Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type

  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Patent number: 10261421
    Abstract: An exposure method for exposing a mask pattern, which includes plural types of patterns, with a high throughput and optimal illumination conditions for each type of pattern. The method includes guiding light from a first spatial light modulator illuminated with pulse lights of illumination light to a second spatial light modulator and exposing a wafer with light from the second spatial light modulator, accompanied by: controlling a conversion state of the second spatial light modulator including a plurality of second mirror elements; and controlling a conversion state of the first spatial light modulator including a plurality of first mirror elements to control intensity distribution of the illumination light on a predetermined plane between the first spatial light modulator and the second spatial light modulator.
    Type: Grant
    Filed: March 14, 2018
    Date of Patent: April 16, 2019
    Assignee: Nikon Corporation
    Inventor: Soichi Owa
  • Patent number: 10264146
    Abstract: An electronic device includes: a communication unit that performs communication with an external device; and a control unit that issues a command to the external device via the communication unit, on the basis of at least one of capacity of the external device, and capacity of the electronic device.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: April 16, 2019
    Assignee: NIKON CORPORATION
    Inventors: Nobuhiro Fujinawa, Setsu Mitsuhashi, Masakazu Sekiguchi, Takashi Kuriyama, Hiroto Nagamine, Masami Takemoto, Motoki Toyama
  • Patent number: 10261419
    Abstract: A stage mover for moving a stage relative to a stage base includes a conductor assembly and a magnet assembly. The conductor assembly is coupled to the stage base and a plurality of coil units with each coil unit having one or more coils. Each of the coils has a coil width. The magnet assembly interacts with the conductor assembly and includes a plurality of spaced apart magnet arrays. Each of the magnet arrays is spaced apart from each adjacent magnet array by an array gap that is at least equal to the coil width so that independent and symmetric magnetic flux distribution can be achieved for each of the magnet arrays.
    Type: Grant
    Filed: May 22, 2015
    Date of Patent: April 16, 2019
    Assignee: NIKON CORPORATION
    Inventors: Pai-Hsueh Yang, Takakuni Goto, Kazuhiro Hirano
  • Patent number: 10261301
    Abstract: Disclosed is a photographing control device, microscope and program that can simply confirm whether time lapse photography is being executed normally or not. A photographing control unit may control an operation of each apparatus of the microscope that performs processing related to the time lapse photography, in an execution mode for executing the time lapse photography, and a test mode for confirming an operation of the time lapse photography before the execution mode. The photographing control unit may also control the operation of each apparatus of the microscope in the execution mode according to information acquired in the test mode.
    Type: Grant
    Filed: June 27, 2016
    Date of Patent: April 16, 2019
    Assignee: NIKON CORPORATION
    Inventor: Takaaki Okamoto
  • Patent number: 10261292
    Abstract: A variable magnification optical system comprises, in order from an object side, a first lens group (G1) having positive refractive power, a second lens group (G2) having negative refractive power, and a third lens group (G3) having positive refractive power. The first lens group (G1) comprises a front group (G11) having negative refractive power and a rear group (G12) having positive refractive power. Focusing is carried out by moving the front group (G11). The first lens group (G1), the second lens group (G2) or at least a portion of the third lens group (G3) is moved in a direction having a directional component perpendicular to the optical axis as a vibration reduction lens group.
    Type: Grant
    Filed: January 29, 2017
    Date of Patent: April 16, 2019
    Assignee: Nikon Corporation
    Inventor: Takeru Uehara
  • Patent number: 10259104
    Abstract: A clamp for selectively inhibiting movement of a first object relative to a second object includes (i) a first clamp component coupled to the first object; (ii) a second clamp component coupled to the second object; and (iii) a fluid source that directs a fluid to the second clamp component to create a fluid bearing between the first clamp component and the second clamp component that allows for movement of the first clamp component relative to the second clamp component, and wherein the fluid source directs less fluid to the second clamp component to inhibit relative movement.
