Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type

  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Patent number: 9900529
    Abstract: An image processing apparatus, comprising: a receiving unit receiving a first image and image-capturing information associated with the first image; a determining unit determining, based on the image-capturing information, whether or not the first image is an image of a subject image in a view point direction corresponding to the aperture mask, using an output signal of an image sensor that includes a pixel array including first parallax pixels having the aperture mask with asymmetric directional properties in the long axis and short axis with respect to incident light flux of a single optical system and positioned to permit a portion of the light flux to pass; and an outputting unit outputting a corrected first image by carrying out a correction process having different frequency properties between the long axis direction and the short axis direction on the subject image in an unfocused region of the first image.
    Type: Grant
    Filed: February 10, 2015
    Date of Patent: February 20, 2018
    Assignee: NIKON CORPORATION
    Inventors: Kenichi Ishiga, Kiyoshige Shibazaki
  • Patent number: 9897437
    Abstract: There is provided a profile measuring apparatus, including: an irradiation section configured to irradiate a measurement light to a measurement area of the object; an imaging section configured to obtain an image of the measurement area; a table configured to place the object thereon; a coordinate calculation section configured to calculate a position of the measurement area based on an image detected by a detection section; and a positioning mechanism configured to drive and control a relative position of the imaging section and the table. The positioning mechanism calculates a relative position of the imaging section to the table, based on an information with respect to an edge line direction of a convex portion or an extending direction of a concave portion in the measurement area of the object having a repetitive concave-convex shape, to move at least one of the table and the imaging section.
    Type: Grant
    Filed: November 29, 2012
    Date of Patent: February 20, 2018
    Assignee: NIKON CORPORATION
    Inventor: Masaya Yamaguchi
  • Patent number: 9897790
    Abstract: A structured illumination device includes: a diffraction unit that diffracts light beams of a plurality of wavelengths that are emitted simultaneously or sequentially by a light source into a plurality of diffracted beams; and an optical system that forms interference fringes on a surface of a sample using the plurality of diffracted beams diffracted by the diffraction unit, the optical system including a first optical system and a second optical system that focuses the plurality of diffracted beams at positions on or near a pupil plane of the first optical system, and a magnification characteristic dY(?) of the second optical system satisfying the condition of (fo·nw?af?/P)?dY(?)?(fo·NA?af?/P), where a=1 (for M=1, 2) or a=2 (for M=3).
    Type: Grant
    Filed: January 15, 2016
    Date of Patent: February 20, 2018
    Assignee: NIKON CORPORATION
    Inventors: Hiroaki Nakayama, Yumiko Ouchi
  • Patent number: 9896370
    Abstract: An optical ceramic material heat treatment apparatus, comprising: a furnace body that is capable to contain an optical ceramic material to be heat treated in the inside thereof; a temperature drop control heater that generates heat during dropping a temperature of the optical ceramic material; a refrigerant intake unit that introduces a refrigerant into the inside of the furnace body to flow the refrigerant therein; and a control unit that controls the temperature drop rate, wherein the temperature drop control heater is arranged in the inside of the furnace body and/or in the refrigerant intake unit, the control unit controls at least one of an amount of heat generation of the temperature drop control heater, and a flow rate of the refrigerant in the inside of the furnace body to control a temperature drop rate at the optical ceramic material or in the vicinity thereof to be kept in a predetermined profile.
    Type: Grant
    Filed: September 3, 2013
    Date of Patent: February 20, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuta Hara
  • Publication number: 20180046066
    Abstract: An interchangeable lens to be detachably attached to a camera body, that includes a holding unit at which a plurality of contacts is arranged, the interchangeable lens includes: a first communication contact system arranged at the holding unit; and a second communication contact system different from the first communication contact system, arranged at the holding unit at a position different from a position at which the first communication contact system is arranged. The fourth contact is arranged at a position closer to the second communication contact system than the first contact, the second contact, and the third contact are, and the seventh contact and the eighth contact are arranged at positions closer to the first communication contact system than the fifth contact and the sixth contact are.
    Type: Application
    Filed: October 26, 2017
    Publication date: February 15, 2018
    Applicant: NIKON CORPORATION
    Inventors: Kazuharu IMAFUJI, Masafumi OIKAWA
  • Publication number: 20180045660
    Abstract: The X-ray inspection device includes a radiation source that irradiates X-rays toward a specimen that is rotated; a detector that detects transmitted X-rays irradiated by the radiation source, and passed through the specimen, and output a plurality of detection data for each angle of rotation; and a region extracting unit that extracts a region where the specimen is projected onto the detector, using the plurality of detection data.
