Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type
  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Publication number: 20240176248
    Abstract: An optical apparatus, which illuminates a first area with light from a light source while the first area is longer in a second direction intersecting a first direction than in the first direction, includes a collector optical member which is arranged in an optical path between the light source and the first area, and condenses the light from the light source to form a second area in a predetermined plane, the second area being longer in a fourth direction intersecting a third direction than in the third direction; and a first fly's eye optical member which is provided within the predetermined plane including the second area, and has a plurality of first optical elements guiding the light of the collector optical member to the first area.
    Type: Application
    Filed: February 6, 2024
    Publication date: May 30, 2024
    Applicant: NIKON CORPORATION
    Inventors: Hideki KOMATSUDA, Yoshio KAWABE
  • Publication number: 20240173773
    Abstract: A build apparatus builds a first structural layer by irradiating a first beam position, builds a first build object and irradiating the first build object, a second irradiation beam position builds a second build object. The build apparatus further builds a second structural layer by irradiating the first structural layer, a third irradiation beam position builds a third build object and by irradiating the third build object, a fourth irradiation beam position builds a fourth build object. At least one of a distance between first and second position and a distance between third and fourth position is shorter than a distance between second and third position. Thus, the build apparatus builds a structural object including the first and second structural objects and is inclined with respect to an optical axis direction.
    Type: Application
    Filed: March 24, 2021
    Publication date: May 30, 2024
    Applicant: NIKON CORPORATION
    Inventors: Kei SEKIGUCHI, Kazuki UENO, Fumika SHIKI, Ryo NAKAYAMA, Hiroki SASAKI, Tatsuya SUZUKI
  • Patent number: 11994811
    Abstract: In a beam irradiation apparatus in which a movable body holds an object, a mark detection system detects a first mark on the movable body while moving the movable body in a first direction and changing an irradiation position of a measurement beam in the first direction, the mark detection system detects a second mark while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, a controller controls a position of the movable body in a second direction intersecting the first direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and a processing beam, based on results of the detection of the first and second marks.
    Type: Grant
    Filed: October 7, 2022
    Date of Patent: May 28, 2024
    Assignee: NIKON CORPORATION
    Inventor: Akihiro Ueda
  • Patent number: 11994746
    Abstract: A zoom lens comprises, in order from an object: a first lens group (G1) having positive refractive power; a second lens group (G2) having negative refractive power; a third lens group (G3) having positive refractive power; a fourth lens group (G4) having negative refractive power; and a fifth lens group (G5) having positive refractive power, in which the first to the fifth lens groups (G1 to G5) each move in an optical axis direction upon zooming from a wide angle end state to a telephoto end state, at least a part of the fourth lens group (G4) is configured to serve as a focusing lens group to move in the optical axis direction upon focusing, the first lens group (G1) consists of two lenses, and the following conditional expression is satisfied. 0.30<GD3/ft<0.8 where, GD3 denotes a thickness of the third lens group (G3) on the optical axis, and ft denotes a focal length of the zoom lens in the telephoto end state.
    Type: Grant
    Filed: November 15, 2021
    Date of Patent: May 28, 2024
    Assignee: Nikon Corporation
    Inventor: Keiichi Nakamura
  • Publication number: 20240164635
    Abstract: An ophthalmic instrument including a light emitter, an optical system, and a control section. The light emitter includes a light source including at least one out of a first light source unit or a second light source unit that emits light for examining a subject eye. The light emitter is configured to emit light from the light source. The optical system guides light emitted from the light emitter onto a right-eye retina and/or onto a left-eye retina. The control section is configured to control the light emitter and the optical system such that the light is shone onto the right-eye retina and/or onto the left-eye retina.
    Type: Application
    Filed: January 31, 2024
    Publication date: May 23, 2024
    Applicant: NIKON CORPORATION
    Inventors: Hideki OBARA, Ken TOMIOKA, Shota MIYAZAKI
  • Patent number: 11989887
    Abstract: A processing system includes a machine tool including a measuring unit which outputs measurement information for calculating a shape of a processing object, a control unit which generates position information related to a position of the measuring unit at the time of measuring the processing object and outputs the generated position information and a generation time signal indicating a time at which the position information is generated, an acquisition unit which acquires the output position information and the generation time signal, an estimation unit which estimates the time at which the position information is generated on the basis of a time at which the acquisition unit acquires the generation time signal, and a shape calculation unit which calculates a shape of the processing object on the basis of the measurement information, the position information, and the time estimated by the estimation unit.
