Nikon Patents

Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.

Nikon Patents by Type
  • Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
  • Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
  • Patent number: 10663704
    Abstract: The art has, disposed in order from an object, a first lens group (G1) having positive refractive power, a second lens group (G2) having negative refractive power, a third lens group (G3) having negative refractive power, and a fourth lens group (G4) having positive refractive power, in which zooming is made by varying an air distance between the first lens group (G1) and the second lens group (G2), and the following conditional expression (1) is satisfied: 0.60<f4/fw<1.15??(1) where f4 denotes a focal distance of the fourth lens group (G4), and fw denotes a focal distance of a zoom lens in a wide-angle end state upon focusing on infinity.
    Type: Grant
    Filed: September 6, 2016
    Date of Patent: May 26, 2020
    Assignee: Nikon Corporation
    Inventors: Taku Matsuo, Haruo Sato
  • Publication number: 20200162662
    Abstract: An electronic device includes a display and a control unit. The display displays a plurality of images of a subject captured in a first image-capturing region of an image sensor. The control unit controls the image sensor so as to set image-capturing conditions for the first image-capturing region to be different from image-capturing conditions for a second image-capturing region of the image sensor by using an image selected from the plurality of images displayed on the display.
    Type: Application
    Filed: January 2, 2020
    Publication date: May 21, 2020
    Applicant: NIKON CORPORATION
    Inventors: Satoshi TSUCHIYA, Yuuki ASANO, Shuhei YOSHIKAWA, Aiko NAMIKAWA
  • Patent number: 10656529
    Abstract: A control system, of a plurality of heads, acquires grating correction information related to at least two of scales in a first grating group and scales in a second grating group, based on position information of a movable body measured using at least four heads irradiating measurement beams on at least two of the scales and scales. The grating correction information is used to control movement of the movable body using at least three heads irradiating at least two of the scales and scales.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: May 19, 2020
    Assignee: NIKON CORPORATION
    Inventors: Akinori Shirato, Takashi Shibuya
  • Patent number: 10656401
    Abstract: An optical apparatus includes a first optical element and a second optical element capable of separating incident light according to a wavelength of the incident light. The first optical element includes a first separation section having first optical characteristics for reflecting light in a first wavelength band, transmitting light in a second wavelength band, and partially transmitting and partially reflecting light in a third wavelength band. The second optical element includes a second separation section having second optical characteristics for separating incident light that is incident in two wavelength bands including the first wavelength band or the second wavelength band and the third wavelength band into the light in the first wavelength band or the light in the second wavelength band and the light in the third wavelength band according to the wavelength.
    Type: Grant
    Filed: December 8, 2014
    Date of Patent: May 19, 2020
    Assignee: NIKON CORPORATION
    Inventors: Susumu Mori, Tomoya Saito
  • Patent number: 10656136
    Abstract: An observation apparatus includes: an area calculation unit that calculates a colony area based on an image in which a cell colony is captured; a cell number calculation unit that calculates, based on the image, the number of cells included in a target colony of which an area is calculated by the area calculation unit; and a density calculation unit that calculates, based on the area of the target colony calculated by the area calculation unit and the number of the cells included in the target colony calculated by the cell number calculation unit, a density of the cells included in the target colony.
    Type: Grant
    Filed: June 16, 2014
    Date of Patent: May 19, 2020
    Assignee: NIKON CORPORATION
    Inventors: Yasujiro Kiyota, Hiroaki Kii
  • Patent number: 10658157
    Abstract: An exposure apparatus scans a substrate in a Y-axis direction and also adjusts irradiation position of a plurality of beams, based on correction information obtained from the same number of distortion tables as the beams, the distortion tables including information concerning change of irradiation position of the plurality of beams of a multibeam optical system. Especially, the irradiation position of the plurality of beams in the Y-axis direction is adjusted by individually controlling irradiation timing of the plurality of beams irradiated on the substrate from the multibeam optical system.
    Type: Grant
    Filed: March 14, 2017
    Date of Patent: May 19, 2020
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Publication number: 20200148700
    Abstract: What is provided is a compound, a pattern forming substrate, a coupling agent, and a pattern formation method. The compound is represented by Formula (1).
