Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type

  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Publication number: 20190057495
    Abstract: An image capturing device includes: an image capturing element having a first image capturing region that captures an image of a photographic subject and outputs a first signal, and a second image capturing region that captures an image of the photographic subject and outputs a second signal; a setting unit that sets an image capture condition for the first image capturing region to an image capture condition that is different from an image capture condition for the second image capturing region; a correction unit that performs correction upon the second signal, for employment in interpolation of the first signal; and a generation unit that generates an image of the photographic subject that has been captured by the first image capturing region by employing a signal generated by interpolating the first signal according to the second signal as corrected by the correction unit.
    Type: Application
    Filed: September 26, 2016
    Publication date: February 21, 2019
    Applicant: NIKON CORPORATION
    Inventors: Takashi SHIONOYA, Toshiyuki KANBARA, Naoki SEKIGUCHI
  • Publication number: 20190058838
    Abstract: An image sensor includes: a first readout circuit that reads out a first signal, being generated by an electric charge resulting from a photoelectric conversion, to a first signal line; a first holding circuit that holds a voltage based on an electric current from a power supply circuit; and a first electric current source that supplies the first signal line with an electric current generated by the voltage held in the first holding circuit, wherein: the first holding circuit holds the voltage based on the electric current from the power supply circuit when the first signal is not read out to the first signal line by the first readout circuit.
    Type: Application
    Filed: September 27, 2016
    Publication date: February 21, 2019
    Applicant: NIKON CORPORATION
    Inventors: Wataru FUNAMIZU, Masahiro JUEN, Atsushi KOMAI
  • Publication number: 20190056672
    Abstract: A liquid immersion exposure apparatus includes a liquid immersion member which forms a liquid immersion space under an emitting surface of an optical member. The liquid immersion member includes a first member disposed in a periphery of the optical member, and a second member which is movable relative to the first member and includes a liquid recovery port that recovers at least a portion of liquid in the liquid immersion space. The second member is moved in a direction perpendicular to an optical axis of the optical member so that a relative speed between the second member and an object below the liquid immersion member is smaller than a relative speed between the first member and the object. The second member has an outer surface facing radially outward relative to the optical axis of the optical member, the outer surface does not face toward any surface of the first member.
    Type: Application
    Filed: October 24, 2018
    Publication date: February 21, 2019
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20190058830
    Abstract: To reduce power consumed when the display magnification of an image is changed. A digital camera includes a display unit having a first display region in which a first image is displayed and a second display region in which a second image is displayed, an image capture unit having a first image capture region in which first image data indicating the first image is generated and a second image capture region in which second image data indicating the second image is generated, magnification change units that change the display magnifications of the first and second images displayed on the display unit, and an image capture control unit that when the magnification change units change the display magnifications, changes the charge accumulation conditions or reading conditions of the first and second image capture regions.
    Type: Application
    Filed: October 23, 2018
    Publication date: February 21, 2019
    Applicant: NIKON CORPORATION
    Inventor: Akira KINOSHITA
  • Publication number: 20190056573
    Abstract: A zoom lens, comprises: in order from an object, a first lens group (G1) having positive refractive power; a second lens group (G2) having negative refractive power; a third lens group (G3) having positive refractive power; a fourth lens group (G4) having negative refractive power; and a fifth lens group (G5) having positive refractive power, wherein, upon zooming from a wide-angle end state to a telephoto end state, a distance between each of lens groups and a lens group adjacent thereto changes to satisfy the following conditional expression: 2.90<|MV5/MV2|<11.50 where, MV5 denotes, upon zooming from a wide-angle end state to a telephoto end state, a moving amount of the fifth lens group with an image surface as a reference; and MV2 denotes, upon zooming from the wide-angle end state to the telephoto end state, a moving amount of the second lens group with the image surface as the reference.
    Type: Application
    Filed: December 9, 2016
    Publication date: February 21, 2019
    Applicant: Nikon Corporation
    Inventor: Saburo MASUGI
  • Publication number: 20190058825
    Abstract: A focus detection device includes: an image sensor that includes a plurality of focus detection pixel rows, each having a plurality of focus detection pixels and each outputting a pair of focus detection signals; a spatial accumulation unit that calculates spatially accumulated values by adding together pairs of focus detection signals output from a first predetermined number of focus detection pixel rows among the plurality of focus detection pixel rows; and a focus detection unit that detects a focusing condition at an optical system based upon the spatially accumulated values.