    Type: Application
    Filed: October 24, 2017
    Publication date: February 15, 2018
    Applicant: NIKON CORPORATION
    Inventors: Hirotomo YASHIMA, Takahiro MICHIMOTO, Naoshi SAKAGUCHI
  • Publication number: 20180048837
    Abstract: An image-capturing device includes an image sensor. The image sensor includes an upper layer pixel group and a lower layer pixel group that receives the light fluxes from the subject that have passed through each pixel in the upper layer pixel group. The lower layer pixel group includes fourth, fifth and sixth pixels having fourth, fifth and sixth spectral sensitivities, respectively, that are complementary to first, second, and third spectral sensitivities, respectively, of the upper layer pixel group, being arranged in a two-dimensional pattern. Positions of first, second and third pixels in the upper layer pixel group and positions of the fourth, fifth and sixth pixels in the lower layer pixel group are determined such that the fourth, fifth and sixth pixels receive light fluxes that pass through the first, second and third pixels, respectively.
    Type: Application
    Filed: October 26, 2017
    Publication date: February 15, 2018
    Applicant: NIKON CORPORATION
    Inventor: Hironobu MURATA
  • Publication number: 20180046093
    Abstract: A movable body apparatus includes a base member, a movable body that is movable at least two-dimensionally, parallel to a predetermined plane, on the base member, a planar motor of a magnetic levitation method having a stator provided at the base member and a mover provided at the movable body, a measurement system that measures a position of the movable body in a direction parallel to the predetermined plane, and a controller. The controller limits movement of the movable body in the direction parallel to the predetermined plane by applying, to the movable body, a driving force generated by the planar motor, directed from the movable body to the base member in a direction intersecting the predetermined plane.
    Type: Application
    Filed: October 4, 2017
    Publication date: February 15, 2018
    Applicant: NIKON CORPORATION
    Inventor: Tomoki MIYAKAWA
  • Publication number: 20180046096
    Abstract: A measurement device has: a slider which holds a substrate and is movable parallel to the XY plane; a drive system that drives the slider; a position measurement system which emits beams from a head section to a measurement surface in which grating section are provided on the slider, which receives respective return beams of the beams from the measurement surface, and which is capable of measuring position information in at least directions of three degrees of freedom including the absolute position coordinates of the slider; a mark detection system that detects a mark on the substrate; and a controller which detects the marks on the substrate using the mark detection system while controlling the drive of the slider, and which obtains the absolute position coordinates of each mark based on the detection result of each mark and measurement information by the position measurement system at the time of detection.
    Type: Application
    Filed: August 9, 2017
    Publication date: February 15, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20180048842
    Abstract: An imaging element includes: an imaging unit in which a plurality of pixel groups including a plurality of pixels that output pixel signals according to incident light are formed, and on which incident light corresponding to mutually different pieces of image information is incident; a control unit that controls, for each of the pixel groups, a period of accumulating in the plurality of pixels included in the pixel group; and a readout unit that is provided to each of the pixel groups, and reads out the pixel signals from the plurality of pixels included in the pixel group.
    Type: Application
    Filed: October 25, 2017
    Publication date: February 15, 2018
    Applicant: NIKON CORPORATION
    Inventors: Shiro TSUNAI, Hironobu MURATA
  • Publication number: 20180044665
    Abstract: There is provided a method of manufacturing a protein array or peptide array suitable for an efficient screening of a functional protein or functional peptide. The method of manufacturing a protein array or peptide array includes the steps of: (a) preparing a nucleic acid immobilized on a solid support and a cell-free synthesis system in a reactor, in which a reactor array includes the reactor having a specific aperture shape and a protein capture molecule or a peptide capture molecule provided on at least a portion of wall surface and bottom surface in the reactor; and (c) synthesizing a protein or peptide from the nucleic acid using the cell-free synthesis system and immobilizing the protein or peptide in the reactor.