    Type: Grant
    Filed: December 25, 2017
    Date of Patent: May 21, 2024
    Assignee: NIKON CORPORATION
    Inventor: Tomoaki Yamada
  • Patent number: 11988822
    Abstract: The present invention relates to a microscope of which visibility, controllability and operability can be improved. In the microscope, an optical path and optical path of an image forming system are set so as to be perpendicular to each other when viewed from the top. In other words, in this microscope, there exists an ocular optical system that guides light, which propagates the optical path to optical path of the image forming system, to a user. The optical path is formed in a direction perpendicular to a direction of the light from a sample emitted from the ocular optical system to the user. The present invention can be applied to an inverted microscope.
    Type: Grant
    Filed: March 2, 2020
    Date of Patent: May 21, 2024
    Assignee: NIKON CORPORATION
    Inventors: Toru Murayama, Atsushi Takeuchi, Yumiko Ouchi, Yuki Yoshida
  • Publication number: 20240163584
    Abstract: An image sensor includes a first photoelectric conversion unit that converts light incident through a first opening to an electric charge, a second photoelectric conversion unit that converts light incident through a second opening which is smaller than the first opening to an electric charge, and a signal output wiring that outputs a first signal generated by the electric charge converted by the first photoelectric conversion unit and a second signal generated by the electric charge converted by the second photoelectric conversion unit. The second photoelectric conversion unit is disposed between the second opening and the signal output wiring.
    Type: Application
    Filed: January 12, 2024
    Publication date: May 16, 2024
    Applicant: NIKON CORPORATION
    Inventor: Hironobu MURATA
  • Publication number: 20240157641
    Abstract: Directed energy beam deflections are compensated by mapping pixel coordinates of an image of a patterning field to patterning field spatial coordinates. For example, electron beam scanning is compensated by imaging calibration features defined on a reticle to produce a mapping between pixel and physical coordinates. An electron beam is scanned to produce cathodoluminescence at a plurality of scan locations in a patterning field. With the pixel coordinate mapping, an image of the cathodoluminescence is used to determine compensated scan drive values. Other directed energy beam deflections can be similarly compensated.
    Type: Application
    Filed: March 4, 2022
    Publication date: May 16, 2024
    Applicant: NIKON CORPORATION
    Inventors: Jacek Kazimierz TYMINSKI, Michael Birk BINNARD
  • Publication number: 20240161395
    Abstract: Methods and systems for generating 3D models of surfaces that accurately reconstruct both the global structure of an object and its local features are described. The methods and systems generally operated by fusing point features from the point cloud data with voxel features extracted from voxelization procedures. Furthermore, the methods and systems utilize voxelization at multiple spatial resolutions. The use of point-voxel fusion and multiple spatial resolutions may permit the extraction of both global and local geometric features, increasing the accuracy of 3D modeling of objects.
    Type: Application
    Filed: November 8, 2023
    Publication date: May 16, 2024
    Applicants: Nikon Corporation, The Curators of the University of Missouri
    Inventors: Chuanmao Fan, Ye Duan, Bausan Yuan
  • Publication number: 20240164012
    Abstract: Provided is a method of manufacturing a metal wiring on a substrate, including the steps of: forming a first layer containing a first material in at least part on the substrate; forming a crack in the first layer to form the first layer having the crack; and forming a second layer containing a second material in the first layer having the crack.
    Type: Application
    Filed: January 25, 2024
    Publication date: May 16, 2024
    Applicant: NIKON CORPORATION
    Inventors: Shohei KOIZUMI, Yoshiaki KITO, Seiji KAWABATA, Tohru KIUCHI
  • Publication number: 20240163581
    Abstract: An imaging element includes: a first substrate including a plurality of pixels configured to output a signal based on charge obtained by photoelectric conversion; a second substrate including a conversion unit configured to convert at least a first signal output from a first pixel among the plurality of pixels and a second signal output from the first pixel after the first signal into digital signals; and a third substrate including a computing unit including a calculating unit configured to calculate evaluation values of first and second images generated on the basis of the first and second signals converted into digital signals by the conversion unit and a selecting unit configured to select data of at least one of the first and second images to be output to an outside on the basis of the evaluation values of the first and second images.