    Type: Application
    Filed: January 16, 2020
    Publication date: May 14, 2020
    Applicants: NIKON CORPORATION, Kanagawa University
    Inventors: Yusuke KAWAKAMI, Kazuo YAMAGUCHI
  • Publication number: 20200153193
    Abstract: A pulsed light generation device, includes: a first optical fiber through which first pulsed light and second pulsed light, having an intensity that decreases while an intensity of the first pulsed light increases, and increases while the intensity of the first pulsed light decreases, having been multiplexed and entered therein, are propagated; and a second optical fiber at which the first pulsed light, having exited the first optical fiber and entered therein, is amplified while being propagated therein, wherein: at the first optical fiber, phase modulation occurs in the first pulsed light due to cross phase modulation caused by the second pulsed light; and self-phase modulation occurring in the first pulsed light at the second optical fiber is diminished by the phase modulation having occurred at the first optical fiber.
    Type: Application
    Filed: January 3, 2020
    Publication date: May 14, 2020
    Applicant: NIKON CORPORATION
    Inventor: Akira TOKUHISA
  • Patent number: 10649348
    Abstract: A movable body apparatus includes: a substrate holder which can move in the X-axis and Y-axis directions; a Y coarse movement stage which can move in the Y-axis direction; a first measurement system which acquires position information on the substrate holder by heads on the substrate holder and a scale on the Y coarse movement stage; a second measurement system which acquires position information on the Y coarse movement stage by heads on the Y coarse movement stage and a scale; and a control system which controls the position of the substrate holder based on position information acquired by the first and second measurement systems. The first measurement system irradiates a measurement beam while moving the heads in the X-axis direction with respect to the scale, and the second measurement system irradiates a measurement beam while moving the heads in the Y-axis direction with respect to the scale.
    Type: Grant
    Filed: September 29, 2017
    Date of Patent: May 12, 2020
    Assignee: NIKON CORPORATION
    Inventor: Yasuo Aoki
  • Patent number: 10652495
    Abstract: An imaging sensor comprising: an imaging chip in which a plurality of pixel are arranged in a matrix; and a signal processing chip that is each provided for one or more pixel columns or one or more pixel rows, has a device that performs signal processing on a pixel signal output from a pixel, and is stacked with the imaging chip is provided. For example, the device that performs signal processing is an A/D converter that converts a pixel signal output from the pixel into a digital signal, and when a pixel signal output from the pixel is converted into a digital signal, at least two or more A/D converters among the A/D converters are controlled in parallel.
    Type: Grant
    Filed: May 1, 2019
    Date of Patent: May 12, 2020
    Assignee: NIKON CORPORATION
    Inventor: Hironobu Murata
  • Patent number: 10652485
    Abstract: When the amplification ratio is low and strong incident light causes a large charge, the signal retrieved from regions where the incident light is weak is also weak, but when the amplification ratio is high in regions where the incident light is weak, the signal retrieved from regions where the incident light is strong becomes saturated. Therefore, the dynamic range of the imaging unit is narrow. Provided is an imaging unit comprising an imaging section that includes a first group having one or more pixels and a second group having one or more pixels different from those of the first group; and a control section that, while a single charge accumulation is performed in the first group, causes pixel signals to be output by performing charge accumulation in the second group a number of times differing from a number of times charge accumulation is performed in the first group.
    Type: Grant
    Filed: April 5, 2018
    Date of Patent: May 12, 2020
    Assignee: NIKON CORPORATION
    Inventor: Shiro Tsunai
  • Patent number: 10649196
    Abstract: A structured illumination microscope includes: a first illumination optical system configured to irradiate, from a first direction, a sample with activating light for activating a fluorescent substance included in the sample; a second illumination optical system configured to irradiate, from a second direction that is different from the first direction, the sample with interference fringes of exciting light for exciting the fluorescent substance; a control unit configured to control a direction and a phase of the interference fringes; an imaging optical system configured to form an image of the sample irradiated with the interference fringes; an imaging element configured to take the image formed by the imaging optical system to generate a first image; and a demodulation unit configured to generate a second image by using a plurality of the first images generated by the imaging element.
    Type: Grant
    Filed: August 2, 2017
    Date of Patent: May 12, 2020
    Assignee: NIKON CORPORATION
    Inventor: Hisao Osawa
  • Publication number: 20200142320
    Abstract: A liquid crystal exposure apparatus has a measurement system having scales arranged apart from each other in the X-axis direction provided at a substrate stage holding a substrate and heads each irradiating the scales with a measurement beam; and a measurement device that measures positions of head units in the Y-axis direction. The measurement system measures a position of the substrate holder in directions of three degrees of freedom within a plane, based on measurement information of at least three heads. Each of the heads move off of one scale while the substrate holder is moved in the X-axis direction and moves to irradiate another scale adjacent to the one scale, and correction information to control movement of the substrate holder using the head moving to irradiate another scale is acquired, based on measurements of at least three heads.