    Type: Application
    Filed: October 23, 2018
    Publication date: February 21, 2019
    Applicant: NIKON CORPORATION
    Inventor: Yosuke KUSAKA
  • Patent number: 10209622
    Abstract: An exposure method sequentially exposes a plurality of shot areas of a substrate. The method includes: (i) holding the substrate on a substrate holder such that a gap is formed along an edge of the substrate; (ii) exposing one of the shot areas, located near a center of the substrate, through a liquid of a liquid immersion area which covers only a portion of a surface of the substrate, while moving the substrate at a first scanning speed; and (iii) exposing an other one of the shot areas through the liquid of the liquid immersion area, while moving the substrate at a second scanning speed lower than the first scanning speed. The other one of the shot areas is located near the edge of the substrate and the gap is included in the liquid immersion area during the exposure of the other one of the shot areas.
    Type: Grant
    Filed: May 4, 2011
    Date of Patent: February 19, 2019
    Assignee: NIKON CORPORATION
    Inventor: Hiroyuki Nagasaka
  • Patent number: 10209498
    Abstract: A first lens group (G1) having positive refractive power, a front-side lens group (GX), an intermediate lens group (GM) having positive refractive power, and a rear-side lens group (GR) are arranged in order from an object side. The front-side lens group (GX) is composed of one or more lens groups and has a negative lens group At least part of the intermediate lens group (GM) is a focusing lens group (GF). The rear-side lens group (GR) is composed of one or more lens groups. Upon zooming, the first lens group (G1) is moved with respect to an image surface, a distance between the first lens group (G1) and the front-side lens group (GX) is changed, a distance between the front-side lens group (GX) and the intermediate lens group (GM) is changed, and a distance between the intermediate lens group (GM) and the rear-side lens group (GR) is changed.
    Type: Grant
    Filed: May 19, 2018
    Date of Patent: February 19, 2019
    Assignee: Nikon Corporation
    Inventors: Satoru Shibata, Tomoyuki Sashima
  • Patent number: 10209499
    Abstract: A first lens group (G1) having positive refractive power, a front-side lens group (GX), an intermediate lens group (GM) having positive refractive power, and a rear-side lens group (GR) are arranged in order from an object side. The front-side lens group (GX) is composed of one or more lens groups and has a negative lens group At least part of the intermediate lens group (GM) is a focusing lens group (GF). The rear-side lens group (GR) is composed of one or more lens groups. Upon zooming, the first lens group (G1) is moved with respect to an image surface, a distance between the first lens group (G1) and the front-side lens group (GX) is changed, a distance between the front-side lens group (GX) and the intermediate lens group (GM) is changed, and a distance between the intermediate lens group (GM) and the rear-side lens group (GR) is changed.
    Type: Grant
    Filed: May 19, 2018
    Date of Patent: February 19, 2019
    Assignee: Nikon Corporation
    Inventors: Satoru Shibata, Tomoyuki Sashima
  • Patent number: 10209623
    Abstract: A liquid immersion exposure apparatus includes a projection system, a movable stage, an alignment system and a measurement member. The projection system has a last optical element, and projects a beam onto a substrate through an immersion liquid. The movable stage has a holder by which the substrate is held. The alignment system detects an alignment mark on the substrate not through the immersion liquid. The measurement member is provided on the movable stage, and has a reference mark to be detected by the alignment system not through the immersion liquid. The measurement member has a material to form the reference mark, the material being covered with a light-transmissive material. The movable stage is movable to a position so that the measurement member is under the projection system and a gap between the projection system and the measurement member is filled with the immersion liquid.
    Type: Grant
    Filed: June 30, 2016
    Date of Patent: February 19, 2019
    Assignee: NIKON CORPORATION
    Inventors: Masahiko Yasuda, Takahiro Masada, Yuho Kanaya, Tadashi Nagayama
  • Publication number: 20190049857
    Abstract: A method of driving a spatial light modulator includes: setting, in an array of mirror elements, mirror elements in a first state for turning incident light into reflected light with the same phase as that of the incident light or with a phase different by a first phase from that of the incident light and mirror elements in a second state for turning incident light into reflected light with a phase different approximately 180° from the first phase to an arrangement with a first phase distribution; and setting, in the array of mirror elements, the first mirror elements and the second mirror elements to an arrangement with a second phase distribution which is an inversion of the first phase distribution.