    Type: Application
    Filed: March 29, 2022
    Publication date: May 16, 2024
    Applicant: NIKON CORPORATION
    Inventors: Hiroki YAMAZAKI, Fumiki NAKAMURA
  • Patent number: 11982521
    Abstract: A method for measuring a spatial distortion of a target surface (110) of a workpiece (110A). Light is transmitted twice through a reference pattern-generator (104) and impinged upon a workpiece pattern-generator (108). Then, with an optical detector (116), first and second beams formed by the light as a result of interaction with two pattern- generators (104) (106) is acquired to produce a signal characterizing geometry of interference fringes formed at the detector (116) by the first and second beams. Indicia representing at least one of a type and a value of spatial distortion of the target surface (110) is generated and recorded. A system embodying the implementation of the method.
    Type: Grant
    Filed: February 22, 2018
    Date of Patent: May 14, 2024
    Assignee: Nikon Corporation
    Inventors: Daniel Gene Smith, Michael B. Binnard
  • Patent number: 11982868
    Abstract: A lens barrel and an imaging device which can be miniaturized, the lens barrel with a movable cylinder that moves along the optical axis with a change in focal length; first and second drive units in the movable cylinder; and first and second lens driven by the first and second drive units respectively to move along the optical axis relative to the movable cylinder. The movement amount of the first lens relative to the cylinder when the focal length is changed to a second focal length from a first state where the first lens is at a position closest to a subject with a first focal length is less than the movement amount of the first lens relative to the cylinder when the focal length is changed to the second focal length from a second state where the first lens is closer to an image plane than the first state.
    Type: Grant
    Filed: December 18, 2019
    Date of Patent: May 14, 2024
    Assignee: NIKON CORPORATION
    Inventors: Osamu Gomibuchi, Makoto Horikoshi, Mizuki Wayu, Tsuneo Watanabe, Kenichi Kitano
  • Patent number: 11982602
    Abstract: The present invention provides a fluidic device in which solutions of different concentrations can be easily obtained.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: May 14, 2024
    Assignee: NIKON CORPORATION
    Inventors: Ryo Kobayashi, Hirofumi Shiono
  • Patent number: 11980417
    Abstract: In an ophthalmology system, an right-eye imaged image is displayed on a display section for presentation to an observer through an optical unit and a reflection member. A left-eye imaged image is also displayed on a display section for presentation to an observer through an optical unit and a reflection member. A separation between the left and right imaged images is made wider than a spacing between the left and right optical units. This enables image presentation with the optical axes for the observer viewing the images intersecting in front so as to cause a convergence angle to arise.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: May 14, 2024
    Assignee: NIKON CORPORATION
    Inventors: Tomohiro Kawasaki, Ryoichi Sataka, Masahiro Mizuta
  • Publication number: 20240153078
    Abstract: Image processing performed by a processor and including acquiring a first fundus image of an examined eye, acquiring a position for acquiring a tomographic image of the examined eye's fundus, acquiring a second fundus image of the examined eye, determining the acquired position is included in a specific range of the first fundus image, and computing a first movement amount of the examined eye in a case in which the acquired position is included in the specific range, using first registration processing to positionally align the first fundus image and the second fundus image, and computing a second movement amount of the examined eye in a case in which the acquired position falls outside the specific range, using second registration processing to positionally align the first fundus image and the second fundus image, the second registration processing being different from the first registration processing.
    Type: Application
    Filed: January 5, 2024
    Publication date: May 9, 2024
    Applicant: NIKON CORPORATION
    Inventors: Yasushi TANABE, Tomoharu FUJIWARA, Motoki TOYAMA, Mariko MUKAI
  • Publication number: 20240155258
    Abstract: An image sensor includes: a first pixel having a first photoelectric conversion unit that photoelectrically converts light to generate a charge, a first accumulation unit that accumulates the charge generated by the first photoelectric conversion unit, and a first output unit that is connected to the first accumulation unit; a second pixel having a second photoelectric conversion unit that photoelectrically converts light to generate a charge, a second accumulation unit that accumulates the charge generated by the second photoelectric conversion unit, and a second output unit that is connected to and disconnected from the second accumulation unit via a second connection unit; and an adjustment unit that adjusts capacitances of the first accumulation unit and the second accumulation unit if a signal based on the charges generated by the first photoelectric conversion unit and the second photoelectric conversion unit is output from the first output unit.