    Type: Application
    Filed: October 13, 2017
    Publication date: February 15, 2018
    Applicants: THE UNIVERSITY OF TOKYO, NIKON CORPORATION
    Inventors: Takanori ICHIKI, Shingo UENO, Hisao OSAWA
  • Patent number: 9891539
    Abstract: An immersion projection optical system having, for example, a catadioptric and off-axis structure, reduces the portion of an image space filled with liquid (immersion 5 liquid), The projection optical system, which projects a reduced image of a first plane onto a second plane through the liquid, includes a refractive optical element (Lp) arranged nearest to the second plane. The refractive optical element includes a light emitting surface (Lpb) shaped to be substantially symmetric with respect to two axial directions (XY·axes) perpendicular to each other on the second plane. The light emitting surface has a central axis (Lpba) that substantially coincides with a central axis (40a) of a circle (40) corresponding to a circumference of a light entering surface (Lpa) of the refractive optical element. The central axis of the light emitting surface is decentered in one of the two axial directions (Y˜axis) from an optical axis (AX).
    Type: Grant
    Filed: May 10, 2016
    Date of Patent: February 13, 2018
    Assignee: NIKON CORPORATION
    Inventors: Yasuhiro Omura, Takaya Okada, Hiroyuki Nagasaka
  • Patent number: 9894281
    Abstract: To check image changes corresponding to changes made to image-capture conditions by causing display unit to display multiple images captured under different image-capture conditions. Digital camera includes: image-capture unit having multiple first image sensors and multiple second image sensors disposed therein, first image sensors configured to capture image under first image-capture conditions, second image sensors configured to capture image under second image-capture conditions different from first image-capture conditions, image-capture unit configured to output first image data generated based on subject image which entered first image sensors and second image data generated based on subject image which entered second image sensors; and control unit configured to display first image based on first image data and second image based on second image data on display unit in such manner that selection can be made between respective recording forms of first image data and second image data.
    Type: Grant
    Filed: September 30, 2013
    Date of Patent: February 13, 2018
    Assignee: NIKON CORPORATION
    Inventor: Takeshi Nishi
  • Patent number: 9894220
    Abstract: A display system has a (1) camera that includes a lens and outputs an image data; (2) a first display that includes a first display screen on which (i) a first image, based on the image data output by the camera, containing a part of a person is displayed and (ii) information indicating a position where the camera has output the image data is displayed; and (3) a second display that includes (i) a receiver which receives the image data transmitted from the camera and (ii) a second display screen that displays a second image based on the image data. The second display can be carried by the person while receiving the image data.
    Type: Grant
    Filed: April 18, 2016
    Date of Patent: February 13, 2018
    Assignee: NIKON CORPORATION
    Inventors: Yosuke Kusaka, Shoei Nakamura
  • Patent number: 9891043
    Abstract: There is provided a form measuring apparatus including: an imager configured to take an image of a object, an irradiator configured to irradiate a measurement light from a projection direction different from the direction along which the imager performs imaging to form a predetermined light amount distribution on the object, a reference light generator configured to generate a reference light to irradiate the object, and a detector configured to detect a target area for form measurement of the object based on a pickup image taken by the imager as the reference light is irradiated on the object.
    Type: Grant
    Filed: October 10, 2012
    Date of Patent: February 13, 2018
    Assignee: NIKON CORPORATION
    Inventor: Hiroshi Aoki
  • Patent number: 9894305
    Abstract: An image sensor includes a first photoelectric conversion unit that converts light incident through a first opening to an electric charge, a second photoelectric conversion unit that converts light incident through a second opening which is smaller than the first opening to an electric charge, and a signal output wiring that outputs a first signal generated by the electric charge converted by the first photoelectric conversion unit and a second signal generated by the electric charge converted by the second photoelectric conversion unit. The second photoelectric conversion unit is disposed between the second opening and the signal output wiring.
    Type: Grant
    Filed: February 22, 2017
    Date of Patent: February 13, 2018
    Assignee: NIKON CORPORATION
    Inventor: Hironobu Murata
  • Patent number: 9891531
    Abstract: In corner sections of first to fourth quadrants whose origin point is a center of an upper surface of a stage, three each of two-dimensional heads are provided. The three each of two-dimensional heads include one first head and two second heads. The stage is driven, while measuring a position of the stage using three first heads that face a two-dimensional grating of a scale plate provided above the stage from the four first heads, and during the driving, difference data of measurement values of the two second heads with respect to the first head in a measurement direction are taken in for head groups to which the three first heads belong, respectively, and using the difference data, grid errors are calibrated.
