Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type

  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Patent number: 9823582
    Abstract: A liquid immersion member is used in a liquid immersion exposure apparatus which exposes a substrate by exposure light via a first liquid between an emitting surface of an optical member and the substrate, and is capable of forming a liquid immersion space on an object movable below the optical member. The liquid immersion member includes a first member that is disposed at at least a portion of surrounding of the optical member; a second member that is capable of being opposite to the object and is movable outside an optical path of the exposure light; and a protection part that protects the optical member. The protection part decreases a change in pressure which the optical member receives from the liquid in the liquid immersion space.
    Type: Grant
    Filed: June 18, 2015
    Date of Patent: November 21, 2017
    Assignee: NIKON CORPORATION
    Inventors: Shinji Sato, Kenyo Odanaka
  • Patent number: 9823583
    Abstract: A liquid immersion member used in a liquid immersion exposure apparatus, and is capable of forming liquid immersion space on a surface of an object opposite to an emitting surface of optical member which emits exposure light. Liquid immersion member includes a first member that includes a first part disposed at surrounding of an optical path of exposure light, and in which a first opening part, through which exposure light is able to pass, and first liquid supply part, which is disposed at at least a portion of surrounding of first opening part and is capable of opposing surface of object, are provided at first part, and a second member that includes a first liquid recovery part which is capable of opposing surface of object and is movable with respect to first member outside first part with respect to optical path.
    Type: Grant
    Filed: June 18, 2015
    Date of Patent: November 21, 2017
    Assignee: NIKON CORPORATION
    Inventor: Shinji Sato
  • Patent number: 9826183
    Abstract: An image-capturing device includes an image sensor. The image sensor includes an upper layer pixel group and a lower layer pixel group that receives the light fluxes from the subject that have passed through each pixel in the upper layer pixel group. The lower layer pixel group includes fourth, fifth and sixth pixels having fourth, fifth and sixth spectral sensitivities, respectively, that are complementary to first, second, and third spectral sensitivities, respectively, of the upper layer pixel group, being arranged in a two-dimensional pattern. Positions of first, second and third pixels in the upper layer pixel group and positions of the fourth, fifth and sixth pixels in the lower layer pixel group are determined such that the fourth, fifth and sixth pixels receive light fluxes that pass through the first, second and third pixels, respectively.
    Type: Grant
    Filed: March 29, 2013
    Date of Patent: November 21, 2017
    Assignee: NIKON CORPORATION
    Inventor: Hironobu Murata
  • Patent number: 9823588
    Abstract: An immersion projection optical system having, for example, a catadioptric and off-axis structure, reduces the portion of an image space filled with liquid (immersion 5 liquid), The projection optical system, which projects a reduced image of a first plane onto a second plane through the liquid, includes a refractive optical element (Lp) arranged nearest to the second plane. The refractive optical element includes a light emitting surface (Lpb) shaped to be substantially symmetric with respect to two axial directions (XY·axes) perpendicular to each other on the second plane. The light emitting surface has a central axis (Lpba) that substantially coincides with a central axis (40a) of a circle (40) corresponding to a circumference of a light entering surface (Lpa) of the refractive optical element. The central axis of the light emitting surface is decentered in one of the two axial directions (Y˜axis) from an optical axis (AX).
    Type: Grant
    Filed: May 10, 2016
    Date of Patent: November 21, 2017
    Assignee: NIKON CORPORATION
    Inventors: Yasuhiro Omura, Takaya Okada, Hiroyuki Nagasaka
  • Patent number: 9821469
    Abstract: A carrier system is provided with a wafer stage which holds a mounted wafer and is also movable along an XY plane, a chuck unit which holds the wafer from above in a non-contact manner above a predetermined position and is vertically movable, and a plurality of vertical movement pins, which can support from below the wafer held by the chuck unit on the wafer stage when the wafer stage is positioned at the predetermined position above and can also move vertically. Then, flatness of the wafer is measured by a Z position detection system, and based on the measurement results, the chuck unit and the vertical movement pins that hold (support) the wafer are independently driven.
