Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type

  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Patent number: 10151979
    Abstract: Within area where of four heads installed on a wafer stage, heads included in the first head group and the second head group to which three heads each belong that include one head different from each other face the corresponding areas on a scale plate, the wafer stage is driven based on positional information which is obtained using the first head group, as well as obtain the displacement (displacement of position, rotation, and scaling) between the first and second reference coordinate systems corresponding to the first and second head groups using the positional information obtained using the first and second head groups. By using the results and correcting measurement results obtained using the second head group, the displacement between the first and second reference coordinate systems is calibrated, which allows the measurement errors that come with the displacement between areas on scale plates where each of the four heads face.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: December 11, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10151983
    Abstract: An exposure apparatus includes a projection system having a final optical element via which an exposure beam is projected, an immersion member having an opening through which the exposure beam is projected, liquid supply ports and liquid recovery ports, a stage which is movable below and relative to the projection system and the immersion member, the stage including a holder configured to hold a substrate, and a detection system configured to detect a residual liquid on at least one of the substrate held on the holder of the movable stage and the movable stage. A liquid immersion area that covers only a portion of the upper surface of the substrate is formed on an upper surface of the substrate held on the holder of the movable stage, while supplying immersion liquid via the liquid supply ports and removing the immersion liquid via the liquid recovery ports.
    Type: Grant
    Filed: May 4, 2015
    Date of Patent: December 11, 2018
    Assignee: NIKON CORPORATION
    Inventors: Hiroaki Takaiwa, Takashi Horiuchi
  • Publication number: 20180349024
    Abstract: A display device includes: a display; and a controller that executes control so as to employ a first or second display mode. The first display mode includes first areas and first images; the second display mode includes second areas and second images; at least one of the second areas has a size different from sizes of the first areas or the number of the second areas is different from the number of the first areas; content of at least one image among the second images is different from content of the first images; and upon detecting at least one of an instruction for image selection issued to select at least one image among the first images and an instruction for area selection issued to select at least one area among the first areas, the controller switches from the first to the second display mode.
    Type: Application
    Filed: November 30, 2016
    Publication date: December 6, 2018
    Applicant: NIKON CORPORATION
    Inventors: Kaoru YOSHINO, Yuki KATSUMATA, Yoshiaki MIYAKAWA, Takashi KURIYAMA
  • Publication number: 20180348638
    Abstract: Within area where of four heads installed on a wafer stage, heads included in the first head group and the second head group to which three heads each belong that include one head different from each other face the corresponding areas on a scale plate, the wafer stage is driven based on positional information which is obtained using the first head group, as well as obtain the displacement (displacement of position, rotation, and scaling) between the first and second reference coordinate systems corresponding to the first and second head groups using the positional information obtained using the first and second head groups. By using the results and correcting measurement results obtained using the second head group, the displacement between the first and second reference coordinate systems is calibrated, which allows the measurement errors that come with the displacement between areas on scale plates where each of the four heads face.
    Type: Application
    Filed: August 8, 2018
    Publication date: December 6, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20180349675
    Abstract: An image processing apparatus includes a cell image acquisition unit configured to acquire a cell image captured with cells, a characteristic amount calculation unit configured to calculate a plurality of types of characteristic amounts on the cell image acquired by the cell image acquisition unit, and a correlation extraction unit configured to extract specific correlations from among a plurality of correlations among the characteristic amounts calculated by the characteristic amount calculation unit, based on likelihood of the characteristic amounts.
    Type: Application
    Filed: December 22, 2015
    Publication date: December 6, 2018
    Applicant: NIKON CORPORATION
    Inventors: Nobuhiko MAIYA, Masafumi YAMASHITA, Shoko YAMASAKI, Yosuke OTSUBO, Shunsuke TAKEI
  • Publication number: 20180348642
    Abstract: An exposure apparatus includes a liquid supply system having a supply path via which liquid is supplied to a space under a projection system; a liquid recovery system having a recovery path via which the supplied liquid is collected; a supply flow-meter provided at the supply path; a recovery flow-meter provided at the recovery path; a stage system having a movable stage apparatus on which a substrate is held; and a light receiver which is provided at the movable stage apparatus and which receives detection light via a light-transmissive member. The light-transmissive member has a liquid repellent upper surface from which the detection light is incident on the light-transmissive member. The substrate is exposed through liquid in a liquid immersion area formed on a portion of an upper surface of the substrate while supplying liquid via the supply path and collecting liquid via the recovery path.
