferometry data acquired for the stack using a low coherence imaging interferometry system; transforming, by the electronic processor, the sample interferometry data to a frequency domain; identifying a non-linear phase variation from the sample interferometry data in the frequency domain, in which the non-linear phase variation is a result of dispersion introduced into a measurement beam by the test sample; and removing the non-linear phase variation from the sample interferometry data thereby producing compensated interferometry data.
    Type: Grant
    Filed: February 27, 2019
    Date of Patent: March 17, 2020
    Assignee: Zygo Corporation
    Inventors: Leslie L. Deck, Peter J. de Groot
  • Patent number: 10451413
    Abstract: An optical method for determining an orientation of surface texture of a mechanical part includes: i) acquiring data for a first areal surface topography image using a surface topography measurement instrument, wherein the first image corresponds to a first field of view of the mechanical part for the surface topography measurement instrument; ii) rotating the mechanical part with respect to a rotation axis provided by a rotatable mount used to secure the mechanical part to provide a second field of view of the mechanical part for the surface topography measurement instrument, wherein the first and second fields of view overlap to provide image information about a common region of the mechanical part; iii) acquiring data for a second areal surface topography image using the surface topography measurement instrument, wherein the second image corresponds to the second field of view; and iv) processing the data from the images.
    Type: Grant
    Filed: January 31, 2018
    Date of Patent: October 22, 2019
    Assignee: Zygo Corporation
    Inventors: Peter J. de Groot, Leslie L. Deck
  • Patent number: 10267617
    Abstract: Method include using an apparatus to measure a first surface field, at a first surface of the apparatus, of an artifact having one or more surface features with known topography. The method includes determining a first focus metric at the first surface based on at least a portion of a first surface profile containing the one or more surface features. Methods include digitally transforming, the first surface field into a second surface field at a second surface of the apparatus, deriving, a second surface profile from the second surface field and computing a second focus metric for the second surface profile, and determining, based on two or more focus metric values, an optimum surface for evaluating the instrument transfer function. Method include determining the instrument transfer function of the apparatus based on at least a portion of the surface profile derived from the surface field of the optimum surface.
    Type: Grant
    Filed: December 19, 2016
    Date of Patent: April 23, 2019
    Assignee: Zygo Corporation
    Inventor: Leslie L. Deck
  • Patent number: 10190871
    Abstract: A method for determining characteristics of a test cavity, the method includes for each of a plurality of optical frequencies within a bandwidth of a tunable laser, measuring interference signals from the test cavity and a reference cavity having a known characteristic. The method includes determining values for the plurality of optical frequencies from the measured interference signals from the reference cavity and the known characteristic of the reference cavity, and determining the characteristic of the test cavity using the determined values of the plurality of optical frequencies.
    Type: Grant
    Filed: June 7, 2017
    Date of Patent: January 29, 2019
    Assignee: Zygo Corporation
    Inventor: Leslie L. Deck
  • Patent number: 10066974
    Abstract: An encoder interferometry system includes an encoder scale arranged to receive and diffract a measurement beam. The system further includes one or more optical elements configured and arranged to receive a first diffracted measurement beam and a second diffracted measurement beam from the encoder scale and to redirect the first diffracted measurement beam and the second diffracted measurement beam toward the encoder scale such that the first diffracted measurement beam and the second diffracted measurement beam propagate along non-parallel beam paths having an angular separation ? following a second diffraction at the encoder scale. The system further includes a first detector arranged to receive the first diffracted measurement beam and a second detector arranged to receive the second diffracted measurement beam.
