Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type

  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Publication number: 20170272709
    Abstract: An image capturing apparatus includes: photoelectric converting elements having a light reception sensitivity to light in a wavelength band from 600 to 2500 nm, and receiving an object light flux to output pixel signals; n types of wavelength filters (n>4) allowing passage therethrough of light included in the flux and is in wavelength bands being respectively different, each including the wavelength band; and an image data generator generating image data using the output from an element among those having received the flux passed through one of m types of the wavelength filters (3?m<n) a combination determined based on a predetermined condition being determined such that among the respective wavelength bands of the m types of filters, a shortest-wavelength side wavelength band and a longest-wavelength side wavelength band overlap, and each filter among the m types allowing passage therethrough of light in the wavelength band including a predetermined effective wavelength band.
    Type: Application
    Filed: March 28, 2017
    Publication date: September 21, 2017
    Applicant: NIKON CORPORATION
    Inventors: Junya HAGIWARA, Yusuke TAKANASHI, Kiyoshige SHIBAZAKI
  • Publication number: 20170270972
    Abstract: The invention is provided with: an acquisition unit that acquires, from an external machine, image data as well as time data when an image based on the image data has been displayed on the external machine; a data memory unit that stores, for each unit of the image data, the image data and the time data acquired in the acquisition unit; and a prioritization determination unit that determines, on the basis of the time data, a prioritization of the image data stored in the data memory unit.
    Type: Application
    Filed: June 8, 2017
    Publication date: September 21, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yusuke YAMASAKI, Noboru AKAMI
  • Publication number: 20170267178
    Abstract: An image capture device is mounted in a vehicle. The image capture device includes: an image capture unit; and a setting unit that sets an image capture condition for each region of the image capture unit each having a plurality of pixels, or for each pixel, based upon at least one of a state exterior to the vehicle and a state of the vehicle.
    Type: Application
    Filed: May 29, 2015
    Publication date: September 21, 2017
    Applicant: NIKON CORPORATION
    Inventors: Akiko SHIGA, Toru MIYAKOSHI, Satoshi YAMAGUCHI, Akira KINOSHITA, Kaoru YOSHINO, Hitomi NAGANUMA, Takashi KURIYAMA, Kouichi FUKUDA, Yuki KITA, Koji NAGAOKA, Tomoya NAKAGAWA, Masakazu SEKIGUCHI, Takashi SHIONOYA
  • Patent number: 9769370
    Abstract: A lens barrel comprising: an optical system which includes a focus adjustment optical system 32; an aperture 34 which limits the light beam which pass through the optical system to predetermined range at the time of detection of the focus state of the optical system; a drive 36 which drives the focus adjustment optical system 32; a memory 37 which stores a first predetermined value which is a aperture value within the predetermined range; and a transmitter 37 which sends the first predetermined value to the camera body 2.
    Type: Grant
    Filed: May 31, 2012
    Date of Patent: September 19, 2017
    Assignee: NIKON CORPORATION
    Inventor: Hiroaki Takahara
  • Patent number: 9766425
    Abstract: A lens barrel includes: a first cylindrical member that extends in a prescribed axial direction; a second cylindrical member that slides in the prescribed axial direction along an inner circumferential surface of the first cylindrical member; an axis member that slides in the prescribed axial direction along an inner circumferential surface of the second cylindrical member; and a first holding member that is fixed to the axis member, is guided in the prescribed axial direction by the slide of the axis member against the second cylindrical member, and holds a first optical member.
    Type: Grant
    Filed: August 22, 2014
    Date of Patent: September 19, 2017
    Assignee: NIKON CORPORATION
    Inventors: Kunihiro Fukino, Masaaki Kusano
  • Patent number: 9766555
    Abstract: An exposure apparatus includes a projection system having a final element that projects exposure light to an upper surface of a substrate through liquid between the final element and the substrate. A liquid confinement member has a recovery outlet, via which the liquid is removed along with gas, arranged such that the upper surface of the substrate faces the recovery outlet, and the recovery outlet surrounds a path of the exposure light. The liquid confinement member confines the liquid to an area smaller than an area of the upper surface of the substrate by removing the liquid via the recovery outlet from a gap between the liquid confinement member and the upper surface of the substrate. An anti-vibration system is disposed such that transmission of vibrations between the liquid confinement member and the projection system is limited.