    Type: Application
    Filed: August 7, 2018
    Publication date: December 6, 2018
    Applicant: NIKON CORPORATION
    Inventor: Kazuya ONO
  • Publication number: 20180351105
    Abstract: Laminate, method of manufacturing laminate, transistor, and method of manufacturing transistor using a composition having the following (a) to (c): (a) a first organic compound represented by Formula (1) below (R represents a hydrogen atom or a glycidyl group.
    Type: Application
    Filed: August 14, 2018
    Publication date: December 6, 2018
    Applicant: NIKON CORPORATION
    Inventors: Shohei KOIZUMI, Takashi Sugizaki, Kenji Miyamoto, Yusuke Kawakami
  • Publication number: 20180348653
    Abstract: A liquid immersion exposure apparatus exposes a substrate by irradiating an exposure beam on the substrate through liquid. The apparatus has a substrate stage which is provided with a substrate holding portion on which the substrate is held and is provided with a stage member having an upper surface. The upper surface of the stage member is provided adjacent to the upper surface of the held substrate with a gap between the held substrate and the stage member. A temperature adjustment system, a part of which is provided under the upper surface of the stage member, performs temperature adjustment for the stage member.
    Type: Application
    Filed: August 2, 2018
    Publication date: December 6, 2018
    Applicant: NIKON CORPORATION
    Inventors: Naoyuki KOBAYASHI, Soichi OWA, Shigeru HIRUKAWA, Yasuhiro OMURA
  • Publication number: 20180348643
    Abstract: An exposure apparatus includes a sensor for detecting light arriving from a projection optical system via a liquid provided on an image plane side of the projection optical system. The sensor includes a light transmissive member provided on a stage and a light receiving element for receiving light arriving from the projection optical system via the light transmissive member. The light transmissive member includes a first surface and a second surface. The first surface is arranged on the stage, comes into contact with the liquid, and is a surface on which the light arriving from the projection optical system is incident via the liquid. At least one of the first and second surfaces diffuses or diffracts the light having arrived from the projection optical system. The light receiving element receives the light that has been diffused or diffracted.
    Type: Application
    Filed: July 13, 2018
    Publication date: December 6, 2018
    Applicant: NIKON CORPORATION
    Inventors: Hisashi NISHINAGA, Ikuo HIKIMA, Mitsunori TOYODA, Masahiro NAKAGAWA, Tsuneyuki HAGIWARA, Yasushi MIZUNO, Naonori KITA, Osamu TANITSU, Nozomu EMURA
  • Publication number: 20180348652
    Abstract: A liquid crystal exposure apparatus is equipped with: a substrate holder that is disposed below a projection optical system and holds a substrate; a first drive section that moves the substrate holder along an XY plane; heads that measures the position information of the substrate holder; head stages that support the heads and are movable within the XY plane; and a second drive section that moves the head stages in the X-axis direction and the Y-axis direction, and the second drive section moves the head stages in the X-axis direction or the Y-axis direction when the substrate holder is moved in the X-axis direction or the Y-axis direction by the first drive section.
    Type: Application
    Filed: September 29, 2016
    Publication date: December 6, 2018
    Applicant: NIKON CORPORATION
    Inventor: Atsushi HARA
  • Patent number: 10149052
    Abstract: An electronic device includes a vibration generation unit configured to generate vibration and a switching unit configured to perform switching between a first mode for causing the vibration generation unit to generate the vibration on the basis of first vibration information including information indicating an amplitude and a frequency, and a second mode for causing the vibration generation unit to generate the vibration on the basis of second vibration information including information indicating an amplitude and a frequency, wherein the second vibration information is data obtained by reducing an amplitude of a predetermined frequency band in the first vibration information.
    Type: Grant
    Filed: May 26, 2016
    Date of Patent: December 4, 2018
    Assignee: NIKON CORPORATION
    Inventors: Satoshi Akasaka, Toshitsugu Il
  • Patent number: 10145806
    Abstract: An X-ray apparatus includes: an X-ray source that radiates X-rays upon an object to be measured; a frame upon which the X-ray source is mounted; an anti-vibration mechanism that attenuates vibration applied to the frame; and a shift mechanism that shifts the frame and the anti-vibration mechanism integrally together.
