Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type

  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Publication number: 20180231755
    Abstract: A microscope including an illumination optical system having an objective lens and a fly-eye lens, where: the fly-eye lens having a plurality of lens elements; in the illumination optical system, images of the plurality of lens elements are projected on a pupil of the objective lens; and the number (n1) of the images of the lens elements projected inside the pupil of the objective lens is more than the number (n2) of the images of the lens elements projected on an outer perimeter of the pupil of the objective lens. In the above observation optical system, a first objective lens having a first pupil diameter and a second objective lens having a pupil diameter larger than the first pupil diameter are switchable, and a number n1 may be greater than a number n2 with respect to the first objective lens.
    Type: Application
    Filed: April 18, 2018
    Publication date: August 16, 2018
    Applicant: NIKON CORPORATION
    Inventors: Norio MIYAKE, Fumio SUZUKI, Hiroaki NAKAYAMA
  • Publication number: 20180231898
    Abstract: A liquid immersion lithography apparatus and method expose a substrate with an optical beam via an optical assembly and liquid by (i) arranging a stage opposite to the optical assembly such that the liquid is maintained in a local space under the optical assembly, the stage having an upper surface and a surface of a pad member and being configured to support the substrate within the upper surface; and (ii) moving the upper surface and the surface of the pad member in a movement relative to the optical assembly in a state in which the upper surface and the surface of the pad member are adjacent to and substantially coplanar with each other so that the surface of the pad member is arranged opposite to the optical assembly in place of the upper surface while the liquid is maintained in the local space under the optical assembly.
    Type: Application
    Filed: April 11, 2018
    Publication date: August 16, 2018
    Applicant: NIKON CORPORATION
    Inventor: Michael BINNARD
  • Patent number: 10051220
    Abstract: Provided is an ADC in which a plurality of pixel signals input through a vertical signal line of a solid-state image pickup apparatus are held in advance using some capacitors among a plurality of capacitors within the ADC. A potential of a node is generated by the respective pixel signals held in the capacitors. Thereafter, the potential of the node is changed by changing the voltages of counter electrodes of the capacitors, and the digital values of the pixel signals are generated by comparing the potential of the node with a predetermined potential.
    Type: Grant
    Filed: June 10, 2015
    Date of Patent: August 14, 2018
    Assignee: NIKON CORPORATION
    Inventor: Takafumi Komaba
  • Patent number: 10048602
    Abstract: An exposure apparatus exposes a substrate by irradiating exposure light on the substrate through liquid. The exposure apparatus has a substrate holder for holding the substrate, a substrate stage capable of moving the substrate held by the substrate holder, and a temperature adjusting system for adjusting the temperature of the substrate holder. The temperature of the substrate is controlled so that there is no difference in temperature between the substrate and the liquid, thereby preventing a reduction in exposure accuracy resulting from variation in temperature of the liquid.
    Type: Grant
    Filed: April 8, 2016
    Date of Patent: August 14, 2018
    Assignee: NIKON CORPORATION
    Inventors: Naoyuki Kobayashi, Soichi Owa, Shigeru Hirukawa, Yasuhiro Omura
  • Patent number: 10047335
    Abstract: A cell picking support device, a display device and a culture container that can enhance work efficiency. An adapter fixes a well plate that holds cells cultured in a cell culture observation device. A control unit reads culture observation information that includes cell information and coordinate information, from a memory card that is fitted to an external memory I/F. A display unit is provided on a placing surface side of the well plate that is fixed by the adapter, and in response to control by the control unit, displays the cell information, read from the memory card, at display positions corresponding to positions on the bottom face of the well plate, as specified by the coordinate information. Embodiments can be used, for instance, as a cell picking support device that supports a picking operation that is performed in a clean bench.
    Type: Grant
    Filed: February 29, 2016
    Date of Patent: August 14, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yasujiro Kiyota
  • Patent number: 10048597
    Abstract: An exposure apparatus includes a stage apparatus having an upper surface in which a recess that holds a substrate is formed. A liquid immersion system has a supply port via which a liquid is supplied and a collection port via which the liquid is collected forms a liquid immersion region. A projection optical system has an optical element and is configured to project an exposure light onto the substrate through the liquid of the liquid immersion region. A light-transmissive member is provided at the stage apparatus and has an upper surface substantially coplanar with an upper surface of the substrate held on the stage apparatus and with the upper surface of the stage apparatus. A groove is provided at the stage apparatus, into which the liquid is allowed to flow.
