Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type

  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Publication number: 20180109768
    Abstract: An image sensor includes: a plurality of microlenses arranged in a two-dimensional pattern; and a plurality of pixels that are provided in correspondence to each of the microlenses and receive lights of different color components, respectively. Pixels that are provided at adjacent microlenses among the microlenses and that receive lights of same color components, are adjacently arranged.
    Type: Application
    Filed: December 18, 2017
    Publication date: April 19, 2018
    Applicant: NIKON CORPORATION
    Inventor: Hironobu MURATA
  • Publication number: 20180108539
    Abstract: An object is to provide a novel method in place of the above-described conventional technology, as a technique for obtaining a thin film with a wiring pattern applied. A method for manufacturing a wiring pattern according to the present invention is characterized in that the method includes: a laminate forming step of forming a laminate by bringing a first member that has a resist layer and a metal layer formed on the resist layer into contact with a second member that includes a substrate; a resist layer patterning step of subjecting the resist layer to patterning; and an etching step of selectively removing the metal layer.
    Type: Application
    Filed: December 15, 2017
    Publication date: April 19, 2018
    Applicant: NIKON CORPORATION
    Inventors: Makoto NAKAZUMI, Yasutaka NISHI, Kei NARA
  • Publication number: 20180109797
    Abstract: A moving image compression device has an obtaining unit, an image conversion unit, and a compression processing unit. The obtaining unit obtains a RAW moving image having plural frames associated in an order of imaging, the frames having pixels of three different color components which are disposed periodically according to a color array with two rows and two columns. The image conversion unit separates, in a target frame, a first pixel group corresponding to a first color component of odd rows and a second pixel group corresponding to the first color component of even rows, and alternately arrays, in a time base direction, a first image including the first pixel group and a second image including the second pixel group. The compression processing unit performs inter-frame prediction coding compression on the first image and the second image.
    Type: Application
    Filed: November 28, 2017
    Publication date: April 19, 2018
    Applicant: NIKON CORPORATION
    Inventor: Ichiro ANDO
  • Patent number: 9945661
    Abstract: There are provided a method for measuring a height by a height measuring apparatus including: obtaining, in advance, a height correction value depending on an inclination angle of a surface of the object as an angle correction data; obtaining, from the height value of each pixel of the imaging device, the inclination angle of the surface of the object which corresponds to each pixel position of the imaging device; obtaining the height correction value, which corresponds to the inclination angle obtained, from the angle correction data; and correcting the height value of the surface of the object, which corresponds to each pixel of the imaging device, by using the height correction value obtained.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: April 17, 2018
    Assignee: NIKON CORPORATION
    Inventors: Yasuo Suzuki, Masaya Yamaguchi
  • Patent number: 9947501
    Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft.
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: April 17, 2018
    Assignee: NIKON METROLOGY NV
    Inventor: Roger Hadland
  • Patent number: 9946160
    Abstract: A pattern forming method which includes: forming a plurality of first line patterns of which longitudinal direction is a first direction and a plurality of second line patterns of which longitudinal direction is the first direction and of which etching characteristic is different from etching characteristic of the plurality of first line patterns, so that at least one edge portion of each of the plurality of first line patterns and at least one edge portion of each of the plurality of second line patterns are adjacent to each other; and removing at least a portion of the plurality of first line patterns by etching.
    Type: Grant
    Filed: October 17, 2013
    Date of Patent: April 17, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yoji Watanabe
  • Patent number: 9949229
    Abstract: To improve the usability of an electronic device, the electronic device includes: a first communication unit located near a user; a receive unit configured to receive data through communication via a body of the user or near field communication between a second communication unit located in a member used by the user and the first communication unit; and a recording unit configured to record data pertaining to the member when communication is established between the first communication unit and the second communication unit.