    Type: Application
    Filed: January 18, 2024
    Publication date: May 9, 2024
    Applicant: NIKON CORPORATION
    Inventor: Shigeru MATSUMOTO
  • Publication number: 20240152031
    Abstract: An imaging device includes a first optical system configured to form an intermediate image of a subject, a second optical system that is an optical system configured to form a final image by re-imaging at least a part of the intermediate image and that is configured to change a magnification of the final image, an imaging element configured to image the final image, and a driving part configured to move the second optical system and the imaging element in a direction intersecting an optical axis of the first optical system.
    Type: Application
    Filed: March 29, 2021
    Publication date: May 9, 2024
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20240155230
    Abstract: A focus detection device includes: an imaging unit having a first and second pixel each of which receives light transmitted through an optical system and outputs signal used for focus detection, and a third pixel which receives light transmitted through the optical system and outputs signal used for image generation; an input unit to which information regarding the optical system is input; a selection unit that selects one of the first and second pixel based on the information to the input unit; a readout unit that reads out the signal from one of the first and second pixel based on a selection result at a timing different from reading out the signal from the third pixel to be read out; and a focus detection unit that performs the focus detection based on at least one of the signals of the first and second pixel read out by the readout unit.
    Type: Application
    Filed: January 17, 2024
    Publication date: May 9, 2024
    Applicant: NIKON CORPORATION
    Inventors: Sinsuke SAMBONGI, Akira Kinoshita, Yuki Kita
  • Publication number: 20240152053
    Abstract: A method for manufacturing a semiconductor integrated circuit in each of a plurality of regions on a substrate, the method includes forming an electronic circuit as a part of the semiconductor integrated circuit in each of the plurality of regions by using a mask pattern fixed to a mask substrate, and forming a specific circuit, which expresses specific information specific to each of the semiconductor integrated circuits, on a part of each of the plurality of regions by using a variable shaping exposure apparatus having a variable shaping mask, the specific circuits formed on the plurality of regions being different from each other.
    Type: Application
    Filed: December 20, 2021
    Publication date: May 9, 2024
    Applicant: NIKON CORPORATION
    Inventors: Yuho KANAYA, Soichi OWA
  • Publication number: 20240153203
    Abstract: Generating a three-dimensional image of a vortex vein based on OCT volume data. An image processing method is performed by a processor and includes a step of acquiring OCT volume data including a choroid, and a step of extracting choroidal vessels based on the OCT volume data and generating a three-dimensional image of the choroidal vessels.
    Type: Application
    Filed: February 22, 2022
    Publication date: May 9, 2024
    Applicant: NIKON CORPORATION
    Inventors: Yasushi TANABE, Hiroshi KASAI, Mariko MUKAI, Yuanting JI
  • Publication number: 20240149351
    Abstract: The problem of slow 3D printing using a beam-guided search (BGS) method is addressed by systems and methods that apply variable volume threshold ratio (VTR) values to a BGS method, to generate a plurality of subvolume groups and a plurality of clipping plane groups corresponding to a model of a 3D printed part or component. The plurality of subvolume groups and the plurality of clipping plane groups are presented to an operator of a 3D printing system, who can select the subvolume group and clipping plane associated with an optimal VTR value (for instance, based on experience and intuition), thereby obtaining a high-quality part or component while speeding up the 3D printing procedure.
    Type: Application
    Filed: October 20, 2023
    Publication date: May 9, 2024
    Applicant: Nikon Corporation
    Inventor: Abdelmoula Haboub
  • Patent number: 11977339
    Abstract: A lithography system is provided with: a measurement device measuring position information of marks on a substrate held in a first stage; and an exposure apparatus on a second stage, the substrate for which the position information measurement for the marks has been completed, performs alignment measurement to measure position information for part of marks selected from among the marks on the substrate, and performs exposure. The measurement device measures position information of marks on the substrate to obtain higher-degree components of correction amounts of an arrangement of divided areas, and the exposure apparatus measures position information of a small number of marks on the substrate to obtain lower-degree components of the correction amounts of the arrangement of the divided areas and exposes the plurality of divided areas while controlling the position of the substrate by using the obtained lower-degree components and the higher-degree components obtained by the measurement device.