    Type: Application
    Filed: January 3, 2020
    Publication date: May 7, 2020
    Applicant: NIKON CORPORATION
    Inventor: Takachika SHIMOYAMA
  • Publication number: 20200145601
    Abstract: An imaging element includes: an imaging unit in which a plurality of pixel groups including a plurality of pixels that output pixel signals according to incident light are formed, and on which incident light corresponding to mutually different pieces of image information is incident; a control unit that controls, for each of the pixel groups, a period of accumulating in the plurality of pixels included in the pixel group; and a readout unit that is provided to each of the pixel groups, and reads out the pixel signals from the plurality of pixels included in the pixel group.
    Type: Application
    Filed: January 9, 2020
    Publication date: May 7, 2020
    Applicant: NIKON CORPORATION
    Inventors: Shiro TSUNAI, Hironobu MURATA
  • Patent number: 10642169
    Abstract: An alignment system is equipped with: an alignment system having an objective optical system, an irradiation system and a beam receiving system; and a calculation system, the objective optical system including an objective transparent plate that faces a wafer movable in a Y-axis direction, the irradiation system irradiating a grating mark provided at the wafer with measurement beams via the objective transparent plate while scanning the measurement beams in the Y-axis direction, the beam receiving system receiving diffraction beams from the grating mark of the measurement beams via the objective optical system, and the calculation system obtaining positional information of the grating mark on the basis of the output of the beam receiving system, wherein the objective transparent plate deflects or diffracts the diffraction beams diffracted at the grating mark toward the beam receiving system.
    Type: Grant
    Filed: May 31, 2019
    Date of Patent: May 5, 2020
    Assignee: NIKON CORPORATION
    Inventor: Akihiro Ueda
  • Patent number: 10645788
    Abstract: An X-ray generation device that emits X-rays due to an electron beam emitted from a cathode arriving at a target, includes: first and second high voltage power supplies that are connected in series between the cathode and the target, and both of which accelerate the electron beam; and wherein the second high voltage power supply outputs a second high voltage so that, with respect to a phase of a ripple component of a first high voltage generated by the first high voltage power supply, a phase of a ripple component of the second high voltage generated by the second high voltage power supply has a predetermined relationship.
    Type: Grant
    Filed: March 27, 2014
    Date of Patent: May 5, 2020
    Assignee: Nikon Corporation
    Inventors: Takeshi Endo, Satoshi Miura
  • Patent number: 10642159
    Abstract: An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object.
    Type: Grant
    Filed: July 3, 2017
    Date of Patent: May 5, 2020
    Assignee: NIKON CORPORATION
    Inventors: Mineyuki Nishino, Katsushi Nakano, Satoshi Takahashi
  • Publication number: 20200137343
    Abstract: An image sensor includes a first semiconductor layer provided with a pixel, including a photoelectric conversion unit that photoelectrically converts incident light to generate an electric charge, an accumulation unit that accumulates the electric charge generated by the photoelectric conversion unit, and a transfer unit that transfers the electric charge generated by the photoelectric conversion unit to the accumulation unit, a second semiconductor layer provided with a supply unit that supplies the transfer unit with a transfer signal for transferring the electric charge from the photoelectric conversion unit to the accumulation unit, and a third semiconductor layer into which a signal is inputted, the signal being based on the electric charge that has been transferred to the accumulation unit.
    Type: Application
    Filed: December 26, 2019
    Publication date: April 30, 2020
    Applicant: NIKON CORPORATION
    Inventors: Atsushi Kamashita, Atsushi Komai, Toru Takagi, Tomohisa Ishida
  • Publication number: 20200137279
    Abstract: An image sensor includes: a first pixel and a second pixel, each of which comprises a first photoelectric conversion unit that photoelectrically converts light that has passed through a micro lens and generates a first charge, a second photoelectric conversion unit that photoelectrically converts light that has passed through the micro lens and generates a second charge, an accumulation unit that accumulates at least one of the first charge and the second charge, a first transfer unit that transfers the first charge to the accumulation unit, and a second transfer unit that transfers the second charge to the accumulation unit; and a control unit that outputs, to the first transfer unit of the first pixel and to the second transfer unit of the second pixel, a signal that causes the first charge of the first pixel and the second charge of the second pixel to be transferred to their accumulation units.