    Type: Grant
    Filed: October 28, 2014
    Date of Patent: April 16, 2019
    Assignee: NIKON CORPORATION
    Inventors: Fardad A. Hashemi, Travis D. Bow, Patrick Chang
  • Patent number: 10261304
    Abstract: An acquiring unit of a structured illuminating microscopy apparatus acquires at least two modulated images having the same wave number vector and the different phases; and a calculating unit of the structured illuminating microscopy apparatus, in a spatial frequency spectrum of each of at least the two modulated images acquired by the acquiring unit, separates a 0th-order modulating component and ┬▒first-order modulating components of observational light fluxes superimposed on arbitrary two observation points based on at least four observation values regarding the two observation points which are mutually displaced by an amount of the wave number vector.
    Type: Grant
    Filed: January 15, 2015
    Date of Patent: April 16, 2019
    Assignee: NIKON CORPORATION
    Inventors: Hiroshi Ohki, Tomoya Noda, Yosuke Okudaira
  • Publication number: 20190110009
    Abstract: A first circuit constituting a plurality of first circuit in a first direction, which stores a signal output from a pixel having a photoelectric conversion unit; a first control unit to which the plurality of first circuits are connected and outputs a first signal for outputting signals stored in the plurality of first circuits; a readout unit that reads out the signal output from the first circuit; a plurality of second circuits that are connected to the first control unit, a plurality of sets of the plurality of second circuits in the first direction; and a second control unit that controls a readout of the signal by the readout unit. The first control unit outputs a second signal to the plurality of second circuits together with the first signal; and the second control unit controls the readout of the signal by the readout unit, based on the second signal.
    Type: Application
    Filed: February 28, 2017
    Publication date: April 11, 2019
    Applicant: NIKON CORPORATION
    Inventor: Atsushi KOMAI
  • Publication number: 20190107688
    Abstract: An optical device includes: a plurality of microlenses arranged in a two-dimensional shape; and an image sensor having a plurality of pixel groups each containing a plurality of pixels, each of the plurality of pixel groups receiving light that has passed through each of the plurality of microlenses, wherein at least a part of the plurality of microlenses each limits a part of an incident light by an opening pattern formed at a microlense.
    Type: Application
    Filed: March 27, 2017
    Publication date: April 11, 2019
    Applicant: NIKON CORPORATION
    Inventor: Masao NAKAJIMA
  • Publication number: 20190107782
    Abstract: A movement area of a stage includes first-fifth areas. In the first area, three of four heads except for a first head respectively face three of four sections of a scale member except for a first section. In the second area, three of four heads except for a second head respectively face three of four sections except for a second section of the scale member. In the third area, three of four heads except for a third head respectively face three of four sections except for a third section of the scale member. In the fourth area, three of four heads except for a fourth head respectively face three of four sections of the scale member. In the fifth area, the four heads respectively face the four sections. The stage is moved from one of the first-fourth areas to another of those areas via the fifth area.
    Type: Application
    Filed: November 27, 2018
    Publication date: April 11, 2019
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20190107787
    Abstract: A first stage system having a first stage and a first drive system that moves the first stage is configured to hold a mask illuminated with illumination light. A second stage system having a second stage and a second drive system that moves the second stage is configured to hold a substrate. A measurement system having a first encoder system and a second encoder system measures positional information of the first and second stages, respectively. The second encoder system measures the positional information of the second stage with a plurality of heads that face a grating section. The first and second drive systems are controlled while compensating for a measurement error that occurs due to at least one of a gradient and a telecentricity of the head, based on correction information.
    Type: Application
    Filed: December 5, 2018
    Publication date: April 11, 2019
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Patent number: 10254519
    Abstract: Composing, in order from an object side, a first lens group G1 having negative refractive power, a second lens group G2 having positive refractive power and at least one lens group G3; upon varying magnification, a distance between the first lens group G1 and the second lens group G2, a distance between the second lens group G2 and a lens group G3 at an image side of the second lens group G2 and adjacent thereto, being varied; and a given conditional expression being satisfied; thereby providing a variable magnification optical system having a superb optical performance upon focusing, an optical device and a method for manufacturing the variable magnification optical system.
    Type: Grant
    Filed: January 29, 2017
    Date of Patent: April 9, 2019
    Assignee: Nikon Corporation
    Inventor: Kosuke Machida
  • Patent number: 10254662
    Abstract: An exposure apparatus is equipped with a fine movement stage that can hold a liquid with a projection optical system when the stage is at a position facing an outgoing surface of the projection optical system, and a blade that comes into proximity within a predetermined distance of the fine movement stage when the fine movement stage is holding the liquid with the projection optical system, and moves along with the fine movement stage while maintaining the proximity state, and then holds the liquid with the projection optical system after the movement. Accordingly, a plurality of stages will not have to be placed right under the projection optical system interchangeably, which can suppress an increase in footprint of the exposure apparatus.