    Type: Grant
    Filed: May 3, 2016
    Date of Patent: September 19, 2017
    Assignee: NIKON CORPORATION
    Inventors: Hiroyuki Nagasaka, Yasufumi Nishii
  • Publication number: 20170264826
    Abstract: An image processing apparatus has a data reading section, a controlling section, and a display section. The data reading section reads a reproduced file selected from a first file and a second file. Here, the first file includes data of a first image together with metadata indicating a location of a second image related to the first image. The second file includes the data of the first image but do not include the metadata. The controlling section detects the metadata from the reproduced file. The display section performs display of indicating existence of the second image on a first screen reproducing the first image of the reproduced file when the controlling section detects the metadata.
    Type: Application
    Filed: May 18, 2017
    Publication date: September 14, 2017
    Applicant: NIKON CORPORATION
    Inventors: Tomoyuki OGAWA, Morihiro TAKAGI, Junko HASEGAWA
  • Publication number: 20170261856
    Abstract: Within area where of four heads installed on a wafer stage, heads included in the first head group and the second head group to which three heads each belong that include one head different from each other face the corresponding areas on a scale plate, the wafer stage is driven based on positional information which is obtained using the first head group, as well as obtain the displacement (displacement of position, rotation, and scaling) between the first and second reference coordinate systems corresponding to the first and second head groups using the positional information obtained using the first and second head groups. By using the results and correcting measurement results obtained using the second head group, the displacement between the first and second reference coordinate systems is calibrated, which allows the measurement errors that come with the displacement between areas on scale plates where each of the four heads face.
    Type: Application
    Filed: May 30, 2017
    Publication date: September 14, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20170261865
    Abstract: A partial section of an aerial image measuring unit is arranged at a wafer stage and part of the remaining section is arranged at a measurement stage, and the aerial image measuring unit measures an aerial image of a mark formed by a projection optical system. Therefore, for example, when the aerial image measuring unit measures a best focus position of the projection optical system, the measurement can be performed using the position of the wafer stage, at which a partial section of the aerial image measuring unit is arranged, in a direction parallel to an optical axis of the projection optical system as a datum for the best focus position. Accordingly, when exposing an object with illumination light, the position of the wafer stage in the direction parallel to the optical axis is adjusted with high accuracy based on the measurement result of the best focus position.
    Type: Application
    Filed: May 19, 2017
    Publication date: September 14, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Patent number: 9760014
    Abstract: An illumination optical apparatus includes a plurality of birefringent members made of a birefringent material and arranged in an optical path on an incidence side of an optical integrator. The members change a polarization state of illumination light such that first and second rays of the illumination light are polarized in different directions on the pupil plane. The birefringent members are arranged such that an optical path length of the first ray in the birefringent material is different from an optical path length of the second ray in the birefringent material, and are arranged so as to change the polarization state of the illumination light incident on the plurality of the birefringent members in a linear polarization state having a substantially single polarization direction such that each of the first and second rays is polarized in a substantially circumferential direction about the optical axis on the pupil plane.
    Type: Grant
    Filed: May 15, 2015
    Date of Patent: September 12, 2017
    Assignee: NIKON CORPORATION
    Inventor: Naomasa Shiraishi
  • Patent number: 9760021
    Abstract: A controller measures positional information of a stage within an XY plane using three encoders which at least include one each of an X encoder and a Y encoder of an encoder system, and the stage is driven in the XY plane, based on measurement results of the positional information and positional information (p1, q1), (p2, q2), and (p3, q3) in a surface parallel to the XY plane of a head (an encoder) used for measurement of the positional information. Accordingly, it becomes possible to control the movement of the stage with good precision, while switching the head (the encoder) used for control during the movement of the stage using the encoder system which includes a plurality of heads.
    Type: Grant
    Filed: May 27, 2015
    Date of Patent: September 12, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9759898
    Abstract: A zooming optical system includes, in order from an object side along an optical axis: a first lens group having positive refractive power; a second lens group having negative refractive power; a third lens group having positive refractive power; and a fourth lens group having positive refractive power; upon zooming from a wide-angle end state to a telephoto end state, a distance between the first lens group and the second lens group is varied, a distance between the second lens group and the third lens group is varied, and a distance between the third lens group and the fourth lens group is varied; the third lens group is composed of one positive lens; and a focus from an infinite-distance object up to a near-distance object is conducted by moving the third lens group in a direction of the optical axis.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: September 12, 2017
    Assignee: Nikon Corporation
    Inventor: Norikazu Yokoi
  • Patent number: 9760026
    Abstract: A liquid immersion exposure apparatus includes a projection system, a liquid supply inlet, a liquid collection outlet, a separator fluidically connected to the liquid collection outlet, the separator separating one of liquid and gas, which have been collected via the liquid collection outlet, from the other, a first flow-meter which measures an amount of the liquid collected via the liquid collection outlet, and a second flow-meter which measures an amount of liquid to be supplied via the liquid supply inlet.