    Type: Grant
    Filed: November 7, 2017
    Date of Patent: August 14, 2018
    Assignee: NIKON CORPORATION
    Inventor: Kazuya Ono
  • Patent number: 10048598
    Abstract: A supporting member on which a wafer table is mounted is substantially kinematically supported, via six rod members placed on a slider. Further, coupling members are placed facing in a non-contact manner via a predetermined gap, thin plate-shaped edges provided at both ends in the Y-axis direction of the supporting member. By this arrangement, vibration-damping is performed by the coupling members (squeeze dampers) facing the edges, on vibration of the supporting member mounted on the wafer table. Further, because the supporting member is kinematically supported via the plurality of rod members, it becomes possible to reduce deformation of the wafer table that accompanies deformation of the slider.
    Type: Grant
    Filed: June 26, 2014
    Date of Patent: August 14, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10048600
    Abstract: Provided is a substrate stage apparatus that is provided with: a substrate holder that can be moved in a plane including an X-axis and a Y-axis; a head unit that can be moved synchronously with the substrate holder along the Y-axis; an encoder system for measuring substrate position, the system including a scale disposed on the substrate holder, and heads disposed on the head unit, and acquiring the X-axis direction and the Y-axis direction position information of the substrate holder on the basis of the output of the heads; an encoder system for measuring head-unit position, the system acquiring the Y-axis direction position information of the head unit; and a position control system that controls the position of the substrate holder within the XY plane on the basis of the output of the encoder system for measuring substrate position and the encoder system for measuring head-unit position.
    Type: Grant
    Filed: March 30, 2015
    Date of Patent: August 14, 2018
    Assignee: NIKON CORPORATION
    Inventor: Akinori Shirato
  • Publication number: 20180224627
    Abstract: A lens barrel, in one configuration, includes a moving member that has a cam pin and moves in an optical axis direction of a lens while holding the lens; a first barrel; a second barrel; a recess groove that is formed along a circumferential direction around the optical axis in one of a surface, which faces the first barrel, of the second barrel and a surface, which faces the second barrel, of the first barrel; and a biasing portion that faces the recess groove and applies a biasing force in a direction intersecting with the optical axis. The biasing force applied by the biasing portion changes according to a relative rotation between the first barrel and the second barrel.
    Type: Application
    Filed: April 6, 2018
    Publication date: August 9, 2018
    Applicant: NIKON CORPORATION
    Inventor: Masateru ASAYAMA
  • Publication number: 20180224745
    Abstract: A device manufacturing method includes forming, in a first layer, first line patterns of which longitudinal direction is a first direction; and forming, in a second layer above the first layer, second line patterns of which longitudinal direction is a second direction crossing the first direction, and third line patterns of which longitudinal direction is the second direction and having a etching characteristic different from an etching characteristic of the second line patterns. At least one edge portion of each of the second line patterns and at least one edge portion of each of the third line patterns are adjacent. As viewed from above the second layer, the adjacent at least one edge portions of one of the second and third line patterns are positioned between two adjacent line patterns of the first line pattern.
    Type: Application
    Filed: April 3, 2018
    Publication date: August 9, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yoji WATANABE
  • Publication number: 20180224758
    Abstract: A first stage system having a first stage and a first drive system that moves the first stage is configured to hold a mask illuminated with illumination light. A second stage system having a second stage and a second drive system that moves the second stage is configured to hold a substrate. A measurement system having a first encoder system and a second encoder system measures positional information of the first and second stages, respectively. The second encoder system measures the positional information of the second stage with a plurality of heads that face a grating section. The first and second drive systems are controlled based on correction information for compensating for a measurement error of the second encoder system that occurs due to the heads and measurement information of the first and the second encoder systems.
    Type: Application
    Filed: April 5, 2018
    Publication date: August 9, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20180224333
    Abstract: An image capturing apparatus includes an image capturing device that captures an image of light from a subject, the light passing through each of wavelength band filters having invisible wavelengths as passbands, in which parts of the passbands of the filters whose center wavelengths are adjacent to each other mutually overlap, and a control unit that causes the image capturing device to capture an image of the light from the subject on which a first irradiation light is irradiated, the first irradiation light having a first spectral distribution in which parts of the respective passbands of the filters overlap with one another, and causes the image capturing device to capture an image of the light from the subject on which a second irradiation light is irradiated, the second irradiation light having a second spectral distribution in which parts of the respective passbands of the filters overlap with one another.