    Type: Grant
    Filed: October 12, 2015
    Date of Patent: September 4, 2018
    Assignee: Zygo Corporation
    Inventor: Jan Liesener
  • Patent number: 9958254
    Abstract: Calibrating a scanning interferometry imaging system includes: configuring the scanning interferometry imaging system for operation with an interference objective using light having a narrowband wavelength spectrum; using the scanning interferometry imaging system to direct measurement light and reference light along different paths and to overlap the measurement and reference light on a detector, the measurement and reference light having the narrowband wavelength spectrum; scanning an optical path length difference between the measurement light and the reference light at the detector while acquiring intensity data using the detector, the detector acquiring the intensity data at a frame rate and the scanning being performed at a scan speed; determining information about the scan speed based on the acquired intensity data, geometric information about the scanning interferometry imaging system, and the narrowband wavelength spectrum; and calibrating the scanning interferometry imaging system based on the infor
    Type: Grant
    Filed: August 11, 2015
    Date of Patent: May 1, 2018
    Assignee: Zygo Corporation
    Inventors: Peter J. de Groot, Jake Beverage, Xavier Colonna de Lega, Martin F. Fay
  • Patent number: 9891078
    Abstract: Determining information about a degree of freedom of rigid body motion of an encoder scale includes: directing a first beam toward an encoder scale, in which the first beam diffracts from an encoder scale; combining a diffracted component of the first beam with a second beam to form an interfering output beam; monitoring changes in the output beam as a function of a wavelength of the first and second beams; and determining the information about a degree of freedom of rigid body motion of the encoder scale based on changes in the output beam as a function of the wavelength.
    Type: Grant
    Filed: July 14, 2015
    Date of Patent: February 13, 2018
    Assignee: Zygo Corporation
    Inventors: Leslie L. Deck, Jan Liesener
  • Patent number: 9823061
    Abstract: A method for measuring a position of an object, the method includes probing a sensing mark arranged in a first plane on a substrate to determine the position of the object, a portion of the substrate connecting the sensing mark to the object. An edge of the object can be sufficiently close to an edge of the sensing mark to reduce measurement errors in the position of the object caused by a deformation of the substrate.
    Type: Grant
    Filed: May 5, 2016
    Date of Patent: November 21, 2017
    Assignee: Zygo Corporation
    Inventor: Vivek G. Badami
  • Patent number: 9798130
    Abstract: Generating a composite image of a non-flat surface includes: acquiring, using a microscope, multiple images of different areas of the non-flat surface, where each image includes a region of overlap with at least one adjacent image, the microscope having sufficient resolution to image in three dimensions a microstructure on the non-flat surface having a lateral dimension of 10 microns or less and a height of 10 nm or less; determining, for each of the images, a set of rigid body parameters relating a position and orientation of the test object in the image to a common coordinate system, where the set of rigid body parameters is determined by fitting the resolved microstructure in the overlap region in the image with the corresponding microstructure in the overlap region of the adjacent image; and combining the images based on the sets of rigid body parameters to generate a composite image.
    Type: Grant
    Filed: January 8, 2015
    Date of Patent: October 24, 2017
    Assignee: Zygo Corporation
    Inventors: Thomas Dresel, Jan Liesener, Peter J. de Groot
  • Patent number: 9746348
    Abstract: An encoder head includes one or more components arranged to: i) direct a first incident beam to the diffractive encoder scale at a first incident angle with respect to the encoder scale; ii) receive a first return beam from the encoder scale at a first return angle, the first return angle being different from the first incident angle; iii) redirect the first return beam to the encoder scale as a second incident beam at a second incident angle; and iv) receive a second return beam back from the encoder scale at a second return angle, the second return angle being different from the second incident angle, in which a difference between the first incident angle and second incident angle is less than a difference between the first incident angle and the first return angle and less than a difference between the second incident angle and the second return angle.
    Type: Grant
    Filed: March 24, 2015
    Date of Patent: August 29, 2017
    Assignee: Zygo Corporation
    Inventors: Peter J. de Groot, Jan Liesener
  • Patent number: 9719777
    Abstract: Methods include: directing test light and reference light along different optical paths, where a test object is in a path of the test light; forming an image of the test object on a multi-element detector by directing test light from the test object to the detector; overlapping the reference light with the test light on the detector; detecting an intensity of the overlapped test and reference light with the detector, the intensity being detected at a frame rate; and modulating an optical path difference (OPD) between the test and reference light at the detector while detecting the light intensity. The OPD is modulated at a rate and amplitude sufficient to reduce a contrast of fringes in a spatial interference pattern formed by the light at the detector over a frame of the detector. Accordingly, fringe-free images may be acquired real-time.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: August 1, 2017
    Assignee: Zygo Corporation
    Inventors: Xavier Colonna de Lega, Jan Liesener
  • Patent number: 9658129
    Abstract: A method for determining information about a transparent optical element including a lens portion and a plane parallel portion, the lens portion having at least one curved surface and the plane parallel portion having opposing first and second surfaces, includes: directing measurement light to the transparent optical element; detecting measurement light reflected from at least one location on the first surface of the plane parallel portion; detecting measurement light reflected from the second surface of the plane parallel portion at a location corresponding to the at least one location on the first surface; determining, based on the detected light, information about the plane parallel portion; and evaluating the transparent optical element based on the information about the plane parallel portion.