    Type: Grant
    Filed: November 27, 2017
    Date of Patent: April 9, 2019
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10255491
    Abstract: To appropriately guide a subject person while protecting a privacy of the subject person despite use of an captured image of the subject person, a guidance system includes: an image capturing unit capable of capturing an image containing a subject person from a first direction; a detection unit that detects a size of an image of the subject person from the image captured by the image capturing unit; and a guidance unit that provides guidance for the subject person based on a detection result of the detection unit.
    Type: Grant
    Filed: October 25, 2011
    Date of Patent: April 9, 2019
    Assignee: NIKON CORPORATION
    Inventors: Masakazu Sekiguchi, Tetsuya Yamamoto, Masahiro Nei, Masamitsu Yanagihara, Satoshi Hagiwara, Isao Totsuka, Tomoyuki Matsuyama
  • Patent number: 10256263
    Abstract: An image sensor having a pixel part generating a signal in accordance with a light, a signal processing part performing signal processing on the signal read from the pixel part, and a power supply part connected to the signal processing part via a first wiring, and supplying a power supply to the signal processing part, and a storage package storing the image sensor, and having a second wiring configuring a parallel circuit by being connected to the first wiring. Accordingly, it is possible to solve a problem such that a wiring resistance is increased when a power supply circuit is configured inside of a solid state image sensor.
    Type: Grant
    Filed: June 13, 2017
    Date of Patent: April 9, 2019
    Assignee: NIKON CORPORATION
    Inventor: Takafumi Komaba
  • Patent number: 10254520
    Abstract: A variable magnification optical system of the present application comprises a first lens group (G1) disposed at a most object side, a first focusing lens group (Ga) disposed at an image side of the first lens group, a second focusing lens group (Gb) disposed at an image side of the first focusing lens group, and a rear lens group (Gr) disposed at an image side of the second focusing lens group; upon varying magnification, the first lens group being moved, and an interval between the first lens group and the first focusing lens group, an interval between the first focusing lens group and the second focusing lens group, and an interval between the second focusing lens group and the rear lens group being varied; upon focusing, the first focusing lens group and the second focusing lens group being moved along the optical axis with different trajectories from each other; and a given conditional expression being satisfied.
    Type: Grant
    Filed: January 29, 2017
    Date of Patent: April 9, 2019
    Assignee: Nikon Corporation
    Inventor: Hiroshi Yamamoto
  • Patent number: 10254654
    Abstract: An optical element assembly includes a base, and an element unit. The element unit includes (i) an optical element having an element central axis and an element perimeter; and (ii) an element connector assembly that couples the optical element to the base, the element connector assembly including a flexure assembly having an element flexure and a base flexure. A distal end of the element flexure is coupled to the optical element near the element perimeter, a distal end of the base flexure is coupled to the base, and a proximal end of the element flexure is coupled to a proximal end of the base flexure near the element central axis.
    Type: Grant
    Filed: December 15, 2017
    Date of Patent: April 9, 2019
    Assignee: NIKON CORPORATION
    Inventors: Shane R. Palmer, Michael Binnard
  • Publication number: 20190101738
    Abstract: It is aimed to prevent excitation light from leaking and being detected by the detector in a fluorescence microscope. A microscope includes an illumination optical system configured to illuminate a specimen with excitation light, a detector configured to detect fluorescence emitted from the specimen, and an observation optical system configured to guide the fluorescence to the detector. The observation optical system includes an optical filter having a variable wavelength characteristic, a light dispersing element configured to disperse, into light beams, light that has passed through the optical filter, and a light block plate configured to block at least some of the light beams resulting from the dispersion by the light dispersing element.