    Type: Application
    Filed: March 30, 2018
    Publication date: April 30, 2020
    Applicant: NIKON CORPORATION
    Inventor: Takashi SEO
  • Publication number: 20200133022
    Abstract: A method for designing an eyeglass lens includes: displaying an image upon a display device while maintaining a positional relationship of a face of a subject and the display device; acquiring information in which visual sensitivity of the subject is evaluated on the basis of an impression received by the subject who has viewed the image; and designing an eyeglass lens on the basis of the information in which the sensitivity is evaluated.
    Type: Application
    Filed: December 26, 2019
    Publication date: April 30, 2020
    Applicant: NIKON-ESSILOR CO., LTD.
    Inventor: Yoshinori YOSHIDA
  • Publication number: 20200137361
    Abstract: An image sensor includes: a plurality of microlenses arranged in a two-dimensional pattern; and a plurality of pixels that are provided in correspondence to each of the microlenses and receive lights of different color components, respectively. Pixels that are provided at adjacent microlenses among the microlenses and that receive lights of same color components, are adjacently arranged.
    Type: Application
    Filed: December 30, 2019
    Publication date: April 30, 2020
    Applicant: NIKON CORPORATION
    Inventor: Hironobu MURATA
  • Patent number: 10636819
    Abstract: An imaging device is provided, the imaging device including: a first-conductivity-type substrate; a first-conductivity-type element forming portion provided on the substrate, and having a concentration lower than the substrate; and a plurality of pixel portions provided in the element forming portion, and arrayed two-dimensionally, each pixel portion having a light receiving element, and a second-conductivity-type carrier absorbing portion provided in an area different from an area where the light receiving element is provided. At least one pixel portion of the pixel portions has: a first-conductivity-type first wall portion provided on a substrate side relative to the light receiving element, the first wall portion overlapping at least part of the light receiving element in an array direction of the pixel portions, and having a concentration higher than the substrate, and a carrier passage area not provided with the first wall portion in the array direction of the pixel portions.
    Type: Grant
    Filed: July 10, 2019
    Date of Patent: April 28, 2020
    Assignee: NIKON CORPORATION
    Inventors: Satoshi Nakayama, Ryoji Ando
  • Patent number: 10634151
    Abstract: A certain material irregularly expressed in an observation area is effectively observed. An observing apparatus includes a first observing unit performing a time lapse shooting of a predetermined observation area, a first discriminating unit discriminating whether or not a first material is expressed in the observation area based on an image obtained by the first observing unit, and a second observing unit starting a time lapse shooting relating to a part where the first material is expressed at a timing when the first material is expressed in the observation area, in which a shooting frequency of the time lapse shooting by the second observing unit is higher than a shooting frequency of the time lapse shooting by the first observing unit.
    Type: Grant
    Filed: February 20, 2018
    Date of Patent: April 28, 2020
    Assignee: NIKON CORPORATION
    Inventor: Hiroaki Kii
  • Patent number: 10638037
    Abstract: An image-capturing device includes: an image sensor that includes an image-capturing area where an image of a subject is captured; a setting unit that sets image-capturing conditions to be applied to the image-capturing area; a selection unit that selects pixels to be used for interpolation from pixels present in the image-capturing area; and a generation unit that generates an image of the subject captured in the image-capturing area with signals generated through interpolation executed by using signals output from the pixels selected by the selection unit, wherein: the selection unit makes a change in selection of at least some of the pixels to be selected depending upon the image-capturing conditions set by the setting unit.
    Type: Grant
    Filed: September 26, 2016
    Date of Patent: April 28, 2020
    Assignee: NIKON CORPORATION
    Inventors: Takashi Shionoya, Toshiyuki Kanbara, Naoki Sekiguchi
  • Patent number: 10636830
    Abstract: An image-capturing element manufacturing method includes: preparing a first substrate having a plurality of pixels that are two-dimensionally continuously arrayed; preparing a second substrate having a plurality of circuit blocks that respectively have connection terminals to a power supply and a reference potential and that are electrically independent from each other, each of the plurality of circuit blocks having at least some of circuits to read out signals from the plurality of pixels; laminating the first substrate and the second substrate to electrically couple the plurality of circuit blocks and the plurality of pixels overlapping therewith; and cutting circuit blocks around at least one of the plurality of circuit blocks and pixels overlapping therewith to form a laminate in which the plurality of pixels are laminated onto the at least one of the plurality of circuit blocks.