    Type: Grant
    Filed: November 27, 2013
    Date of Patent: November 21, 2017
    Assignee: NIKON CORPORATION
    Inventor: Hideaki Hara
  • Patent number: 9823478
    Abstract: An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, and a polarization member made of optical material with optical rotatory power, which is arranged in the optical path on an incidence side of the optical integrator, and which changes a polarization state of the illumination light. The illumination light from the polarization member is irradiated onto the pattern through a pupil plane of the illumination optical apparatus.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: November 21, 2017
    Assignee: NIKON CORPORATION
    Inventor: Mitsunori Toyoda
  • Patent number: 9823548
    Abstract: An interchangeable lens to be detachably attached to a camera body, that includes a holding unit at which a plurality of contacts is arranged, the interchangeable lens includes: a first communication contact system arranged at the holding unit; and a second communication contact system different from the first communication contact system, arranged at the holding unit at a position different from a position at which the first communication contact system is arranged. The fourth contact is arranged at a position closer to the second communication contact system than the first contact, the second contact, and the third contact are, and the seventh contact and the eighth contact are arranged at positions closer to the first communication contact system than the fifth contact and the sixth contact are.
    Type: Grant
    Filed: February 20, 2015
    Date of Patent: November 21, 2017
    Assignee: Nikon Corporation
    Inventors: Kazuharu Imafuji, Masafumi Oikawa
  • Patent number: 9823580
    Abstract: A liquid immersion member is used in a liquid immersion exposure apparatus which exposes a substrate via liquid by exposure light, and forms a liquid immersion space above an object which is movable below the optical member. The liquid immersion member includes a first member that is disposed at at least a portion of surrounding of the optical member, and a second member that is disposed at at least a portion of surrounding of an optical path of the exposure light, that includes a second upper surface which is opposite to the first lower surface of the first member via a gap, a second lower surface which is capable of being opposite to the object, and a fluid recovery part which is disposed at at least a portion of surrounding of the second lower surface, and that is relatively movable with respect to the first member.
    Type: Grant
    Filed: July 12, 2013
    Date of Patent: November 21, 2017
    Assignee: NIKON CORPORATION
    Inventor: Shinji Sato
  • Patent number: 9823091
    Abstract: An encoder system includes a signal processing circuit including: (1) a first position data detection circuit that detects first position data representing positional displacement in rotation of an input shaft through first predetermined signal processing based on a first detection signal input from a first absolute position encoder; (2) a second position data detection circuit that detects second position data representing positional displacement in rotation of an output shaft through second predetermined signal processing based on a second detection signal input from a second absolute position encoder; (3) a position data combination circuit that combines the first and second position data to generate combined position data representing the number of rotations of the input shaft and the positional displacement within one rotation of the input shaft; and (4) a position data comparing and collating circuit that compares and collates the first and second position data.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: November 21, 2017
    Assignee: NIKON CORPORATION
    Inventors: Hiroyuki Kishida, Toru Morita, Yoshiji Takahashi
  • Publication number: 20170332016
    Abstract: An electronic apparatus includes: an input unit that inputs image data generated by an image capturing unit that has a plurality of pixel groups, each pixel group including at least one pixel, and that is capable of performing image-capturing under different imaging conditions for each of the pixel groups and data for the imaging conditions for each of the pixel groups; and a recording control unit that generates image data for each of pixel groups having the same imaging conditions based on the image data inputted from the input unit and records the image data generated for each of the pixel groups having the same imaging conditions in a recording unit.
    Type: Application
    Filed: September 28, 2015
    Publication date: November 16, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yoshiaki MIYAKAWA, Naoki YAMAGATA
  • Publication number: 20170329122
    Abstract: A structured illumination microscope includes: a first illumination optical system configured to irradiate, from a first direction, a sample with activating light for activating a fluorescent substance included in the sample; a second illumination optical system configured to irradiate, from a second direction that is different from the first direction, the sample with interference fringes of exciting light for exciting the fluorescent substance; a control unit configured to control a direction and a phase of the interference fringes; an imaging optical system configured to form an image of the sample irradiated with the interference fringes; an imaging element configured to take the image formed by the imaging optical system to generate a first image; and a demodulation unit configured to generate a second image by using a plurality of the first images generated by the imaging element.