    Type: Grant
    Filed: May 3, 2017
    Date of Patent: February 13, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Publication number: 20180039185
    Abstract: An exposure apparatus exposes a substrate with illumination light via a liquid. A liquid immersion member of the exposure apparatus has a lower surface, a plurality of collection ports, and a plurality of supply ports. The lower surface has an opening through which illumination light passes. The collection ports are arranged at the lower surface to surround the opening, and the supply ports are arranged at the lower surface and between the opening and the collection ports to surround the opening, such that the liquid is supplied via the supply ports onto the substrate while the substrate is arranged opposite to a plane-convex lens of a projection optical system and such that the liquid is collected via the collection ports from the substrate.
    Type: Application
    Filed: October 4, 2017
    Publication date: February 8, 2018
    Applicant: NIKON CORPORATION
    Inventor: Akimitsu EBIHARA
  • Publication number: 20180039186
    Abstract: A liquid immersion exposure apparatus includes a liquid immersion member which forms a liquid immersion space under an emitting surface of a last optical member. The exposure light is projected to a substrate through liquid in the liquid immersion space to expose the substrate while the substrate is moved in a scanning direction. The liquid immersion member includes (i) a first member having a liquid supply port and an opening through which the exposure light is projected, and (ii) a second member having a liquid recovery port facing downwardly and that is movable with respect to the first member. The liquid recovery port has a plurality of openings disposed in a four-sided shaped having four corners to surround the opening of the first member.
    Type: Application
    Filed: October 17, 2017
    Publication date: February 8, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20180039187
    Abstract: A liquid immersion lithography apparatus includes a projection system having a final optical element and a nozzle member having a first opening disposed on a first side of the final optical element and from which an immersion liquid is supplied, a second opening disposed on a second side of the final optical element and from which the immersion liquid is recovered, and a liquid recovery portion disposed to surround a path of an exposure beam and from which the immersion liquid is recovered. A tank is fluidicly connected to the liquid recovery portion of the nozzle member. During exposure of a substrate to the exposure beam, an upper surface of the substrate faces the liquid recovery portion, and the immersion liquid is supplied from the first opening while performing liquid recovery from the second opening and the liquid recovery portion.
    Type: Application
    Filed: October 18, 2017
    Publication date: February 8, 2018
    Applicant: NIKON CORPORATION
    Inventors: Alex Ka Tim POON, Leonard Wai Fung KHO
  • Publication number: 20180039827
    Abstract: To determine the state of a subject person with a simple structure, an image determining device includes: an imaging unit that captures an image from a first direction, the image including the subject person; a first detector that detects size information from the image, the size information being about the subject person in the first direction; a second detector that detects position-related information, the position-related information being different from the information detected by the first detector; and a determining unit that determines the state of the subject person, based on a result of the detection performed by the first detector and a result of the detection performed by the second detector.
    Type: Application
    Filed: October 6, 2017
    Publication date: February 8, 2018
    Applicant: NIKON CORPORATION
    Inventors: Tetsuya YAMAMOTO, Masahiro NEI, Isao TOTSUKA, Tomoyuki MATSUYAMA, Masamitsu YANAGIHARA, Satoshi HAGIWARA, Masakazu SEKIGUCHI
  • Publication number: 20180039189
    Abstract: A liquid immersion exposure apparatus includes a liquid immersion member which forms a liquid immersion space on an object disposed opposite to an emitting surface of an optical member. The liquid immersion member includes (i) a first member that has a first liquid supply port and a first opening through which the exposure light is projected, (ii) a second member that has a first liquid recovery port facing downwardly and that is movable with respect to the first member, and (iii) a gas supply port arranged radially outward of the first liquid recovery port with respect to a path of the exposure light. The first liquid recovery port has a plurality of openings disposed in a four-sided shape to surround the first opening of the first member. The second member is movable relative to the first member in a direction perpendicular to an optical axis of the optical member.
    Type: Application
    Filed: October 17, 2017
    Publication date: February 8, 2018
    Applicant: NIKON CORPORATION
    Inventor: Shinji SATO
  • Publication number: 20180039190
    Abstract: A lithography system is provided with: a measurement device measuring position information of marks on a substrate held in a first stage; and an exposure apparatus on a second stage, the substrate for which the position information measurement for the marks has been completed, performs alignment measurement to measure position information for part of marks selected from among the marks on the substrate, and performs exposure. The measurement device measures position information of many marks on the substrate to obtain higher-degree components of correction amounts of an arrangement of divided areas, and the exposure apparatus measures position information of a small number of marks on the substrate to obtain lower-degree components of the correction amounts of the arrangement of the divided areas and exposes the plurality of divided areas while controlling the position of the substrate by using the obtained lower-degree components and the higher-degree components obtained by the measurement device.
