Nikon Patents
Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.
Nikon Patents by Type- Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
- Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
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Patent number: 12713145Abstract: An image sensor includes a plurality of pixel blocks and a connection unit. The plurality of pixel blocks includes: a diffusion unit to which an electric charge resulting from photoelectric conversion is transferred; and a transistor containing a source electrically connected with the diffusion unit. The connection unit is electrically connected with a drain of the transistor included in each of the plurality of pixel blocks.Type: GrantFiled: July 27, 2023Date of Patent: August 18, 2026Assignee: NIKON CORPORATIONInventors: Atsushi Komai, Yoshiyuki Watanabe, Osamu Saruwatari
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Patent number: 12708944Abstract: A powder container for handling powder in an additive manufacturing process. The container includes a powder vessel with a powder inlet in an upper portion thereof and a powder outlet in a lower portion thereof, a set of n sensors configured to determine a set of n observables, a first actuator configured to drive a first mechanical function of the powder container and optionally—to provide for additional safety as well as versatility a second actuator configured to drive a second mechanical function of the powder container and/or a multi-port connector configured to be connected with a corresponding connector of a powder handling station in an additive manufacturing process.Type: GrantFiled: January 8, 2025Date of Patent: August 18, 2026Assignee: NIKON SLM SOLUTIONS AGInventors: Daniel Kopschinski, Marcel Overberg, Philip Negendank, Randy Redlich, Sebastian Feist
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Patent number: 12713151Abstract: An imaging element includes a photoelectric conversion part configured to convert light into charges, an accumulation part in which the charges from the photoelectric conversion part are accumulated, a transfer path part which is a transfer path for transferring charges from the photoelectric conversion part to the accumulation part and has a lower potential than a pixel separation region formed around the photoelectric conversion part, and a measurement part configured to measure the number of times a predetermined amount of charges is accumulated in the accumulation part and to measure the amount of charges accumulated in the photoelectric conversion part.Type: GrantFiled: June 24, 2022Date of Patent: August 18, 2026Assignees: NIKON CORPORATION, TOHOKU UNIVERSITYInventors: Osamu Saruwatari, Daiki Ogura, Rihito Kuroda
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Patent number: 12708263Abstract: An ophthalmic device including an interference optical system that detects interference light between signal light obtained by scanning an examined eye with light from a light source and reference light configured from light divided from the light source, an adjustment section that is disposed on an optical path of at least one out of the signal light or the reference light, and that adjusts a polarization state of light propagating along the at least one optical path such that a polarization state of the signal light is the same as the polarization state of the reference light, and a control section that controls the adjustment section according to a scan angle scanned on the examined eye.Type: GrantFiled: April 8, 2022Date of Patent: August 18, 2026Assignee: NIKON CORPORATIONInventors: Yasushi Tanabe, Yasufumi Nishi
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Patent number: 12710633Abstract: A microscope objective lens (OL) includes a first lens group (G1) and a second lens group (G2) arranged in order from the object side. The first lens group has positive refractive power and converts luminous flux from an object into convergent luminous flux. The second lens group has negative refractive power and converts the convergent luminous flux from the first lens group into parallel luminous flux. The microscope objective lens satisfies the following conditional expression: 14.0?NA×f 1.0<H1/H0 where NA is the numerical aperture of the microscope objective lens; f is the focal distance of the microscope objective lens; H1 is the maximum value of the height of marginal rays from an on-axis object point of the first lens group; and H0 is the height of marginal rays on the lens surface closest to the image side of the second lens group.Type: GrantFiled: April 13, 2021Date of Patent: August 18, 2026Assignee: NIKON CORPORATIONInventors: Yuta Kusui, Kazuhiro Takasago
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Patent number: 12713137Abstract: Provided is a control device for controlling an imaging condition of a sensor having one or more pixels, comprising an event detection unit for detecting an event indicating that a luminance signal changes in excess of a predetermined threshold value in one or more pixels, and for outputting an event detection signal; a counter for counting a number of events detected by the event detection unit; and a control unit for controlling the imaging condition of the sensor, based on the event detection signal. In addition, provided is a control method for controlling an imaging condition of a sensor having one or more pixels. The control method comprises detecting an event indicating that a luminance signal changes in excess of a predetermined threshold value in one or more pixels; counting a number of events; and controlling the imaging condition of the sensor, based on the detection of events.Type: GrantFiled: February 8, 2024Date of Patent: August 18, 2026Assignee: NIKON CORPORATIONInventor: Hajime Yonemochi