    Type: Application
    Filed: April 4, 2018
    Publication date: August 9, 2018
    Applicant: NIKON CORPORATION
    Inventors: Hiroshi SAKAKIBARA, Kiyoshige Shibazaki, Junya Hagiwara, Yusuke Takanashi
  • Publication number: 20180227512
    Abstract: When the amplification ratio is low and strong incident light causes a large charge, the signal retrieved from regions where the incident light is weak is also weak, but when the amplification ratio is high in regions where the incident light is weak, the signal retrieved from regions where the incident light is strong becomes saturated. Therefore, the dynamic range of the imaging unit is narrow. Provided is an imaging unit comprising an imaging section that includes a first group having one or more pixels and a second group having one or more pixels different from those of the first group; and a control section that, while a single charge accumulation is performed in the first group, causes pixel signals to be output by performing charge accumulation in the second group a number of times differing from a number of times charge accumulation is performed in the first group.
    Type: Application
    Filed: April 5, 2018
    Publication date: August 9, 2018
    Applicant: NIKON CORPORATION
    Inventor: Shiro TSUNAI
  • Patent number: 10043609
    Abstract: A cooling structure for a first electromagnetic coil includes the first electromagnetic coil having a space extending in the direction of a predetermined axis Z; a cooling member attached to an end surface, with respect to the direction of the predetermined axis Z, of the first electromagnetic coil and having a flow path for fluid internally formed; and an inlet pipe and an outlet pipe connected, within the space, to an inlet and outlet, respectively, of the flow path of the cooling member and extending through the space to a region outside the electromagnetic coil.
    Type: Grant
    Filed: March 4, 2016
    Date of Patent: August 7, 2018
    Assignees: CKD Corporation, Nikon Corporation
    Inventors: Akihiro Ito, Masayuki Kouketsu, Shigeru Morimoto, Hiromitsu Yoshimoto, Koji Tanaka
  • Patent number: 10042157
    Abstract: Provided is an eyepiece optical system including at least three lenses disposed in order from an observation object (Ob) along an optical axis. A final lens disposed closest to an eye point (EP) (corresponds to the third lens (L3) in FIG. 1) is fixed when adjusting the diopter, and the following conditional expressions (1) and (2) are satisfied: 2.2<|fe/fa|<6.0??(1) 0.5<|Re2/fa|<5.0??(2) where fe denotes a focal length of the final lens, fa denotes a focal length of the total eyepiece optical system (EL), and Re2 denotes a radius of curvature of the eye point (EP) side lens surface of the final lens. When an optical surface is aspherical, a paraxial radius of curvature is used for calculation.
    Type: Grant
    Filed: April 1, 2015
    Date of Patent: August 7, 2018
    Assignee: Nikon Corporation
    Inventors: Taku Matsuo, Motohisa Mouri, Yukio Kubota, Takuya Sato
  • Patent number: 10043207
    Abstract: A selling server stores prescription data of a customer transmitted from an optometrist terminal of an optometrist who performs optometry for a glasses prescription through a communication line in association with customer identification information, transmits image data of a frame candidate group of glasses to a customer terminal, transmits image data of a lens candidate group of the glasses to the customer terminal, receives information relating to a frame and a lens purchased by the customer and determined on the basis of a combined image of a frame image selected by the customer, a lens image selected by the customer, and a face image of the customer, and transmits prescription data of the customer to a lens company terminal of a lens company which processes the lens purchased by the customer.
    Type: Grant
    Filed: July 7, 2015
    Date of Patent: August 7, 2018
    Assignee: NIKON CORPORATION
    Inventors: Hideya Inoue, Yasuteru Fukawa, Koji Yamagaki
  • Patent number: 10044242
    Abstract: A drive apparatus includes a motor having a drive part that rotates a first shaft member; a transmission part that transmits rotation of the first shaft member to a second shaft member which is different from the first shaft member; a first detection device provided at the first shaft member to detect information regarding rotation of the drive part; a second detection device provided at the second shaft member to detect information regarding rotation of the transmission part; and a prevention part that prevents movement of foreign substance toward a detection part which includes at least one of the first detection device and the second detection device.
    Type: Grant
    Filed: September 13, 2017
    Date of Patent: August 7, 2018
    Assignee: NIKON CORPORATION
    Inventors: Kenji Omata, Takashi Nagase
  • Patent number: 10044160
    Abstract: A pulsed light generating method for generating a pulsed light by cutting out a laser light outputted from a laser light source with an intensity modulation type electro optic modulator, wherein: the electro optic modulator is driven by use of a drive signal that changes a voltage applied to the electro optic modulator between a voltage lower than a reference voltage and a voltage higher than the reference voltage, the reference voltage being a voltage applied to the electro optic modulator at which a transmittance of the laser light transmitting through the electro optic modulator is local maximum.