    Type: Application
    Filed: August 9, 2017
    Publication date: February 8, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20180039191
    Abstract: A measurement device is equipped with a surface plate, a slider which holds a substrate and which is movable relative to the surface plate, a drive system that moves the slider, a first position measurement system which measures the slider's first position information relative to the surface plate, a measurement unit having a mark detection system that detects a mark on a substrate, a second position measurement system which measures a relative second position information between the mark detection system and substrate, and a controller which obtains the first position information from the first position measurement system and second position information from the second position measurement system while controlling the slider's movement by the drive system, and obtains position information of a plurality of marks based on detection signals of the mark detection system having detected marks on the substrate, the first position information, and the second position information.
    Type: Application
    Filed: August 9, 2017
    Publication date: February 8, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Patent number: 9886027
    Abstract: A lens processing management system includes a lens processing section that processes a lens based on design data, an authentication section that is substantially attached to a lens material or a semi-finished lens product, and an authentication processing section that performs an authentication process for the processing of the lens using the authentication section.
    Type: Grant
    Filed: August 24, 2012
    Date of Patent: February 6, 2018
    Assignees: NIKON-ESSILOR CO., LTD., NIKON CORPORATION
    Inventors: Yoshinori Yoshida, Yukio Honma, Hideya Inoue, Koji Yamagaki
  • Patent number: 9885872
    Abstract: An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, and a polarization member made of optical material with optical rotatory power, which is arranged in the optical path on an incidence side of the optical integrator, and which changes a polarization state of the illumination light. The illumination light from the polarization member is irradiated onto the pattern through a pupil plane of the illumination optical apparatus.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: February 6, 2018
    Assignee: NIKON CORPORATION
    Inventor: Mitsunori Toyoda
  • Patent number: 9888136
    Abstract: An electronic device includes: a communication unit that performs communication with an external device; and a control unit that issues a command to the external device via the communication unit, on the basis of at least one of capacity of the external device, and capacity of the electronic device.
    Type: Grant
    Filed: June 2, 2016
    Date of Patent: February 6, 2018
    Assignee: NIKON CORPORATION
    Inventors: Nobuhiro Fujinawa, Setsu Mitsuhashi, Masakazu Sekiguchi, Takashi Kuriyama, Hiroto Nagamine, Masami Takemoto, Motoki Toyama
  • Patent number: 9888069
    Abstract: A portable electronic device includes a topology control section that controls a topology of a P2P network. The topology control section controls, when the portable electronic device functions as a root node, acceptance or rejection of connection of another portable electronic device that functions as an non-associated node to each node under control of the portable electronic device, and controls, when the portable electronic device functions as a branch node or a leaf node, acceptance or rejection of connection of the other portable electronic device that functions as the non-associated node to the portable electronic device according to the control of a root node.
    Type: Grant
    Filed: November 18, 2014
    Date of Patent: February 6, 2018
    Assignee: NIKON CORPORATION
    Inventors: Koji Nishigaki, Shigehiro Yoshinaga
  • Patent number: 9888226
    Abstract: With a conventional stereoimage capturing device, it has been difficult to simply determine the present of a depth. An image capturing device includes an image capturing element in which a first parallax pixel group and a second parallax pixel group that output a first parallax image and a second parallax image, respectively, to cause a parallax are arranged at mutually different positions. The image capturing device computes a differential pixel value of each of a plurality of second parallax output pixels in the second parallax image positioned around a target pixel that is a first parallax output pixel of the first parallax image, the differential pixel value being computed with reference to the target pixel, and generates differential data in which a direction of each of the plurality of second parallax output pixels with reference to the target pixel is associated with the corresponding differential pixel value.