    Type: Application
    Filed: November 16, 2018
    Publication date: April 4, 2019
    Applicant: NIKON CORPORATION
    Inventors: Shota TSUCHIDA, Kei HORIE
  • Publication number: 20190104266
    Abstract: An image sensor is provided, the image sensor including: an imaging unit that has a first imaging region and a second imaging region, and outputs: a first pixel signal generated according to light incident on the first imaging region; and a second pixel signal generated according to light incident on the second imaging region; a first ramp generating unit that generates a first ramp signal; a second ramp generating unit that generates a second ramp signal; a first signal converting unit that converts the first pixel signal into a first digital image signal based on a result of comparison between the first pixel signal and the first ramp signal; and a second signal converting unit that converts the second pixel signal into a second digital image signal based on a result of comparison between the second pixel signal and the second ramp signal.
    Type: Application
    Filed: November 9, 2018
    Publication date: April 4, 2019
    Applicant: NIKON CORPORATION
    Inventors: Hironobu MURATA, Shiro TSUNAI, Takashi KURIYAMA
  • Patent number: 10246287
    Abstract: A processing system and a device manufacturing method that can perform manufacturing of an electronic device without stopping the entire manufacturing system, even when the processing state actually implemented on a sheet substrate by a processing device differs from the target processing state.
    Type: Grant
    Filed: September 3, 2015
    Date of Patent: April 2, 2019
    Assignee: NIKON CORPORATION
    Inventors: Yoshiaki Kito, Masaki Kato, Kei Nara, Masakazu Hori
  • Patent number: 10246368
    Abstract: To provide an optical glass which has a unique combination of anomalous dispersibility in a visible range with that in a near-infrared range. Provided is an optical glass containing respective components of SiO2 from 14 to 26% by mass, B2O3 from 9 to 16% by mass, and La2O3 from 10 to 42% by mass as essential components, and containing respective components of ZnO, Y2O3, ZrO2, Ta2O5, Li2O, and Na2O as optional components, and satisfying respective relationships of SiO2+B2O3 from 28 to 36% by mass, ZrO2+Ta2O5 from 6 to 16% by mass, La2O3+Y2O3+ZnO from 43 to 59% by mass, and Li2O+Na2O from 2 to 14% by mass.
    Type: Grant
    Filed: April 16, 2018
    Date of Patent: April 2, 2019
    Assignee: NIKON CORPORATION
    Inventors: Tatsunori Kawashima, Hiroshi Yamamoto, Kohei Yoshimoto
  • Patent number: 10250793
    Abstract: A focus adjustment device comprising: a first detector 221 which detects a focused state by a contrast detection system; second detectors 222a, 222b which detect a focused state by a phase difference detection system; and a control unit 21 which controls the first detector 221 and second detectors 222a, 222b so as to detect the focused state by the second detectors 222a, 222b when detecting the focused state by the first detector 221.
    Type: Grant
    Filed: June 28, 2012
    Date of Patent: April 2, 2019
    Assignee: NIKON CORPORATION
    Inventors: Hiroaki Takahara, Hiroyuki Tomita
  • Publication number: 20190094708
    Abstract: An exposure apparatus includes a projection optical system, a substrate stage which is movable and has a holder to hold a substrate, and a detection apparatus that detects whether liquid is present on a surface of an object, which is disposed lower than a front end of the projection optical system. The surface of the object includes a recessed portion formed on the object. The substrate is exposed by emitting exposure light onto the substrate through the projection optical system and a liquid in a liquid immersion area locally formed on a portion of an upper surface of the substrate.
    Type: Application
    Filed: November 30, 2018
    Publication date: March 28, 2019
    Applicant: NIKON CORPORATION
    Inventors: Hiroaki TAKAIWA, Takashi HORIUCHI
  • Publication number: 20190094133
    Abstract: An observation apparatus in this embodiment includes a light source configured to irradiate an observation target with light, and a processing unit configured to generate an image based on Rayleigh scattered light derived from ?(3) included in light obtained from the observation target.
    Type: Application
    Filed: November 29, 2018
    Publication date: March 28, 2019
    Applicant: NIKON CORPORATION
    Inventor: Naoki FUKUTAKE
  • Publication number: 20190098246
    Abstract: An electronic apparatus includes a processing unit that processes an image capture signal captured by an image capturing unit, a communication unit that is capable of transmitting the image capture signal captured by the image capturing unit to an external apparatus, and a determination unit that determines whether or not to transmit the image capture signal to the external apparatus, according to a capture setting for the image capturing unit.