    Type: Grant
    Filed: December 12, 2013
    Date of Patent: December 4, 2018
    Assignee: NIKON CORPORATION
    Inventor: Toshihisa Tanaka
  • Publication number: 20180341185
    Abstract: An illumination optical apparatus illuminates an object with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light; and a polarization modulating member which modulates a polarization of the illumination light, the polarization modulating member being made of an optical material with optical activity and being arranged in the optical path on an incidence side of the optical integrator such that a direction of an optic axis of the optical material is coincident with a direction of an optical axis of the illumination optical apparatus. The polarization modulating member has a thickness profile varying with respect to azimuthal positions about the optical axis.
    Type: Application
    Filed: August 6, 2018
    Publication date: November 29, 2018
    Applicant: NIKON CORPORATION
    Inventors: Osamu TANITSU, Koji SHIGEMATSU, Hiroyuki HIROTA, Tomoyuki MATSUYAMA
  • Publication number: 20180340799
    Abstract: Provided is an encoder apparatus that is free from battery maintenance or has low frequency of battery maintenance. The encoder apparatus includes: a position detection system including: a scale; a light emitter that irradiates the scale with light; a light detector that changes a relative position thereof with the scale in response to movement of a mover; and a detector that detects position information on the mover based on a detection result of the light detector. The encoder apparatus also includes an electric signal generator that generates an electric signal in response to the movement of the mover; and a light emission adjuster that adjusts emission of light from the light emitter based on the electric signal.
    Type: Application
    Filed: July 16, 2018
    Publication date: November 29, 2018
    Applicant: NIKON CORPORATION
    Inventor: Masahiko GOTO
  • Publication number: 20180341187
    Abstract: An exposure apparatus exposes a substrate with illumination light via a projection optical system, and includes a stage disposed below the projection optical system and holds the substrate; an encoder system in which one of a grating section and a head is provided at the stage and the other of the grating section and the head is provided at a frame member disposed above the stage, on a lower end side of the projection optical system, and which irradiates the grating section with a measurement beam via the head and measures positional information of the stage with a plurality of the heads that face the grating section; and a controller coupled to the encoder system, that controls a drive system based on positional information measured with the encoder system while compensating for measurement error of the encoder system related to measurement direction of the positional information by the heads.
    Type: Application
    Filed: August 6, 2018
    Publication date: November 29, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20180340800
    Abstract: Provided is an encoder apparatus capable of reducing frequency of maintenance of a battery. An encoder apparatus includes: a position detection system including a detector that detects position information on a mover; an electric signal generator that generates an electric signal in response to movement of the mover; and a battery that supplies at least a part of power consumed by the position detection system in accordance with the electric signal generated by the electric signal generator.
    Type: Application
    Filed: July 16, 2018
    Publication date: November 29, 2018
    Applicant: NIKON CORPORATION
    Inventor: Masahiko GOTO
  • Publication number: 20180343759
    Abstract: An external accessory that can be attached to and detached from an electronic apparatus equipped with a power source unit includes: a first power receiving unit that receives power from the power source unit of the electronic apparatus; a second power receiving unit that receives power from the power source unit of the electronic apparatus; a decision-making unit that makes a decision as to whether or not the first power receiving unit is receiving power; a function execution unit that executes a predetermined function by using power received at one of the first power receiving unit and the second power receiving unit; and a control unit that engages the function execution unit in operation continuously when an affirmative decision is made by the decision-making unit, and engages the function execution unit in operation intermittently when a negative decision is made by the decision-making unit.
    Type: Application
    Filed: August 7, 2018
    Publication date: November 29, 2018
    Applicant: NIKON CORPORATION
    Inventors: Riichi HIGAKI, Koichiro KAWAMURA
  • Publication number: 20180341183
    Abstract: A liquid crystal exposure apparatus has: scales arranged apart from each other in the X-axis direction provided at a substrate holder holding a substrate; heads irradiating the scales with a measurement beam from the heads that can move in the Y-axis direction; and a measurement device that measures position of the heads in the Y-axis direction. The apparatus has a measurement system which measures position of the substrate holder in directions of three degrees of freedom within a plane, based on measurement information of at least three heads and measurements of the measurement device. The heads move off of one scale while the substrate holder is moved in the X-axis direction and moves to irradiate another scale adjacent to the one scale, and correction information to control movement of the substrate holder is acquired using the heads moving to irradiate another scale, based on measurements of at least three heads.