    Type: Grant
    Filed: March 23, 2016
    Date of Patent: April 17, 2018
    Assignee: NIKON CORPORATION
    Inventors: Yukio Kubota, Satoshi Ejima, Takeo Motohashi, Mitsuko Matsumura, Hiroki Ono, Masakazu Sekiguchi
  • Patent number: 9946058
    Abstract: A microscope apparatus comprises: a distribution measurement apparatus which—with respect to an observation region wherein a sample is arranged which comprises a fluorescent material that is activated when irradiated with an activating light of a prescribed wavelength, and that emits fluorescence when irradiated in an activated condition with an exciting light of a wavelength that differs from that of the activating light—obtains a fluorescent picture image by conducting irradiation with the exciting light, and measures a fluorescent intensity distribution of the observation region; an irradiation intensity setting apparatus which sets irradiation intensities of the activating light for respective portions of the observation region based on the fluorescent intensity distribution; and a picture image formation apparatus which obtains a plurality of the fluorescent picture images by multiply repeating operations comprising an operation wherein the observation region is irradiated with the activating light at th
    Type: Grant
    Filed: June 10, 2011
    Date of Patent: April 17, 2018
    Assignee: NIKON CORPORATION
    Inventor: Ichiro Sase
  • Patent number: 9946171
    Abstract: One pair each of a Y linear motor (a total of four) on the +X side and the ?X side that drive a reticle stage include one pair each of a stator section (a total of four) and three each of a mover section (a total of six) on the +X side and the ?X side. In this case, the three each of the mover sections on the +X side and the ?X side configure one each of a mover. The mover section located in the center in the Z-axis direction of each of the movers is used in common by each pair of the Y linear motors. Therefore, the weight of the mover section (reticle stage) of the reticle stage device is reduced, which allows a higher acceleration. Further, the mover section located in the center in the Z-axis direction of each of the movers coincides with a neutral plane of the reticle stage.
    Type: Grant
    Filed: September 15, 2015
    Date of Patent: April 17, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9947637
    Abstract: A system and method for clamping wafers together in alignment using pressure. The system and method involves holding a first wafer and a second wafer together in alignment using a wafer clamp within an ambient environment maintained at a first pressure and creating a second pressure at least partially around and between the first wafer and the second wafer held together by the wafer clamp, wherein the first pressure is greater than the second pressure. The first wafer and the second wafer are clamped together in alignment using a pneumatic force created by a pressure differential between the first pressure and the second pressure.
    Type: Grant
    Filed: October 21, 2014
    Date of Patent: April 17, 2018
    Assignee: NIKON CORPORATION
    Inventors: Alton H. Phillips, Fardad A. Hashemi
  • Patent number: 9946163
    Abstract: An immersion exposure apparatus and method involves (i) supporting a substrate with a stage, (ii) arranging the stage under an optical assembly to maintain immersion liquid in a gap between the optical assembly and the stage, (iii) projecting an image onto the substrate via the optical assembly and the immersion liquid, (iv) arranging a movable pad, which is movable separately from the stage, adjacent to the stage, and (v) moving the stage and the pad adjacent to each other relative to the optical assembly to arrange the pad under the optical assembly in place of the stage such that the immersion liquid is maintained below the optical assembly during the movement, thereby to arrange the movable pad under the optical assembly to maintain the immersion liquid in a gap between the optical assembly and the pad.
    Type: Grant
    Filed: June 9, 2015
    Date of Patent: April 17, 2018
    Assignee: NIKON CORPORATION
    Inventor: Michael Binnard
  • Patent number: 9946162
    Abstract: An exposure method for exposing a mask pattern, which includes plural types of patterns, with a high throughput and optimal illumination conditions for each type of pattern. The method includes guiding light from a first spatial light modulator illuminated with pulse lights of illumination light to a second spatial light modulator and exposing a wafer with light from the second spatial light modulator, accompanied by: controlling a conversion state of the second spatial light modulator including a plurality of second mirror elements; and controlling a conversion state of the first spatial light modulator including a plurality of first mirror elements to control intensity distribution of the illumination light on a predetermined plane between the first spatial light modulator and the second spatial light modulator.
    Type: Grant
    Filed: December 9, 2016
    Date of Patent: April 17, 2018
    Assignee: Nikon Corporation
    Inventor: Soichi Owa
  • Publication number: 20180101037
    Abstract: A thin film forming an intermediate layer for an optical article including liquid crystals, the thin film including a main body limited by a first main surface and by a second main surface opposed to the first main surface, the first and second main surfaces both including a first zone exhibiting alignment properties for aligning liquid crystals along a predetermined alignment direction and a second zone forming spacing structures extending in projection from the first zone.