    Type: Grant
    Filed: July 30, 2018
    Date of Patent: April 28, 2020
    Assignee: NIKON CORPORATION
    Inventors: Tadashi Narui, Toru Takagi
  • Patent number: 10638067
    Abstract: A solid-state image sensor includes: a plurality of pixels, each including a photoelectric conversion unit and a charge accumulating unit that accumulates an electric charge from the photoelectric conversion unit; and a connection unit that includes a plurality of linking units each of which electrically connects the charge accumulating units of two adjacent pixels among the plurality of pixels.
    Type: Grant
    Filed: November 18, 2014
    Date of Patent: April 28, 2020
    Assignee: NIKON CORPORATION
    Inventors: Atsushi Komai, Yoshiyuki Watanabe, Osamu Saruwatari
  • Patent number: 10638113
    Abstract: An imaging system, including: a first body; a first imager that is provided in the first body and images an object; a first information calculator that is provided in the first body and calculates first model information including at least one of shape information and texture information of the object based on an imaging result of the first imager; a pattern setter that sets a reference pattern indicating at least a part of the first model information calculated by the first information calculator; a first projector that projects the reference pattern toward the object; a second body; a second imager that is provided in the second body and images the object onto which the reference pattern is projected; a second information calculator that is provided in the second body and calculates second model information including at least one of shape information and texture information of the object based on an imaging result of the second imager; and a pattern extractor that extracts the reference pattern projected by
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: April 28, 2020
    Assignee: NIKON CORPORATION
    Inventors: Takeaki Sugimura, Yoshihiro Nakagawa
  • Publication number: 20200124988
    Abstract: A substrate stage apparatus includes: a fine movement stage movable along the XY plane; an XY two-dimensional stage apparatus (an X beam and an X carriage) which guides the fine movement stage in a direction parallel to the XY plane; a plurality of weight-canceling devices movable in the direction parallel to the XY plane synchronously with the fine movement stage and also working together to support the weight of the fine movement stage; a first Y step guide provided at the +Y side of the X beam in a direction parallel to the Y-axis, that guides a part of the plurality of weight-canceling devices moving in a direction parallel to the X-axis; and a second Y step guide provided at the other side of the X beam in the direction parallel to the Y-axis, that guides the other part of the plurality of weight-canceling devices moving parallel to the X-axis.
    Type: Application
    Filed: December 13, 2019
    Publication date: April 23, 2020
    Applicant: NIKON CORPORATION
    Inventor: Yasuo AOKI
  • Publication number: 20200124414
    Abstract: An information processing device that, assuming that a first member, provided with a first clearance adjustment target part and a first assembly part, and a second member, provided with a second clearance adjustment target part and a second assembly part, are assembled together by abutting the first assembly part and the second assembly part each other, calculates clearance information between the first clearance adjustment target part and the second clearance adjustment target part. The information processing device comprises a calculating unit configured to calculate the clearance information based on: first shape measurement data of the first assembly part; second shape measurement data of the second assembly part; first relative position information of the first clearance adjustment target part with respect to the first assembly part; and second relative position information of the second clearance adjustment target part with respect to the second assembly part.
    Type: Application
    Filed: April 13, 2017
    Publication date: April 23, 2020
    Applicant: NIKON CORPORATION
    Inventors: Masaya YAMAGUCHI, Nobukatsu MACHII
  • Publication number: 20200128188
    Abstract: An image-capturing device includes: a first image-capturing unit and a second image-capturing unit, each of the first image-capturing unit and the second image-capturing unit having a plurality of lenses and a plurality of light-receiving units, each lens having a plurality of light-receiving units, the first image-capturing unit and the second image-capturing unit each outputting signals upon receiving light from a subject having transmitted through an image-capturing optical system via the plurality of lenses in the light-receiving units; and a generation unit that generates images of the subject at a plurality of positions in an optical axis direction of the image-capturing optical system, based on a signal outputted from the first image-capturing unit and a signal outputted from the second image-capturing unit.