    Type: Application
    Filed: September 29, 2016
    Publication date: November 29, 2018
    Applicant: Nikon Corporation
    Inventor: Takachika SHIMOYAMA
  • Publication number: 20180343410
    Abstract: Provided is an ADC in which a plurality of pixel signals input through a vertical signal line of a solid-state image pickup apparatus are held in advance using some capacitors among a plurality of capacitors within the ADC. A potential of a node is generated by the respective pixel signals held in the capacitors. Thereafter, the potential of the node is changed by changing the voltages of counter electrodes of the capacitors, and the digital values of the pixel signals are generated by comparing the potential of the node with a predetermined potential.
    Type: Application
    Filed: August 1, 2018
    Publication date: November 29, 2018
    Applicant: NIKON CORPORATION
    Inventor: Takafumi KOMABA
  • Patent number: 10139737
    Abstract: When a transition from a first state where one stage is positioned at a first area directly below projection optical system to which liquid is supplied to a state where the other stage-is positioned at the first area, both stages are simultaneously driven while a state where both stages are close together in the X-axis direction is maintained. Therefore, it becomes possible to make a transition from the first state to the second state in a state where liquid is supplied in the space between the projection optical system and the specific stage directly under the projection optical system. Accordingly, the time from the completion of exposure operation on one stage side until the exposure operation begins on the other stage side can be reduced, which allows processing with high throughput. Further, because the liquid can constantly exist on the image plane side of the projection optical system, generation of water marks on optical members of the projection optical system on the image plane side is prevented.
    Type: Grant
    Filed: September 8, 2015
    Date of Patent: November 27, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10139736
    Abstract: A liquid immersion exposure apparatus includes a liquid immersion member which forms a liquid immersion space under an emitting surface of a last optical member. The exposure light is projected to a substrate through liquid in the liquid immersion space to expose the substrate while the substrate is moved in a scanning direction. The liquid immersion member includes (i) a first member having a liquid supply port and an opening through which the exposure light is projected, and (ii) a second member having a liquid recovery port facing downwardly and that is movable with respect to the first member. The liquid recovery port has a plurality of openings disposed in a four-sided shaped having four corners to surround the opening of the first member.
    Type: Grant
    Filed: October 17, 2017
    Date of Patent: November 27, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10142563
    Abstract: To generate multiple types of images of the same subject. An electronic apparatus includes a drive control unit that controls the drive of an image sensor, a division unit that divides an image capture region of the image sensor into at least first and second regions, and an image generation unit that generates a first image by capturing an image of the same subject in the first region and generates a second image by capturing an image of the same subject in the second region.
    Type: Grant
    Filed: July 4, 2013
    Date of Patent: November 27, 2018
    Assignee: NIKON CORPORATION
    Inventors: Takashi Shionoya, Toshiyuki Kanbara, Masakazu Sekiguchi
  • Patent number: 10139610
    Abstract: A catadioptric microscope objective color-corrected for any wavelength in 190 nm to 1000 nm operational range and containing primary spherical front-surface mirror devoid of a through-hole and rear-surface plane-parallel mirror, each of which mirrors has a corresponding reflective annular coating defining an aperture formed in such coating coaxially with the optical axis. The objective, devoid of a Mangin element, is configured such that for any optical field with a diameter smaller than about 50 microns the Strehl ratio is no lower than 0.0781, and/or longitudinal spherical aberration is no larger than 0.0008 mm, and/or the astigmatism is smaller than 0.0005 mm, and/or distortion is smaller than 0.012 percent within the operational range.
    Type: Grant
    Filed: October 25, 2016
    Date of Patent: November 27, 2018
    Assignee: NIKON CORPORATION
    Inventor: David M. Williamson
  • Patent number: 10139738
    Abstract: A controller of an exposure apparatus (1) controls a second drive system so that scanning exposure is performed via a projection optical system and liquid of a liquid immersion area, from an area located on one side in a first direction, of a plurality of areas of a substrate held by a second stage that is placed facing the projection optical system and (ii) controls the second drive system so that a third stage comes close to the second stage from the other side in the first direction, and the second and the third stages that have come close together move from the other side to the one side in the first direction in order to place the third stage to face the projection optical system instead of the second stage while substantially maintaining the liquid immersion area under the lens.