    Type: Application
    Filed: July 11, 2018
    Publication date: February 14, 2019
    Applicant: NIKON CORPORATION
    Inventors: Yoji WATANABE, Soichi OWA, Tomoharu FUJIWARA
  • Publication number: 20190049856
    Abstract: A substrate stage device of an exposure apparatus is equipped with: a noncontact holder that supports, in a noncontact manner, a first area and at least a partial area of a second area, of a substrate, the second area being arranged side by side with the first area in the Y-axis direction; a substrate carrier that holds the substrate held in a noncontact manner by the noncontact holder, at a position not overlapping the noncontact holder in the X-axis direction; Y linear actuators and Y voice coil motors that relatively move the substrate carrier with respect to the noncontact holder in the Y-axis direction; X voice coil motors that move the substrate carrier in the X-axis direction; and actuators that move the noncontact holder in the X-axis direction.
    Type: Application
    Filed: September 29, 2016
    Publication date: February 14, 2019
    Applicant: NIKON CORPORATION
    Inventor: Yasuo AOKI
  • Publication number: 20190049713
    Abstract: A biological specimen observation apparatus whereby observation of a biological specimen can be performed accurately. In macro observation, a biological change region is extracted from a macro image, a micro observation point corresponding to an extracted biological change region is registered, and an object for tracking is identified. In micro observation, it is judged from the micro image whether or not biological change has continued in the biological change region at the micro observation point, and the registered micro observation point is updated on the basis of this judgment result. It is possible to carry out both macro observation for detecting a biological change region and micro observation for observing the progress of growth of a partial minute region where biological change has been exhibited, and to carry out accurate observation of a biological specimen.
    Type: Application
    Filed: October 17, 2018
    Publication date: February 14, 2019
    Applicant: NIKON CORPORATION
    Inventors: Hideo KURODA, Hirotada Watanabe, Yoichi Wada, Yasujiro Kiyota, Takayuki Uozumi, Ryuji Koshiba
  • Publication number: 20190049688
    Abstract: A lens barrel in which tilt adjustment can be made depending on the position of a lens unit in the optical axis direction. This lens barrel includes: at least three guide bars provided so as to extend along the optical axis direction; a driving unit that respectively drives the at least three guide bars in the optical axis direction; a lens frame holding unit that holds an image-capturing lens, the lens frame holding unit being attached to at least three guide bars and being driven in the optical axis direction by the at least three guide bars; and a control unit that controls said at least three linear actuators so as to adjust the respective drive amounts in the optical axis direction of the at least three guide bars and to tilt the lens frame holding unit from a direction orthogonal to the optical axis.
    Type: Application
    Filed: October 18, 2018
    Publication date: February 14, 2019
    Applicant: NIKON CORPORATION
    Inventor: Kunihiro FUKINO
  • Publication number: 20190049855
    Abstract: A liquid immersion member is used in a liquid immersion exposure apparatus which exposes a substrate by exposure light via a first liquid between an emitting surface of an optical member and the substrate, and is capable of forming a liquid immersion space on an object movable below the optical member. The liquid immersion member includes a first member that is disposed at at least a portion of surrounding of the optical member; a second member that is capable of being opposite to the object and is movable outside an optical path of the exposure light; and a protection part that protects the optical member. The protection part decreases a change in pressure which the optical member receives from the liquid in the liquid immersion space.
    Type: Application
    Filed: October 19, 2018
    Publication date: February 14, 2019
    Applicant: NIKON CORPORATION
    Inventors: Shinji SATO, Kenyo ODANAKA
  • Publication number: 20190049862
    Abstract: In an exposure operation of a substrate, a controller controls first and second drive systems based on measurement information of first and second encoder systems and correction information for compensating for a measurement error of the second encoder system that occurs due to a grating section of the second encoder system, so that scanning exposure in which a mask and the substrate are each moved relative to illumination light in a first direction is performed and the measurement error is compensated for.
    Type: Application
    Filed: October 17, 2018
    Publication date: February 14, 2019
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20190052846
    Abstract: An imaging device includes a plurality of first pixels that includes pixels of a plurality of color components and generates a first signal from incident light, a plurality of second pixels that generates a second signal from light that has transmitted at least a part of the first pixels, and a signal generation unit that generates a signal obtained by combining the first signal and the second signal.
    Type: Application
    Filed: October 18, 2018
    Publication date: February 14, 2019
    Applicant: NIKON CORPORATION
    Inventor: Yuki ARUGA
  • Publication number: 20190049863
    Abstract: A controller controls a second drive system so that, in an exposure operation, a second stage is moved from one side to an other side in a first direction with respect to a projection optical system while substantially maintaining a liquid immersion area between the second stage and a lens of the projection optical system, in order to perform exposure via the projection optical system and a liquid of the liquid immersion area, from an area located on the one side in the first direction, of a plurality of areas on the substrate.