    Type: Application
    Filed: August 2, 2017
    Publication date: November 16, 2017
    Applicant: NIKON CORPORATION
    Inventor: Hisao OSAWA
  • Publication number: 20170329234
    Abstract: An exposure apparatus exposes a substrate by projecting a pattern image onto the substrate through a liquid. The exposure apparatus includes a projection optical system by which the pattern image is projected onto the substrate, and a movable member which is movable relative to the projection optical system. A liquid-repellent member, at least a part of a surface of which is liquid-repellent, is provided detachably on the movable member, the liquid-repellent member being different from the substrate.
    Type: Application
    Filed: July 31, 2017
    Publication date: November 16, 2017
    Applicant: NIKON CORPORATION
    Inventors: Soichi OWA, Nobutaka MAGOME, Shigeru HIRUKAWA, Yoshihiko KUDO, Jiro INOUE, Hiroyuki NAGASAKA, Hirotaka KOHNO, Masahiro NEI, Motokatsu IMAI, Kenichi SHIRAISHI, Yasufumi NISHII, Hiroaki TAKAIWA
  • Publication number: 20170329239
    Abstract: A liquid immersion exposure apparatus exposes a substrate with an exposure beam via a liquid immersion area formed on a portion of a surface of the substrate. The apparatus includes: a projection system; a first nozzle member having an aperture through which the exposure beam is projected, the first nozzle member having a liquid supply inlet and a liquid recovery outlet; a second nozzle member having a gas supply inlet via which a gas is supplied, the gas being supplied via the gas supply inlet to a space surrounding the liquid immersion area during the exposure; and a stage system having a holder by which the substrate is held. The substrate held by the holder is moved below and relative to the projection system, the first nozzle member and the second nozzle member.
    Type: Application
    Filed: August 2, 2017
    Publication date: November 16, 2017
    Applicants: NIKON CORPORATION, NIKON ENGINEERING CO., LTD.
    Inventors: Hirotaka KOHNO, Takeshi OKUYAMA, Hiroyuki NAGASAKA, Katsushi NAKANO
  • Publication number: 20170332008
    Abstract: An image-capturing apparatus includes: an image sensor having a first image-capturing region and a second image-capturing region different from the first image-capturing region; and a control unit that displays an image generated by the first image-capturing region and an image generated by the second image-capturing region on a display unit, with a region targeted for setting image-capturing conditions of the image sensor being selectable.
    Type: Application
    Filed: December 3, 2015
    Publication date: November 16, 2017
    Applicant: NIKON CORPORATION
    Inventors: Satoshi TSUCHIYA, Yuuki ASANO, Shuhei YOSHIKAWA, Aiko NAMIKAWA
  • Publication number: 20170330037
    Abstract: An imaging device includes an imaging portion that images a subject; a positional information acquisition portion that acquires positional information of an imaging position; a control portion which acquires information on the subject based on the positional information, and displays image data of the subject and the information on the subject on a display portion; and a hold control portion that outputs a hold control signal, which holds the image data of the subject and the information on the subject, to the control portion.
    Type: Application
    Filed: August 3, 2017
    Publication date: November 16, 2017
    Applicant: NIKON CORPORATION
    Inventor: Hideya INOUE
  • Publication number: 20170332006
    Abstract: A focusing device comprises: an image capturing unit that captures a subject image formed via an optical system including a lens for executing focus adjustment and outputs an output signal; an edge detection unit that detects an edge signal among the output signal in correspondence to each color component among a plurality of color components contained in an image based upon the output signal; a calculation unit that calculates edge differential values each of which is a differential value of the edge signal in correspondence to the each color component; and a control unit that controls a moving direction along which the lens is to move based upon a comparison of the edge differential values.
    Type: Application
    Filed: August 1, 2017
    Publication date: November 16, 2017
    Applicant: NIKON CORPORATION
    Inventors: Souichi UETA, Yoshiyuki SUZUKI
  • Patent number: 9817229
    Abstract: According to one embodiment, a spatial light modulator unit is used in the illumination optical system for illuminating an illumination target surface with light from a light source and comprises: a spatial light modulator with a plurality of optical elements arrayed in a predetermined plane and controlled individually; a spatial light modulation element which applies spatial light modulation to the incident light from the light source and which makes rays of intensity levels according to positions of the respective optical elements, incident on the plurality of optical elements; and a control unit which individually controls the plurality of optical elements on the basis of information about the intensity levels of the rays incident on the respective optical elements.