    Type: Grant
    Filed: June 29, 2022
    Date of Patent: May 7, 2024
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 11978757
    Abstract: An image sensor includes: a pixel substrate that includes a plurality of pixels each having a photoelectric conversion unit that generates an electric charge through photoelectric conversion executed on light having entered therein and an output unit that generates a signal based upon the electric charge and outputs the signal; and an arithmetic operation substrate that is laminated on the pixel substrate and includes an operation unit that generates a corrected signal by using a reset signal generated after the electric charge in the output unit is reset and a photoelectric conversion signal generated based upon an electric charge generated in the photoelectric conversion unit and executes an arithmetic operation by using corrected signals each generated in correspondence to one of the pixels.
    Type: Grant
    Filed: December 14, 2022
    Date of Patent: May 7, 2024
    Assignee: NIKON CORPORATION
    Inventor: Shigeru Matsumoto
  • Patent number: 11979654
    Abstract: A portable information device includes: an image sensor; a position information acquisition portion that outputs position information; an orientation sensor; and a display that displays an image of an object output from the image sensor and displays relevant information on the object, the relevant information on the object being obtained based on at least measurement data from the position information acquisition portion and the orientation sensor.
    Type: Grant
    Filed: March 28, 2023
    Date of Patent: May 7, 2024
    Assignee: NIKON CORPORATION
    Inventors: Hideya Inoue, Toru Iwaoka, Michiko Noborisaka, Masayuki Hatori, Tomohide Hamada
  • Patent number: 11979672
    Abstract: A backside illumination image sensor that includes a semiconductor substrate with a plurality of photoelectric conversion elements and a read circuit formed on a front surface side of the semiconductor substrate, and captures an image by outputting, via the read circuit, electrical signals generated as incident light having reached a back surface side of the semiconductor substrate is received at the photoelectric conversion elements includes: a light shielding film formed on a side where incident light enters the photoelectric conversion elements, with an opening formed therein in correspondence to each photoelectric conversion element, and an on-chip lens formed at a position set apart from the light shielding film by a predetermined distance in correspondence to each photoelectric conversion element. The light shielding film and an exit pupil plane of the image forming optical system achieve a conjugate relation to each other with regard to the on-chip lens.
    Type: Grant
    Filed: February 2, 2023
    Date of Patent: May 7, 2024
    Assignee: NIKON CORPORATION
    Inventor: Yosuke Kusaka
  • Publication number: 20240142877
    Abstract: An exposure apparatus includes a substrate stage on which substrates are placed, and first projection modules each including a spatial light modulator, the first projection modules projecting wiring patterns each connecting semiconductor chips arranged on each of the substrates onto the substrates, wherein the first projection modules project the wiring patterns onto different substrates, substantially simultaneously.
    Type: Application
    Filed: December 19, 2023
    Publication date: May 2, 2024
    Applicant: NIKON CORPORATION
    Inventors: Masaki KATO, Yasushi MIZUNO
  • Publication number: 20240146891
    Abstract: An imaging device includes an imaging sensor that outputs an imaging signal representing a sequence of frame images of a photographic subject. A buffer memory temporarily stores data of the sequence of frame images from the imaging signal. A release switch is actuated by a user to output an image-taking signal. A controller, upon receipt of the image-taking signal from the release switch: (i) generates moving image data from at least some of the plurality of frame images stored in the buffer memory, (ii) generates at least one piece of still image data based on at least one frame image of the plurality of frame images stored in the buffer memory, and (iii) associates the moving image data with the still image data and records the moving image data and the still image data in a recording medium.
    Type: Application
    Filed: January 10, 2024
    Publication date: May 2, 2024
    Applicant: NIKON CORPORATION
    Inventor: Takashi KURIYAMA
  • Patent number: 11974056
    Abstract: An image-capturing unit includes: an image-capturing chip; a power supply circuit unit that outputs electrical power to be fed to the image-capturing chip; a power supply line that feeds electrical power from the power supply circuit unit to the image-capturing chip; a disconnecting unit that is provided to the power supply line and is electrically disconnecting the power supply circuit unit and the image-capturing chip when a leakage current of the image-capturing chip is measured; and an implementation substrate on which the power supply circuit unit, the image-capturing chip, the power supply line and the disconnecting unit are implemented.