    Type: Application
    Filed: October 18, 2018
    Publication date: February 14, 2019
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Patent number: 10203614
    Abstract: Exposure apparatus exposes a substrate by irradiating the substrate with exposure light via a projection optical system and a liquid. The exposure apparatus is provided with a liquid immersion mechanism for supplying the liquid and recovering the liquid. The liquid immersion mechanism has an inclined surface, which is opposite to a surface of the substrate and is inclined with respect to the surface of the substrate, and a liquid recovering port of the liquid immersion mechanism is formed in the inclined surface. A flat portion is provided between the substrate and the projection optical system. A liquid immersion area can be maintained to be small.
    Type: Grant
    Filed: September 15, 2017
    Date of Patent: February 12, 2019
    Assignees: NIKON CORPORATION, NIKON ENGINEERING CO., LTD.
    Inventors: Hiroyuki Nagasaka, Takeshi Okuyama
  • Patent number: 10203488
    Abstract: A zoom lens includes, in order from an object side along an optical axis, a first lens group G1 having positive refractive power, a second lens group G2 having negative refractive power, and a third lens group G3 having positive refractive power. Upon zooming from a wide-angle end state W to a telephoto end state T, a distance between the first lens group G1 and the second lens group G2 increases, and a distance between the second lens group G2 and the third lens group G3 decreases. Given conditions are satisfied. Accordingly, a zoom lens having high optical performance with suppressing variations in aberrations, an optical apparatus equipped therewith, and a method for manufacturing the zoom lens are provided.
    Type: Grant
    Filed: November 22, 2016
    Date of Patent: February 12, 2019
    Assignee: Nikon Corporation
    Inventors: Akihiko Obama, Norikazu Yokoi, Issei Tanaka
  • Patent number: 10203496
    Abstract: One embodiment relates to a spatial light modulator unit comprising: a spatial light modulator with a plurality of optical elements; a spatial light modulation element applying spatial light modulation to the incident light and making rays of intensity levels according to positions of the respective optical elements; and a control unit.
    Type: Grant
    Filed: November 8, 2017
    Date of Patent: February 12, 2019
    Assignee: NIKON CORPORATION
    Inventor: Osamu Tanitsu
  • Patent number: 10203613
    Abstract: Positional information of a movable body in a Y-axis direction is measured using an interferometer and an encoder whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the encoder is performed. Accordingly, by using measurement values of the interferometer, correction information for correcting the measurement values of the encoder whose short-term stability of the measurement values excels the interferometer is obtained. Then, based on the measurement values of the encoder and the correction information, the movable body is driven in the Y-axis direction with good precision.
    Type: Grant
    Filed: July 26, 2017
    Date of Patent: February 12, 2019
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10203608
    Abstract: An exposure apparatus includes a substrate stage having a substrate holder to hold a substrate, a gap being formed between an edge of the held substrate and a surface surrounding the held substrate, and a controller that controls an exposure operation in which shot areas of the substrate are exposed sequentially and respectively with an image through liquid of a liquid immersion area which covers a portion of an upper surface of the substrate. The controller moves the substrate stage at a first speed to expose one of the shot areas to the image through the liquid, moves the substrate stage at a second speed, that is lower than the first speed, to expose another one of the shot areas to the image through the liquid, and during the exposing of the another one of the shot areas, the liquid immersion area is formed over a portion of the gap.
    Type: Grant
    Filed: December 13, 2012
    Date of Patent: February 12, 2019
    Assignee: NIKON CORPORATION
    Inventor: Hiroyuki Nagasaka
  • Patent number: 10203610
    Abstract: A liquid immersion lithography apparatus includes a projection system having a final optical element and a nozzle member having a first opening disposed on a first side of the final optical element and from which an immersion liquid is supplied, a second opening disposed on a second side of the final optical element and from which the immersion liquid is recovered, and a liquid recovery portion disposed to surround a path of an exposure beam and from which the immersion liquid is recovered. A tank is fluidicly connected to the liquid recovery portion of the nozzle member. During exposure of a substrate to the exposure beam, an upper surface of the substrate faces the liquid recovery portion, and the immersion liquid is supplied from the first opening while performing liquid recovery from the second opening and the liquid recovery portion.
    Type: Grant
    Filed: October 18, 2017
    Date of Patent: February 12, 2019
    Assignee: NIKON CORPORATION
    Inventors: Alex Ka Tim Poon, Leonard Wai Fung Kho
  • Patent number: 10203594
    Abstract: A projector is provided with a projection unit that projects onto a projection surface a projected image that is based on image data; a detection unit that detects the direction of approach of an indication member or of the shadow of the indication member that has approached a detection region which includes the projected image; an icon memory unit that stores the image data of a plurality of icons; a decision unit that decides at least one of the display sizes of the icons, the display gaps between the icons, and the display positions of the icons, on the basis of the projection direction of the projected image and the direction of approach detected by the detection unit; and a projection control unit that projects the icons onto the display positions decided by the decision unit at the display sizes and display gaps decided by the decision unit.