    Type: Grant
    Filed: October 24, 2016
    Date of Patent: September 12, 2017
    Assignee: NIKON CORPORATION
    Inventors: Nobutaka Magome, Naoyuki Kobayashi
  • Patent number: 9760012
    Abstract: An illumination optical system that illuminates a target surface includes a first deflector, a second deflector, and an optical integrator. The first deflector is arranged on a first face crossing an optical path of light from a light source and has a period in a first direction defined on the first face. The second deflector is arranged on a second face crossing an optical path of light from the first deflector and has a period in a second direction defined on the second face. The optical integrator has a plurality of wavefront division facets arrayed on a third face crossing an optical axis of light from the second deflector. At least one of the first and second deflectors rotates about an optical axis of the illumination optical system or about an axis parallel to the optical axis in order to adjust a pattern of an illumination distribution.
    Type: Grant
    Filed: July 31, 2012
    Date of Patent: September 12, 2017
    Assignee: NIKON CORPORATION
    Inventor: Hideki Komatsuda
  • Publication number: 20170255108
    Abstract: While a wafer stage moves linearly in a Y-axis direction, surface position information of a wafer surface at a plurality of detection points set at a predetermined interval in an X-axis direction is detected by a multipoint AF system, and by a plurality of alignment systems arranged in a line along the X-axis direction, marks at different positions on the wafer are each detected, and a part of a chipped shot of the wafer is exposed by a periphery edge exposure system. This allows throughput to be improved when compared with the case when detection operation of the marks, detection operation of the surface position information (focus information), and periphery edge exposure operation are performed independently.
    Type: Application
    Filed: May 19, 2017
    Publication date: September 7, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20170255005
    Abstract: To optionally forming a multilevel light intensity distribution on an illumination pupil plane, the illumination apparatus implements Köller illumination on an illumination target surface, using as a light source the light intensity distribution formed on the illumination pupil plane on the basis of light from a light source. The illumination apparatus has a spatial light modulator, a condensing optical system, and a controller. The spatial light modulator has reflecting surfaces which are two-dimensionally arranged and postures of which can be controlled independently of each other. The condensing optical system condenses light from the reflecting surfaces to form a predetermined light intensity distribution on the illumination pupil plane. The controller controls the number of reflecting surfaces contributing to arriving light, for each of points on the illumination pupil plane forming the light intensity distribution, according to a light intensity distribution to be formed on the illumination pupil plane.
    Type: Application
    Filed: May 18, 2017
    Publication date: September 7, 2017
    Applicant: NIKON CORPORATION
    Inventor: Osamu TANITSU
  • Publication number: 20170256331
    Abstract: A method of manufacturing a laminate, transistor, and method of manufacturing transistor using a composition that includes an organic compound having a hydroxy group; a first cross-linking agent that is at least one organic silicon compound selected from the group including an organic silicon compound including a siloxane bond in the molecule and having three or more cyclic ether groups in the molecule, a chain organic silicon compound including two or more siloxane bonds in the molecule and having two or more cyclic ether groups in the molecule, a cyclic organic silicon compound including D unit in the molecule and having four or more cyclic ether groups bonded to a silicon atom of the D unit in the molecule, and a cyclic organic silicon compound including a T unit in the molecule and having two or more cyclic ether groups in the molecule; and a photocationic polymerization initiator.