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Patent number: 12713124Abstract: An electronic device includes: a display control unit that is configured to display at a display unit a first image generated by capturing an image with light having entered a first area of an image sensor and a second image generated by capturing an image with light having entered a second area at the image sensor different from the first area; and a selection unit that is configured to select either the first area or the second area as an area for image-capturing condition adjustment in reference to the first image and the second image displayed at the display unit.Type: GrantFiled: May 12, 2023Date of Patent: August 18, 2026Assignee: NIKON CORPORATIONInventors: Satoshi Tsuchiya, Yuuki Asano, Shuhei Yoshikawa, Iori Noda, Takashi Shionoya, Toshiyuki Kanbara, Aiko Namikawa
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Publication number: 20260235926Abstract: An imaging apparatus includes an imaging element having an imaging surface that captures an image formed by a variable magnification optical system, a generator that generates image information based on a signal output from at least a partial region of the imaging surface, and a controller that performs mixed control that performs electronic variable magnification control to vary a size of the partial region in parallel with varying a magnification of the variable magnification optical system.Type: ApplicationFiled: March 30, 2026Publication date: August 13, 2026Applicant: NIKON CORPORATIONInventors: Yokichi GODA, Masaki KANEKO, Akihiko KAWAI, Hidefumi OTA, Kosuke HAGIWARA
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Publication number: 20260238886Abstract: An interchangeable lens mountable on a camera body includes a variable magnification optical system capable of varying magnification, an operation member that receives an operation for instructing varying the magnification of the variable magnification optical system from a user, a detection circuit that detects the operation received by the operation member, a transmitter that transmits information indicating the operation detected by the detection circuit to the camera body, a controller that performs in-lens control for controlling varying the magnification of the variable magnification optical system based on the information indicating the operation detected by the detection circuit, and a receiver that receives a signal indicating executability of the in-lens control from the camera body.Type: ApplicationFiled: April 2, 2026Publication date: August 13, 2026Applicant: NIKON CORPORATIONInventors: Yokichi GODA, Masaki KANEKO, Akihiko KAWAI, Hidefumi OTA, Kosuke HAGIWARA
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Publication number: 20260235933Abstract: A lens barrel includes a first member having conductivity, a second member that has conductivity and is disposed closer to an image plane side than the first member, a non-conductive member at least a portion of which is disposed between the first member and the second member, and a conductive member that fixes a fixed member to the non-conductive member and electrically connects the first member and the second member.Type: ApplicationFiled: March 28, 2024Publication date: August 13, 2026Applicant: NIKON CORPORATIONInventors: Satoshi YAMADA, Masateru ASAYAMA, Kazuaki KAMIO
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Patent number: 12704701Abstract: A variable magnification optical system comprises, in order from an object side, a first lens group G1 having positive refractive power, a second lens group G2 having negative refractive power, a third lens group G3 having positive refractive power and a fourth lens group G4 having negative refractive power; upon varying a magnification, a distance between the first lens group G1 and the second lens group G2 being varied, a distance between the second lens group G2 and the third lens group G3 being varied, and a distance between the third lens group G3 and the fourth lens group G4 being varied; upon focusing, the fourth lens group G4 being moved; and a predetermined conditional expression being satisfied.Type: GrantFiled: February 9, 2024Date of Patent: August 11, 2026Assignee: Nikon CorporationInventor: Kosuke Machida
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Patent number: 12703150Abstract: The invention relates to an optical unit for use in an apparatus for producing a three-dimensional workpiece by a beam melting process. The optical unit comprises a beam optics for generating a beam and directing the beam to a predetermined location, and a housing having a housing bottom and an opening provided in the housing bottom which is transparent to the beam so that the beam can pass through the opening.Type: GrantFiled: July 3, 2020Date of Patent: August 11, 2026Assignees: Nikon SLM Solutions AG, RAYLASE GmbHInventors: Axel Engelhardt, Eduard Gieser, Markus Mallmann, Manuel Wiedmann, Andreas Hermann