    Type: Application
    Filed: September 28, 2017
    Publication date: April 23, 2020
    Applicant: NIKON CORPORATION
    Inventors: Hiroyuki IWASAKI, Ikuya SAITO, Masao NAKAJIMA
  • Patent number: 10627725
    Abstract: A substrate stage and an empty-weight canceling mechanism that supports an empty weight of the substrate stage are made up of separate bodies. Accordingly, the size and weight of the substrate stage (a structure including the substrate stage) can be reduced, compared with the case where the substrate stage and the empty-weight canceling mechanism are integrally configured. Further, due to movement of an X coarse movement stage and a Y coarse movement stage by an X drive mechanism and a Y drive mechanism, the substrate stage is driven in an XY plane and also the empty-weight canceling mechanism that supports the empty weight of the substrate stage is driven. With this operation, the substrate stage can be driven without difficulty even when the substrate stage and the empty-weight canceling mechanism are configured of separate bodies.
    Type: Grant
    Filed: January 25, 2019
    Date of Patent: April 21, 2020
    Assignee: NIKON CORPORATION
    Inventors: Yasuo Aoki, Hiroshi Shirasu, Yoshihiko Kudo
  • Publication number: 20200115271
    Abstract: Provide is an optical glass including: by mass %, 0% to 5% of a SiO2 component; 10% to 40% of a P2O5 component; 4% to 30% of a B2O3 component; 0% to 11% of a Na2O component; 5% to 20% of a K2O component; 0% to 20% of a TiO2 component; 0% to 2% of a ZrO2 component; and 20% to 70% of a Nb2O5 component, wherein P2O5 component+B2O3 component is more than 25% and 41% or less, B2O3 component/P2O5 component is 0.15 or more and less than 1.23, TiO2 component/P2O5 component is 0 or more and less than 1.3, and Nb2O5 component/P2O5 component is from 0.7 to 2.8.
    Type: Application
    Filed: December 13, 2019
    Publication date: April 16, 2020
    Applicants: HIKARI GLASS CO., LTD., NIKON CORPORATION
    Inventors: Tetsuya Koide, Noriaki Iguchi
  • Publication number: 20200118847
    Abstract: A substrate case includes a shaft portion around which a sheet-shaped substrate having a circuit area in which a circuit manufacturing process is performed is wound; and a cover portion that accommodates the substrate in the state of being wound around the shaft portion, the shaft portion having a holding portion that holds an area different from the circuit area at a winding start portion of the substrate.
    Type: Application
    Filed: December 12, 2019
    Publication date: April 16, 2020
    Applicant: NIKON CORPORATION
    Inventors: Hideo MIZUTANI, Tohru KIUCHI, Toru KAWAGUCHI, Takashi MASUKAWA
  • Publication number: 20200120261
    Abstract: A lens barrel of the invention includes: an imaging optical system including a focus adjustment lens; a driver that drives the focus adjustment lens in a direction of an optical axis; a transceiver that transmits and receives a signal to and from a camera body; and a controller that controls the transceiver to repeatedly transmit a first image plane transfer coefficient which is determined in correspondence with a position of the focus adjustment lens included in the imaging optical system and a second image plane transfer coefficient which does not depend on the position of the focus adjustment lens to the camera body at a predetermined interval, and, when the controller repeatedly transmits the second image plane transfer coefficient to the camera body, the controller varies the second image plane transfer coefficient over time.
    Type: Application
    Filed: December 13, 2019
    Publication date: April 16, 2020
    Applicant: NIKON CORPORATION
    Inventor: Hiroyuki TOMITA
  • Patent number: 10618214
    Abstract: An article having a nanotextured surface with hydrophobic properties, said nanotextured surface comprising an array of pillars (71) defined by a surface fraction (?s) of the pillars, a pitch (P) of the pillars and an aspect ratio (H/2R) of the pillars, wherein: —the surface fraction (s) is equal or greater to 2% and equal or less to 80%; —the pitch (P) is equal or less to 250; —the aspect ratio (H/2R) is equal or less to 2.4, where H is the height of the pillars and R is the radius of the pillars; —the pitch (P), the height (H), the radius (R) are expressed in nanometers (nm); —the nanotextured surface comprises at least partially a hydrophobic material.