    Type: Grant
    Filed: August 16, 2016
    Date of Patent: August 7, 2018
    Assignee: NIKON CORPORATION
    Inventors: Naoto Inaba, Akira Tokuhisa
  • Publication number: 20180220060
    Abstract: A focus detection device includes: a plurality of first pixels having first color filters, via which a pair of first signals, to be used for split-pupil phase detection, are output; a plurality of second pixels having second color filters, via which a pair of second signals, to be used for the split-pupil phase detection, are output; a phase difference detection unit that detects a phase difference manifested by the first signals or a phase difference manifested by the second signals; and a defocus amount calculation unit that calculates a defocus amount by using a first conversion coefficient corresponding to the first color when the phase difference detection unit has detected the phase difference manifested by the first signals and by using a second conversion coefficient corresponding to the second color when the phase difference detection unit has detected the phase difference manifested by the second signals.
    Type: Application
    Filed: March 28, 2018
    Publication date: August 2, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yosuke KUSAKA
  • Publication number: 20180217511
    Abstract: A liquid immersion exposure apparatus is disclosed. It includes a projection system having a final element and a liquid immersion member that in turn includes a first member, which surrounds the final element and has a liquid supply port and a liquid suction port, and a second member, which is movable with respect to the first member and has a lower part under which a portion of a liquid immersion space is formed. During exposure of a plurality of shot regions of a substrate, the immersion space covers a portion of a surface of the substrate, and the first shot region is exposed while moving the substrate in a first scanning direction. After the exposure of the first shot region, the second shot region is exposed while moving the substrate in a second scanning direction.
    Type: Application
    Filed: March 26, 2018
    Publication date: August 2, 2018
    Applicant: NIKON CORPORATION
    Inventor: Shinji SATO
  • Publication number: 20180220393
    Abstract: An electronic device having an attachment part that attaches/detaches the electronic device to/from a predetermined member; a physical quantity sensor detecting a physical quantity affecting the predetermined member according to a movement of a human body; and a communication unit configured to communicate with an external device and transmit the physical quantity detected by the physical quantity sensor to the external device.
    Type: Application
    Filed: March 22, 2018
    Publication date: August 2, 2018
    Applicant: NIKON CORPORATION
    Inventors: Yukio Kubota, Satoshi Ejima, Takeo Motohashi, Mitsuko Matsumura, Hiroki Ono, Masakazu Sekiguchi
  • Publication number: 20180217298
    Abstract: An optical member is provided with a substrate and a Cu-proof protective layer formed on or above the substrate.
    Type: Application
    Filed: March 29, 2018
    Publication date: August 2, 2018
    Applicant: NIKON CORPORATION
    Inventor: Masafumi Mizuguchi
  • Patent number: 10036968
    Abstract: A control method of a movable body includes: a step of detecting a part of a plurality of grating marks provided at a wafer placed on a movable body that is movable within an XY plane, while scanning a measurement beam, that is irradiated from a mark detection system, in a Y-axis direction with respect to the part of plurality of grating marks, as moving the movable body in the Y-axis direction; a step of measuring an irradiation position of the measurement beam on the part of the plurality of grating marks; and a step of relatively moving the measurement beam and the movable body in an X-axis direction on the basis of the measurement result of the irradiation position and also detecting another grating mark while scanning the measurement beam in the Y-axis direction.
    Type: Grant
    Filed: June 20, 2017
    Date of Patent: July 31, 2018
    Assignee: NIKON CORPORATION
    Inventor: Akihiro Ueda
  • Patent number: 10038020
    Abstract: A solid-state image sensor includes: a pixel array that includes first pixels, each having first and second photoelectric conversion units, and second pixels, each having third and fourth photoelectric conversion units; first to fourth transfer gates via which a signal charge respectively generated in the first to fourth photoelectric conversion units is respectively transferred to first to fourth charge voltage conversion units. At least one of a gate width, a gate length and an installation position of at least one transfer gate among the first to fourth transfer gates is altered to achieve uniformity in voltage conversion efficiency at the first to fourth charge voltage conversion units.
    Type: Grant
    Filed: March 2, 2017
    Date of Patent: July 31, 2018
    Assignee: NIKON CORPORATION
    Inventor: Satoshi Suzuki
  • Publication number: 20180210332
    Abstract: Alignment patterns that are selected based on device pattern spatial frequencies are defined on a reticle. The alignment patterns can include periodic arrays of lines, spaces, dots, of other pattern elements. Such patterns can be defined as sets associated with a common spatial frequency or frequency range, or some or all sets can include alignment marks having mark elements associated with different spatial frequencies.