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Patent number: 12704719Abstract: An ocular optical system (EL) comprises: a first Fresnel lens (first lens (L1)) having a first Fresnel surface (FSa) formed on the lens surface on the image display unit (11) side; and a second Fresnel lens (second lens (L2)) placed closer to the image display unit (11) than the first Fresnel lens and having a second Fresnel surface (FSb) formed on the lens surface on the image display unit (11) side. In a plurality of wall surfaces constituting the first Fresnel surface (FSa) and the second Fresnel surface (FSb) within the radii of at least 10 mm from the optical axes for the first Fresnel surface (FSa) and the second Fresnel surface (FSb), the tilt angle of a wall surface in the first Fresnel surface (FSa) relative to the optical axis for the wall surface is greater than the tilt angle of a wall surface in the second Fresnel surface (FSb) relative to the optical axis for the wall surface, for the wall surfaces that are in the same order from the optical axes for the first and the second Fresnel surfaces.Type: GrantFiled: January 28, 2019Date of Patent: August 11, 2026Assignee: NIKON CORPORATIONInventor: Hidetsugu Takagi
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Publication number: 20260217551Abstract: Gallium-doped zinc oxide particles having an average particle diameter of from >0 nm to 30 nm and a resistivity of from 0.08 M?·cm to 1.4 M?·cm.Type: ApplicationFiled: March 23, 2026Publication date: July 30, 2026Applicants: TOHOKU UNIVERSITY, NIKON CORPORATIONInventors: Kiyoshi KANIE, Atsushi MURAMATSU, Yasutaka NISHI, Ryoko SUZUKI
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Publication number: 20260219586Abstract: An exposure device includes a neutralization portion that eliminates static electricity charged on a substrate support member while the substrate support member supporting a substrate moves, wherein the substrate support member includes a main body portion that is conductive, and a conductive member that faces the substrate supported by the substrate support member and is electrically connected to the main body portion, and the neutralization portion eliminates static electricity charged on the main body portion.Type: ApplicationFiled: March 23, 2026Publication date: July 30, 2026Applicant: NIKON CORPORATIONInventors: Atsushi HARA, Yutaro FUJITA
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Patent number: 12693507Abstract: A microscope objective lens (OL) includes a first lens group (G1) having positive refractive power, a second lens group (G2) having a concave surface facing the image side, and a third lens group (G3) having a concave surface facing the object side, which are arranged in order from the object side along an optical axis. The first lens group (G1) includes one lens component having positive refractive power, the third lens group (G3) includes three or more lenses including two negative lenses and one positive lens, and at least one predetermined negative lens in the two negative lenses satisfies the conditional expression “vdA<40”.Type: GrantFiled: February 25, 2022Date of Patent: July 28, 2026Assignee: NIKON CORPORATIONInventor: Hidetsugu Takagi
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Patent number: 12693601Abstract: An exposure apparatus includes an illumination optical system, a spatial light modulator illuminated by light from the illumination optical system, a projection optical system that irradiates an exposure target with light emitted from the spatial light modulator, a stage on which the exposure target is placed to perform a relative movement between the exposure target and the projection optical system relative to each other in a predetermined scanning direction, and a controller that has a storage in which information relating to exposure pattern is stored and controls exposure for the exposure target. The controller controls the exposure for the exposure target so that a first step of performing a first exposure based on the information relating to the exposure pattern and a second step of performing a second exposure based on at least a portion of the information relating to the exposure pattern used in the first step are executed.Type: GrantFiled: December 13, 2023Date of Patent: July 28, 2026Assignee: NIKON CORPORATIONInventors: Masaki Kato, Hitoshi Mizuno, Yasushi Mizuno
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Patent number: 12694276Abstract: A device for supporting diagnosis has: a reception unit that is configured to receive a fundus image of a subject eye; an identification unit provided with a trained model that is configured to recognize, in the fundus image of the subject eye, an area of abnormality in blood circulation, wherein the model has been trained based upon an image of a fundus and an area of abnormality in blood circulation specified in a fluorescent angiography image of the fundus; and an output unit that is configured to output information relating to the area of abnormality in blood circulation recognized in the fundus image of the subject eye.Type: GrantFiled: January 26, 2024Date of Patent: July 28, 2026Assignee: NIKON CORPORATIONInventors: Toshihide Kurihara, Yusaku Katada, Kazuo Tsubota, Kanato Masayoshi
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Publication number: 20260211207Abstract: A lens barrel includes a first frame that holds a lens, a drive unit that includes a drive shaft and drives the first frame in a direction of an optical axis, and a second frame including at least two guide portions that guide driving of the first frame in the direction of the optical axis, wherein in a plane orthogonal to the optical axis, at least one of the at least two guide portions is disposed on a second straight line that is orthogonal to a first straight line passing through the drive shaft and the optical axis and passes through the optical axis.Type: ApplicationFiled: December 19, 2023Publication date: July 23, 2026Applicant: NIKON CORPORATIONInventors: Kunihiko SHIMIZU, Takuji HAMASAKI, Takumi NAKANO, Koji NAGAOKA