    Type: Grant
    Filed: August 10, 2015
    Date of Patent: April 14, 2020
    Assignees: Essilor International, Nikon Corporation
    Inventors: Sandrine Couderc, Grégory Tortissier
  • Patent number: 10620116
    Abstract: A polarization property image measurement device includes: a first radiation unit that radiates light beams in different polarization conditions onto a target object after subjecting the light beams to intensity modulation at frequencies different from one another; a light receiving unit including first photoelectric conversion units that photoelectrically convert the light beams having been radiated from the first radiation unit and scattered at the target object in correspondence to each of the different polarization conditions, and second photoelectric conversion units that photoelectrically convert visible light from the target object; and a processor that detects signals individually output from the first photoelectric conversion units at the different frequencies and differentiates each signal from other signals so as to determine an origin of the signal as one of the light beams; and creates an image of the target object based upon signals individually output from the second photoelectric conversion un
    Type: Grant
    Filed: June 8, 2018
    Date of Patent: April 14, 2020
    Assignee: NIKON CORPORATION
    Inventors: Takanori Kojima, Satoru Odate, Toru Takagi
  • Publication number: 20200108464
    Abstract: A shaping system forms a three-dimensional shaped object on a target surface using a beam and has: a beam irradiation section emitting beams passing through tilted optical paths; a material supplying section having a material supplying port and supplies along the axis a powdered material irradiated with the beams from the beam irradiation section; a cover member having an inner surface that gradually converges from a side at one end to a side at the other end and has an outlet formed at the other end through which the beams from the beam irradiation section pass; and a gas supply apparatus supplying inert gas via a gas supplying port into a space inside the cover member, and the inert gas flows outside the space via the outlet of the cover member, and the shaping material is supplied outside the space via the outlet of the cover member.
    Type: Application
    Filed: September 30, 2019
    Publication date: April 9, 2020
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Patent number: 10612997
    Abstract: An apparatus and method for measuring thermo-mechanically induced reticle distortion or other distortion in a lithography device enables detecting distortion at the nanometer level in situ. The techniques described use relatively simple optical detectors and data acquisition electronics that are capable of monitoring the distortion in real time, during operation of the lithography equipment. Time-varying anisotropic distortion of a reticle can be measured by directing slit patterns of light having different orientations to the reticle and detecting reflected, transmitted or diffracted light from the reticle. In one example, corresponding segments of successive time measurements of secondary light signals are compared as the reticle scans a substrate at a reticle stage speed of about 1 m/s to detect temporal offsets and other features that correspond to spatial distortion.
    Type: Grant
    Filed: May 18, 2018
    Date of Patent: April 7, 2020
    Assignee: Nikon Corporation
    Inventor: Michael Sogard
  • Patent number: 10613309
    Abstract: In the microscope, an optical path and optical path of an image forming system are set so as to be perpendicular to each other when viewed from the top. In other words, in this microscope, there exists an ocular optical system that guides light, which propagates the optical path to optical path of the image forming system, to a user. The optical path is formed in a direction perpendicular to a direction of the light from a sample emitted from the ocular optical system to the user.
    Type: Grant
    Filed: September 5, 2012
    Date of Patent: April 7, 2020
    Assignee: NIKON CORPORATION
    Inventors: Toru Murayama, Atsushi Takeuchi, Yumiko Ouchi, Yuki Yoshida
  • Patent number: 10614990
    Abstract: A target assembly for an x-ray emission apparatus, the apparatus assembly including: a vacuum chamber having at least one conductive wall; an insulating element projecting through the conductive wall; a conductive high voltage element extending along the insulating element from outside the chamber to an end portion of the insulating element furthest from the conductive wall; an x-ray-generating target arranged at the end portion of the insulating element and electrically connected to the high voltage element; and a suppressive electrode arranged at the end portion of the insulating element and configured to suppress acceleration toward the outer surface of the insulating element of electrons which are emitted from a junction between the outer surface of the insulating element and an inner surface of the conductive wall.
    Type: Grant
    Filed: December 21, 2016
    Date of Patent: April 7, 2020
    Assignee: NIKON METROLOGY NV
    Inventor: Ian George Haig
  • Patent number: 10613311
    Abstract: A three-dimensional direction drift control apparatus and a microscope apparatus that correct misalignment of a relative position between an object lens and a sample. A near-infrared light emitted from a light source is irradiated onto a surface of a glass cover holding a sample on a stage. When the near-infrared light is irradiated onto the glass cover, a regular reflection light and scattered light of the near-infrared light are generated, and the regular reflection light and the scattered light enter a half-mirror via lenses from an objective lens to an offset lens group. A clamp processing unit detects misalignment in the lateral direction of the object lens with respect to the sample based on the image of the scattered light, which has been reflected by the half-mirror and entered a two-dimensional photoelectric converter, and controls a drive unit according to this detection result, whereby the stage is moved.