    Type: Grant
    Filed: July 6, 2021
    Date of Patent: April 30, 2024
    Assignee: NIKON CORPORATION
    Inventors: Hirofumi Arima, Ryoichi Suganuma, Ryuuzou Motoori
  • Patent number: 11969822
    Abstract: The processing system is provided with: a liquid supply device which can supply a liquid; a liquid processing device which processes a liquid supplied from the liquid supply device such that a non-liquid-immersion state is generated locally in a partial area including a target portion on a predetermined surface; a beam irradiation section which emits beams toward the target portion; and a moving apparatus which moves the predetermined surface. The beams are irradiated on the target portion to apply a predetermined processing to the target portion, in a state in which the target portion is in the non-liquid-immersion state.
    Type: Grant
    Filed: September 30, 2019
    Date of Patent: April 30, 2024
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 11971540
    Abstract: An optical system (LS) includes lenses (L22,L23) satisfying the following conditional expressions, ndLZ+(0.01425×?dLZ)<2.12, and ?dLZ<35.0, where ndLZ: a refractive index of the lens with reference to d-line, and ?dLZ: Abbe number of the lens with reference to d-line.
    Type: Grant
    Filed: December 15, 2017
    Date of Patent: April 30, 2024
    Assignee: Nikon Corporation
    Inventors: Masashi Yamashita, Tomoki Ito, Hiroshi Yabumoto, Hiroshi Yamamoto, Satoshi Miwa, Keisuke Tsubonoya, Ayumu Makida, Takeru Uehara
  • Patent number: 11972325
    Abstract: A determination method includes causing the state in each of the plurality of pixels to correspond to a plurality of states of a plurality of bits of an Ising model, and setting an evaluation function for evaluating a degree of coincidence between the target image and the formed image as a function of the plurality of bits, and determining which one of the plurality of states is to be set for each of the plurality of pixels on the basis of states of the plurality of bits included in a result obtained by evaluating the evaluation function by an Ising machine.
    Type: Grant
    Filed: September 28, 2021
    Date of Patent: April 30, 2024
    Assignee: Nikon Corporation
    Inventor: Yosuke Okudaira
  • Publication number: 20240134288
    Abstract: An optical device includes a plurality of laser light sources, an output module having an optical modulator, and a time divider that is disposed between the plurality of laser light sources and the output module and that is configured to divide laser beams emitted from the plurality of laser light sources in time.
    Type: Application
    Filed: December 29, 2023
    Publication date: April 25, 2024
    Applicant: NIKON CORPORATION
    Inventors: Yasushi MIZUNO, Masaki Kato
  • Publication number: 20240134295
    Abstract: A lithography system is provided with: a measurement device measuring position information of marks on a substrate held in a first stage; and an exposure apparatus on a second stage, the substrate for which the position information measurement for the marks has been completed, performs alignment measurement to measure position information for part of marks selected from among the marks on the substrate, and performs exposure. The measurement device measures position information of marks on the substrate to obtain higher-degree components of correction amounts of an arrangement of divided areas, and the exposure apparatus measures position information of a small number of marks on the substrate to obtain lower-degree components of the correction amounts of the arrangement of the divided areas and exposes the plurality of divided areas while controlling the position of the substrate by using the obtained lower-degree components and the higher-degree components obtained by the measurement device.
    Type: Application
    Filed: January 4, 2024
    Publication date: April 25, 2024
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20240134294
    Abstract: A measurement device has: a slider which holds a substrate and is movable parallel to the XY plane; a drive system that drives the slider; a position measurement system which emits beams from a head section to a measurement surface in which grating section are provided on the slider, which receives respective return beams of the beams from the measurement surface, and which is capable of measuring position information in at least directions of three degrees of freedom including the absolute position coordinates of the slider; a mark detection system that detects a mark on the substrate; and a controller which detects the marks on the substrate using the mark detection system while controlling the drive of the slider, and which obtains the absolute position coordinates of each mark based on the detection result of each mark and measurement information by the position measurement system at the time of detection.
    Type: Application
    Filed: December 27, 2023
    Publication date: April 25, 2024
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Patent number: 11966032
    Abstract: A variable magnification optical system comprises, in order from an object side, a negative first lens group, a positive second lens group, a negative third lens group and a positive fourth lens group. Upon varying a magnification, a distance between the first lens group and the second lens group, a distance between the second lens group and the third lens group, and a distance between the third lens group and the fourth lens group are varied. The first lens group consists of, in order from the object side, a negative lens and a positive lens. The second lens group consists of, in order from the object side, a positive 2a lens group, a positive 2b lens group, and a negative 2c lens group. A downsized system having high optical performance is provided.