    Type: Grant
    Filed: November 5, 2013
    Date of Patent: February 6, 2018
    Assignee: NIKON CORPORATION
    Inventors: Kiyoshige Shibazaki, Susumu Mori, Muneki Hamashima
  • Patent number: 9885558
    Abstract: A position detecting apparatus includes a light source, which supplies a detecting light; a light-collecting optical system which collects the detecting light onto a diffracted light generating portion provided on the object; a light guiding optical system which guides, to a predetermined position, a diffracted measuring light generated from the diffracted light generating portion by receiving the detecting light and a reference light generated from a reference surface by receiving the detecting light; and a photodetector which is arranged at the predetermined position and which detects interference fringes generated by the diffracted measuring light and the reference light. Three-dimensional positional information of, for example, a mask pattern surface or an exposure surface of a photosensitive substrate can be highly accurately detected by a relatively simple construction.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: February 6, 2018
    Assignee: Nikon Corporation
    Inventors: Keiji Inada, Mikihiko Ishii, Tetsuya Koike
  • Patent number: 9885959
    Abstract: An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, a deflecting member arranged in the optical path on an incidence side of the optical integrator, which deflects the illumination light, a lens element arranged in the optical path between the deflecting member and the optical integrator, which distributes the illumination light in a region, on a pupil plane of the illumination optical apparatus, away from an optical axis of the illumination optical apparatus, and a polarization member arranged in the optical path between the lens element and the optical integrator, which changes a polarization state of the illumination light so that a polarization direction of the illumination light in the region is substantially coincident with a circumferential direction about the optical axis.
    Type: Grant
    Filed: May 9, 2013
    Date of Patent: February 6, 2018
    Assignee: NIKON CORPORATION
    Inventors: Takehito Kudo, Shigeru Hirukawa
  • Publication number: 20180031367
    Abstract: An integrated optical assembly is provided, with enhancements that are particularly useful when the integrated optical assembly forms part of a laser radar system. The integrated optical assembly produces a reference beam that is related to the optical characteristics of a scanning reflector, or to changes in position or orientation of the scanning reflector relative to a source. Thus, if the scanning reflector orientation were to shift from its intended orientation (due e.g. to thermal expansion) or if characteristics of the scanning reflector (e.g. the index of refraction of the scanning reflector) were to change on account of temperature changes, the reference beam can be used to provide data that can be used to account for such changes. In addition, if the scanning reflector were to be positioned in an orientation other than the orientation desired, the reference beam can be used in identifying and correcting that positioning.
    Type: Application
    Filed: October 9, 2017
    Publication date: February 1, 2018
    Applicant: Nikon Corporation
    Inventor: Daniel Gene Smith
  • Patent number: 9883095
    Abstract: A focus adjusting device which includes an edge detection unit that detects edges of a subject image for each color component forming an image including the subject image; a distribution detection unit that detects distributions of a focalized state and an unfocused state of the image based on the edges detected by the edge detection unit; and a control unit that moves a lens based on the distributions detected by the distribution detection unit, wherein the subject image is incident from an optical system having the lens, the control unit moves the lens, and thus the subject image is focused on.
    Type: Grant
    Filed: June 1, 2015
    Date of Patent: January 30, 2018
    Assignee: NIKON CORPORATION
    Inventor: Hayato Hokoi
  • Patent number: 9882340
    Abstract: A laser device includes: a laser light source which generates a laser light in a pulse waveform of preset predetermined frequency; intensity modulator which is driven with a transmittance waveform wherein transmittance changes at either the predetermined frequency or an integer-multiple frequency thereof and which extracts and outputs the laser light which is outputted from the laser light source; control unit which controls an operation of the intensity modulator; an amplifier which amplifies the laser light which is outputted from the intensity modulator; and a wavelength conversion optical element which converts a wavelength of the laser light which is amplified by the amplifier, wherein the control unit changes relative timing of the transmittance waveform with respect to the pulse waveform, thereby changing the pulse waveform of the laser light which is emitted from the intensity modulator, to output a pulse light of predetermined waveform from the wavelength conversion optical element.
    Type: Grant
    Filed: April 25, 2016
    Date of Patent: January 30, 2018
    Assignee: NIKON CORPORATION
    Inventor: Akira Tokuhisa
  • Publication number: 20180024442
    Abstract: An immersion lithography apparatus includes a projection system having a last optical element, a plurality of liquid supply openings that surround a path of exposure light that exits an end surface of the last optical element and face downwardly, and a plurality of liquid recovery openings that surround the path of the exposure light, are arranged radially outward of the liquid supply openings, and face downwardly. An upper surface of a substrate is opposite to the liquid supply openings and the liquid recovery openings. A portion of the upper surface of the substrate is covered with immersion liquid, which flows across the end surface of the last optical element. The substrate is exposed with the exposure light through the immersion liquid between the end surface of the last optical element and the upper surface the substrate.