    Type: Grant
    Filed: October 3, 2011
    Date of Patent: February 12, 2019
    Assignee: NIKON CORPORATION
    Inventors: Seiji Takano, Hidenori Kuribayashi
  • Patent number: 10204957
    Abstract: An imaging device having a first surface on which light is incident and a second surface on an opposite side of the first surface, includes a photoelectric conversion section including semiconductors having a same conductivity type, in which an impurity concentration on the second surface side is higher than an impurity concentration on the first surface side.
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: February 12, 2019
    Assignee: NIKON CORPORATION
    Inventor: Hironobu Murata
  • Patent number: 10204949
    Abstract: A backside illumination image sensor that includes a semiconductor substrate with a plurality of photoelectric conversion elements and a read circuit formed on a front surface side of the semiconductor substrate, and captures an image by outputting, via the read circuit, electrical signals generated as incident light having reached a back surface side of the semiconductor substrate is received at the photoelectric conversion elements includes: a light shielding film formed on a side where incident light enters the photoelectric conversion elements, with an opening formed therein in correspondence to each photoelectric conversion element; and an on-chip lens formed at a position set apart from the light shielding film by a predetermined distance in correspondence to each photoelectric conversion element. The light shielding film and an exit pupil plane of the image forming optical system achieve a conjugate relation to each other with regard to the on-chip lens.
    Type: Grant
    Filed: June 6, 2017
    Date of Patent: February 12, 2019
    Assignee: NIKON CORPORATION
    Inventor: Yosuke Kusaka
  • Patent number: 10205901
    Abstract: An image sensor is provided, the image sensor including: an imaging unit that has a first imaging region and a second imaging region, and outputs: a first pixel signal generated according to light incident on the first imaging region; and a second pixel signal generated according to light incident on the second imaging region; a first ramp generating unit that generates a first ramp signal; a second ramp generating unit that generates a second ramp signal; a first signal converting unit that converts the first pixel signal into a first digital image signal based on a result of comparison between the first pixel signal and the first ramp signal; and a second signal converting unit that converts the second pixel signal into a second digital image signal based on a result of comparison between the second pixel signal and the second ramp signal.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: February 12, 2019
    Assignee: NIKON CORPORATION
    Inventors: Hironobu Murata, Shiro Tsunai, Takashi Kuriyama
  • Publication number: 20190043913
    Abstract: An image sensor includes: a plurality of pixels having photoelectric conversion units that convert incident light to charges, and readout units; a first signal line, connected to the plurality of pixels, that outputs a first signal transferred to the readout unit based upon the charge converted by the photoelectric conversion unit; and a second signal line, connected to the plurality of pixels, that outputs a second signal after the readout unit has been reset.
    Type: Application
    Filed: February 28, 2017
    Publication date: February 7, 2019
    Applicant: NIKON CORPORATION
    Inventors: Masahiro JUEN, Atsushi KOMAI
  • Publication number: 20190044906
    Abstract: A server device includes a receiving unit, a browse page creation unit, a mail creation unit, and a mail transmission unit. The receiving unit receives an image transmitted from an electronic camera via a wireless network. The browse page creation unit creates a browse page for browsing the transmitted image from the electronic camera, the image having been received by the receiving unit. The mail creation unit creates a notification mail for introducing the browse page that has been created by the browse page creation unit to a person other than a user of the electronic camera. Furthermore, the mail transmission unit transmits the notification mail that has been created by the mail creation unit to a specified mail address.
    Type: Application
    Filed: October 10, 2018
    Publication date: February 7, 2019
    Applicant: NIKON CORPORATION
    Inventors: Hirotaka MAEDA, Mio NAGISA, Motoyuki KUBOI, Gaku ITO, Takeshi SHINOHARA
  • Publication number: 20190044358
    Abstract: An electric device including: a connecting unit connected to a connection line supplying an electric power of a predetermined rating and transmitting and receiving an information; a charging unit conducting a charging of a charging battery connected to an own device, by the electric power supplied by the connection line; an electric supplying unit supplying an electric power to a recording medium storing an information; a reading-and-writing unit performing a reading-and-writing operation of the recording medium; and an electronic source controlling unit performing a control of the electric power supplied to the charging unit, when the reading-and-writing unit performs the reading-and-writing operation of the recording medium, according to an access request to the recording medium via the connection line.