    Type: Grant
    Filed: April 21, 2016
    Date of Patent: November 14, 2017
    Assignee: Nikon Corporation
    Inventor: Osamu Tanitsu
  • Patent number: 9816805
    Abstract: Method of predicting a distribution of light in an illumination pupil of an illumination system includes identifying component(s) of the illumination system the adjustment of which affects this distribution and simulating the distribution based on a point spread function defined in part by the identified components. The point spread function has functional relationship with configurable setting of the illumination settings.
    Type: Grant
    Filed: June 11, 2014
    Date of Patent: November 14, 2017
    Assignee: NIKON CORPORATION
    Inventors: Daniel Gene Smith, Eric Peter Goodwin
  • Patent number: 9817319
    Abstract: A liquid immersion lithography apparatus includes a projection system having a final optical element and a nozzle member having a first opening disposed on a first side of the final optical element and from which an immersion liquid is supplied, a second opening disposed on a second side of the final optical element and from which the immersion liquid is recovered, and a liquid recovery portion disposed to surround a path of an exposure beam and from which the immersion liquid is recovered. A tank is fluidicly connected to the liquid recovery portion of the nozzle member. During exposure of a substrate to the exposure beam, an upper surface of the substrate faces the liquid recovery portion, and the immersion liquid is supplied from the first opening while performing liquid recovery from the second opening and the liquid recovery portion.
    Type: Grant
    Filed: December 29, 2016
    Date of Patent: November 14, 2017
    Assignee: NIKON CORPORATION
    Inventors: Alex Ka Tim Poon, Leonard Wai Fung Kho
  • Publication number: 20170321079
    Abstract: Provided is a compound which is excellent terms of stability and tight adhesion to substrates and on which wiring can be formed by electroless plating. The compound is a high-molecular-weight compound having a constituent unit represented by the following formula (1). [In formula (1), R1 represents a hydrogen atom or a methyl group, m is an integer of 2-20, and Q represents a photosensitive leaving group.
    Type: Application
    Filed: July 26, 2017
    Publication date: November 9, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yusuke KAWAKAMI, Shohei Koizumi, Takashi Sugizaki
  • Publication number: 20170322498
    Abstract: Positional information of a movable body in a Y-axis direction is measured using an interferometer and an encoder whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the encoder is performed. Accordingly, by using measurement values of the interferometer, correction information for correcting the measurement values of the encoder whose short-term stability of the measurement values excels the interferometer is obtained. Then, based on the measurement values of the encoder and the correction information, the movable body is driven in the Y-axis direction with good precision.
    Type: Application
    Filed: July 26, 2017
    Publication date: November 9, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20170324911
    Abstract: An electronic apparatus includes: an input unit that inputs image data generated by an image capturing unit that has a plurality of imaging regions and that has different imaging conditions for each of the imaging regions and data for the imaging conditions for each of the imaging regions; and a recording control unit that records the image data and the data for the imaging conditions that are inputted from the input unit in a recording unit, wherein the recording control unit records the image data in a recording region of the recording unit which is read after the data for the imaging conditions for each of the image regions.
    Type: Application
    Filed: September 28, 2015
    Publication date: November 9, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yoshiaki MIYAKAWA, Naoki YAMAGATA
  • Publication number: 20170322483
    Abstract: An electronic device includes: a communication unit that is engaged in communication with an external device; a control unit that adds image information into transmission data to be transmitted to the communication unit; and a decision-making unit that makes a decision in correspondence to information indicating a recipient of the transmission data as to whether or not to allow photographing location information included in the image information to be included in the transmission data.
    Type: Application
    Filed: July 20, 2017
    Publication date: November 9, 2017
    Applicant: NIKON CORPORATION
    Inventors: Chie SOGOH, Akira OHMURA
  • Publication number: 20170322496
    Abstract: A liquid immersion exposure apparatus includes a projection optical system via which exposure light is projected, a first stage that is movable below the projection optical system and having a holding portion that holds a substrate, a second stage that is movable below the projection optical system, and a nozzle member having an opening through which the exposure light is projected, a supply opening via which the liquid is supplied and a first recovery opening via which the liquid is collected. During exposure of the substrate, a portion of a surface of the substrate is covered by the liquid while performing liquid supply from the supply opening and liquid collection from the first recovery opening.