    Type: Application
    Filed: October 3, 2017
    Publication date: January 25, 2018
    Applicant: NIKON CORPORATION
    Inventors: W. Thomas NOVAK, Andrew J. HAZELTON, Douglas C. WATSON
  • Publication number: 20180024079
    Abstract: An image reconstruction method, includes: generating differential data indicating a difference between detection data generated by detecting X-ray that passed through a measurement object by irradiating X-rays to the measurement object and estimate data generated by estimating X-rays that are assumed to have been passed through an estimated structure having been generated by estimating a shape of the measurement object; and generating an image using the differential data and the estimated structure.
    Type: Application
    Filed: February 9, 2015
    Publication date: January 25, 2018
    Applicant: NIKON CORPORATION
    Inventor: Atsushi YAMADA
  • Patent number: 9874817
    Abstract: An optical element assembly includes a base, and an element unit. The element unit includes (i) an optical element having an element central axis and an element perimeter; and (ii) an element connector assembly that couples the optical element to the base, the element connector assembly including a flexure assembly having an element flexure and a base flexure. A distal end of the element flexure is coupled to the optical element near the element perimeter, a distal end of the base flexure is coupled to the base, and a proximal end of the element flexure is coupled to a proximal end of the base flexure near the element central axis.
    Type: Grant
    Filed: August 26, 2014
    Date of Patent: January 23, 2018
    Assignee: Nikon Corporation
    Inventors: Shane R. Palmer, Michael Binnard
  • Patent number: 9874823
    Abstract: A purge cover is equipped whose upper end is connected to an illumination unit and the lower end has a pair of plate sections facing an upper surface of a reticle stage and a reticle via a predetermined clearance. Therefore, gaseous circulation can be substantially blocked via the clearance between the reticle stage and the plate sections. This allows a space which is almost airtight surrounded by the purge cover, the reticle stage and/or the reticle to be formed on the optical path of the illumination light that reaches the projection optical system from the illumination unit. Further, the space above which is almost airtight serves as a purge space that is purged with clean dry air and the like.
    Type: Grant
    Filed: September 14, 2015
    Date of Patent: January 23, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9874822
    Abstract: A controller inclines a movable body with respect to an XY plane at an angle ? in a periodic direction of a grating, based on a measurement value of an interferometer which measures an angle of inclination of the movable body to the XY plane, and based on a measurement value of an encoder system and information of angle ? before and after inclination, and computes an Abbe offset quantity of the grating surface with respect to a reference surface which serves as a reference for position control of the movable body in the XY plane. The controller drives the movable body, based on positional information of the movable body in the XY plane measured by the encoder system and a measurement error of the encoder system corresponding to an angle of inclination of the movable body to the XY plane due to Abbe offset quantity of the grating surface.
    Type: Grant
    Filed: August 14, 2014
    Date of Patent: January 23, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9874730
    Abstract: Composing, in order from an object side: a first lens group having positive refractive power; a second lens group having negative refractive power; a third lens group having positive refractive power; a fourth lens group having positive refractive power and a fifth lens group; upon zooming from a wide-angle end state to a telephoto end state, a distance between the first lens group and the second lens group, a distance between the second lens group and the third lens group, a distance between the third lens group and the fourth lens group and a distance between the fourth lens group and the fifth lens group being varied, and predetermined conditional expression being satisfied, thereby providing a small-size variable magnification optical system having a high zoom ratio and a high optical performance, an optical apparatus, and a method for manufacturing the variable magnification optical system.
    Type: Grant
    Filed: April 30, 2015
    Date of Patent: January 23, 2018
    Assignee: Nikon Corporation
    Inventors: Tomoyuki Sashima, Akihiko Obama
  • Publication number: 20180016176
    Abstract: A device for manufacturing SiO2—TiO2 based glass by growing a glass ingot upon a target by a direct method. The device includes the target, comprising a thermal storage portion that accumulates heat by being preheated, and a heat insulating portion that suppresses conduction of heat from the thermal storage portion in a direction opposite to the glass ingot.
    Type: Application
    Filed: September 26, 2017
    Publication date: January 18, 2018
    Applicant: NIKON CORPORATION
    Inventors: Toshio YOSHINARI, Tadahiko SAITO
  • Publication number: 20180017773
    Abstract: The microscope device includes an imager, an image processor, and a controller. In a first period, the controller causes excitation light to be emitted and causes the imager to image a fluorescent image from an activated fluorescent substance in a plurality of frame periods. In a second period, the controller causes a fiducial marker to be irradiated with auxiliary light and causes the imager to image a fluorescent image from the fiducial marker, causes irradiation with the excitation light in the second period to stop or causes the intensity thereof to be reduced to be lower than that in the first period, and causes irradiation with the auxiliary light in the first period to stop or causes the intensity thereof to be reduced to be lower than that in the second period. The image processor uses an imaging result obtained in the second period to correct at least a part of an imaging result obtained in the first period and uses at least a part of the corrected imaging result to generate one image.