    Type: Application
    Filed: May 18, 2017
    Publication date: September 7, 2017
    Applicant: NIKON CORPORATION
    Inventors: Shohei KOIZUMI, Takashi SUGIZAKI, Kenji MIYAMOTO, Yusuke KAWAKAMI
  • Publication number: 20170255109
    Abstract: An exposure apparatus exposes a substrate to light passing through liquid, and includes a stage that holds the substrate. The stage includes a substrate holder including a support member that supports a rear surface of the substrate and a first circumferential wall surrounding the support member. A second circumferential wall surrounds the substrate holder and forms a first groove between the second circumferential wall and the substrate holder, and a second groove on an outer side thereof. A plate member surrounds the substrate on the support member, and a recovery passage recovers liquid flowing from a liquid supply system to a gap between the plate member and the substrate. The second circumferential wall is under the gap so that part of an upper surface of the second circumferential wall faces the substrate rear surface and another part of the upper surface faces a rear surface of the plate member.
    Type: Application
    Filed: May 22, 2017
    Publication date: September 7, 2017
    Applicant: NIKON CORPORATION
    Inventor: Makoto SHIBUTA
  • Publication number: 20170253451
    Abstract: A processing system and a device manufacturing method that can perform manufacturing of an electronic device without stopping the entire manufacturing system, even when the processing state actually implemented on a sheet substrate by a processing device differs from the target processing state.
    Type: Application
    Filed: September 3, 2015
    Publication date: September 7, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yoshiaki KITO, Masaki KATO, Kei NARA, Masakazu HORI
  • Patent number: 9753378
    Abstract: An exposure apparatus exposes a substrate with exposure light via a liquid. The exposure apparatus includes an optical system including an emission surface from which the exposure light is emitted; a liquid supply port that supplies the liquid in order to fill an optical path of the exposure light emitted from the emission surface with the liquid; and a fluid supply port that supplies a fluid including a material capable of changing the specific resistance of the liquid to at least a part of a space around a liquid immersion space that is formed by the liquid.
    Type: Grant
    Filed: May 22, 2015
    Date of Patent: September 5, 2017
    Assignee: NIKON CORPORATION
    Inventor: Junichi Chonan
  • Patent number: 9753363
    Abstract: A modeling technique is provided. The modeling technique includes inputting tool parameters into a model and inputting basic model parameters into the model. The technique further includes generating a simulated, corrected reticle design using the tool parameters and the basic model parameters. An image of test patterns is compared against the simulated, corrected reticle design. A determination is made as to whether ?1<?1, wherein ?1 represents model vs. exposure difference and ?1 represents predetermined criteria. The technique further includes completing the model when ?1<?1.
    Type: Grant
    Filed: February 11, 2016
    Date of Patent: September 5, 2017
    Assignees: NIKON CORPORATION, NIKON PRECISION INC
    Inventors: Jacek Tyminski, Raluca Popescu, Tomoyuki Matsuyama
  • Patent number: 9756237
    Abstract: A focus detection device includes: an image sensor that includes a plurality of focus detection pixel rows, each having a plurality of focus detection pixels and each outputting a pair of focus detection signals; a spatial accumulation unit that calculates spatially accumulated values by adding together pairs of focus detection signals output from a first predetermined number of focus detection pixel rows among the plurality of focus detection pixel rows; and a focus detection unit that detects a focusing condition at an optical system based upon the spatially accumulated values.
    Type: Grant
    Filed: August 19, 2016
    Date of Patent: September 5, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yosuke Kusaka
  • Patent number: 9753268
    Abstract: Provided are a reticle unit that can secure excellent visibility of a reticle regardless of the background and an optical instrument including the reticle unit. A reticle unit 30 used in an optical instrument such as a rifle scope 50 includes: a reflector 32 provided with a concave portion 32b on one of surfaces of a plate-like optical member, wherein at least part of a side surface of the concave portion 32b is a reflection surface 32c; a light source 33 that is arranged laterally to the reflector 32 and that emits light; and a light collector 34 that is arranged between the light source 33 and the reflector 32 and that collects the light from the light source 33 to guide the light to the reflection surface 32c, wherein at least part of the light incident on the reflection surface 32c is totally reflected by the reflection surface 32c and emitted from the other surface of the reflector 32.
    Type: Grant
    Filed: October 21, 2011
    Date of Patent: September 5, 2017
    Assignee: NIKON VISION CO., LTD.
    Inventors: Satoshi Arai, Kenji Shikama, Yosuke Miyazaki
  • Patent number: 9756253
    Abstract: An imaging device includes an imaging portion that images a subject; a positional information acquisition portion that acquires positional information of an imaging position; a control portion which acquires information on the subject based on the positional information, and displays image data of the subject and the information on the subject on a display portion; and a hold control portion that outputs a hold control signal, which holds the image data of the subject and the information on the subject, to the control portion.