    Type: Application
    Filed: March 25, 2015
    Publication date: April 12, 2018
    Applicants: ESSILOR INTERNATIONAL (COMPAGNIE GENERALE D'OPTIQUE), NIKON CORPORATION
    Inventors: Mathieu FEUILLADE, Gregory TORTISSIER
  • Publication number: 20180101104
    Abstract: In an exposure operation of a substrate, a controller controls first and second drive systems based on correction information for compensating for a measurement error of an encoder system and measurement information of first and second measurement devices, so that scanning exposure is performed and a measurement error is compensated for. In the scanning exposure, a mask and the substrate are each moved relative to illumination light with a first direction serving as a scanning direction, the measurement error occurring due to a difference between a position of a reference plane and a position of a grating surface of a grating section in a third direction orthogonal to a predetermined plane that includes the first direction, and the reference plane being a reference plane for position control or positioning of a second stage or a reference plane with which the substrate coincides in the exposure operation.
    Type: Application
    Filed: December 13, 2017
    Publication date: April 12, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20180102324
    Abstract: A mark forming method includes: a step of forming, on a device layer of a wafer, an intermediate layer to which a polymer layer containing a block copolymer is adherable, the device layer including a shot area and a scribe line area; a step of removing a portion, of the intermediate layer, formed in the scribe line area; a step of exposing an image of a mark on the scribe line area and forming, based on the image of the mark, a mark including recessed portion; and a step of applying the polymer layer containing the block copolymer on the device layer of the wafer. When a circuit pattern is formed by using the self-assembly of the block copolymer, it is possible to form the mark simultaneously with the formation of the circuit pattern.
    Type: Application
    Filed: December 12, 2017
    Publication date: April 12, 2018
    Applicant: NIKON CORPORATION
    Inventor: Tomoharu FUJIWARA
  • Patent number: 9941090
    Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft.
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: April 10, 2018
    Assignee: NIKON METROLOGY NV
    Inventor: Roger Hadland
  • Patent number: 9939293
    Abstract: An encoder, which measures a relative moving amount of a second member relative to a first member, includes: a diffraction grating provided on the first member; a light-incident optical member causing a measuring light to come into a grating pattern surface of the diffraction grating substantially perpendicularly; a first reflecting member provided on the second member and reflecting a diffracted light generated from the diffraction grating; a first direction-changing member changing a direction of the diffracted light; a first photo-detector detecting an interference light generated by interference between a double diffracted light and other diffracted light than the double diffracted light or a reference light, the double diffracted light being generated, via diffraction of the diffracted light, from the diffraction grating; and a measuring section which obtains the relative moving amount of the second member relative to the first member by using a detection signal from the first photo-detector.
    Type: Grant
    Filed: November 16, 2012
    Date of Patent: April 10, 2018
    Assignee: NIKON CORPORATION
    Inventor: Zhigiang Liu
  • Patent number: 9942537
    Abstract: An image processing device including means for: inputting two parallax images composed of images of first and second viewpoint directions; generating first and second smoothed images by applying, respectively to the images of the first and second viewpoint directions, a smoothing filter in a direction joining the first and second viewpoints; generating a reference image formed by a value based on a product of values of the first and second smoothed images; generating gain distribution data by dividing a value of the reference image by the value of the first smoothed image; performing gain correction of each pixel on the image of the first viewpoint direction, based on the gain distribution data; and outputting the gain corrected image of the first viewpoint direction as a parallax image, the smoothing filter having a filter diameter approximately equal to a parallax amount between the images of the first and second viewpoint directions.
    Type: Grant
    Filed: September 29, 2015
    Date of Patent: April 10, 2018
    Assignee: NIKON CORPORATION
    Inventors: Yusuke Takanashi, Kenichi Ishiga
  • Patent number: 9939733
    Abstract: There is provided a reflective imaging optical system forming an image of a first plane onto a second plane, wherein the numerical aperture with respect to a first direction on the second plane is greater than 1.1 times a numerical aperture with respect to a second direction crossing the first direction on the second plane. The reflecting imaging optical system has an aperture stop defining the numerical aperture on the side of the second plane, and the aperture stop has an elliptic-shaped opening of which size in a major axis direction is greater than 1.1 times that in a minor axis direction. The reflective image-forming optical system is applicable to an exposure apparatus using, for example, EUV light and capable of increasing numerical aperture while enabling optical path separation of light fluxes.