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Publication number: 20260208289Abstract: The problem of plasma shielding in pulsed laser manufacturing processes is addressed by systems and methods that break a pulsed laser scan line into subsets of irradiation positions. The subsets are generally offset along the scan line from one another. Within each subset, the irradiation positions are separated from one another by a predetermined separation distance. Thus, the irradiation positions contained in a given subset are interspersed with irradiation positions contained in other subsets. The predetermined separation distance is chosen at least in part to minimize the plasma shielding effect.Type: ApplicationFiled: October 20, 2023Publication date: July 23, 2026Applicant: Nikon CorporationInventors: Takuto Takemoto, Wan Qin
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Publication number: 20260208286Abstract: A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.Type: ApplicationFiled: January 7, 2026Publication date: July 23, 2026Applicant: NIKON CORPORATIONInventors: Masayuki SHIRAISHI, Shigeki EGAMI, Yoshio KAWABE, Yosuke TATSUZAKI, Baku OGASAWARA
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Patent number: 12687709Abstract: An optical system (OL) comprising, sequentially along an optical axis from the objective side, a first lens group (G1) having a positive refractive power, a second lens group (G2) having a negative refractive power, a third lens group (G3) having a positive refractive power, and a fourth lens group (G4) having a negative refractive power, wherein, when focusing the optical system, the following conditional expression is satisfied as a result of moving the second lens group (G2) and the third lens group (G3) along the optical axis and changing the interval between adjacent lens groups. 0.20<DG4/TL<0.40 wherein DG4 represents the length of the fourth lens group (G4) on the optical axis, and TL represents the full length of the optical system (OL) when the optical system (OL) comes into focus at an infinite distance.Type: GrantFiled: October 4, 2021Date of Patent: July 21, 2026Assignee: Nikon CorporationInventor: Tomonori Kuribayashi
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Patent number: 12687486Abstract: An image processing device illuminates light from a light source through an optical system with a first numerical aperture onto an examined eye, transmits signal light returning from the examined eye through an optical system with a second numerical aperture, and divides a reference light from the light from the light source. The image processing device detects interference light between the signal light and the reference light, and acquires information representing the obtained interference light. The image processing device performs a first process of projecting the information representing the interference light onto a four-dimensional frequency aperture formed by the optical system with the first numerical aperture and the optical system with the second numerical aperture, in a four-dimensional space of frequencies of the light source and frequencies of light from the examined eye according to the signal light, and a second process of projecting the projected information into three-dimensional space.Type: GrantFiled: September 20, 2024Date of Patent: July 21, 2026Assignees: NIKON CORPORATION;, UNIVERSITY OF TSUKUBAInventors: Naoki Fukutake, Yoshiaki Yasuno, Shuichi Makita
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Patent number: 12681278Abstract: A zoom optical system (ZL) comprises: a first lens group (G1) disposed closest to an object and having a positive refractive power; an aperture stop (S) disposed closer to an image than the first lens group (G1); a positive lens component disposed so as to oppose the image side of the aperture stop (S); and a lens group (G3) having the positive lens component, wherein a distance between the first lens group (G1) and the lens group (G3) having the positive lens component changes during zooming, at least one lens surface of the positive lens component has an aspherical surface, and the following conditional expression, 0.40<fp/fGp<3.60 is satisfied, where fp: a focal length of the positive lens component, and fGp: a focal length of the lens group (G3) having the positive lens component.Type: GrantFiled: March 20, 2024Date of Patent: July 14, 2026Assignee: Nikon CorporationInventors: Takeshi Umeda, Tomoki Ito, Atsushi Shibayama
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Publication number: 20260192395Abstract: A processing system includes: a processing apparatus that processes an object by irradiating the object with beams to form arranged irradiation areas on a surface of the object; and a control apparatus that controls the processing apparatus, the processing apparatus includes: a generation apparatus that generates the beams; a first movement apparatus that moves the beams generated by the generation apparatus; and a second movement apparatus that changes an arrangement direction along which the irradiation areas are arranged, the control apparatus controls the first movement apparatus so that the irradiation areas move along a target movement route and controls the second movement apparatus so as to change the arrangement direction of the irradiation areas based on the target movement route.Type: ApplicationFiled: November 17, 2022Publication date: July 9, 2026Applicant: NIKON CORPORATIONInventor: Kaneyuki NAITO