    Type: Application
    Filed: July 12, 2017
    Publication date: November 9, 2017
    Applicant: NIKON CORPORATION
    Inventors: Tomoharu FUJIWARA, Yuichi SHIBAZAKI
  • Patent number: 9810530
    Abstract: Autofocus system (AF) employing, in addition to specified optical units, fringe projection and fringe detection systems (FPS, FDS) and specifically-configured data processing system. AFS is configured to project with FPS a sinusoidal fringe pattern, formed by a pattern source, on a substrate and to image the so projected pattern from substrate onto optical detector with FDS to form optical image from which topology of the substrate is defined as substrate moves relative to the projected pattern. Pattern source may include diffraction grating oriented that the projected pattern is inclined relative to direction of substrate scanning Topology profile is corrected for tilt of substrate, Goos-Hanchen errors, and for fringe-pattern-induced errors outside a chosen spatial-frequency range. To reduce errors of topology profile, at least five values of phase difference are used. AFS is configured to define temporal phase shifting in optical image without using any moving parts in the AFS.
    Type: Grant
    Filed: January 9, 2015
    Date of Patent: November 7, 2017
    Assignee: NIKON CORPORATION
    Inventors: Daniel Gene Smith, Eric Peter Goodwin
  • Patent number: 9810999
    Abstract: A liquid immersion member forms a liquid immersion space on an object movable below an optical member so that a light path of exposure light emitted from an emission surface of the optical member is filled with liquid. The liquid immersion member includes a first member which is disposed in at least a portion of a periphery of the optical member, a second member which is movable relative to the first member and which includes a recovery port that recovers at least a portion of the liquid in the liquid immersion space, and a gas supply opening facing a gap between the first member and the second member, from which gas is supplied to the gap.
    Type: Grant
    Filed: April 11, 2016
    Date of Patent: November 7, 2017
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 9810995
    Abstract: An exposure apparatus and method exposes a substrate via a projection optical system and a liquid supplied to an immersion region below the projection optical system. First and second holding members move below the projection optical system and each can hold a substrate in a hole of an upper surface thereof. A controller is arranged to control a drive system such that, when one holding member of the first and second holding members is arranged opposite to the projection optical system, the other holding member of the first and second holding members comes close to the one holding member, and such that the close first and second holding members are moved relative to a liquid immersion member so that the other holding member is arranged opposite to the projection optical system in place of the one holding member while the immersion region is substantially maintained below the projection optical system.
    Type: Grant
    Filed: January 17, 2017
    Date of Patent: November 7, 2017
    Assignee: NIKON CORPORATION
    Inventor: Akimitsu Ebihara
  • Publication number: 20170316682
    Abstract: An electronic device may include a position detecting unit that detects a position; a time detecting unit that detects a time; a communicating unit that communicates with a first device provided separately from the position detecting unit and the time detecting unit; and an instructing unit that instructs, via the communicating unit, a first detecting unit provided to the first device to perform detection according to a detection result of the position detecting unit and the time detecting unit. An electronic device may include a position detecting unit that detects a position; a time detecting unit that detects a time; a physical amount detecting unit that detects a physical amount of an ambient environment according to a detection result of the position detecting unit and the time detecting unit; and a human detecting that performs detection about human according to a detection result of the physical amount detecting unit.
    Type: Application
    Filed: July 20, 2017
    Publication date: November 2, 2017
    Applicant: NIKON CORPORATION
    Inventors: Kengo MIZUI, Hisashi TAI, Takafumi TOYODA, Mayuko ITO, Yuki KINOUCHI, Masakazu SEKIGUCHI
  • Publication number: 20170315457
    Abstract: A substrate is exposed with an illumination light via a projection optical system. A stage that holds the substrate moves below the projection optical system. A measurement system measures positional information of the stage with a plurality of heads that face a grating section. Movement of the stage is controlled based on the positional information measured with the measurement system, while compensating for a measurement error of the measurement system that occurs due to the heads.
    Type: Application
    Filed: July 14, 2017
    Publication date: November 2, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20170317129
    Abstract: Provided is an image-capturing unit including an image-capturing chip that includes a first surface having a pixel and a second surface that is on an opposite side of the first surface and has provided thereon an output section that outputs a pixel signal read from the pixel; a transparent substrate that is arranged facing the first surface and includes a wire pattern; a mounting substrate that is arranged facing the second surface and supports the image-capturing chip; and a relay section that is arranged on the mounting substrate and relays, to the wire pattern, the pixel signal output from the output section. Also provided is an image-capturing apparatus including the image-capturing unit described above.