    Type: Grant
    Filed: December 31, 2016
    Date of Patent: April 10, 2018
    Assignee: Nikon Corporation
    Inventor: Hideki Komatsuda
  • Patent number: 9941217
    Abstract: A mark forming method includes: forming recessed portion on a mark formation area of a substrate; coating the recessed portion with a polymer layer containing a block copolymer; allowing the polymer layer in the recessed portion to form a self-assembled area; selectively removing a portion of the self-assembled area; and forming a positioning mark by using the self-assembled area from which the portion thereof has been removed.
    Type: Grant
    Filed: January 6, 2015
    Date of Patent: April 10, 2018
    Assignee: NIKON CORPORATION
    Inventors: Yuji Shiba, Tomoharu Fujiwara, Nobutaka Magome
  • Patent number: 9939739
    Abstract: A liquid immersion exposure method exposes a substrate with exposure light through liquid, and uses a projection system, a stage system having a holder that holds the substrate, a supply port via which the liquid is supplied arranged such that an upper surface of the substrate faces the supply port and that is spaced a first distance from an optical axis of the projection system, and a recovery port via which the liquid is collected arranged such that the upper surface of the substrate faces the recovery port, which is spaced a second distance greater than the first distance from the optical axis of the projection system, and that encircles the supply port. In the method, the substrate held on the holder is positioned based on a detection result of an alignment system that detects an alignment mark of the substrate not through the liquid.
    Type: Grant
    Filed: February 29, 2016
    Date of Patent: April 10, 2018
    Assignee: NIKON CORPORATION
    Inventors: Naoyuki Kobayashi, Akikazu Tanimoto
  • Patent number: 9939621
    Abstract: A zoom lens comprises a first lens group having negative refractive power; a second lens group having positive refractive power; a third lens group having negative refractive power and a fourth lens group having positive refractive power. Upon varying magnification, distances between the first lens group and the second lens group, between the second lens group and the third lens group and between the third lens group and the fourth lens group vary. The second lens group includes a front lens group, an aperture stop, and a rear lens group. Each of the front lens group and the rear lens group includes at least one negative lens. At least a part of the lenses in the second lens group is moved as a group to have a component in a direction perpendicular to an optical axis.
    Type: Grant
    Filed: July 10, 2014
    Date of Patent: April 10, 2018
    Assignee: Nikon Corporation
    Inventors: Makoto Fujimoto, Takeshi Umeda
  • Publication number: 20180098016
    Abstract: An imaging sensor comprising: an imaging chip in which a plurality of pixel are arranged in a matrix; and a signal processing chip that is each provided for one or more pixel columns or one or more pixel rows, has a device that performs signal processing on a pixel signal output from a pixel, and is stacked with the imaging chip is provided. For example, the device that performs signal processing is an A/D converter that converts a pixel signal output from the pixel into a digital signal, and when a pixel signal output from the pixel is converted into a digital signal, at least two or more A/D converters among the A/D converters are controlled in parallel.
    Type: Application
    Filed: November 21, 2017
    Publication date: April 5, 2018
    Applicant: NIKON CORPORATION
    Inventor: Hironobu MURATA
  • Publication number: 20180095275
    Abstract: An image-capturing device includes: a micro-lens array in which a plurality of micro-lenses are arranged in a two dimensional configuration; an image sensor that comprises a plurality of pixel groups each comprising a plurality of pixels, and that receives light with each of the pixel groups that has passed through a respective micro-lens of the micro-lens array; and a drive unit that changes a positional relationship of the image sensor and the micro-lens array to prevent blurring of an image captured by the pixel groups.
    Type: Application
    Filed: March 29, 2016
    Publication date: April 5, 2018
    Applicant: NIKON CORPORATION
    Inventor: Masao NAKAJIMA
  • Publication number: 20180097988
    Abstract: An electronic device includes: an image-capturing unit that captures an image of a subject with an image sensor, the image sensor being configured to be able to set image-capturing conditions for a plurality of regions on an image-capturing surface; and a control unit that determines the image-capturing conditions varied for each of the regions, based on a subject element detected from the image captured by the image-capturing unit.