    Type: Application
    Filed: October 12, 2018
    Publication date: February 7, 2019
    Applicant: NIKON CORPORATION
    Inventor: Goro KANO
  • Publication number: 20190041244
    Abstract: Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is measured with high accuracy by a surface position measuring system, without being affected by air fluctuations. In this case, since both of the encoder system and the surface position measuring system directly measure the upper surface of the movable body, simple and direct position control of the movable body can be performed.
    Type: Application
    Filed: September 28, 2018
    Publication date: February 7, 2019
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20190043826
    Abstract: A substrate bonding apparatus that brings a part of a surface of a first substrate and a part of a surface of a second substrate into contact to form contact regions at the parts, and then enlarges the contact regions to bond the first substrate and the second substrate includes: a temperature adjusting unit that adjusts a temperature of at least one of the first substrate and the second substrate such that positional misalignment between the first substrate and the second substrate does not exceed a threshold at least in a course of enlargement of the contact regions.
    Type: Application
    Filed: September 27, 2018
    Publication date: February 7, 2019
    Applicant: NIKON CORPORATION
    Inventors: Isao SUGAYA, Hajime MITSUISHI, Minoru FUKUDA
  • Publication number: 20190043212
    Abstract: A detection device including: a detector that detects an object from one viewpoint; a reliability calculator that calculates reliability information on the object at the one viewpoint by using a detection result of the detector; and an information calculator that calculates shape information on the object at the one viewpoint by using the detection result of the detector and the reliability information and calculates texture information on the object at the one viewpoint by using the detection result, the information calculator generates model information on the object at the one viewpoint based on the shape information and the texture information.
    Type: Application
    Filed: February 26, 2016
    Publication date: February 7, 2019
    Applicant: NIKON CORPORATION
    Inventors: Takeaki SUGIMURA, Yoshihiro NAKAGAWA
  • Patent number: 10199420
    Abstract: Provided is an image-capturing unit including an image-capturing chip that includes a first surface having a pixel and a second surface that is on an opposite side of the first surface and has provided thereon an output section that outputs a pixel signal read from the pixel; a transparent substrate that is arranged facing the first surface and includes a wire pattern; a mounting substrate that is arranged facing the second surface and supports the image-capturing chip; and a relay section that is arranged on the mounting substrate and relays, to the wire pattern, the pixel signal output from the output section. Also provided is an image-capturing apparatus including the image-capturing unit described above.
    Type: Grant
    Filed: July 17, 2017
    Date of Patent: February 5, 2019
    Assignee: NIKON CORPORATION
    Inventor: Tomohisa Ishida
  • Patent number: 10197668
    Abstract: Laser radar systems include focusing optical systems having a retroreflector such as a corner cube that is translatable with respect to an objective lens. The retroreflector provides a selected retardance to an interrogation optical beam that is directed to a target as well as to a returned portion of the interrogation optical beam that is directed to a detection system. Typically, an input linearly polarized interrogation beam is returned by the retroreflector as a circularly polarized beam that is directed to the target. Returned beam portions from the target are coupled by the retroreflector to a detection system in a linear polarization that is orthogonal to that of the input linearly polarized optical beam. The retroreflector produces state of polarization changes based on retardance associated with total internal reflection from coated or uncoated optical surfaces. Retroreflector surfaces that are not to introduce retardance are coated with suitable zero or low retardance coatings.
    Type: Grant
    Filed: August 29, 2014
    Date of Patent: February 5, 2019
    Assignee: Nikon Corporatin
    Inventor: Daniel Gene Smith
  • Patent number: 10197924
    Abstract: A first stage system having a first stage and a first drive system that moves the first stage is configured to hold a mask illuminated with illumination light. A second stage system having a second stage and a second drive system that moves the second stage is configured to hold a substrate. A measurement system having a first encoder system and a second encoder system measures positional information of the first and second stages, respectively. The second encoder system measures the positional information of the second stage with a plurality of heads that face a grating section. The first and second drive systems are controlled based on correction information for compensating for a measurement error of the second encoder system that occurs due to the heads and measurement information of the first and the second encoder systems.
    Type: Grant
    Filed: April 5, 2018
    Date of Patent: February 5, 2019
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Publication number: 20190034748
    Abstract: A feature extracting element including: a light-receiving substrate where a plurality of light-receiving elements for photoelectrically converting received light are two-dimensionally arrayed; and one or more other substrates that are laminated on the light-receiving substrate, wherein the other substrate has: a convolution processor which has a plurality of multiplying circuits that are correspondingly provided per the light-receiving element or per a block that is configured of a plurality of the light-receiving elements, and performs convolution operation on signals that are output from the plurality of light-receiving elements using the plurality of multiplying circuits; a pooling processing unit to sample a signal that is output from the convolution processor, based on a predetermined condition; and a connection wiring to pass the sampled signal to the plurality of multiplying circuits.