    Type: Application
    Filed: January 24, 2018
    Publication date: July 26, 2018
    Applicant: Nikon Corporation
    Inventors: Steven Douglas Slonaker, Stephen P. Renwick
  • Publication number: 20180213140
    Abstract: An electronic device includes: an imaging unit including a region having a pixel group that has a plurality of first pixels, and second pixels that are fewer than the first pixels in the pixel group; and a control unit that reads out the signals based upon exposure of the second pixels during exposure of the plurality of first pixels.
    Type: Application
    Filed: March 20, 2018
    Publication date: July 26, 2018
    Applicant: NIKON CORPORATION
    Inventors: Koichi GOHARA, Satoshi TSUCHIYA
  • Publication number: 20180210204
    Abstract: It is possible to provide a technique for accurately performing an operation desired by a user. A user's head operation is identified according to information detected by a head motion detection unit. A process desired by the user is executed according to an angular velocity of the head motion. Moreover, the technique uses a control unit which can accurately execute an operation by the user's head operation without reflecting the return motion of the user's head in the process. The control unit executes a process for a start and an end of each process corresponding to the detected angular velocity according to a predetermined threshold value.
    Type: Application
    Filed: March 26, 2018
    Publication date: July 26, 2018
    Applicant: NIKON CORPORATION
    Inventors: Seiji TAKANO, Masaki OTSUKI, Akinobu SUGA, Nobuhiro FUJINAWA, Hidenori KURIBAYASHI
  • Patent number: 10031425
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: July 24, 2018
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Publication number: 20180202009
    Abstract: A technique for detecting intact provirus more simply and at a lower cost is provided. A marker showing HIV pathology, comprising near-full-length HIV provirus. A method of testing HIV pathology, comprising evaluating the level of full-length HIV provirus in HIV-infected cells. A method of testing the efficacy of an anti-HIV drug, comprising evaluating the level of near-full-length HIV provirus in HIV-infected cells. A method of screening for drugs that enable a functional cure of HIV, comprising evaluating the level of near-full-length HIV provirus in HIV-infected cells. A method of evaluating the level of near-full-length HIV provirus in HIV-infected cells, comprising detecting 3 to 7 regions scattered across the full length of HIV provirus. Also provided is a kit for evaluating the level of near-full-length HIV provirus, comprising primers capable of amplifying 3 to 7 regions scattered across the full length of HIV provirus and probes capable of detecting the nucleic acid amplified by the primers.
    Type: Application
    Filed: October 28, 2015
    Publication date: July 19, 2018
    Applicants: KEIO UNIVERSITY, NIKON CORPORATION
    Inventor: Shingo KATO
  • Publication number: 20180202842
    Abstract: An encoder, which measures a relative moving amount of a second member relative to a first member, includes: a diffraction grating provided on the first member; a light-incident optical member causing a measuring light to come into a grating pattern surface of the diffraction grating substantially perpendicularly; a first reflecting member provided on the second member and reflecting a diffracted light generated from the diffraction grating; a first direction-changing member changing a direction of the diffracted light; a first photo-detector detecting an interference light generated by interference between a double diffracted light and other diffracted light than the double diffracted light or a reference light, the double diffracted light being generated, via diffraction of the diffracted light, from the diffraction grating; and a measuring section which obtains the relative moving amount of the second member relative to the first member by using a detection signal from the first photo-detector.
    Type: Application
    Filed: March 13, 2018
    Publication date: July 19, 2018
    Applicant: NIKON CORPORATION
    Inventor: Zhigiang LIU
  • Publication number: 20180203366
    Abstract: In an immersion lithography apparatus, a projection optics having a final surface projects a pattern image onto a workpiece through a liquid immersion area between the final surface and an upper surface of the workpiece during an immersion lithography process in which the immersion liquid is supplied from above the workpiece via the liquid supply port and the supplied immersion liquid is collected from above the workpiece via the liquid recovery port. During a cleanup process, an object different from the workpiece is placed instead of the workpiece, a cleaning liquid is supplied onto the object from above the object via the liquid supply port, and the supplied cleaning liquid is collected from above the object via the recovery port. The cleaning liquid is not allowed to be used for projecting the pattern image.