    Type: Application
    Filed: March 30, 2016
    Publication date: April 5, 2018
    Applicant: NIKON CORPORATION
    Inventors: Satoshi TSUCHIYA, Yuuki ASANO, Shuhei YOSHIKAWA, Aiko NAMIKAWA
  • Patent number: 9935054
    Abstract: A mark forming method includes: exposing a wafer with a mask image to form first and second resist marks that have different shapes than one another based on a portion of the mask image; applying a polymer layer that contains a block copolymer to the wafer by spin-coating; forming self-assembled regions in the applied polymer layer; selectively removing a portion of the self-assembled regions; and forming first and second wafer marks on the wafer using the first and second resist marks. This makes it possible to form the marks when forming circuit patterns using self-assembly of a block copolymer.
    Type: Grant
    Filed: September 24, 2015
    Date of Patent: April 3, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuji Shiba
  • Patent number: 9934251
    Abstract: In a database, product image data is accumulated. A search portion acquires product image data having the image characteristics information that is the same as or similar to the image characteristics information that indicates the characteristics of the image of input image data from the database for the input image data. A search server outputs information on another product that is different from the product corresponding to the product image data together with the product image data acquired by the search portion.
    Type: Grant
    Filed: September 27, 2012
    Date of Patent: April 3, 2018
    Assignee: NIKON CORPORATION
    Inventors: Hideya Inoue, Toru Iwaoka, Michiko Noborisaka, Masayuki Hatori, Tomohide Hamada, Yutaka Iwasaki, Hideki Sasaki
  • Patent number: 9933705
    Abstract: A projection objective includes at least four curved mirrors, which include a first curved mirror that is a most optically forward mirror and a second curved mirror that is a second most optically forward mirror, as defined along a light path. In addition, an intermediate lens element is disposed physically between the first and second mirrors, the intermediate lens element being a single pass type lens. The objective forms an image with a numerical aperture of at least substantially 1.0 in immersion.
    Type: Grant
    Filed: March 27, 2014
    Date of Patent: April 3, 2018
    Assignee: Nikon Corporation
    Inventor: Yasuhiro Omura
  • Patent number: 9933627
    Abstract: An optical system includes: a first optical member having a concave surface that reflects a light having a first circularly polarized light component and transmits a light having a second circularly polarized light component a rotation direction of which is opposite to a rotation direction of the first circularly polarized light component; and a second optical member that transforms the light having the first circularly polarized light component reflected from the first optical member into the light having the second circularly polarized light component to be reflected so as to be incident on the first optical member.
    Type: Grant
    Filed: February 24, 2014
    Date of Patent: April 3, 2018
    Assignee: NIKON CORPORATION
    Inventor: Toru Iwane
  • Patent number: 9933708
    Abstract: A liquid immersion exposure apparatus in which a substrate is exposed with an exposure beam, includes a projection optical system by which the substrate is exposed to the exposure beam, a first inlet disposed at a first position, which is capable of supplying a first liquid to a space adjacent to a bottom surface of the projection optical system, and a second inlet disposed at a second position which is different from the first position, the second inlet being capable of supplying a second liquid that is different from the first liquid to the space.
    Type: Grant
    Filed: April 28, 2016
    Date of Patent: April 3, 2018
    Assignee: NIKON CORPORATION
    Inventor: Hiroyuki Nagasaka
  • Publication number: 20180088473
    Abstract: An exposure apparatus is equipped with a fine movement stage that can hold a liquid with a projection optical system when the stage is at a position facing an outgoing surface of the projection optical system, and a blade that comes into proximity within a predetermined distance of the fine movement stage when the fine movement stage is holding the liquid with the projection optical system, and moves along with the fine movement stage while maintaining the proximity state, and then holds the liquid with the projection optical system after the movement. Accordingly, a plurality of stages will not have to be placed right under the projection optical system interchangeably, which can suppress an increase in footprint of the exposure apparatus.
    Type: Application
    Filed: November 27, 2017
    Publication date: March 29, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20180088474
    Abstract: On a substrate conforming to a layout method for a plurality of marks for detection using a plurality of mark detection systems of which the detection centers are arranged at a predetermined spacing along an X-axis direction, a plurality of shot areas are formed in both an X-axis direction and a Y-axis direction orthogonal thereto in an XY plane, and sets including at least two marks separated in the X-axis direction are repeatedly arranged along the X-axis direction at spacing of a length in the X-axis-direction of each shot area, and the marks belonging to each set are separated from each other in the X-axis direction by a spacing determined based arrangement in the X-axis direction of the plurality of mark detection systems and the length. It is thereby possible to reliably detect a plurality of marks on a substrate-using a plurality of mark detection systems.