    Type: Application
    Filed: September 28, 2018
    Publication date: January 31, 2019
    Applicant: NIKON CORPORATION
    Inventors: Shigeru Matsumoto, Sota Nakanishi, Tomohisa Ishida, Atsushi Miyamoto, Kiyoshi Uchikawa
  • Publication number: 20190037163
    Abstract: A cellular phone is capable of telephone-calling with an external device, and includes an antenna by which to communicate with the external device; a lens; an image sensor that outputs an image signal; a display; a loudspeaker; and a processer. The processor controls the display to display an announcement of an incoming call from the external device after receiving a calling signal via the antenna, and in a case that the calling signal is received during operation of the image sensor in a moving image mode, the processor permits communication between the cellular phone and the external device via the antenna and using the loudspeaker and a microphone of the cellular phone after the announcement of the incoming call is displayed by the display and after the processor receives an instruction from an input device of the cellular phone to allow starting of the telephone-calling with the external device.
    Type: Application
    Filed: October 2, 2018
    Publication date: January 31, 2019
    Applicant: NIKON CORPORATION
    Inventors: Itaru HOMMA, Chiyuki KUWATA, Akira OHMURA
  • Publication number: 20190037130
    Abstract: A focus detection device includes: a sensor outputting a pair of focus detection signal sequences, each of which being made of a plurality of focus detection signals; a difference calculation unit obtaining a plurality of differences by sequentially calculating differences between focus detection signals corresponding to each other in the pair of focus detection signal sequences; a division unit dividing the pair of focus detection signal sequences into at least two pairs of partial signal sequences based on the plurality of differences; a focus detection parameter calculation unit calculating a first focus detection parameter according to a phase difference amount of a first pair of partial signal sequences and a second focus detection parameter in accordance with a phase difference amount of a second pair of partial signal sequences; and a focus adjustment parameter determination unit determining either the first or second focus detection parameters, as a focus adjustment parameter.
    Type: Application
    Filed: October 4, 2018
    Publication date: January 31, 2019
    Applicant: NIKON CORPORATION
    Inventor: Naoyuki OHNISHI
  • Publication number: 20190033203
    Abstract: Provided is an observation apparatus that observes tissues of an organism. The observation apparatus includes a generator that generates first data obtained by irradiating the tissues with a first infrared light with a first wavelength and second data obtained by irradiating the tissues with a second infrared light with a second wavelength being different from the first infrared light in an optical property value with respect to a water, and a comparison calculator that compares the first data with the second data to generate bodily fluid data that indicates a presence of a bodily fluid on a surface of the tissues.
    Type: Application
    Filed: September 28, 2018
    Publication date: January 31, 2019
    Applicants: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE, NIKON CORPORATION
    Inventors: Yuzuru IKEHARA, Josaku SAKAKIMA
  • Patent number: 10191257
    Abstract: A lens system having, in order from an object, at least a first lens group G1 having positive refractive power, and second to fourth lens groups G2 to G4, wherein the first lens group G1 includes a front portion lens group G1a, and a rear portion lens group G1b which is disposed to an image side of the front portion lens group G1a with an air distance therebetween, and performs focusing by shifting the rear portion lens group G1b in the optical axis direction, and the fourth lens group G4 includes, in order from the object, a negative lens and a positive lens (cemented negative lens L41), a negative lens L42, and an aperture stop S, and is fixed in the optical axis direction with respect to an image plane I upon zooming from a wide angle end state to a telephoto end state.
    Type: Grant
    Filed: September 10, 2014
    Date of Patent: January 29, 2019
    Assignee: Nikon Corporation
    Inventor: Toshinori Take
  • Patent number: 10194068
    Abstract: A digital camera includes a communicator that communicates with other digital camera, a receiver that receives a camera information of another digital camera and an imaging device that forms a digital image of an object. The digital camera further includes a processor that creates a digital image data from the digital image based upon the camera information.