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Publication number: 20260194692Abstract: A polysulfide resin in which structural units containing an adamantane structure are linked in a linear chain via sulfide bonds.Type: ApplicationFiled: September 26, 2025Publication date: July 9, 2026Applicant: NIKON CORPORATIONInventors: Toshiki NAKANO, Yohei KAYANO, Akane KUBOTERA, Daisuke MORI, Yoshihiro SOMEYA, Hideo TANAKA
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Publication number: 20260194825Abstract: A pattern-exposure-apparatus includes: spatial-light-modulating-element including a plurality of micro-mirrors selectively driven based on drawing data, illumination-unit that irradiates spatial-light-modulating-element with illumination-light at predetermined-incidence-angle, and projection-unit that projects reflected-light from selected micro-mirrors of spatial-light-modulating-element in ON-state to substrate, and pattern-exposure-apparatus projects and exposes pattern corresponding to drawing data to substrate, illumination-unit including condensing-optical-member that condenses light from surface-light-source having predetermined shape so as to obliquely irradiate light to spatial-light-modulating-element and that is disposed along optical-axis which is inclined at incidence-angle with respect to optical-axis of projection-unit so as to optically conjugate surface-light-source with pupil of projection-unit, and correcting-optical-member that deforms shape of outline of the surface-light-source so as toType: ApplicationFiled: February 26, 2026Publication date: July 9, 2026Applicant: NIKON CORPORATIONInventors: Masaki KATO, Yasushi MIZUNO, Toshiharu NAKASHIMA, Satoshi KAWADO
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Publication number: 20260191478Abstract: An image display method executed by a processor comprises displaying a screen including a two-dimensional fundus image of an examined eye and a three-dimensional eyeball image of the examined eye, finding a second region in the three-dimensional eyeball image that corresponds to a first region specified in the two-dimensional fundus image, and displaying a mark indicating the second region in the three-dimensional eyeball image.Type: ApplicationFiled: March 5, 2026Publication date: July 9, 2026Applicant: NIKON CORPORATIONInventor: Mariko HIROKAWA
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Patent number: 12675002Abstract: An ophthalmic lens design method includes: acquiring first information about a purpose of an ophthalmic lens; acquiring second information about at least one of a visual line of a wearer for the purpose, a place, a use tool, and a body of the wearer; acquiring data indicating a number of first regions, positions, shapes, and sizes of a plurality of first regions set on a surface of the ophthalmic lens, and distances to a target viewed through the first regions; setting a variable numerical value among numerical values indicating the number of first regions, the positions, the shapes, and the sizes of the plurality of first regions, and the distances in the data and setting the plurality of first regions and the distances on the surface; and setting a target aberration distribution based on the plurality of first regions and the distances that have been set.Type: GrantFiled: June 15, 2022Date of Patent: July 7, 2026Assignee: NIKON-ESSILOR CO., LTD.Inventor: Naoshi Aikawa
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Publication number: 20260185449Abstract: A blade member on a surface of which a groove structure is formed, wherein the groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, the plurality of first groove structures are formed to extend in a first direction, the plurality of second groove structures are formed to extend in a second direction that is different from the first direction, the third groove structure extends along a third direction that is different from the first and second directions, and is formed between one first groove structure and one second groove structure.Type: ApplicationFiled: February 25, 2026Publication date: July 2, 2026Applicant: NIKON CORPORATIONInventors: Masayuki SHIRAISHI, Takahiro KURASHIMA, Baku OGASAWARA
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Publication number: 20260185820Abstract: Detectors are situated along a tilted optical axis to receive optical radiation from a work surface. Variations in the received optical power are used to estimate a work surface positional along a work surface axis. The received optical power can be emitted from the work surface and an estimated temperature of the work surface used to adjust the received optical power. One or two single element detectors or a linear detector can be used. A position of a focused spot produced from the received optical power at the linear detector can be used to assess work surface axial position.Type: ApplicationFiled: February 23, 2026Publication date: July 2, 2026Applicant: NIKON CORPORATIONInventors: Eric Peter GOODWIN, Zhi-Wei LIN