    Type: Application
    Filed: September 25, 2017
    Publication date: March 29, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20180091762
    Abstract: An electronic apparatus includes: an input unit that inputs data for imaging conditions for each of a plurality of imaging regions included in an image capturing unit, different imaging conditions being set for each of the imaging regions; and a recording control unit that correlates the data for imaging conditions inputted from the input unit with the imaging regions and records correlated data in a recording unit.
    Type: Application
    Filed: September 28, 2015
    Publication date: March 29, 2018
    Applicant: NIKON CORPORATION
    Inventors: Yoshiaki MIYAKAWA, Naoki YAMAGATA
  • Publication number: 20180088472
    Abstract: An exposure system is equipped with: a first row of chambers that are arranged to be adjacent to a C/D provided on a floor surface F on a +X side; a second row of chambers arranged on the ?Y side facing the first row of chambers; and a first control rack adjacent to the to the second row of chambers on a ?X side and is arranged on the ?Y side facing the C/D. Inside at least a part of the plurality of chambers, exposure chambers where exposure is performed are formed and the first control rack distributes utilities supplied from the below the floor surface to the first and the second rows of chambers.
    Type: Application
    Filed: April 15, 2016
    Publication date: March 29, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20180088441
    Abstract: A lens barrel with a shake detecting function includes: a lens tube that supports an imaging optical system; a first shake detection sensor that detects a shake along a first detection axis; a second shake detection sensor that detects a shake along a second detection axis; and a flexible printed circuit substrate via which the first shake detection sensor and the second shake detection sensor are attached to the lens tube such that each of the first detection axis and the second detection axis is substantially orthogonal to an optical axis of the imaging optical system and the first detection axis and the second detection axis are substantially orthogonal to each other.
    Type: Application
    Filed: July 13, 2017
    Publication date: March 29, 2018
    Applicant: NIKON CORPORATION
    Inventors: Satoshi YAMAZAKI, Tetsuji KAMATA
  • Patent number: 9927712
    Abstract: A spatial light modulation element module having a large area is manufactured. A spatial light modulation element module comprising a base member and a plurality of spatial light modulation element arrays, wherein each of the plurality of spatial light modulation element arrays has a light modulation element which modulates and emits at least one of the intensity and the phase of an incident light, and the base member maintains the plurality of spatial light modulation element arrays in a predetermined relative position in a bare chip state. In the above-described spatial light modulation element module, the plurality of spatial light modulation element arrays may be in a staggered arrangement in at least 1 direction.
    Type: Grant
    Filed: May 16, 2016
    Date of Patent: March 27, 2018
    Assignee: NIKON CORPORATION
    Inventors: Yoshihiko Suzuki, Junji Suzuki
  • Patent number: 9928579
    Abstract: A method for deblurring a blurry image (400) includes the steps of: performing a first phase of deconvolution (202) with a first phase regularization spatial mask (300) to reconstruct the main edges and generate a first phase latent sharp image (404) having reconstructed main edges; and performing a second phase of deconvolution (204) with a second phase regularization spatial mask (304) to reconstruct the texture and generate a second phase latent sharp image (406). The second phase regularization spatial mask (304) can be different from the first phase regularization spatial mask (300).
    Type: Grant
    Filed: July 22, 2014
    Date of Patent: March 27, 2018
    Assignee: NIKON CORPORATION
    Inventor: Radka Tezaur
  • Patent number: 9927713
    Abstract: A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member having first reflective surfaces, and a light receiving system has a light receiving prism member having second reflective surfaces arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces.
    Type: Grant
    Filed: November 22, 2016
    Date of Patent: March 27, 2018
    Assignee: NIKON CORPORATION
    Inventors: Yasuhiro Hidaka, Tadashi Nagayama
  • Patent number: 9927605
    Abstract: A certain material irregularly expressed in an observation area is effectively observed. An observing apparatus includes a first observing unit performing a time lapse shooting of a predetermined observation area, a first discriminating unit discriminating whether or not a first material is expressed in the observation area based on an image obtained by the first observing unit, and a second observing unit starting a time lapse shooting relating to a part where the first material is expressed at a timing when the first material is expressed in the observation area, in which a shooting frequency of the time lapse shooting by the second observing unit is higher than a shooting frequency of the time lapse shooting by the first observing unit.