    Type: Application
    Filed: March 14, 2018
    Publication date: July 19, 2018
    Applicant: NIKON CORPORATION
    Inventor: Hidemi KAWAI
  • Publication number: 20180204537
    Abstract: An image processing apparatus includes: a luminance/chromaticity calculation unit that calculates a luminance and a chromaticity for each pixel of pixels making up image data, based upon a value indicated for the pixel; a plane calculation unit that determines through arithmetic operation a plane containing coordinates of the pixel in a raw data space; an intersection point calculation unit that ascertains, through calculation, an intersection point at which an achromatic locus and the plane intersect each other in the raw data space; an intersection point chromaticity calculation unit that calculates a chromaticity at the intersection point; and a conversion unit that converts the chromaticity at the pixel to a chromaticity close to a chromaticity of achromatic color if the chromaticity at the pixel is close to the chromaticity at the intersection point.
    Type: Application
    Filed: March 16, 2018
    Publication date: July 19, 2018
    Applicant: NIKON CORPORATION
    Inventor: Hisashi SANO
  • Publication number: 20180202924
    Abstract: An imaging method includes: irradiating breast tissue with infrared light, detecting light in a narrow wavelength band selected from wavelength bands from 1400 nm or more to 1600 nm or less, among light radiated from the tissue irradiated with the infrared light, and generating, based on the detected light in the narrow wavelength band, an image to specify an area in the tissue containing breast cancer cell aggregation or breast cancer tissue.
    Type: Application
    Filed: March 16, 2018
    Publication date: July 19, 2018
    Applicants: JAPAN ORGANIZATION OF OCCUPATIONAL HEALTH AND SAFETY, NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, NIKON CORPORATION
    Inventors: Kenichi HARIGAYA, Daisuke OZAKI, Yuzuru IKEHARA, Hiroki ISHIKAWA, Zhen LIU, Takeshi HATAGUCHI
  • Publication number: 20180203332
    Abstract: An accessory mount can be inserted through the camera body mount without any of the first through third tabs being hindered by any of three camera body-side tabs at the camera body mount, as long as the accessory mount is inserted into the camera body mount at a correct interlock phase. The first, second, and third tabs extend over varying lengths along the circumferential direction. The first tab extends over a greatest length and the third tab extends over a smallest length, along the circumferential direction. The accessory mount includes a restricting member, a fitting portion, and a lock pin hole. The restricting member is disposed at a position assumed on a side substantially opposite from the lock pin hole across the fitting portion.
    Type: Application
    Filed: March 12, 2018
    Publication date: July 19, 2018
    Applicant: NIKON CORPORATION
    Inventors: Masanori HASUDA, Noriyasu KOTANI, Hideaki HOSHIKAWA
  • Patent number: 10027942
    Abstract: A technique is disclosed to obtain first image data including a first pixel value of a first pixel having a no-parallax opening corresponding to a reference direction, a second pixel value of a second pixel having a parallax opening that causes parallax in one direction and a third pixel value of a third pixel having a parallax opening that causes parallax in the opposite direction, to calculate, for a pixel position of the second pixel, a fourth pixel value by averaging the second pixel value at the pixel position and a hypothetical third pixel value and to calculate, for a pixel position of the third pixel, a fifth pixel value by averaging the third pixel value at the pixel position and a hypothetical second pixel value, and to use the first pixel value, the fourth pixel value and the fifth pixel value to produce 2D second image data.
    Type: Grant
    Filed: September 10, 2014
    Date of Patent: July 17, 2018
    Assignee: NIKON CORPORATION
    Inventors: Kenichi Ishiga, Kiyoshige Shibazaki, Muneki Hamashima, Susumu Mori
  • Patent number: 10025194
    Abstract: An exposure apparatus includes an optical member that can be provided on a stage. The optical member has a first surface contacting a liquid when moved to face a projection system, and a second surface contacting a gas and transmitting light having come from the projection system via the liquid and the first surface. The optical member is configured such that at least a large-angle ray of the light, which has an angle with an optical axis of the projection system sufficiently large to undergo total reflection at an end surface of the projection system when the liquid is absent, travels from the projection system to the second surface without passing through gas. The second surface transmits the large-angle ray, which is received by the light-receiving surface.
    Type: Grant
    Filed: December 5, 2016
    Date of Patent: July 17, 2018
    Assignee: NIKON CORPORATION
    Inventors: Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara, Yasushi Mizuno, Naonori Kita, Osamu Tanitsu, Nozomu Emura
  • Patent number: 10025117
    Abstract: A functional dyed lens for spectacles is obtained by dyeing at least one of the surfaces of an undyed plastic lens, and in the functional dyed lens, a dyeing density defined as a difference in luminous transmittance from the undyed plastic lens is 2% or more but 4% or less, and a difference in average transmittance from the undyed plastic lens in a wavelength region of 530 nm to 570 nm is 3% or more but 5% or less.