    Type: Grant
    Filed: August 25, 2017
    Date of Patent: November 27, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10139492
    Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
    Type: Grant
    Filed: February 27, 2017
    Date of Patent: November 27, 2018
    Assignee: Nikon Corporation
    Inventors: Mina A. Rezk, Anthony R. Slotwinski, Daniel G. Smith, Eric Peter Goodwin, Alexander Cooper, Thomas M. Hedges
  • Patent number: 10142599
    Abstract: An image capturing device includes: a plurality of first pixels that have a plurality of color components, and that generate first signals by photoelectrically converting incident light; a plurality of second pixels that generate second signals by photoelectrically converting light that has passed through the first pixels; and a drive unit that reads out the first signals from the first pixels, and that reads out the second signals from the second pixels at timings that are different from timings of reading out the first signals.
    Type: Grant
    Filed: July 17, 2014
    Date of Patent: November 27, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuki Kita
  • Publication number: 20180337209
    Abstract: An image-capturing element manufacturing method includes: preparing a first substrate having a plurality of pixels that are two-dimensionally continuously arrayed; preparing a second substrate having a plurality of circuit blocks that respectively have connection terminals to a power supply and a reference potential and that are electrically independent from each other, each of the plurality of circuit blocks having at least some of circuits to read out signals from the plurality of pixels; laminating the first substrate and the second substrate to electrically couple the plurality of circuit blocks and the plurality of pixels overlapping therewith; and cutting circuit blocks around at least one of the plurality of circuit blocks and pixels overlapping therewith to form a laminate in which the plurality of pixels are laminated onto the at least one of the plurality of circuit blocks.
    Type: Application
    Filed: July 30, 2018
    Publication date: November 22, 2018
    Applicant: NIKON CORPORATION
    Inventors: Tadashi NARUI, Toru TAKAGI
  • Publication number: 20180335597
    Abstract: A thermally regulated component is an optical element or chuck for holding an optical element, or a stage for same, or combination thereof. The component has first and second heat-transfer zones. The first has a first component surface that receives a heating influence such as incident electromagnetic radiation. The second has a second component surface. A conduit circuit extends in the component serially through the first and second heat-transfer zones, back to the first heat-transfer zone, and contains an electrically conductive liquid (e.g., liquid metal). A vibration-free pump (e.g., MFD pump) coupled to the conduit circuit induces flow of the liquid through the circuit. A heat-exchanger is in thermal contact, but not actual contact, with the second component surface. Thus, heat delivered to the second heat-transfer zone by the liquid flowing in the conduit circuit flows from the second component surface to the heat-exchanger.
    Type: Application
    Filed: July 30, 2018
    Publication date: November 22, 2018
    Applicant: Nikon Corporation
    Inventor: Michael R. Sogard
  • Patent number: 10133194
    Abstract: A stage device is equipped with a surface plate and a wafer stage which is mounted on the surface plate and has an exhausting port formed on a surface facing the surface plate. In a state where the wafer stage lands on the surface plate, an air chamber is formed in between the surface plate and the wafer stage. Pressurized gas blows out from the exhausting port provided at a stage main section into the air chamber, and self-weight of the wafer stage is cancelled by an inner pressure of the air chamber. This allows to the wafer stage which has stopped on the surface plate to be moved manually.
    Type: Grant
    Filed: October 2, 2013
    Date of Patent: November 20, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10136059
    Abstract: To reduce power consumed when the display magnification of an image is changed. A digital camera includes a display unit having a first display region in which a first image is displayed and a second display region in which a second image is displayed, an image capture unit having a first image capture region in which first image data indicating the first image is generated and a second image capture region in which second image data indicating the second image is generated, magnification change units that change the display magnifications of the first and second images displayed on the display unit, and an image capture control unit that when the magnification change units change the display magnifications, changes the charge accumulation conditions or reading conditions of the first and second image capture regions.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: November 20, 2018
    Assignee: NIKON CORPORATION
    Inventor: Akira Kinoshita
  • Patent number: 10132656
    Abstract: There is provided an encoder device to measure a relative moving amount between a first and second members. The encoder device includes: a reflective-type diffraction grating on the first member; a light source unit to radiate a measuring light; a first optical member on the second member; a first and second reflecting units on the second member that cause first and third diffracted lights generated via diffraction of the measuring light and having orders different from each other to come into the diffraction grating respectively, and cause second and fourth diffracted lights generated via diffraction of the first and third diffracted lights respectively to come into the first optical member; photo-detectors configured to detect interference lights between two diffracted lights and other light beam respectively; and a measuring unit to obtain the relative moving amount by using detection signals from the photo-detectors.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: November 20, 2018
    Assignee: NIKON CORPORATION
    Inventor: Zhigiang Liu
  • Patent number: 10133040
    Abstract: A first lens group (G1) having a positive refractive power, a second lens group (G2) having a negative refractive power, a third lens group (G3) having a positive refractive power, a fourth lens group (G4) having a negative refractive power, and a fifth lens group (G5) having a positive refractive power are arranged in order along an optical axis from an object, and distances between each lens group change when zooming, and the first lens group (G1) is composed of two lenses, and the following expression (1) is satisfied: 0.07<D1/fw<0.46 where D1 denotes a thickness on the optical axis of the first lens group (G1), and fw denotes a focal length of the zoom lens (ZL) in a wide-angle end state.