    Type: Application
    Filed: November 29, 2018
    Publication date: March 28, 2019
    Applicant: NIKON CORPORATION
    Inventors: Sho KAMIDE, Yasuyuki MOTOKI, Kunihiro KUWANO, Teppei OKUYAMA, Takeo MOTOHASHI, Yae JOTAKI, Masakazu SEKIGUCHI
  • Publication number: 20190094686
    Abstract: A pulsed light generation device includes: an optical coupler having four input/output ports including a first port, a second port, a third port and a fourth port; a connection optical path that connects the third port with the fourth port; and a phase modulation element disposed in the connection optical path. The optical coupler branches pulsed light input to the first port and outputs the branched input pulsed light as first-direction pulsed light and second-direction pulsed light to the third port and to the fourth port. The modulation element applies phase modulation to either one of the first-direction pulsed light and the second-direction pulsed light, thereby outputs output pulsed lights through the first port and the second port, wherein a waveform of one of the pulsed lights output through the first port is different from a waveform of the other of the output pulsed lights output through the second port.
    Type: Application
    Filed: November 26, 2018
    Publication date: March 28, 2019
    Applicant: NIKON CORPORATION
    Inventor: Akira TOKUHISA
  • Patent number: 10241417
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: March 26, 2019
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Patent number: 10241312
    Abstract: The total internal reflection microscope has an illumination optical system that relays light from a light source with a relay optical system, forms an image of the light source on the incident pupil plane of the objective lens and irradiates a sample with the illumination light via an objective lens, has an angle adjustment mirror for changing the position of the image of the light source in a direction orthogonal to the optical axis, an optical detector for detecting the intensity of the returning illumination light reflected by the sample and collected by the objective lens, and a controller for determining the operation amount of the angle adjustment mirror, wherein the controller determines the operation amount of the angle adjustment mirror so that the illumination light is totally reflected at the sample based on the change in intensity of the returning light when the angle adjustment mirror is changed.
    Type: Grant
    Filed: April 29, 2016
    Date of Patent: March 26, 2019
    Assignee: NIKON CORPORATION
    Inventors: Takayuki Morita, Akitoshi Suzuki, Tomoko Kobayashi, Keita Masuda
  • Patent number: 10242903
    Abstract: In a carrier system, a chuck unit is used to hold a placed wafer from above, and vertical-motion pins use suction to hold the wafer from below. Then, the chuck unit and the vertical-motion pins are subsequently lowered until a bottom surface of the wafer comes into contact with a wafer table. During the lowering, the holding force exerted by the chuck unit and the arrangement of chuck members are optimally adjusted such that, as a result of the restraint of the wafer by the chuck unit and the vertical-motion pins, localized surplus-restraint is imparted to the wafer, and warping does not occur.
    Type: Grant
    Filed: November 27, 2013
    Date of Patent: March 26, 2019
    Assignee: NIKON CORPORATION
    Inventors: Go Ichinose, Taisuke Ibe
  • Patent number: 10244194
    Abstract: An imaging element includes: an imaging unit in which a plurality of pixel groups including a plurality of pixels that output pixel signals according to incident light are formed, and on which incident light corresponding to mutually different pieces of image information is incident; a control unit that controls, for each of the pixel groups, a period of accumulating in the plurality of pixels included in the pixel group; and a readout unit that is provided to each of the pixel groups, and reads out the pixel signals from the plurality of pixels included in the pixel group.
    Type: Grant
    Filed: October 25, 2017
    Date of Patent: March 26, 2019
    Assignee: NIKON CORPORATION
    Inventors: Shiro Tsunai, Hironobu Murata
  • Patent number: 10241314
    Abstract: A microscope apparatus includes a monitoring optical system, an imaging unit capturing an image of an observation target through the monitoring optical system to generate a plurality of images, a correction unit disposed in the optical monitoring system and correcting various aberrations which occur due to an observation condition, and a decision unit deciding a correction amount of the correction unit based on the plurality of images generated by the imaging unit, whereby an image deterioration ascribable to the aberration occurring due to the observation condition in the microscope apparatus is appropriately and easily corrected according to a use condition of the microscope apparatus.