    Type: Grant
    Filed: October 30, 2014
    Date of Patent: July 17, 2018
    Assignee: NIKON-ESSILOR CO., LTD.
    Inventors: Yuka Takedomi, Yuko Kawamura
  • Patent number: 10025195
    Abstract: A reflective imaging optical system which forms, on a second plane, an image of a pattern arranged on a first plane and illuminated with light from an illumination optical system includes a plurality of reflecting mirrors including first and second reflecting mirrors by which the light reflected by the first plane is reflected first, second, respectively. An area on the first plane illuminated with the light from the illumination optical system is an illumination objective area, the illumination objective area is positioned on a predetermined side of an optical axis of the reflecting mirrors, and reflection areas of the first and second reflecting mirrors are positioned on the predetermined side of the optical axis of the reflecting mirrors; and the first and second reflecting mirrors are arranged so that an optical path of the light from the illumination optical system is positioned between the first and second reflecting mirrors.
    Type: Grant
    Filed: January 9, 2017
    Date of Patent: July 17, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yoshio Kawabe
  • Patent number: 10026768
    Abstract: A detector comprises a plurality of photoelectric converters to output an electrical signal corresponding to an incident light, and a plurality of filter circuits provided corresponding to each of the plurality of photoelectric converters or to each of a plurality of element groups respectively including a predetermined number of the photoelectric converters of the plurality of photoelectric converters, the plurality of filter circuits attenuating a signal having a predetermined frequency from the electrical signal output from the plurality of photoelectric converters, In the above-described detector, the plurality of photoelectric converters may be provided in a first substrate, and the plurality of filter circuits may be provided in a second substrate laminated on the first substrate.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: July 17, 2018
    Assignee: NIKON CORPORATION
    Inventors: Osamu Saruwatari, Shigeru Aoki, Kazuya Okamoto, Isao Sugaya, Masashi Okada, Hiroshi Ohki
  • Publication number: 20180196352
    Abstract: A liquid immersion exposure apparatus includes a stage having a holder that holds a substrate, and is movable below a projection system, supply ports via which immersion liquid is supplied, the supply ports facing an upper surface of the substrate held on the holder, recovery ports via which the immersion liquid is collected and arranged such that (i) the upper surface of the substrate held on the holder faces the recovery ports and (ii) the recovery ports encircle a path of exposure light. The recovery ports collect the immersion liquid from the upper surface of the substrate such that only a portion of the upper surface of the substrate is covered with the immersion liquid. The stage is movable below a gas supply opening that supplies a gas. The stage is movable to a position where the supplied gas is supplied to a surface of the stage.
    Type: Application
    Filed: March 9, 2018
    Publication date: July 12, 2018
    Applicant: NIKON CORPORATION
    Inventors: Naoyuki KOBAYASHI, Akikazu TANIMOTO
  • Publication number: 20180197820
    Abstract: A mark forming method includes: forming recessed portion on a mark formation area of a substrate; coating the recessed portion with a polymer layer containing a block copolymer, allowing the polymer layer in the recessed portion to form a self-assembled area; selectively removing a portion of the self-assembled area; and forming a positioning mark by using the self-assembled area from which the portion thereof has been removed.
    Type: Application
    Filed: March 7, 2018
    Publication date: July 12, 2018
    Applicant: NIKON CORPORATION
    Inventors: Yuji SHIBA, Tomoharu FUJIWARA, Nobutaka MAGOME
  • Publication number: 20180196359
    Abstract: An exposure apparatus that exposes a substrate by exposure light via liquid between an optical member and the substrate, the exposure apparatus includes: an apparatus frame, an optical system including the optical member, a liquid immersion member that is configured to form an immersion liquid space and that includes a first member disposed at at least a portion of surrounding of the optical member and a second member disposed at at least a portion of surrounding of the optical member, a driving apparatus configured to relatively move the second member with respect to the first member, and a vibration isolator by which the first member is supported to the apparatus frame.
    Type: Application
    Filed: March 9, 2018
    Publication date: July 12, 2018
    Applicant: NIKON CORPORATION
    Inventor: Shinji SATO
  • Publication number: 20180194279
    Abstract: Provided is an electronic apparatus that perform an appropriate process according to a gesture of a subject person, the electronic apparatus including: a first input unit that inputs a detection result of a biosensor detecting a change in biological information of a subject person; a second input unit that inputs a recognition result of a recognition device recognizing an action of the subject person; and a processing unit that performs a process according to the action of the subject person based on input results of the first and second input units.