    Type: Grant
    Filed: July 11, 2016
    Date of Patent: September 5, 2017
    Assignee: NIKON CORPORATION
    Inventor: Hideya Inoue
  • Patent number: 9753246
    Abstract: Provided is an eyepiece optical system including, in order from an observation object (Ob): a first lens (L11) having positive refractive power; a second lens (L12) which has negative refractive power and of which an observation object (Ob) side lens surface is concave; and a third lens (L13) which has positive refractive power and of which an eye point (EP) side lens surface is convex. The third lens (L13) is fixed on the optical axis with respect to the observation object (Ob) when adjusting the diopter, and the following conditional expressions are satisfied: 0.65<R31/fe<1.30??(1) ?0.80<(R32+R31)/(R32?R31)<?0.10??(2) where fe denotes a focal length of the eyepiece optical system, R31 denotes a radius of curvature of the observation object (Ob) side lens surface of the third lens (L13), and R32 denotes a radius of curvature of the eye point (EP) side lens surface of the third lens (L13).
    Type: Grant
    Filed: April 1, 2015
    Date of Patent: September 5, 2017
    Assignee: Nikon Corporation
    Inventor: Taku Matsuo
  • Patent number: 9753308
    Abstract: A method for designing a spectacle lens includes: a determination step of determining at least one optimization condition to be used in optimization design of a spectacle lens in accordance with a prescription condition for the spectacle lens; a design step of designing at least one prototype lens by the optimization design corresponding to the at least one optimization condition determined in the determination step; a selection step of selecting a prototype lens to be provided as the spectacle lens from the at least one prototype lens designed in the design step; and a recording step of performing update recording, at a database in which a plurality of optimization conditions respectively correlated with a plurality of prescription conditions are recorded, an optimization condition that is correlated with the prescription condition for the spectacle lens to an optimization condition used in the optimization design of the prototype lens selected in the selection step.
    Type: Grant
    Filed: May 4, 2015
    Date of Patent: September 5, 2017
    Assignee: NIKON CORPORATION
    Inventors: Yukimasa Uchiyama, Masatomo Mizuno
  • Patent number: 9753271
    Abstract: An eyepiece lens (EL) used for a viewfinder optical system (VF) for viewing, using the eyepiece lens (EL), an image formed by an objective lens (OL), an image displayed by a display member, or an object, wherein an antireflection coating (101) is disposed on at least one surface among the optical surfaces constituting the eyepiece lens (EL), and the antireflection coating (101) includes at least one layer (101g) formed by a wet process.
    Type: Grant
    Filed: March 5, 2016
    Date of Patent: September 5, 2017
    Assignee: Nikon Corporation
    Inventors: Issei Tanaka, Hiroki Harada, Taku Matsuo
  • Publication number: 20170248853
    Abstract: An exposure method and apparatus for illuminating a pattern with an illumination system to expose a substrate through a projection system. The pattern is illuminated with illumination light with a light amount distribution in which an amount of light is larger in a pair of first areas and a pair of second areas than in an area other than the first and second areas on a pupil plane of the illumination system. The pair of the first areas being arranged outside an optical axis, the pair of the second areas being arranged on ten same straight line as the pair of the first areas are arranged on, and the pair of the second areas being arranged outside the pair of the first areas.
    Type: Application
    Filed: February 6, 2017
    Publication date: August 31, 2017
    Applicant: NIKON CORPORATION
    Inventors: Takehito KUDO, Shigeru HIRUKAWA
  • Patent number: 9749518
    Abstract: A focusing device comprises: an image capturing unit that captures a subject image formed via an optical system including a lens for executing focus adjustment and outputs an output signal; an edge detection unit that detects an edge signal among the output signal in correspondence to each color component among a plurality of color components contained in an image based upon the output signal; a calculation unit that calculates edge differential values each of which is a differential value of the edge signal in correspondence to the each color component; and a control unit that controls a moving direction along which the lens is to move based upon a comparison of the edge differential values.