    Type: Grant
    Filed: July 13, 2018
    Date of Patent: April 23, 2024
    Assignee: Nikon Corporation
    Inventors: Yoko Komatsubara, Takeshi Umeda
  • Patent number: 11967094
    Abstract: To reduce the feel of incongruity in a model, provided is a detection device comprising: a texture detector that detects texture information of a target object from a first position; a position detector that detects depth information to each point in the target object from a second position different from the first position; a region detector that detects a data deficient region in which the depth information has been acquired but the texture information has not been acquired, on the basis of a detection result of the texture detector and a detection result of the position detector; and an adder that adds specific texture information to the data deficient region.
    Type: Grant
    Filed: June 17, 2021
    Date of Patent: April 23, 2024
    Assignee: NIKON CORPORATION
    Inventors: Satoshi Hasegawa, Yoshihiro Nakagawa, Masashi Hashimoto
  • Publication number: 20240126176
    Abstract: A spatial light modulation unit is used in an exposure apparatus that exposes an exposure pattern onto a photosensitive substrate while moving the photosensitive substrate in a scan direction. The spatial light modulation unit includes: a spatial light modulator having a plurality of elements; a controller that controls the plurality of elements in accordance with the exposure pattern; and a SLM substrate on which the spatial light modulator and the controller are provided. The controller is arranged side by side in the scan direction with respect to the spatial light modulator.
    Type: Application
    Filed: December 22, 2023
    Publication date: April 18, 2024
    Applicant: NIKON CORPORATION
    Inventors: Yasuhito KUBOTA, Yasushi MIZUNO, Masaki KATO, Masaki NISHIMURA, Hitoshi MIZUNO
  • Publication number: 20240127473
    Abstract: A processor identifies a first position of a vortex vein from a first fundus image, identifies a second position of the vortex vein from a second fundus image, and generates data of a screen to display the first position and the second position.
    Type: Application
    Filed: October 15, 2019
    Publication date: April 18, 2024
    Applicant: Nikon Corporation
    Inventors: Mariko Hirokawa, Yasushi Tanabe
  • Publication number: 20240122465
    Abstract: A visual field testing method is a visual field testing method of testing a visual field range divided into at least a first partial area and a second partial area, the method including: a step of measuring sensitivities of a plural first test points that are included in the first partial area: and a step of performing a process of estimating sensitivities of a plural second test points that are included in the first partial area and are test points other than the first test points, by using the sensitivities of the plural first test points.
    Type: Application
    Filed: December 13, 2023
    Publication date: April 18, 2024
    Applicant: NIKON CORPORATION
    Inventors: Chikara NAKAMURA, Taishi AOKI, Teruo HORIKAWA, Hisao OSAWA
  • Publication number: 20240126178
    Abstract: An exposure apparatus includes a substrate holder configured to hold a substrate and move, a module including a spatial light modulator having light modulation elements that are two-dimensionally arranged, an illumination unit irradiating the spatial light modulator with illumination lights, and a projection unit guiding the illumination light from the light modulation elements to respective light irradiation areas that are two-dimensionally arranged on the substrate in first and second directions, and a control unit configured to drive the substrate holder in a scanning direction, wherein the light modulation elements are two-dimensionally arranged to be inclined at a predetermined angle ? (0°<?<90°) with respect to the scanning direction and a non-scanning direction orthogonal to the scanning direction, and when a predetermined region of the substrate is exposed, the control unit scans the substrate holder at such a speed that spot positions are arranged in a staggered arrangement.
    Type: Application
    Filed: December 15, 2023
    Publication date: April 18, 2024
    Applicant: NIKON CORPORATION
    Inventors: Masaki KATO, Yasushi Mizuno, Toshiharu Nakashima, Yoshihiko Fujimura
  • Publication number: 20240123508
    Abstract: A processing system includes: a processing apparatus configured to perform an additive processing on a plurality of objects; and a control apparatus configured to control the processing apparatus, the control apparatus generates, based on a result of a first measurement operation for measuring a shape of a first object of the plurality of objects, first processing control information for controlling the processing apparatus to perform the additive processing on the first object, the processing apparatus performs, based on the first processing control information, the additive processing on the first object and the additive processing on a second object of the plurality of objects that is different from the first object.