    Type: Application
    Filed: July 17, 2017
    Publication date: November 2, 2017
    Applicant: NIKON CORPORATION
    Inventor: Tomohisa ISHIDA
  • Publication number: 20170318251
    Abstract: An imaging device has a sensor chip and a signal processing chip. The sensor chip includes a pixel array in which a plurality of pixels are arranged in a 2-dimensional matrix and a data output terminal group made up of a plurality of data output terminals which output analog signals of pixels for each pixel column of the pixel array. The signal processing chip includes a data input terminal group electrically coupled to the data output terminal group, a plurality of A/D converters which convert analog signals of pixels received by the data input terminal group into digital signals for each pixel column of the pixel array, and a control unit which controls operation of the plurality of A/D converters.
    Type: Application
    Filed: July 19, 2017
    Publication date: November 2, 2017
    Applicant: NIKON CORPORATION
    Inventor: Masahiro JUEN
  • Publication number: 20170318256
    Abstract: An electronic apparatus includes: an input unit that inputs data for imaging conditions for each of a plurality of imaging regions included in an image capturing unit, different imaging conditions being set for each of the imaging regions, and data for information relating to positions of the imaging regions; and a recording control unit that correlates the data for imaging conditions inputted from the input unit for each of the imaging regions with the information relating to the positions of the imaging regions and records correlated data in a recording unit.
    Type: Application
    Filed: September 28, 2015
    Publication date: November 2, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yoshiaki MIYAKAWA, Naoki YAMAGATA
  • Publication number: 20170318209
    Abstract: An electronic device, includes an input unit that inputs image data generated by an imaging unit that has a plurality of imaging regions with imaging conditions being different for each of the imaging regions, and data of the imaging conditions for each of the imaging regions; and an image processing unit that performs image processing upon the image data inputted from the input unit based on the imaging conditions for each of the imaging regions.
    Type: Application
    Filed: September 28, 2015
    Publication date: November 2, 2017
    Applicant: NIKON CORPORATION
    Inventors: Yoshiaki MIYAKAWA, Naoki YAMAGATA
  • Patent number: 9804506
    Abstract: An exposure apparatus can mitigate the impact of fluctuations in the refractive index of ambient gas, and improve, for example, stage positioning accuracy. An exposure apparatus radiates an exposure illumination light to a wafer on a wafer stage through a projection optical system, and forms a prescribed pattern on the wafer, and comprises: a scale, which is provided to the wafer stage; a plurality of X heads, which detect information related to the position of the scale; a measurement frame that integrally supports the plurality of X heads and has a coefficient of linear thermal expansion that is smaller than that of the main body of the wafer stage (portions excepting a plate wherein the scale is formed); and a control apparatus that derives information related to the displacement of the wafer stage based on the detection results of the plurality of X heads.
    Type: Grant
    Filed: July 24, 2013
    Date of Patent: October 31, 2017
    Assignee: NIKON CORPORATION
    Inventor: Dai Arai
  • Patent number: 9804508
    Abstract: A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member (142) and facing a flow passage (142a) of a liquid for regulating temperature, and is provided with a coil unit (141) having at least a part thereof in contact with the liquid. The coil unit (141) is provided with a coil body (144), a mold layer (143) that covers the coil body and holds it in specific form, and a liquid protection layer (150) that covers the mold layer (143) and has liquid protection properties.
    Type: Grant
    Filed: September 30, 2005
    Date of Patent: October 31, 2017
    Assignee: Nikon Corporation
    Inventors: Shigeru Morimoto, Tadahiro Kominami
  • Patent number: 9802852
    Abstract: A method for manufacturing an SiO2—TiO2 based glass upon a target by a direct method, includes a first process of preheating the target and a second process of growing an SiO2—TiO2 based glass ingot to a predetermined length upon the target which has been preheated, wherein the target is heated in the first process such that, in the second process, the temperature of growing surface of the glass ingot is maintained at or above a predetermined lower limit temperature.