    Type: Grant
    Filed: July 31, 2015
    Date of Patent: August 29, 2017
    Assignee: NIKON CORPORATION
    Inventors: Souichi Ueta, Yoshiyuki Suzuki
  • Patent number: 9749591
    Abstract: A focus position maintaining apparatus and a microscope are provided. The focus position maintaining apparatus can three-dimensionally correct a shift of a specimen in real time to maintain the focal point of an objective lens in a desired position in the specimen, and the microscope includes the focus position maintaining apparatus. The focus position maintaining apparatus includes a microlens array having a plurality of unit lenses and disposed in a position where the microlens array receives light from a specimen via an objective lens, a focus imaging device disposed in a position where the focus imaging device receives light from the unit lenses of the microlens array, and a control unit that outputs a signal for controlling operation of a focus actuator based on image formation positions of a plurality of images of the specimen detected by the focus imaging device via the microlens array.
    Type: Grant
    Filed: June 26, 2013
    Date of Patent: August 29, 2017
    Assignee: NIKON CORPORATION
    Inventor: Fumihiro Dake
  • Patent number: 9746787
    Abstract: A holding apparatus includes a holding portion that includes a first member which contacts a portion of an object, a second member which at least a portion thereof is fixed to a base, and a connection member which is configured to connect the first and second members, and a driving unit which drives the holding portion to change at least a posture of the first member, wherein a relative positional relationship between the first member and the second member is changed via the connection member.
    Type: Grant
    Filed: February 17, 2012
    Date of Patent: August 29, 2017
    Assignee: NIKON CORPORATION
    Inventor: Tomoki Miyakawa
  • Patent number: 9746781
    Abstract: A liquid immersion exposure apparatus exposes a substrate with an exposure beam via a liquid immersion area formed on a portion of a surface of the substrate. The apparatus includes a projection system, a first nozzle member having an aperture through which the exposure beam is projected, the first nozzle member having a liquid supply inlet and a liquid recovery outlet, a second nozzle member having a gas supply inlet via which a gas is supplied to a space surrounding the liquid immersion area during the exposure, a driving system which moves the second nozzle member relative to the first nozzle member, and a stage system having a holder which holds the substrate and which is movable relative to and below the projection system, the first nozzle member and the second nozzle member.
    Type: Grant
    Filed: June 25, 2014
    Date of Patent: August 29, 2017
    Assignees: NIKON CORPORATION, NIKON ENGINEERING CO., LTD.
    Inventors: Hirotaka Kohno, Takeshi Okuyama, Hiroyuki Nagasaka, Katsushi Nakano
  • Publication number: 20170242231
    Abstract: An illumination optical system includes: a beam splitter located near a conjugate position of a specimen and configured to split beams from a light source into a plurality of groups of beams having different splitting directions around an optical axis; a beam selector configured to select and transmit one group of beams from the plurality of groups of beams and that is rotatable with respect to the optical axis; and a ½ wavelength plate located near the beam selector and rotatable about the optical axis. The rotation angles of the ½ wavelength plate and of the beam selector about the optical axis are respectively set so that the polarization direction of the beam which has passed through the ½ wavelength plate is perpendicular to the splitting direction of the one group of beams that has been selected by the beam selector and split by the beam splitter.
    Type: Application
    Filed: May 9, 2017
    Publication date: August 24, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yumiko OUCHI
  • Publication number: 20170242229
    Abstract: Fluorescence is generated from an irradiated point on an inspection surface of a sample and the fluorescence is collected by an objective lens. Here, because of the magnification chromatic aberration of the objective lens, the fluorescence going out from the objective lens travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner. The fluorescence passes through a dichroic mirror into a plane-parallel plate after light of unnecessary wavelength is removed by a filter. The plane-parallel plate is driven in synchronization with the galvano-scanner by a computer and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens. Then, the fluorescence forms an image of the irradiation point of the inspection surface of the sample on a pin hole of a pin hole plate by using a collective lens.
    Type: Application
    Filed: April 10, 2017
    Publication date: August 24, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yuki YOSHIDA, Naoshi AIKAWA
  • Patent number: 9740090
    Abstract: An electronic device includes: a communication unit that is engaged in communication with an external device; a control unit that adds image information into transmission data to be transmitted to the communication unit; and a decision-making unit that makes a decision in correspondence to information indicating a recipient of the transmission data as to whether or not to allow photographing location information included in the image information to be included in the transmission data.