    Type: Grant
    Filed: May 21, 2016
    Date of Patent: November 20, 2018
    Assignee: Nikon Corporation
    Inventor: Atsushi Suzuki
  • Patent number: 10133189
    Abstract: A liquid immersion member is used in a liquid immersion exposure apparatus which exposes a substrate by exposure light via a first liquid between an emitting surface of an optical member and the substrate, and is capable of forming a liquid immersion space on an object movable below the optical member. The liquid immersion member includes a first member that is disposed at at least a portion of surrounding of the optical member; a second member that is capable of being opposite to the object and is movable outside an optical path of the exposure light; and a protection part that protects the optical member. The protection part decreases a change in pressure which the optical member receives from the liquid in the liquid immersion space.
    Type: Grant
    Filed: October 17, 2017
    Date of Patent: November 20, 2018
    Assignee: NIKON CORPORATION
    Inventors: Shinji Sato, Kenyo Odanaka
  • Patent number: 10133054
    Abstract: A biological specimen observation apparatus whereby observation of a biological specimen can be performed accurately. In macro observation, a biological change region is extracted from a macro image, a micro observation point corresponding to an extracted biological change region is registered, and an object for tracking is identified. In micro observation, it is judged from the micro image whether or not biological change has continued in the biological change region at the micro observation point, and the registered micro observation point is updated on the basis of this judgment result. It is possible to carry out both macro observation for detecting a biological change region and micro observation for observing the progress of growth of a partial minute region where biological change has been exhibited, and to carry out accurate observation of a biological specimen.
    Type: Grant
    Filed: July 27, 2016
    Date of Patent: November 20, 2018
    Assignee: NIKON CORPORATION
    Inventors: Hideo Kuroda, Hirotada Watanabe, Yoichi Wada, Yasujiro Kiyota, Takayuki Uozumi, Ryuji Koshiba
  • Patent number: 10136108
    Abstract: An imaging device includes a plurality of first pixels that includes pixels of a plurality of color components and generates a first signal from incident light, a plurality of second pixels that generates a second signal from light that has transmitted at least a part of the first pixels, and a signal generation unit that generates a signal obtained by combining the first signal and the second signal.
    Type: Grant
    Filed: August 23, 2017
    Date of Patent: November 20, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuki Aruga
  • Patent number: 10133184
    Abstract: A process for use in configuring a projection optics lithography system comprising providing a determination of pupil amplitude and phase optimization for the projection optics, for use in configuring the projection optics in accordance with the determination.
    Type: Grant
    Filed: April 25, 2012
    Date of Patent: November 20, 2018
    Assignee: NIKON CORPORATION
    Inventor: Donis G. Flagello
  • Patent number: 10133195
    Abstract: An exposure apparatus exposes a substrate with illumination light via a projection optical system, and includes a frame member, a mark detection system that detects a mark of the substrate, a mask stage system having a first movable body to hold a mask, a first encoder system having first heads that each irradiate a first measurement beam to a first grating section, a substrate stage system having a second movable body to hold the substrate, a second encoder system having second heads that each irradiate a second measurement beam to a second grating section, and a controller that controls driving of the first movable body and of the second movable body, based on measurement information of the first and second encoder systems. In each of an exposure operation and a detection operation, the positional information of the second movable body is measured by the second encoder system.