    Type: Grant
    Filed: December 24, 2014
    Date of Patent: October 31, 2017
    Assignee: NIKON CORPORATION
    Inventors: Toshio Yoshinari, Tadahiko Saito
  • Publication number: 20170307370
    Abstract: A surveying instrument includes: a survey system; an image sensing system, including first and second image sensing units, the second having an angle of view wider than that of the first; horizontal and vertical angle drivers to rotate the survey and image sensing systems around a surveying instrument vertical and horizontal axes, respectively; a data storage part; an angle detecting part; and a control unit to cause an image, based on image data the first or second generates after imaging, a design data object for showing the design data portion locations included in the image, and coordinate measurement point objects for showing the coordinate measurement points locations, to be surveyed, corresponding to the design data portion included in the image, to appear on a representation device in response to the design data stored in the data storage part and the detected angle.
    Type: Application
    Filed: October 24, 2014
    Publication date: October 26, 2017
    Applicant: NIKON-TRIMBLE CO., LTD
    Inventors: Tomohiro TANAKA, Kazuhito YAMADA, Koki SUGIHARA, Naoko NIIMI
  • Publication number: 20170307984
    Abstract: An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object.
    Type: Application
    Filed: July 3, 2017
    Publication date: October 26, 2017
    Applicant: NIKON CORPORATION
    Inventors: Mineyuki NISHINO, Katsushi NAKANO, Satoshi TAKAHASHI
  • Publication number: 20170307884
    Abstract: It is possible to provide a technique for accurately performing an operation desired by a user. A user's head operation is identified according to information detected by a head motion detection unit. A process desired by the user is executed according to an angular velocity of the head motion. Moreover, the technique uses a control unit which can accurately execute an operation by the user's head operation without reflecting the return motion of the user's head in the process. The control unit executes a process for a start and an end of each process corresponding to the detected angular velocity according to a predetermined threshold value.
    Type: Application
    Filed: July 12, 2017
    Publication date: October 26, 2017
    Applicant: NIKON CORPORATION
    Inventors: Seiji TAKANO, Masaki OTSUKI, Akinobu SUGA, Nobuhiro FUJINAWA, Hidenori KURIBAYASHI
  • Publication number: 20170309000
    Abstract: The present invention provides an image restoration apparatus, a camera and a program which are capable of performing image restoration with simple const ruction. A specific area within a captured image is specified, and a calculation of a point spread function and the image restoration calculation are carried out using an image in the specific area.
    Type: Application
    Filed: May 19, 2017
    Publication date: October 26, 2017
    Applicant: NIKON CORPORATION
    Inventor: Mitsuhiro OKAZAKI
  • Publication number: 20170304947
    Abstract: This shaping apparatus is equipped with: a movement system which moves a target surface; a measurement system for acquiring position information of the target surface in a state movable by the movement system, a beam shaping system that has a beam irradiation section and a material processing section which supplies a shaping material irradiated by a beam from beam irradiation section; and a controller. On the basis of 3D data of a three-dimensional shaped object to be formed on a target surface and position information of the target surface acquired using the measurement system, the controller controls the movement system and the beam shaping system such that a target portion on the target surface is shaped by supplying the shaping material while moving the target surface and the beam from beam irradiation section relative to each other.
    Type: Application
    Filed: May 9, 2017
    Publication date: October 26, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20170304946
    Abstract: A shaping apparatus is equipped with: a beam shaping system having a beam irradiation section that includes a condensing optical system which emits a beam and a material processing section which supplies a shaping material irradiated by the beam from the beam irradiation section; and a controller which, on the basis of 3D data of a three-dimensional shaped object to be formed on a target surface, controls a workpiece movement system and the beam shaping system such that a target portion on the target surface is shaped by supplying the shaping material from the material processing section while moving the beam from the beam irradiation section and the target surface on a workpiece (or a table) relative to each other. Further the intensity distribution of the beam in the shaping plane facing the emitting surface of the condensing optical system can be modified.
    Type: Application
    Filed: May 9, 2017
    Publication date: October 26, 2017
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20170309847
    Abstract: A transistor manufacturing method includes: forming a first insulator layer of which formation material is a fluorine-containing resin, on a substrate having a source electrode, a drain electrode, and a semiconductor layer so as to cover the semiconductor layer; forming a second insulator layer to cover the first insulator layer; forming a base film on at least part of a surface of the second insulator layer; and after depositing a metal which is an electroless plating catalyst on a surface of the base film, forming a gate electrode on the surface of the base film by electroless plating, wherein the forming of the base film is performed by applying a liquid substance which is a formation material of the base film to the surface of the second insulator layer, and the second insulator layer has a higher lyophilic property with respect to the liquid substance than the first insulator layer.