    Type: Grant
    Filed: June 23, 2015
    Date of Patent: August 22, 2017
    Assignee: NIKON CORPORATION
    Inventors: Chie Sogoh, Akira Ohmura
  • Patent number: 9743510
    Abstract: A substrate comprises: a first insulating layer; a second insulating layer having an elastic modulus that is different from an elastic modulus of the first insulating layer; and a core layer that is sandwiched by the first insulating layer and the second insulating layer, and is more rigid than the first insulating layer and the second insulating layer.
    Type: Grant
    Filed: December 22, 2014
    Date of Patent: August 22, 2017
    Assignee: NIKON CORPORATION
    Inventors: Ryoichi Suganuma, Hirofumi Arima, Satoru Suzuki, Takuya Sato
  • Patent number: 9740114
    Abstract: A substrate is exposed with an illumination light via a projection optical system. A stage that holds the substrate moves below the projection optical system. A measurement system measures positional information of the stage with a plurality of heads that face a grating section. Movement of the stage is controlled based on the positional information measured with the measurement system, while compensating for a measurement error of the measurement system that occurs due to the heads.
    Type: Grant
    Filed: February 15, 2017
    Date of Patent: August 22, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9741241
    Abstract: An electronic device may include a position detecting unit that detects a position; a time detecting unit that detects a time; a communicating unit that communicates with a first device provided separately from the position detecting unit and the time detecting unit; and an instructing unit that instructs, via the communicating unit, a first detecting unit provided to the first device to perform detection according to a detection result of the position detecting unit and the time detecting unit. An electronic device may include a position detecting unit that detects a position; a time detecting that detects a time; a physical amount detecting unit that detects a physical amount of an ambient environment according to a detection result position detecting unit and the time detecting unit; and a human detecting that performs detection about human according to a detection result of the physical amount detecting unit.
    Type: Grant
    Filed: June 11, 2014
    Date of Patent: August 22, 2017
    Assignee: NIKON CORPORATION
    Inventors: Kengo Mizui, Hisashi Tai, Takafumi Toyoda, Mayuko Ito, Yuki Kinouchi, Masakazu Sekiguchi
  • Patent number: 9743028
    Abstract: An imaging device has a sensor chip and a signal processing chip. The sensor chip includes a pixel array in which a plurality of pixels are arranged in a 2-dimensional matrix and a data output terminal group made up of a plurality of data output terminals which output analog signals of pixels for each pixel column of the pixel array. The signal processing chip includes a data input terminal group electrically coupled to the data output terminal group, a plurality of A/D converters which convert analog signals of pixels received by the data input terminal group into digital signals for each pixel column of the pixel array, and a control unit which controls operation of the plurality of A/D converters.
    Type: Grant
    Filed: November 9, 2015
    Date of Patent: August 22, 2017
    Assignee: NIKON CORPORATION
    Inventor: Masahiro Juen
  • Publication number: 20170235238
    Abstract: An exposure apparatus is capable of accurately performing an exposure process and a measurement process based on a liquid immersion method. The exposure apparatus, which forms a liquid immersion area of a liquid on an image surface side of a projection optical system, and exposes a substrate via the projection optical system and the liquid of the immersion area, includes a measuring device which measures at least one of a property and composition of the liquid for forming the liquid immersion area. The measuring device includes a resistivity meter to obtain information on a specific resistance value of the immersion liquid.
    Type: Application
    Filed: May 3, 2017
    Publication date: August 17, 2017
    Applicant: NIKON CORPORATION
    Inventor: Kenichi SHIRAISHI
  • Publication number: 20170234972
    Abstract: A distance detection device is provided, including a calculating unit that calculates a distance to a detection target using a length of time until floodlighted light is received by a light-receiving unit; a first detecting unit that detects whether detection target changing operation is being performed; a second detecting unit that detects variation in the distance calculated by the calculating unit; a shake correcting optical system that is driven based on a shake detection result and through which the floodlighted light passes; and a control unit that controls driving of the shake correcting optical system using an output from the first detecting unit and an output from the second detecting unit.
    Type: Application
    Filed: February 27, 2017
    Publication date: August 17, 2017
    Applicant: NIKON VISION CO., LTD.
    Inventor: Takao TAKIZAWA
  • Publication number: 20170234975
    Abstract: A distance detection apparatus includes: a detection unit which detects a time until when an output light is received by a light receiving unit; a computation unit which computes a distance to a detection target by using the time detected by the detection unit; an obtaining unit which obtains a predetermined range which is a range prone to a detection error due to a fog; and a determination unit which determines whether the distance to the detection target computed by the computation unit is included in the predetermined range.