    Type: Grant
    Filed: January 6, 2016
    Date of Patent: March 26, 2019
    Assignee: NIKON CORPORATION
    Inventors: Yumiko Ouchi, Takashi Kawahito
  • Publication number: 20190085004
    Abstract: A method for producing a fluorine-containing compound represented by General formula (1), wherein X represents a halogen atom or an alkoxy group, R1 represents a hydrogen atom or a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, Rf1 and Rf2 are each independently a fluorinated alkoxy group, and n represents an integer of 0 or more.
    Type: Application
    Filed: November 16, 2018
    Publication date: March 21, 2019
    Applicants: Kanagawa University, Nikon Corporation
    Inventors: Kazuo Yamaguchi, Yusuke Kawakami
  • Publication number: 20190089909
    Abstract: To generate multiple types of images of the same subject, an electronic apparatus includes a drive control unit that controls the drive of an image sensor, a division unit that divides an image capture region of the image sensor into at least first and second regions, and an image generation unit that generates a first image by capturing an image of the same subject in the first region and generates a second image by capturing an image of the same subject in the second region.
    Type: Application
    Filed: November 1, 2018
    Publication date: March 21, 2019
    Applicant: NIKON CORPORATION
    Inventors: Takashi SHIONOYA, Toshiyuki KANBARA, Masakazu SEKIGUCHI
  • Publication number: 20190089937
    Abstract: A plurality of kinds of color filters are disposed at each of pixels in accordance with a color array of two rows and two columns at a pixel section of a solid state imaging device. A first signal outputting circuit and a second signal outputting circuit each perform an addition read of electrical signals from the pixels of one/the other color included in a line to be read. An addition controlling circuit shifts sampling positions of the pixels which are added at a time of the addition read by a unit of the color array between the first signal outputting circuit and a second signal outputting circuit.
    Type: Application
    Filed: November 15, 2018
    Publication date: March 21, 2019
    Applicant: NIKON CORPORATION
    Inventor: Taku ARII
  • Publication number: 20190087941
    Abstract: An image smoothing unit smoothing a target image having pixel values which include a plurality of color components with a different plurality of smoothing degrees and generating a plurality of smoothed images; a calculation unit obtaining color differences being differences between a pixel value of a predetermined color component of the target image and pixel values of a color component of each of the smoothed images which is different from the predetermined color component at each pixel position of the target image, and calculating dispersions of the obtained color difference; a determination unit comparing sharpness of each of the color components of the target image based on the dispersions of the color differences and determining a color component having the highest sharpness; and an adjustment unit adjusting the sharpness of at least one of the color components of the target image based on the color component having the highest sharpness.
    Type: Application
    Filed: November 15, 2018
    Publication date: March 21, 2019
    Applicant: NIKON CORPORATION
    Inventor: Shinya EBIHARA
  • Publication number: 20190086812
    Abstract: An object is to provide an illumination apparatus that achieves illumination with a uniform illuminance distribution, while reducing a light quantity loss. An illumination apparatus for illuminating an illumination target surface has: a deflection member configured to form an illuminance distribution with a periodic pattern along a predetermined direction on a predetermined face traversing an optical path; and an optical integrator system having a plurality of wavefront division facets arrayed on the predetermined face and configured to form secondary light sources with use of a beam from the deflection member; the deflection member forms the illuminance distribution with the periodic pattern of an integer times or a unit fraction times an array period of the plurality of wavefront division facets.
    Type: Application
    Filed: November 15, 2018
    Publication date: March 21, 2019
    Applicant: NIKON CORPORATION
    Inventor: Hideki KOMATSUDA
  • Publication number: 20190086811
    Abstract: The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a polarization converting member which converts a polarization state of incident light to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil of the illumination optical system; and a phase modulating member which is arranged in the optical path on the illumination target surface side with respect to the polarization converting member and which transmits light from the pupil intensity distribution so as to convert linearly polarized light thereof polarized in a first direction, into required elliptically polarized light and maintain a polarization state of linearly polarized light polarized in a second direction (X-direction or Y-direction) obliquely intersecting with the first direction, in order to reduce influence of retardation caused by a subsequent optical system between the polarization converting member and the illumination targe
    Type: Application
    Filed: November 20, 2018
    Publication date: March 21, 2019
    Applicant: NIKON CORPORATION
    Inventor: Koji SHIGEMATSU
  • Publication number: 20190086815
    Abstract: When a transition from a first state where one stage is positioned at a first area directly below projection optical system to which liquid is supplied to a state where the other stage-is positioned at the first area, both stages are simultaneously driven while a state where both stages are close together in a direction is maintained. Therefore, it becomes possible to make a transition from the first state to the second state in a state where liquid is supplied in the space between the projection optical system and the specific stage directly under the projection optical system. Because the liquid can constantly exist on the image plane side of the projection optical system, generation of water marks on optical members of the projection optical system on the image plane side is prevented.