    Type: Application
    Filed: March 5, 2018
    Publication date: July 12, 2018
    Applicant: NIKON CORPORATION
    Inventors: Kazuhiro TAKAHASHI, Mami MURATAMI, Naoto YAMADA, Shinjiro MURAKI, Yuya ADACHI, Masakazu SEKIGUCHI
  • Publication number: 20180198998
    Abstract: Dehazed images are produced based on an atmospheric light image obtained form an input image as brightest pixels of a predetermined window and white map. The white map is median filtered, morphologically filtered and, in some examples, filtered with a guided filter, and the filtered image combined with the atmospheric light image to produce a dehazed image.
    Type: Application
    Filed: January 8, 2018
    Publication date: July 12, 2018
    Applicant: Nikon Corporation
    Inventors: Ripul Bhutani, Ping-Wei Chang, Bausan Yuan
  • Patent number: 10018814
    Abstract: A first lens group (G1) having positive refractive power, a front-side lens group (GX), an intermediate lens group (GM) having positive refractive power, and a rear-side lens group (GR) are arranged in order from an object side. The front-side lens group (GX) is composed of one or more lens groups and has a negative lens group At least part of the intermediate lens group (GM) is a focusing lens group (GF). The rear-side lens group (GR) is composed of one or more lens groups. Upon zooming, the first lens group (G1) is moved with respect to an image surface, a distance between the first lens group (G1) and the front-side lens group (GX) is changed, a distance between the front-side lens group (GX) and the intermediate lens group (GM) is changed, and a distance between the intermediate lens group (GM) and the rear-side lens group (GR) is changed.
    Type: Grant
    Filed: February 10, 2017
    Date of Patent: July 10, 2018
    Assignee: Nikon Corporation
    Inventors: Satoru Shibata, Tomoyuki Sashima
  • Patent number: 10018922
    Abstract: Method for minimization of degradation of images created by the projector tool turns on the optimization of the pattern-imaging by adjusting parameters and hardware of the projector to judiciously impact the placement of various image edges at different locations in the image field. Adjustments to the projector (exposure tool) include a change of a setup parameter of the exposure tool and/or scanning synchronization and/or a change of a signature of the optical system of the exposure tool determined as a result of minimizing the pre-determined cost function(s) that are parts of a comprehensive edge-placement error model.
    Type: Grant
    Filed: February 3, 2016
    Date of Patent: July 10, 2018
    Assignee: NIKON CORPORATION
    Inventor: Jacek K. Tyminski
  • Patent number: 10018552
    Abstract: A particle analysis apparatus includes: an acquisition unit that acquires a plurality of images each captured at a different time in each of which a particle moving in a predetermined direction in a medium is imaged; and a determination unit that determines, based on a movement amount of a particle due to Brownian motion in the medium, whether or not an image of a first particle included in an image captured at a first time of the plurality of images acquired by the acquisition unit and an image of a second particle included in an image captured at a second time which is different from the first time of the plurality of images acquired by the acquisition unit are images indicating the same particle.
    Type: Grant
    Filed: July 14, 2016
    Date of Patent: July 10, 2018
    Assignee: Nikon Corporation
    Inventors: Daishi Tanaka, Hisao Osawa, Kuno Suzuki
  • Patent number: 10020157
    Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerized tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft.
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: July 10, 2018
    Assignee: NIKON METROLOGY NV
    Inventor: Roger Hadland
  • Patent number: 10021357
    Abstract: An image capturing apparatus includes: photoelectric converting elements having a light reception sensitivity to light in a wavelength band from 600 to 2500 nm, and receiving an object light flux to output pixel signals; n types of wavelength filters (n>4) allowing passage therethrough of light included in the flux and is in wavelength bands being respectively different, each including the wavelength band; and an image data generator generating image data using the output from an element among those having received the flux passed through one of m types of the wavelength filters (3?m<n) a combination determined based on a predetermined condition being determined such that among the respective wavelength bands of the m types of filters, a shortest-wavelength side wavelength band and a longest-wavelength side wavelength band overlap, and each filter among the m types allowing passage therethrough of light in the wavelength band including a predetermined effective wavelength band.
    Type: Grant
    Filed: March 28, 2017
    Date of Patent: July 10, 2018
    Assignee: NIKON CORPORATION
    Inventors: Junya Hagiwara, Yusuke Takanashi, Kiyoshige Shibazaki
  • Patent number: D824480
    Type: Grant
    Filed: December 22, 2016
    Date of Patent: July 31, 2018
    Assignee: Nikon Vision Co., Ltd.
    Inventor: Kazuya Izumi