    Type: Grant
    Filed: August 2, 2012
    Date of Patent: March 27, 2018
    Assignee: NIKON CORPORATION
    Inventor: Hiroaki Kii
  • Patent number: 9927724
    Abstract: A liquid immersion exposure apparatus is disclosed. It includes a projection system having a final element and a liquid immersion member that in turn includes a first member, which surrounds the final element and has a liquid supply port and a liquid suction port, and a second member, which is movable with respect to the first member and has a lower part under which a portion of a liquid immersion space is formed. During exposure of a plurality of shot regions of a substrate, the immersion space covers a portion of a surface of the substrate, and the first shot region is exposed while moving the substrate in a first scanning direction. After the exposure of the first shot region, the second shot region is exposed while moving the substrate in a second scanning direction.
    Type: Grant
    Filed: December 29, 2016
    Date of Patent: March 27, 2018
    Assignee: NIKON CORPORATION
    Inventor: Shinji Sato
  • Patent number: 9927878
    Abstract: Provided is a convenient display device including: a display unit capable of projecting a projection image on a domain in accordance with a position of a user; and a judgment unit that judges whether the projection image can be projected on the domain.
    Type: Grant
    Filed: October 12, 2012
    Date of Patent: March 27, 2018
    Assignee: NIKON CORPORATION
    Inventors: Atsushi Tanaka, Kumiko Ishida, Toru Miyakoshi, Chiori Saito, Michiyo Ogawa, Masakazu Sekiguchi
  • Publication number: 20180081148
    Abstract: An interchangeable lens attachable to a camera body, the interchangeable lens including: a focusing optical system configured to vary a focal position of the interchangeable lens; and a transmitter configured to transmit a first value and a second value to the camera body, the first value indicating a relationship between an amount of movement of the focusing optical system and an amount of movement of an image plane at a position to which the focusing optical system has moved, the second value indicating a relationship between an amount of movement of the focusing optical system and an amount of movement of the image plane, the second value being equal to or smaller than the first value.
    Type: Application
    Filed: November 6, 2015
    Publication date: March 22, 2018
    Applicant: NIKON CORPORATION
    Inventor: Hiroyuki TOMITA
  • Publication number: 20180081283
    Abstract: An exposure method and apparatus expose a substrate with illumination light via a projection optical system and a liquid of a liquid immersion area formed under the projection optical system. A second stage on which the substrate is held and a third stage are relatively moved, based on outer periphery positional information of the second stage, in order to cause the second stage to come close, from one side in a first direction, to the third stage that faces the projection optical system. The second and third stages that have come close together are moved from the one side to an other side in the first direction with respect to the projection optical system to place the second stage to face the projection optical system instead of the third stage while substantially maintaining the liquid immersion area under the projection optical system.
    Type: Application
    Filed: November 28, 2017
    Publication date: March 22, 2018
    Applicant: NIKON CORPORATION
    Inventors: Masahiko YASUDA, Taro SUGIHARA
  • Publication number: 20180080076
    Abstract: A method for detecting a target nucleic acid, comprising: (a) contacting a nucleic acid sample comprising a target nucleic acid, comprising a first portion and a second portion, with: (i) a detection probe, wherein the detection probe is labeled with a labeling substance and comprises a nucleic acid sequence that forms a stem-loop structure and having a 5? protruding end or a 3? protruding end that is capable of hybridizing to the second portion, and (ii) a capture probe comprising a nucleic acid sequence capable of hybridizing to the first portion, wherein the capture probe is immobilized to a substrate, under conditions to form a target nucleic acid-detection probe-capture probe complex by hybridizing the second portion to the detection probe and hybridizing the first portion to the capture probe; (b) ligating a first end of the detection probe with an end of the target nucleic acid and ligating a second end of the detection probe with an end of the capture probe; and (c) detecting the labeling substance of
    Type: Application
    Filed: November 16, 2017
    Publication date: March 22, 2018
    Applicants: The University of Tokyo, Nikon Corporation
    Inventors: Taro Ueno, Takashi Funatsu, Takanori Ichiki, Hirofumi Shiono
  • Publication number: 20180081158
    Abstract: Provided is a microscope objective lens that sufficiently corrects on-axis and off-axis chromatic aberrations and that has a long working distance. A microscope objective lens OL includes, in order from an object side, a first lens group G1 with positive refractive power and a second lens group G2 with negative refractive power. The first lens group G1 of the microscope objective lens OL includes a diffractive optical element GD including a diffractive optical surface D, and the diffractive optical element GD is arranged at a position closer to the image than a section where a diameter of a light flux passing through the first lens group G1 is the largest.