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Publication number: 20260186236Abstract: A lens barrel includes a first lens holding frame that holds a first lens and has a first protruding portion, a first motor configured to move the first lens holding frame in an optical axis direction, a second lens holding frame that holds a second lens and has a second protruding portion, a second motor configured to move the second lens holding frame in the optical axis direction, and an outer barrel that has a straight groove engaging with the first protruding portion and the second protruding portion and extending in the optical axis direction, and is disposed further outward than the first lens holding frame and the second lens holding frame.Type: ApplicationFiled: February 23, 2026Publication date: July 2, 2026Applicant: NIKON CORPORATIONInventors: Takumi NAKANO, Takuji HAMASAKI
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Patent number: 12667892Abstract: We describe a process chamber, an apparatus, a modular system, a method, a safety device, a positioning system and a system for producing a three-dimensional workpiece and/or for use thereof when producing a three-dimensional workpiece. The process chamber for producing the three-dimensional workpiece via an additive layer construction method comprises: a material supply unit comprising a substantially ring-like shaped end portion at a first side of the process chamber, wherein the material supply unit is adapted to supply, via the end portion, material to a carrier on which the material is to be processed by the process chamber for producing the three-dimensional workpiece, and an opening at the first side of the process chamber for processing, by the process chamber, the material supplied on the carrier in order to produce the three-dimensional workpiece, wherein the substantially ring-like shaped end portion surrounds the opening.Type: GrantFiled: March 2, 2020Date of Patent: June 30, 2026Assignee: Nikon SLM Solutions AGInventors: Birk Hoppe, Kevin Kondziella, Toni Adam Krol, Christopher Stengel, Meike Husmann, Naveed Iqbal, Maximilian Schniedenham, Dieter Schwarze, Jan Wilkes, Bärbel Kratz
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Publication number: 20260177809Abstract: A spatial light modulation unit includes a spatial light modulator including a substrate, a plurality of mirrors arranged on a surface of the substrate in a plan view, and a frame body that is located over the substrate and surrounds the plurality of mirrors in the plan view, and a cover that is located over the frame body, is attached to the spatial light modulator so that a relative positional relationship with the spatial light modulator is fixed, and restricts incidence of light on the frame body, wherein a first surface of the cover faces the frame body, an opening of the cover extends from a side of the first surface to a side of a second surface, which is opposite to the side of the first surface, of the cover, and each of the plurality of mirrors is able to be brought into a plurality of states.Type: ApplicationFiled: December 17, 2025Publication date: June 25, 2026Applicant: NIKON CORPORATIONInventors: Kensuke TOKUMI, Satoshi KAWADO, Hiroshi KAJIYAMA, Yusuke MATSUHASHI, Koki YAMAGUCHI, Yuu HASEGAWA
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Publication number: 20260179246Abstract: An observation device that analyzes a cell image includes an image acquiring unit configured to acquire a second image in a region wider than a region used for analysis at a pixel resolution lower than a pixel resolution of a first image used for the analysis, an index calculating unit configured to calculate a value of an index for a cell in each of subregions included in the second image and corresponding to the region used for the analysis, a region selecting unit configured to select a region to be used for the analysis from the subregions on the basis of the value of the index calculated by the index calculating unit, an analysis unit configured to analyze the first image in the region to be used for the analysis, and a third input unit configured to receive an input of a determination method for the region to be used for the analysis, wherein the determination method includes a method of determining a region to be used for the analysis using the index calculating unit and the region selecting unit and aType: ApplicationFiled: February 13, 2026Publication date: June 25, 2026Applicant: NIKON CORPORATIONInventors: Kohma Hayashi, Tetsuro Hoshino, Takeyuki Abe, Hiromi Oi, Chisako Iwamoto, Shutaro Onishi
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Publication number: 20260177926Abstract: An exposure apparatus includes: an illumination optical system; a spatial light modulator; a projection optical system that illuminates an exposure target with light emitted from the spatial light modulator; and a stage where the exposure target is placed, wherein by the stage moving the exposure target in a predetermined scan direction, the light illuminates the exposure target by the projection optical system scans on the exposure target, the spatial light modulator includes a plurality of mirrors that rotates around a tilt axis extending in a direction orthogonal to both the scan and an optical axis directions of the projection optical system, the mirrors become an ON state by adjusting a tilt of each mirror relative to the scan direction and thereby emit light to the system, and the exposure apparatus includes an angle adjustment mechanism that adjusts a tilt angle of the spatial light modulator relative to the scan direction.Type: ApplicationFiled: February 20, 2026Publication date: June 25, 2026Applicant: NIKON CORPORATIONInventors: Masaki KATO, Hitoshi MIZUNO, Yasushi MIZUNO