    Type: Application
    Filed: December 8, 2021
    Publication date: April 18, 2024
    Applicant: NIKON CORPORATION
    Inventor: Kazuki UENO
  • Patent number: 11960065
    Abstract: A zoom optical system (ZL) comprises, in order from an object, a first lens group (G1) having a positive refractive power, a second lens group (G2) having a negative refractive power, a third lens group (G3) having a positive refractive power, a fourth lens group (G4) having a positive refractive power and a succeeding lens group (GR). In the zoom optical system, upon zooming, distances between adjacent lens groups change, and the succeeding lens group (GR) includes a plurality of focusing lens groups that have positive refractive powers and move upon focusing.
    Type: Grant
    Filed: December 26, 2018
    Date of Patent: April 16, 2024
    Assignee: Nikon Corporation
    Inventor: Kosuke Machida
  • Publication number: 20240118418
    Abstract: A distance measurement apparatus including: a control unit that controls a projection state of light based on a detection result of a target object; a light projection unit that projects light controlled by the control unit onto the target object; and a processing unit that determines a distance to the target object based on a detection result of reflected light. With this, it is possible to accurately project the light onto the target object and determine the distance to the target object by: controlling the projection state of the light based on the detection result of the target object to project the light onto the target object; and determining the distance to the target object based on the detection result of the reflected light.
    Type: Application
    Filed: January 29, 2021
    Publication date: April 11, 2024
    Applicant: NIKON VISION CO., LTD.
    Inventor: Kazuki CHIDA
  • Publication number: 20240118622
    Abstract: An exposure apparatus includes a spatial light modulator, a calculation unit configured to calculate positions of first connection portions of a first semiconductor chip provided on a substrate and positions of second connection portions of a second semiconductor chip provided on the substrate, based on a first position measurement result, a second position measurement result, and design information of the first connection portions and the second connection portions, the first position measurement result being a measurement result of positions of measurement points on the first semiconductor chip, the second position measurement result being a measurement result of positions of measurement points on the second semiconductor chip, and an exposure processing unit configured to control the spatial light modulator based on a calculation result by the calculation unit so as to expose wiring patterns connecting the first connection portions and the second connection portions.
    Type: Application
    Filed: December 18, 2023
    Publication date: April 11, 2024
    Applicant: Nikon Corporation
    Inventors: Masaki KATO, Yasushi Mezuno
  • Publication number: 20240116798
    Abstract: An optical glass comprising: by cation %, more than 0% and up to 40% of a content rate of La3+; 15% to 65% of a content rate of Ti4+; and more than 0% and up to 20% of a content rate of Zr4+; wherein a refractive index (nd) with respect to a d-line is from 2.00 to 2.35.
    Type: Application
    Filed: December 13, 2023
    Publication date: April 11, 2024
    Applicant: NIKON CORPORATION
    Inventors: Shuhei TAKASU, Kohei YOSHIMOTO
  • Patent number: 11954888
    Abstract: A device includes an image processing unit configured to calculate color information of at least one cell in a captured image and a determination unit configured to determine a cultured state of the cell on the basis of the color information calculated by the image processing unit.
    Type: Grant
    Filed: December 22, 2020
    Date of Patent: April 9, 2024
    Assignee: NIKON CORPORATION
    Inventors: Hiroaki Kii, Shinichi Takayama
  • Patent number: RE49928
    Abstract: A plurality of pixels PX include effective pixels and optical black pixels. Signal lines VL are provided corresponding to each column of the pixels PX and supplied with output signals of the pixels PX of the corresponding column. Clip transistors CL are provided corresponding to the respective signal lines VL and limit a potential of the corresponding vertical signal lines VL based on a gate potential. At least in a predetermined operating mode, a potential Vclip_dark is supplied to a gate of one of the clip transistors CL corresponding to at least one pixel column formed of the optical black pixels when reading a noise level from the pixels PX corresponding to the clip transistors CL and when reading a data level from the pixels PX corresponding to the clip transistors CL.
    Type: Grant
    Filed: November 20, 2019
    Date of Patent: April 16, 2024
    Assignee: NIKON CORPORATION
    Inventor: Toru Shima
  • Patent number: D1028062
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: May 21, 2024
    Assignee: NIKON CORPORATION
    Inventors: Makoto Imamizu, Masayoshi Ueno