    Type: Application
    Filed: November 13, 2017
    Publication date: March 22, 2018
    Applicant: NIKON CORPORATION
    Inventors: Taeko TOSHI, Kazuhiro TAKASAGO
  • Patent number: 9921495
    Abstract: A stage assembly for positioning a device includes: (i) a stage that retains the device; (ii) a base; (iii) a mover assembly that moves the stage along a first axis, along a second axis, and along a third axis relative to the base; (iv) a magnetic sensor system that monitors the movement of the stage along the first, second and third axes, the magnetic sensor system generating a magnetic sensor signal; (v) a second sensor system that monitors the movement of the stage along the first, second and third axes, the second sensor system generating a second sensor signal; and (vi) a control system that controls the mover assembly using at least one of the magnetic sensor signal and the second sensor signal.
    Type: Grant
    Filed: January 17, 2014
    Date of Patent: March 20, 2018
    Assignee: NIKON CORPORATION
    Inventors: Pai-Hsueh Yang, Michael Binnard, J. Kyle Wells, Chetan Mahadeswaraswamy, Tsutomu Ogiwara
  • Patent number: 9921496
    Abstract: In a substrate stage, when a Y coarse movement stage moves in the Y-axis direction, an X coarse movement stage, a weight cancellation device, and an X guide move integrally in the Y-axis direction with the Y coarse movement stage, and when the X coarse movement stage moves in the X-axis direction on the Y coarse movement stage, the weight cancellation device move on the X guide in the X-axis direction integrally with the X coarse movement stage. Because the X guide is provided extending in the X-axis direction while covering the movement range of the weight cancellation device in the X-axis direction, the weight cancellation device is constantly supported by the X guide, regardless of its position. Accordingly, a substrate can be guided along the XY plane with good accuracy.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: March 20, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yasuo Aoki
  • Patent number: 9921490
    Abstract: A substrate holding device is equipped with a substrate holder that adsorbs and holds a substrate, and a plurality of vertical movement pin units that each have, at one end, an adsorption section to adsorb a rear surface of the substrate, and are movable relative to the substrate holder in a state of adsorbing the rear surface of the substrate with the adsorption section. The plurality of vertical movement pin units each have at least part including the adsorption section that is displaced in at least one direction, by an action of a force received from the adsorbed substrate.
    Type: Grant
    Filed: October 29, 2014
    Date of Patent: March 20, 2018
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9919508
    Abstract: A substrate aligning apparatus comprising: an aligning section that aligns a first substrate and a second substrate together; an acquiring section that acquires positional information on at least one of the first substrate and the second substrate, by the time the first substrate and the second substrate which have been aligned in the aligning section are carried out from the aligning section; a judging that judges misalignment of the first substrate and the second substrate, based on information acquired by the acquiring section.
    Type: Grant
    Filed: April 24, 2015
    Date of Patent: March 20, 2018
    Assignee: NIKON CORPORATION
    Inventors: Kazuya Okamoto, Isao Sugaya
  • Patent number: 9921055
    Abstract: The time and labor required to set an extraction region of point cloud data is decreased. A shape measuring apparatus includes a projecting unit that projects a measurement beam onto a measurement region of a measurement target, an imaging unit that captures an image of the measurement target onto which the measurement beam is projected, a movement mechanism that relatively moves the projecting unit or the imaging unit with respect to the measurement target so that a position of the measurement region of the measurement target changes, and an extraction region setting unit that sets an extraction region for image information used for calculating a position of the measurement target from capture images captured by the imaging unit, on the basis of positions of images of the measurement beam captured by the imaging unit when the measurement beam is projected onto different measurement regions.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: March 20, 2018
    Assignee: NIKON CORPORATION
    Inventor: Kenta Kanto