    Type: Application
    Filed: November 20, 2018
    Publication date: March 21, 2019
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Patent number: 10234766
    Abstract: A reticle protection device capable of keeping a reticle therein is provided with an inner pod capable of keeping the reticle therein; an outer pod capable of keeping the inner pod therein; an electroconductive movable contact portion provided on at least one of the inner pod and the outer pod and being capable of coining into contact with an electroconductive film of the reticle; and a leaf spring for achieving electric conduction of the contact portion to at least one of the inner pod and the outer pod. The reticle is kept in the inner pod and the inner pod is kept in the outer pod, thereby enabling stable grounding of the reticle.
    Type: Grant
    Filed: June 19, 2017
    Date of Patent: March 19, 2019
    Assignee: NIKON CORPORATION
    Inventor: Kazuya Ota
  • Patent number: 10237470
    Abstract: A focusing device comprises: an image capturing unit that captures a subject image formed via an optical system including a lens for executing focus adjustment and outputs an output signal; an edge detection unit that detects an edge signal among the output signal in correspondence to each color component among a plurality of color components contained in an image based upon the output signal; a calculation unit that calculates edge differential values each of which is a differential value of the edge signal in correspondence to the each color component; and a control unit that controls a moving direction along which the lens is to move based upon a comparison of the edge differential values.
    Type: Grant
    Filed: August 1, 2017
    Date of Patent: March 19, 2019
    Assignee: NIKON CORPORATION
    Inventors: Souichi Ueta, Yoshiyuki Suzuki
  • Patent number: 10234663
    Abstract: A variable magnification optical system comprises, in order from an object side: a first lens group having positive refractive power; a second lens group having negative refractive power; a third lens group having positive refractive power; a fourth lens group having positive refractive power; and a fifth lens group; upon varying magnification from a wide-angle end state to a telephoto end state, a distance between the first lens group and the second lens group, a distance between the second lens group and the third lens group, a distance between the third lens group and the fourth lens group and a distance between the fourth lens group and the fifth lens group being varied, the fifth lens group being moved with respect to the image plane; upon focusing the third lens group being moved along the optical axis; and the given conditional expressions being satisfied; thereby providing a small-size variable magnification optical system having a high variable magnification ratio and an excellent optical performance
    Type: Grant
    Filed: October 22, 2016
    Date of Patent: March 19, 2019
    Assignee: Nikon Corporation
    Inventors: Tomoyuki Sashima, Akihiko Obama
  • Patent number: 10234773
    Abstract: While a wafer stage linearly moves in a Y-axis direction, a multipoint AF system detects surface position information of the wafer surface at a plurality of detection points that are set at a predetermined distance in an X-axis direction and also a plurality of alignment systems that are arrayed in a line along the X-axis direction detect each of marks at positions different from one another on the wafer. That is, detection of surface position information of the wafer surface at a plurality of detection points and detection of the marks at positions different from one another on the wafer are finished, only by the wafer stage (wafer) linearly passing through the array of the plurality of detection points of the multipoint AF system and the plurality of alignment systems, and therefore, the throughput can be improved.
    Type: Grant
    Filed: August 16, 2017
    Date of Patent: March 19, 2019
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10234308
    Abstract: An encoder includes a scale unit having a substrate configured of a metal material and in which a pattern is formed on a first surface of the substrate and a passive state member is formed on a second surface different from the first surface in the substrate, and a detection unit that is configured to move relative to the scale unit and detects the pattern.