    Type: Application
    Filed: July 10, 2017
    Publication date: October 26, 2017
    Applicant: NIKON CORPORATION
    Inventors: Shohei KOIZUMI, Takashi SUGIZAKI, Yusuke KAWAKAMI
  • Publication number: 20170310887
    Abstract: An electronic device includes: an input unit that inputs imaging condition data for each imaging region of an imaging unit that has a plurality of imaging regions with the imaging conditions being different for each of the imaging regions, and position information data for the imaging regions; and a recording control unit that records, in a recording unit, imaging condition data for the imaging regions and position information data for the imaging regions, both are inputted from the input unit.
    Type: Application
    Filed: September 28, 2015
    Publication date: October 26, 2017
    Applicant: NIKON CORPORATION
    Inventors: Shigenori FUJIO, Kiyoshi YASUDA
  • Publication number: 20170310900
    Abstract: A portable information device including a body, a position information portion that is provided in the body and that outputs position information, an image sensor that is provided in the body, a display system that is provided in the body and that displays, on a local field in a screen field, relevant information based on the position information such that the displayed relevant information is overlapped on a real-time image, an input portion that is provided on the body and, by use of which user operates an icon, the icon being displayed on the local field such that the displayed icon is overlapped on the real-time image and an imaging button that is provided, separately from the input portion, on the body and that is operated by user to capture a subject image via the image sensor.
    Type: Application
    Filed: July 13, 2017
    Publication date: October 26, 2017
    Applicant: NIKON CORPORATION
    Inventors: Hideya INOUE, Toru IWAOKA, Michiko NOBORISAKA, Masayuki HATORI, Tomohide HAMADA
  • Publication number: 20170310919
    Abstract: An electronic apparatus includes: a processing unit that processes an image capture signal captured by an image capturing unit; a communication unit that is capable of transmitting the image capture signal captured by the image capturing unit to an external apparatus; and a determination unit that determines whether or not to transmit the image capture signal to the external apparatus, according to a capture setting for the image capturing unit.
    Type: Application
    Filed: July 10, 2017
    Publication date: October 26, 2017
    Applicant: NIKON CORPORATION
    Inventors: Sho KAMIDE, Yasuyuki MOTOKI, Kunihiro KUWANO, Teppei OKUYAMA, Takeo MOTOHASHI, Yae JOTAKI, Masakazu SEKIGUCHI
  • Patent number: 9798245
    Abstract: A stage apparatus PST is provided with a holder PH, which has a substrate holding surface 33A that holds a substrate P; a stage 52, which supports and moves the holder PH; and a recovery apparatus 60, which is disposed in the vicinity of the holder PH and has lyophilic parts 3, 5 of which at least a part of each is lyophilic, that uses the lyophilic parts 3, 5 to recover a liquid 1. As a result, the infiltration of liquid into the space between the substrate and the holder is prevented, even if performing an exposure treatment by filling the space between a projection optical system and the substrate with the liquid.
    Type: Grant
    Filed: December 8, 2010
    Date of Patent: October 24, 2017
    Assignee: NIKON CORPORATION
    Inventors: Yasufumi Nishii, Kenichi Shiraishi, Hirotaka Kohno
  • Patent number: 9799510
    Abstract: Provided is a technology for efficiently obtaining a metal oxide film having good adhesiveness. A method of producing a metal oxide film includes: an application step of applying a solution containing an organic metal complex onto a substrate; an ozone exposure step of exposing the resultant coating film to ozone; and a heating step of heating the coating film.
    Type: Grant
    Filed: January 28, 2016
    Date of Patent: October 24, 2017
    Assignee: NIKON CORPORATION
    Inventors: Makoto Nakazumi, Yasutaka Nishi
  • Patent number: D800816
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: October 24, 2017
    Assignee: Nikon Corporation
    Inventors: Chikara Fujita, Hiroyuki Asano
  • Patent number: D802650
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: November 14, 2017
    Assignee: Nikon Corporation
    Inventor: Tomohiro Hoshi