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Publication number: 20260177938Abstract: A measurement device has: a slider which holds a substrate and is movable parallel to the XY plane; a drive system that drives the slider; a position measurement system which emits beams from a head section to a measurement surface in which grating section are provided on the slider, which receives respective return beams of the beams from the measurement surface, and which is capable of measuring position information in at least directions of three degrees of freedom including the absolute position coordinates of the slider; a mark detection system that detects a mark on the substrate; and a controller which detects the marks on the substrate using the mark detection system while controlling the drive of the slider, and which obtains the absolute position coordinates of each mark based on the detection result of each mark and measurement information by the position measurement system at the time of detection.Type: ApplicationFiled: February 19, 2026Publication date: June 25, 2026Applicant: NIKON CORPORATIONInventor: Yuichi SHIBAZAKI
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Patent number: 12663623Abstract: A variable magnification optical system comprising, in order from an object side, a first lens group having negative refractive power, a second lens group having positive refractive power, a third lens group and a fourth lens group; upon varying a magnification, respective distances between neighboring lens groups being varied; the first lens group comprising a negative lens at a most object side and a positive lens at a most image side, the negative lens being a negative meniscus lens having a convex surface facing the object side; and the second lens group comprising, in order from the object side, a 2a lens group having positive refractive power, a 2b lens group having positive refractive power, and a 2c lens group. The optical system satisfies specified conditional expressions.Type: GrantFiled: April 3, 2024Date of Patent: June 23, 2026Assignee: Nikon CorporationInventors: Yoko Komatsubara, Takeshi Umeda
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Patent number: 12663692Abstract: A blur correction device includes a lens holding frame that holds a lens, a holding frame that movably holds the lens holding frame, a first drive unit that drives the lens holding frame with respect to the holding frame in a direction intersecting an optical axis, a lock member configured to move between a lock position that restricts movement of the lens holding frame and a release position that releases restriction, and a detection unit configured to detect an amount of movement of the lock member.Type: GrantFiled: April 26, 2022Date of Patent: June 23, 2026Assignee: NIKON CORPORATIONInventors: Yusuke Sakamoto, Sueyuki Ohishi
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Patent number: 12663611Abstract: An optical system (OL) has a first lens group (G1), a first focusing lens group (GF1) having a negative refractive power, and a second focusing lens group (GF2) having a positive refractive power, arranged in the stated order from the object side along the optical axis, the first focusing lens group (GF1) and the second focusing lens group (GF2) moving along the optical axis in mutually different trajectories during focusing, and the optical system (OL) furthermore having an aperture diaphragm (S) disposed further toward the object side than the first focusing lens group (GF1), and satisfying the following conditional expression: 0.68<(?fF1)/fF2<3.60, where fF1 is the focal length of the first focusing lens group (GF1), and fF2 is the focal length of the second focusing lens group (GF2).Type: GrantFiled: January 21, 2022Date of Patent: June 23, 2026Assignee: Nikon CorporationInventor: Kosuke Machida
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Publication number: 20260170187Abstract: An information processing method including: acquiring a difference model indicating difference between an object model acquired by measuring a three-dimensional shape of an object and a target model indicating a target shape of the object after a processing, generated based on the object model; acquiring a post-processing model indicating at least a part of a three-dimensional shape of a post-processing object, which is the object processed based on the difference model, by measuring the post-processing object; and generating difference information relating to a difference between the difference model and the post-processing model.Type: ApplicationFiled: February 11, 2026Publication date: June 18, 2026Applicant: NIKON CORPORATIONInventors: Yusuke NAKAUNE, Tomoya NAKAGAWA