    Type: Grant
    Filed: August 13, 2015
    Date of Patent: May 23, 2017
    Assignee: Zygo Corporation
    Inventors: Xavier Colonna de Lega, Martin F. Fay, Peter J. de Groot
  • Patent number: 9599534
    Abstract: A method for determining information about an object including a curved portion and a planar portion, the curved portion having a first curved surface having an apex and defining an axis of the object, includes: directing measurement light to the object; detecting measurement light reflected from the first curved surface of the curved portion; detecting measurement light reflected from at least one other surface of the object; and determining, based on the detected light, information about the apex of the first curved surface of the curved portion.
    Type: Grant
    Filed: August 13, 2015
    Date of Patent: March 21, 2017
    Assignee: Zygo Corporation
    Inventors: Martin F. Fay, Xavier Colonna de Lega, Peter J. de Groot
  • Patent number: 9541381
    Abstract: Systems and methods for generating 3D representations of shape and color texture of a test surface are described. In one aspect, surface topography interferometers are equipped with a multi-element detector and an illumination system to produce a true-color image of the measured object surface. Color information can be presented as a true-color two-dimensional image or combined with topography information to form a three-dimensional representation of the shape and color texture of the object, effectively creating for a human observer the impression of looking at the actual part.
    Type: Grant
    Filed: February 6, 2014
    Date of Patent: January 10, 2017
    Assignee: Zygo Corporation
    Inventor: Xavier Colonna de Lega
  • Patent number: 9435640
    Abstract: Methods and systems for measuring asymmetric surface topology are described. In one aspect, a method includes directing a test beam including a spherical wave front along an optical axis to reflect from a test surface; combining the test beam reflected from the test surface with a reference beam to form an interferogram on a detector, where the test and reference beams are derived from a common source; and recording the interferogram for each of multiple lateral displacements of the test surface relative to the optical axis. For each recorded interferogram, the curvature of the spherical wave front at the test surface substantially matches a local curvature of the test surface along a first axis orthogonal to the optical axis, and the multiple lateral displacements of the test surface each include a component along a second axis orthogonal to each of the first axis and the optical axis.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: September 6, 2016
    Assignee: Zygo Corporation
    Inventor: Thomas Dresel
  • Patent number: 9411222
    Abstract: A photo-mask for use in extreme ultraviolet (EUV) lithography, in which the photo-mask has low coefficient of thermal expansion and high specific stiffness.
    Type: Grant
    Filed: April 1, 2015
    Date of Patent: August 9, 2016
    Assignee: Zygo Corporation
    Inventor: Marc Tricard
  • Patent number: 9377292
    Abstract: An interferometry system includes: a light source, defining a coherence length, an interferometer configured to combine measurement and reference beams to form an output beam, where the interferometer includes a dispersion imbalance between measurement and reference paths large enough to produce a coherence envelope for the system having a width more than twice the coherence length; a phase modulation device configured to introduce a variable phase between the measurement and reference beams; a detector; imaging optics to direct the output beam to the detector and produce an image of the measurement surface; and an electronic processor electronically coupled to the phase modulation device and the detector and configured to record multiple interference signals corresponding to different locations on the measurement surface, in which the interference signals are based on the intensity of the output beam as a function of the variable phase for the different locations of the measurement surface.
    Type: Grant
    Filed: August 4, 2014
    Date of Patent: June 28, 2016
    Assignee: Zygo Corporation
    Inventor: Peter J. de Groot