    Type: Grant
    Filed: October 7, 2016
    Date of Patent: April 7, 2020
    Assignee: NIKON CORPORATION
    Inventor: So Nishikawa
  • Publication number: 20200101564
    Abstract: The processing system is provided with: a liquid supply device which can supply a liquid; a liquid processing device which processes a liquid supplied from the liquid supply device such that a non-liquid-immersion state is generated locally in a partial area including a target portion on a predetermined surface; a beam irradiation section which emits beams toward the target portion; and a moving apparatus which moves the predetermined surface. The beams are irradiated on the target portion to apply a predetermined processing to the target portion, in a state in which the target portion is in the non-liquid-immersion state.
    Type: Application
    Filed: September 30, 2019
    Publication date: April 2, 2020
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20200103773
    Abstract: In a beam irradiation apparatus in which a movable body holds an object, a mark detection system detects a first mark on the movable body while moving the movable body in a first direction and changing an irradiation position of a measurement beam in the first direction, the mark detection system detects a second mark while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, a controller controls a position of the movable body in a second direction intersecting the first direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and a processing beam, based on results of the detection of the first and second marks.
    Type: Application
    Filed: November 29, 2019
    Publication date: April 2, 2020
    Applicant: NIKON CORPORATION
    Inventor: Akihiro UEDA
  • Publication number: 20200103757
    Abstract: Correction information is acquired for compensating for a measurement error of a second encoder system that occurs due to a displacement between four sections of a scale member of the second encoder system, based on measurement information of the second encoder system obtained in a fifth area in which four heads of the second encoder system that are provided on a second stage, which holds a substrate, respectively face the four sections of the scale member.
    Type: Application
    Filed: December 4, 2019
    Publication date: April 2, 2020
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20200106949
    Abstract: An imaging device includes: a first image sensor comprising first pixels that receive incident light, and that include a first and second photoelectric conversion units that are arranged in a first direction; and a second image sensor including second pixels that receive light that has passed through the first image sensor, and that include a third and fourth photoelectric conversion units that are arranged in a second direction that is different from the first direction.
    Type: Application
    Filed: November 4, 2019
    Publication date: April 2, 2020
    Applicant: NIKON CORPORATION
    Inventor: Akira IZUMI
  • Publication number: 20200105818
    Abstract: Image-capturing device includes: an image sensor that includes a first pixel and a second pixel, each having a filter unit that can be switched to a light-shielding state in which light is blocked or to a transmissive state in which light is transmitted, a photoelectric conversion unit that generates an electric charge through photoelectric conversion of light transmitted through the filter unit and an output unit that outputs a signal based upon electric charge generated at the photoelectric conversion unit, and; a correction unit that corrects a signal output from the output unit of the first pixel while the filter unit of the first pixel is in a transmissive state, based upon a signal output from the output unit of the first pixel with the filter unit of the first pixel set in a light-shielding state and with the filter unit of the second pixel set in a transmissive state.
    Type: Application
    Filed: September 29, 2017
    Publication date: April 2, 2020
    Applicant: NIKON CORPORATION
    Inventor: Atsushi KOMAI
  • Publication number: 20200106969
    Abstract: Provided is an imaging device including a light receiving portion including a plurality of photoelectric conversion elements arranged in a two-dimensional manner, and a spectral filter including a storage portion that stores a substance composed of a fluid or a gas, an inflow portion through which the substance flows into the storage portion, and an outflow portion through which the substance flows out from the storage portion, the spectral filter having a spectral characteristic corresponding to a refractive index of the substance, the spectral filter being each provided for one or more of the photoelectric conversion elements.
    Type: Application
    Filed: December 3, 2019
    Publication date: April 2, 2020
    Applicant: NIKON CORPORATION
    Inventors: Madoka NISHIYAMA, Yoshiyuki WATANABE, Naoki OHKOUCHI, Hiroyuki TSUKAMOTO
  • Patent number: D880562
    Type: Grant
    Filed: January 13, 2018
    Date of Patent: April 7, 2020
    Assignee: Nikon Corporation
    Inventors: Chikara Fujita, Hiroyuki Asano
  • Patent number: D885462
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: May 26, 2020
    Assignee: Nikon Corporation
    Inventors: Koji Nagaoka, Osamu Katsuda
  • Patent number: D885463
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: May 26, 2020
    Assignee: Nikon Corporation
    Inventors: Koji Nagaoka, Osamu Katsuda