    Type: Grant
    Filed: September 17, 2014
    Date of Patent: November 20, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10132658
    Abstract: Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is measured with high accuracy by a surface position measuring system, without being affected by air fluctuations. In this case, since both of the encoder system and the surface position measuring system directly measure the upper surface of the movable body, simple and direct position control of the movable body can be performed.
    Type: Grant
    Filed: August 16, 2017
    Date of Patent: November 20, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10126518
    Abstract: A lens barrel in which tilt adjustment can be made depending on the position of a lens unit in the optical axis direction. This lens barrel includes: at least three guide bars provided so as to extend along the optical axis direction; a driving unit that respectively drives the at least three guide bars in the optical axis direction; a lens frame holding unit that holds an image-capturing lens, the lens frame holding unit being attached to at least three guide bars and being driven in the optical axis direction by the at least three guide bars; and a control unit that controls said at least three linear actuators so as to adjust the respective drive amounts in the optical axis direction of the at least three guide bars and to tilt the lens frame holding unit from a direction orthogonal to the optical axis.
    Type: Grant
    Filed: October 19, 2016
    Date of Patent: November 13, 2018
    Assignee: NIKON CORPORATION
    Inventor: Kunihiro Fukino
  • Patent number: 10128672
    Abstract: An electric device including: a connecting unit connected to a connection line supplying an electric power of a predetermined rating and transmitting and receiving an information; a charging unit conducting a charging of a charging battery connected to an own device, by the electric power supplied by the connection line; an electric supplying unit supplying an electric power to a recording medium storing an information; a reading-and-writing unit performing a reading-and-writing operation of the recording medium; and an electronic source controlling unit performing a control of the electric power supplied to the charging unit, when the reading-and-writing unit performs the reading-and-writing operation of the recording medium, according to an access request to the recording medium via the connection line.
    Type: Grant
    Filed: April 13, 2015
    Date of Patent: November 13, 2018
    Assignee: NIKON CORPORATION
    Inventor: Goro Kano
  • Patent number: 10126661
    Abstract: An exposure apparatus includes a projection system having an optical element via which an exposure beam is projected; an immersion area forming member having an opening through which the exposure beam is projected, the immersion area forming member having a liquid supply inlet facing downward, a liquid recovery outlet facing downward, and a liquid supply port disposed between the liquid supply inlet and the liquid recovery outlet; a frame by which the projection system and the immersion area forming member are supported; a first vibration isolator by which transmission of vibration from the frame to the projection system is limited; and a second vibration isolator by which transmission of vibration from the immersion area forming member to the frame is limited. A liquid immersion area is formed, using the immersion area forming member, on a portion of an upper surface of a substrate, which is exposed to the exposure beam.
    Type: Grant
    Filed: July 21, 2016
    Date of Patent: November 13, 2018
    Assignee: NIKON CORPORATION
    Inventor: Hideaki Hara
  • Patent number: 10126535
    Abstract: Comprising, in order from an object side: a first lens group G1 having positive refractive power; a second lens group G2 having negative refractive power; a third lens group G3 having positive refractive power; a fourth lens group G4 having positive refractive power; and a fifth lens group; upon zooming from a wide-angle end state to a telephoto end state, the distance between the first lens group G1 and the second lens group G2, the distance between the second lens group G2 and the third lens group G3, and the distance between the third lens group G3 and the fourth lens group G4, and the distance between the fourth lens group G4 and the fifth lens group G5 being varied, and the fifth lens group G5 being fixed in a position; and a predetermined conditional expression being satisfied, thereby providing a variable magnification optical system that has a high variable magnification ratio, is compact in size and has high optical performance, an optical apparatus, and a method for manufacturing the variable magnif
    Type: Grant
    Filed: April 30, 2015
    Date of Patent: November 13, 2018
    Assignee: Nikon Corporation
    Inventors: Akihiko Obama, Tomoyuki Sashima
  • Patent number: 10126566
    Abstract: An eyeglass lens design method includes: a prescription requirement-setting step in which prescription requirements for an eyeglass lens to be worn by an eyeglass wearer are set; a pattern setting step in which a plurality of patterns taking different values for at least one of; the prescription requirements for the eyeglass lens, a lens type, a progressive zone length, a wearing condition parameter pertaining to an eyeglass wearing condition in which the eyeglass wearer wears eyeglasses, a lifestyle/habit parameter pertaining to a lifestyle/habit of the eyeglass wearer and an optimization parameter used to control optimization of design for the eyeglass lens, are set; and a designing step in which eyeglass lens contours, each corresponding to one of the plurality of patterns having been set in the pattern setting step, are designed.