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Patent number: 12660341Abstract: A first circuit layer including a first semiconductor substrate with photoelectric conversion unit that photoelectrically converts incident light and generates charge, and a first wiring layer with wiring that reads out signal based upon charge generated by the photoelectric conversion unit; second circuit layer including a second wiring layer with wiring connected to the wiring of the first wiring layer, and a second semiconductor substrate with a through electrode connected to the wiring of the second wiring layer; third circuit layer including a third semiconductor substrate with a through electrode connected to the through electrode of the second circuit layer, and third wiring layer with wiring connected to the through electrode of the third semiconductor substrate; and a fourth circuit layer including a fourth wiring layer with wiring connected to the wiring of the third wiring layer, and fourth semiconductor substrate connected to the wiring of the fourth wiring layer.Type: GrantFiled: April 25, 2023Date of Patent: June 16, 2026Assignee: NIKON CORPORATIONInventors: Shigeru Matsumoto, Toru Takagi
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Patent number: 12656589Abstract: An infinity-corrected microscope objective lens has, arranged in order from the object side along an optical axis, a first lens group having a positive refractive power, and a second lens group having a positive refractive power, an intermediate image forming plane in which light from an object forms an image being positioned between the first lens group and the second lens group, and the microscope objective lens satisfying the condition below. ?0.2<f×NA/TL<?0.05, where f is the focal length of the microscope objective lens, NA is the object-side numerical aperture of the microscope objective lens, and TL is the distance on the optical axis from the lens surface of the microscope objective lens on the side thereof closest to the object to the lens surface of the microscope objective lens on the side thereof closest to the image.Type: GrantFiled: October 7, 2021Date of Patent: June 16, 2026Assignee: NIKON CORPORATIONInventors: Kyoya Tokunaga, Kei Tomimatsu, Katsuya Watanabe
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Patent number: 12656620Abstract: An optical system includes a first optical system, a second optical system, and a third optical system. The first optical system divides an input beam into a first light and a second light. The second optical system includes a concave reflective surface which reflects the first light. The third optical system directs at least one of the first light reflected from the second optical system and the second light from the first optical system to an output optical path of the third optical system.Type: GrantFiled: August 23, 2022Date of Patent: June 16, 2026Assignee: NIKON CORPORATIONInventors: Daniel Gene Smith, Brian Lee Stamper
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Publication number: 20260158594Abstract: A processing optical system includes a first optical system that is configured to split a processing light from a light source into a first processing light and a second processing light; a second optical system that is configured to split the second processing light into a plurality of second processing lights and to irradiate the split second processing lights onto an object from different incident directions respectively to form interference fringes on a surface of the object; and a third optical system that is configured to irradiate the first processing light from the first optical system toward an interference area on the surface of the object, the interference fringes being formed in the interference area.Type: ApplicationFiled: May 11, 2022Publication date: June 11, 2026Applicant: NIKON CORPORATIONInventor: Zhigiang LIU
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Patent number: 12649683Abstract: Provided is an optical glass including: by mol % of a cation, 5% to 20% of a content rate of Si4+; 18% to 35% of a content rate of Al3+; 15% to 50% of a total content rate of La3+, Y3+, and Gd3+; 2% to 15% of a content rate of Zr4+; and 8% to 30% of a content rate of Ta5+, wherein a ratio of the content rate of Al3+ to a total content rate of Si4+ and Al3+ (Al3+/(Si4++Al3+)) is from 0.5 to 0.85.Type: GrantFiled: December 2, 2021Date of Patent: June 9, 2026Assignee: NIKON CORPORATIONInventor: Kohei Yoshimoto
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Patent number: D1130141Type: GrantFiled: July 15, 2024Date of Patent: June 16, 2026Assignee: Nikon CorporationInventors: Kanoko Ishida, Yuki Nomura, Toshimitsu Nojima
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Patent number: D1130472Type: GrantFiled: April 9, 2024Date of Patent: June 16, 2026Assignee: Nikon CorporationInventors: Misao Miura, Rin Onishi
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Patent number: D1130525Type: GrantFiled: July 2, 2025Date of Patent: June 16, 2026Assignee: Nikon CorporationInventors: Koji Nagaoka, Osamu Katsuda
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Patent number: RE50962Abstract: A plurality of pixels PX include effective pixels and optical black pixels. Signal lines VL are provided corresponding to each column of the pixels PX and supplied with output signals of the pixels PX of the corresponding column. Clip transistors CL are provided corresponding to the respective signal lines VL and limit a potential of the corresponding vertical signal lines VL based on a gate potential. At least in a predetermined operating mode, a potential Vclip_dark is supplied to a gate of one of the clip transistors CL corresponding to at least one pixel column formed of the optical black pixels when reading a noise level from the pixels PX corresponding to the clip transistors CL and when reading a data level from the pixels PX corresponding to the clip transistors CL.Type: GrantFiled: April 25, 2023Date of Patent: July 21, 2026Assignee: NIKON CORPORATIONInventor: Toru Shima