    Type: Grant
    Filed: September 28, 2016
    Date of Patent: January 29, 2019
    Assignee: NIKON CORPORATION
    Inventor: Akira Ohmura
  • Patent number: 10190997
    Abstract: There is provided an X-ray device irradiating a measuring object with X-ray and detecting transmission X-ray transmitted through the measuring object, the X-ray device including: a first information generation portion configured to generate first information in which a value according to an absorption coefficient is allocated to each of a plurality of divided sections into which there is divided a predetermined space including at least part of the measuring object; a frequency generation portion configured to generate frequency information of the allocated value to indicate a number of the divided sections according to magnitude of the allocated value in the first information; a ratio acquirement portion configured to acquire ratio information indicating a ratio between a first substance and a second substance constituting the measuring object; and a second information generation portion configured to change the first information into second information, by using the frequency information and the ratio inform
    Type: Grant
    Filed: July 16, 2014
    Date of Patent: January 29, 2019
    Assignee: NIKON CORPORATION
    Inventor: Takashi Aoki
  • Patent number: 10191388
    Abstract: An exposure apparatus exposes a substrate with illumination light via a liquid. A liquid immersion member of the exposure apparatus has a lower surface, a plurality of collection ports, and a plurality of supply ports. The lower surface has an opening through which illumination light passes. The collection ports are arranged at the lower surface to surround the opening, and the supply ports are arranged at the lower surface and between the opening and the collection ports to surround the opening, such that the liquid is supplied via the supply ports onto the substrate while the substrate is arranged opposite to a plane-convex lens of a projection optical system and such that the liquid is collected via the collection ports from the substrate.
    Type: Grant
    Filed: June 20, 2018
    Date of Patent: January 29, 2019
    Assignee: NIKON CORPORATION
    Inventor: Akimitsu Ebihara
  • Patent number: 10191387
    Abstract: A reflective mirror is provided with a base and a multilayer film including a first layer and a second layer laminated alternately on the base and capable of reflecting at least a portion of incident light. The multilayer film is provided with a first portion having a first thickness, and with a second portion having a second thickness that is different from the first thickness, and which is provided at a position rotationally symmetric to that of the first portion about an optical axis of the reflective mirror.
    Type: Grant
    Filed: December 28, 2017
    Date of Patent: January 29, 2019
    Assignee: Nikon Corporation
    Inventors: Yoshio Kawabe, Hiroshi Chiba
  • Patent number: 10191383
    Abstract: A movement area of a stage includes first-fifth areas. In the first area, three of four heads except for a first head respectively face three of four sections of a scale member except for a first section. In the second area, three of four heads except for a second head respectively face three of four sections except for a second section of the scale member. In the third area, three of four heads except for a third head respectively face three of four sections except for a third section of the scale member. In the fourth area, three of four heads except for a fourth head respectively face three of four sections of the scale member. In the fifth area, the four heads respectively face the four sections. The stage is moved from one of the first-fourth areas to another of those areas via the fifth area.
    Type: Grant
    Filed: January 24, 2018
    Date of Patent: January 29, 2019
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Publication number: 20190029090
    Abstract: In an imaging using fluorescence, for example, it is difficult to perform a surgery while a tumor part is directly confirmed in a bright operating room. A light irradiation system according to an embodiment performs an open/close control of a first eyesight of a first eyesight restrictor and a second eyesight of a second eyesight restrictor at every predetermined time interval. The light irradiation system controls a light-on of a light such that opening and closing timings of the first eyesight match a timing of a light amount control of a surgery lamp and opening and closing timings of the second eyesight match a timing of a light amount control of a fluorescence excitation light source (see FIG. 1).
    Type: Application
    Filed: September 21, 2018
    Publication date: January 24, 2019
    Applicants: National Institute of Advanced Industrial Science and Technology, Nikon Corporation
    Inventors: Yuzuru Ikehara, Susumu Makinouchi, Shunji Watanabe, Tetsuro Ishikawa
  • Publication number: 20190025716
    Abstract: A liquid immersion exposure apparatus includes a liquid immersion member which forms a liquid immersion space on an object disposed opposite to an emitting surface of an optical member. The liquid immersion member includes (i) a first member that has a first liquid supply port, and a first opening, through which exposure light is projected and (ii) a second member that has a first liquid recovery port facing downwardly and a second liquid supply port and that is movable with respect to the first member. The first member has a second liquid recovery port. The first liquid supply port faces an outer surface of the optical member and is provided on one side of the optical member. The second liquid recovery port faces the outer surface of the optical member and is provided on the other side of the optical member.
    Type: Application
    Filed: September 27, 2018
    Publication date: January 24, 2019
    Applicant: NIKON CORPORATION
    Inventor: Shinji SATO
  • Patent number: D841071
    Type: Grant
    Filed: December 22, 2016
    Date of Patent: February 19, 2019
    Assignee: Nikon Vision Co., Ltd.
    Inventor: Kenichi Soejima