    Type: Grant
    Filed: August 18, 2016
    Date of Patent: November 13, 2018
    Assignee: NIKON CORPORATION
    Inventors: Masatomo Mizuno, Yukimasa Uchiyama
  • Patent number: 10126660
    Abstract: A multilayer film reflector is a multilayer film reflector that includes a first uniform period multilayer film, an adjustment layer, and a second uniform period multilayer film in this order from a substrate side. A combination of the following (a) to (c) is set to each region or each position within a reflection surface. (a) Reflection characteristics of the single first uniform period multilayer film, (b) reflection characteristics of the single second uniform period multilayer film, and (c) a film thickness of the adjustment layer.
    Type: Grant
    Filed: January 5, 2016
    Date of Patent: November 13, 2018
    Assignee: NIKON CORPORATION
    Inventors: Noriaki Kandaka, Katsuhiko Murakami
  • Patent number: 10126113
    Abstract: A spectroscope including: a spectral element that is configured to spectrally separate signal light; a first optical system that is configured to condense spectroscopic light spectrally separated by the spectral element; and an optical receiver that is configured to receive the spectroscopic light; wherein the optical receiver includes a plurality of regions different sensitivities with respect to a wavelength characteristics of the spectroscopic light.
    Type: Grant
    Filed: June 26, 2015
    Date of Patent: November 13, 2018
    Assignee: NIKON CORPORATION
    Inventors: Ryoichi Sataka, Hisao Osawa
  • Publication number: 20180321605
    Abstract: In a beam irradiation apparatus in which a movable body holds an object, a mark detection system detects a first mark on the movable body while moving the movable body in a first direction and changing an irradiation position of a measurement beam in the first direction, the mark detection system detects a second mark while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, a controller controls a position of the movable body in a second direction intersecting the first direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and a processing beam, based on results of the detection of the first and second marks.
    Type: Application
    Filed: June 27, 2018
    Publication date: November 8, 2018
    Applicant: NIKON CORPORATION
    Inventor: Akihiro UEDA
  • Publication number: 20180321601
    Abstract: A substrate stage apparatus provided with: a substrate holder that can be moved in a plane including an X-axis and a Y-axis; a head unit that can be moved synchronously with the substrate holder along the Y-axis; an encoder system for measuring substrate position, the system including a scale disposed on the substrate holder, and heads disposed on the head unit, and acquiring the X-axis direction and the Y-axis direction position information of the substrate holder on the basis of the output of the heads; an encoder system for measuring head-unit position, the system acquiring the Y-axis direction position information of the head unit; and a position control system that controls the position of the substrate holder within the XY plane on the basis of the output of the encoder system for measuring substrate position and the encoder system for measuring head-unit position.
    Type: Application
    Filed: July 10, 2018
    Publication date: November 8, 2018
    Applicant: NIKON CORPORATION
    Inventor: Akinori SHIRATO
  • Publication number: 20180324354
    Abstract: A display unit having an image display area for displaying an image, an operation unit by which a predetermined area in the image display area is designated in a movable manner, and a filter unit performing filter processing on the image corresponding to the predetermined area designated in the movable manner by the operation unit. Accordingly, it is possible to easily perform an operation of overlapping a plurality of filter effects, and a comparison of images based on the presence/absence of a filter effect, or different filter effects, without performing a complicated filter operation.
    Type: Application
    Filed: July 18, 2018
    Publication date: November 8, 2018
    Applicant: NIKON CORPORATION
    Inventors: Yoshiaki MIYAKAWA, Shigenori FUJIO
  • Patent number: D833973
    Type: Grant
    Filed: May 3, 2017
    Date of Patent: November 20, 2018
    Assignee: Nikon Corporation
    Inventors: Yasuo Kitsugi, Toshiaki Kobayashi, Hideaki Asano, Takasumi Murase, Masuhiro Yamasaki
  • Patent number: D835172
    Type: Grant
    Filed: January 13, 2018
    Date of Patent: December 4, 2018
    Assignee: Nikon Corporation
    Inventors: Chikara Fujita, Hiroyuki Asano