    Type: Grant
    Filed: March 1, 2017
    Date of Patent: March 19, 2019
    Assignee: NIKON CORPORATION
    Inventors: Shintaro Hikichi, Hideaki Sugiyama
  • Patent number: 10234770
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: June 7, 2013
    Date of Patent: March 19, 2019
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Patent number: 10234756
    Abstract: A modeling technique is provided. The modeling technique includes inputting tool parameters into a model and inputting basic model parameters into the model. The technique further includes generating a simulated, corrected reticle design using the tool parameters and the basic model parameters. An image of test patterns is compared against the simulated, corrected reticle design. A determination is made as to whether ?1<?1, wherein ?1 represents model vs. exposure difference and ?1 represents predetermined criteria. The technique further includes completing the model when ?1<?1.
    Type: Grant
    Filed: August 30, 2017
    Date of Patent: March 19, 2019
    Assignees: NIKON CORPORATION, NIKON PRECISION INC.
    Inventors: Jacek Tyminski, Raluca Popescu, Tomoyuki Matsuyama
  • Patent number: 10237457
    Abstract: Provided is a light receiving apparatus including a first light receiving unit; a body to which the first light receiving unit is secured; a first exterior portion that covers at least a portion of the body; and a mount that is capable of having an interchangeable lens attached thereto, to which the body and the first exterior portion are secured. Also provided is a light receiving apparatus, in which a body to which a first light receiving unit is secured and a first exterior portion that covers at least a portion of the body are secured to a mount that is capable of having an interchangeable lens attached thereto, and force placed on the first exterior portion is absorbed by the mount, such that transfer of the force placed on the first exterior portion to the body is reduced.
    Type: Grant
    Filed: September 15, 2015
    Date of Patent: March 19, 2019
    Assignee: NIKON CORPORATION
    Inventors: Tsuyoshi Okutani, Eiji Matsukawa, Yoshiaki Tanabe
  • Patent number: 10236259
    Abstract: A mark forming method includes: forming recessed portion on a mark formation area of a substrate; coating the recessed portion with a polymer layer containing a block copolymer, allowing the polymer layer in the recessed portion to form a self-assembled area; selectively removing a portion of the self-assembled area; and forming a positioning mark by using the self-assembled area from which the portion thereof has been removed.
    Type: Grant
    Filed: March 7, 2018
    Date of Patent: March 19, 2019
    Assignee: NIKON CORPORATION
    Inventors: Yuji Shiba, Tomoharu Fujiwara, Nobutaka Magome
  • Publication number: 20190079415
    Abstract: A stage device is equipped with a surface plate and a wafer stage which is mounted on the surface plate and has an exhausting port formed on a surface facing the surface plate. In a state where the wafer stage lands on the surface plate, an air chamber is formed in between the surface plate and the wafer stage. Pressurized gas blows out from the exhausting port provided at a stage main section into the air chamber, and self-weight of the wafer stage is cancelled by an inner pressure of the air chamber. This allows to the wafer stage which has stopped on the surface plate to be moved manually.
    Type: Application
    Filed: November 6, 2018
    Publication date: March 14, 2019
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20190079266
    Abstract: An image sensor includes: a photoelectric conversion film that performs photoelectric conversion on light having entered therein; at least two electrodes, including a first electrode and a second electrode, disposed at a surface of the photoelectric conversion film; and at least two electrodes, including a third electrode and a fourth electrode, disposed at another surface of the photoelectric conversion film.
    Type: Application
    Filed: January 5, 2017
    Publication date: March 14, 2019
    Applicant: NIKON CORPORATION
    Inventor: Yuki KITA
  • Patent number: RE47352
    Abstract: An adapter includes: a first mount section that is detachably attached to a camera body; a second mount section that is provided separately from the first mount section and is detachably attached to an interchangeable lens; and a power supply section that generates supply voltages of a third power supply system and a fourth power supply system, which are to be fed to the interchangeable lens mounted on the second mount section, from a second power supply system between a first power supply system of the camera body, which is mounted on the first mount section, and the second power supply system which is different from the first power supply system.
    Type: Grant
    Filed: June 16, 2016
    Date of Patent: April 16, 2019
    Assignee: NIKON CORPORATION
    Inventors: Hideaki Sugiyama, Fumiya Taguchi, Masanori Hasuda, Masafumi Oikawa, Noriaki Nakajima, Shunji Nagaya