    Type: Application
    Filed: February 27, 2017
    Publication date: August 17, 2017
    Applicant: NIKON VISION CO., LTD.
    Inventor: Takehito NONOMURA
  • Publication number: 20170234974
    Abstract: A distance detection apparatus including: a light output unit which outputs a light; a computation unit which computes a distance to a detection target by using a time until when the light output from the light output unit is received in a light receiving unit; a deblurring optical system which is driven based on a detection result of a blurring and through which the output light is transmitted; a detection unit which detects a position of the deblurring optical system; a storage unit which stores a predetermined range; a determination unit which determines whether the position detected by the detection unit is included in the predetermined range; and a control unit which controls a light output by the light output unit in accordance with a determination result of the determination unit.
    Type: Application
    Filed: February 27, 2017
    Publication date: August 17, 2017
    Applicant: NIKON VISION CO., LTD.
    Inventor: Masahiro MOCHIZUKI
  • Publication number: 20170235231
    Abstract: In corner sections of first to fourth quadrants whose origin point is a center of an upper surface of a stage, three each of two-dimensional heads are provided. The three each of two-dimensional heads include one first head and two second heads. The stage is driven, while measuring a position of the stage using three first heads that face a two-dimensional grating of a scale plate provided above the stage from the four first heads, and during the driving, difference data of measurement values of the two second heads with respect to the first head in a measurement direction are taken in for head groups to which the three first heads belong, respectively, and using the difference data, grid errors are calibrated.
    Type: Application
    Filed: May 3, 2017
    Publication date: August 17, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20170235237
    Abstract: A lithographic projection apparatus includes a projection system and a liquid confinement member extending along a boundary of a space under the projection system. The liquid confinement member has (i) a first opening facing downwardly via which a liquid is removed from a gap to be formed under the liquid confinement member, and (ii) a second opening facing downwardly via which fluid is removed from the gap to be formed under the liquid confinement member, the second opening being located radially outward of the first opening with respect to the space. The liquid in the space covers a portion of an upper surface of a substrate and the substrate is exposed through the liquid in the space.
    Type: Application
    Filed: May 3, 2017
    Publication date: August 17, 2017
    Applicant: NIKON CORPORATION
    Inventors: Andrew J. HAZELTON, Michael SOGARD
  • Patent number: 9734840
    Abstract: A signal-processing device includes a determination section that compares a frequency spectrum and a floor spectrum of an input audio signal to each other for each frequency bin and determines whether the input audio signal should be subjected to noise reduction processing or not for each of the frequency bins; and a noise reduction-processing section that subtracts a noise frequency spectrum from the frequency spectrum of the input audio signal for each of the frequency bins on the basis of the result determined by the determination section for each of the frequency bins.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: August 15, 2017
    Assignee: NIKON CORPORATION
    Inventors: Yoko Yoshizuka, Mitsuhiro Okazaki, Kosuke Okano
  • Patent number: D795939
    Type: Grant
    Filed: September 22, 2016
    Date of Patent: August 29, 2017
    Assignee: Nikon Corporation
    Inventor: Tomohiro Hoshi
  • Patent number: D795945
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: August 29, 2017
    Assignee: Nikon Corporation
    Inventor: Tomohiro Hoshi
  • Patent number: RE46551
    Abstract: A plurality of pixels PX include effective pixels and optical black pixels. Signal lines VL are provided corresponding to each column of the pixels PX and supplied with output signals of the pixels PX of the corresponding column. Clip transistors CL are provided corresponding to the respective signal lines VL and limit a potential of the corresponding vertical signal lines VL based on a gate potential. At least in a predetermined operating mode, a potential Vclip_dark is supplied to a gate of one of the clip transistors CL corresponding to at least one pixel column formed of the optical black pixels when reading a noise level from the pixels PX corresponding to the clip transistors CL and when reading a data level from the pixels PX corresponding to the clip transistors CL.
    Type: Grant
    Filed: February 2, 2016
    Date of Patent: September 12, 2017
    Assignee: NIKON CORPORATION
    Inventor: Toru Shima
  • Patent number: D797835
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: September 19, 2017
    Assignee: Nikon Corporation
    Inventors: Mitsuo Nakajima, Shu Suzuki