    Type: Application
    Filed: September 26, 2017
    Publication date: January 18, 2018
    Applicant: NIKON CORPORATION
    Inventors: Wataru TOMOSUGI, Ryosuke KOMATSU
  • Publication number: 20180020153
    Abstract: An image sensor includes: a first light-receiving unit that: receives a modulated optical signal having being reflected on an image-capturing target and including a modulated component with an intensity modulated at a predetermined modulation frequency; and outputs a first electrical signal; a second light-receiving unit that: receives a reference optical signal with an intensity modulated in synchronization with the modulated optical signal; and outputs a second electrical signal; and a detecting unit that: is provided to a substrate stacked on a substrate including the first light-receiving unit; refers to the second electrical signal; and detects, from the first electrical signal, a third electrical signal corresponding to the modulated component.
    Type: Application
    Filed: September 27, 2017
    Publication date: January 18, 2018
    Applicant: NIKON CORPORATION
    Inventors: Wataru FUNAMIZU, Kazuya OKAMOTO
  • Publication number: 20180020200
    Abstract: Because conversion from an invisible wavelength band to a visible wavelength band has been performed arbitrarily on a device-by-device basis, the color gamut in the visible color space could not be utilized sufficiently. A first aspect of the present invention provides an image-capturing device including: an image-capturing unit that is photosensitive to light in an invisible band; a generating unit that generates invisible wavelength information defined based on a sensitivity characteristic, which is an output characteristic of the image-capturing unit, to an object light flux wavelength for conversion of image-capturing data generated from an output signal of the image-capturing unit into visible color space image data; and a processing unit that relates the invisible wavelength information to the image-capturing data.
    Type: Application
    Filed: September 26, 2017
    Publication date: January 18, 2018
    Applicant: NIKON CORPORATION
    Inventors: Junya HAGIWARA, Yusuke TAKANASHI, Kiyoshige SHIBAZAKI
  • Publication number: 20180019640
    Abstract: A drive apparatus includes a motor having a drive part that rotates a first shaft member; a transmission part that transmits rotation of the first shaft member to a second shaft member which is different from the first shaft member; a first detection device provided at the first shaft member to detect information regarding rotation of the drive part; a second detection device provided at the second shaft member to detect information regarding rotation of the transmission part; and a prevention part that prevents movement of foreign substance toward a detection part which includes at least one of the first detection device and the second detection device.
    Type: Application
    Filed: September 13, 2017
    Publication date: January 18, 2018
    Applicant: NIKON CORPORATION
    Inventors: Kenji OMATA, Takashi NAGASE
  • Patent number: D808257
    Type: Grant
    Filed: December 14, 2015
    Date of Patent: January 23, 2018
    Assignee: Nikon Corporation
    Inventors: Hideki Ito, Yuri Manabe, Chiori Saito, Suzuka Fujita, Toshimitsu Nojima, Seina Takahashi, Maki Shimizu, Yuki Nomura, Keiji Gohara
  • Patent number: D808260
    Type: Grant
    Filed: December 14, 2015
    Date of Patent: January 23, 2018
    Assignee: Nikon Corporation
    Inventors: Hideki Ito, Yuri Manabe, Chiori Saito, Suzuka Fujita, Toshimitsu Nojima, Seina Takahashi, Maki Shimizu, Yuki Nomura, Keiji Gohara
  • Patent number: D810810
    Type: Grant
    Filed: August 16, 2016
    Date of Patent: February 20, 2018
    Assignee: Nikon Corporation
    Inventors: Kenji Abe, Kenichi Soejima
  • Patent number: D810811
    Type: Grant
    Filed: August 16, 2016
    Date of Patent: February 20, 2018
    Assignee: Nikon Corporation
    Inventors: Makoto Imamizu, Kenji Abe, Yuki Kobayashi, Kenichi Soejima
  • Patent number: D810812
    Type: Grant
    Filed: August 16, 2016
    Date of Patent: February 20, 2018
    Assignee: Nikon Corporation
    Inventors: Kenji Abe, Shu Suzuki, Makoto Imamizu, Yuki Kobayashi, Kenichi Soejima