Nikon Patents
Nikon Corporation manufactures and sells semiconductor and FPD lithography equipment, digital cameras, lenses and accessories, and microscopes and other measuring instruments.
Nikon Patents by Type- Nikon Patents Granted: Nikon patents that have been granted by the United States Patent and Trademark Office (USPTO).
- Nikon Patent Applications: Nikon patent applications that are pending before the United States Patent and Trademark Office (USPTO).
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Publication number: 20240377628Abstract: An image sensor includes: (1) a first pixel and a second pixel each including: a photoelectric conversion unit that photoelectrically converts light and generates an electric charge; and a transfer unit that transfers the electric charge generated by the photoelectric conversion unit to an accumulation unit that accumulates the electric charge, the first pixel and the second pixel being arranged in a row direction; (2) a first supply unit that supplies a signal which controls the transfer unit of the first pixel; and (3) a second supply unit that supplies a signal which controls the transfer unit of the second pixel.Type: ApplicationFiled: July 24, 2024Publication date: November 14, 2024Applicant: NIKON CORPORATIONInventor: Osamu SARUWATARI
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Publication number: 20240375219Abstract: A build system irradiates a second position different from a first position with a second energy beam at a first time at which the first position is irradiated with a first energy beam, irradiates a third position different from the first and second positions with the first energy beam at a second time different from the first time, and irradiates the third position with the second energy beam at a third time different from the second time.Type: ApplicationFiled: September 16, 2021Publication date: November 14, 2024Applicant: NIKON CORPORATIONInventors: Takayuki FUNATSU, Koji TANAKA, Kazuki UENO
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Publication number: 20240377610Abstract: An accessory includes: a detection terminal; a first power supply terminal through which a first power supply voltage is supplied; a first ground terminal used as a ground potential; a second power supply terminal through which a second power supply voltage is supplied; a second ground terminal used as a ground potential; a ready terminal used to indicate whether or not communication is allowed; a first data terminal that receives a first data signal; a second data terminal that outputs a second data signal; a clock terminal that outputs a clock signal; and a third data terminal that outputs a third data signal, wherein: the first ground terminal, the second power supply terminal, and the second ground terminal are positioned between the first power supply terminal and the ready terminal; and the first data terminal and the second data terminal are positioned between the ready terminal and the clock terminal.Type: ApplicationFiled: July 23, 2024Publication date: November 14, 2024Applicant: NIKON CORPORATIONInventor: Takayuki FUNAOKA
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Publication number: 20240377763Abstract: An exposure system exposing system capable of exposing wafer transported from coating apparatus capable of coating photosensitive material onto wafer, including: holding apparatus including first holding part holding first surface of wafer transported from coating apparatus; measurement apparatus including first measurement part having at least first measurement region and capable of measuring position in first direction of second surface on side opposite to first surface of wafer held by first holding part and second measurement part having at least one second measurement region different from first measurement region and capable of measuring position in first direction of first or second surface of wafer; exposure apparatus exposing the wafer with energy beam; transport apparatus transporting wafer from measurement apparatus to exposure apparatus; and control apparatus, wherein control apparatus determines whether or not wafer is transported toward exposure apparatus by transport apparatus based on measuremType: ApplicationFiled: July 25, 2024Publication date: November 14, 2024Applicant: NIKON CORPORATIONInventors: Arata OCHINO, Kenta ASAI, Yoshiki KIDA, Masatoshi MORO, Hiroaki TSUJI, Masahiro YOSHIDA, Takayuki SUDA
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Patent number: 12139646Abstract: Provided is a compound represented by Formula (1) given below. (In the formula, R1 represents a hydrogen atom or a methyl group, R2 represents a hydrogen atom, a phenyl group, a C1 to 8 alkyl group, or a C1 to 4 perfluoroalkyl group, X1 represents a hydrogen atom or a hydroxy group, Y1 represents a C1 to 9 alkylene group containing a fluorine atom or a C1 to 9 alkylene group containing no fluorine atom, and n1 is an integer from 0 to 3.).Type: GrantFiled: May 7, 2021Date of Patent: November 12, 2024Assignee: NIKON CORPORATIONInventors: Yoshihiro Someya, Masayuki Shijo
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Patent number: 12140739Abstract: A variable power optical system (ZL (1)) includes a plurality of lens groups (G1-G7). During variable magnification, an interval between adjacent lens groups changes. The plurality of lens groups include: a first focusing lens group (G5) that moves during focusing; and a second focusing lens group (G6) that is disposed more toward an imaging surface side than the first focusing lens group and that moves along a different trajectory than the first focusing lens group during focusing. The first focusing lens group and the second focusing lens group both have a negative refractive power. The plurality of lens groups satisfy the following condition: 0.40<fF1/fF2<3.50 (wherein fF1 is the focal distance of the first focusing lens group, and fF2 is the focal distance of the second focusing lens group).Type: GrantFiled: May 27, 2020Date of Patent: November 12, 2024Assignee: Nikon CorporationInventor: Kosuke Machida
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Patent number: 12140415Abstract: A measurement condition that enables accurate shape measurement can be set easily. An image analysis device includes an image analyzer 83 configured to detect, in a case of capturing an image of light projected onto an object to be measured, an improper image for shape measurement of the object to be measured, on the basis of design information on the object to be measured, and a measurement condition, and an output unit 88 configured to output detection result information that is information based on a detection result of the image analyzer 83.Type: GrantFiled: February 27, 2018Date of Patent: November 12, 2024Assignee: NIKON CORPORATIONInventors: Sumito Nakano, Makoto Kondo
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Publication number: 20240372487Abstract: A lens barrel includes an element displaced by application of voltage; an elastic body having a contact surface coming into contact with the element, a drive surface to produce a vibration wave by displacement of the element, and a plurality of grooves; a moving element come into contact with the drive surface and rotated by the vibration wave; an annular ring rotated by rotating of the moving element; and a lens moved in an optical axis direction by rotating of the annular ring; wherein the element mainly contains a material having potassium sodium niobate, potassium niobate, sodium niobate, or barium titanate, wherein a value of [(T/B)÷W] is in a range of 0.84 to 1.94, where T represents a depth of the groove, B represents a distance from a bottom part of the groove to the contact surface, and W represents a radial width of the elastic body.Type: ApplicationFiled: July 15, 2024Publication date: November 7, 2024Applicant: NIKON CORPORATIONInventor: Takatoshi ASHIZAWA
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Publication number: 20240373133Abstract: An image sensor includes: a first and a second pixel, each of which includes a first photoelectric conversion unit that photoelectrically converts light that has passed through a micro lens and generates a first charge, a second photoelectric conversion unit that photoelectrically converts light that has passed through the micro lens and generates a second charge, an accumulation unit that accumulates at least one of the first charge and the second charge, a first transfer unit that transfers the first charge to the accumulation unit, and a second transfer unit that transfers the second charge to the accumulation unit; and a control unit that outputs, to the first transfer unit of the first pixel and to the second transfer unit of the second pixel, a signal that causes the first charge of the first pixel and the second charge of the second pixel to be transferred to their accumulation units.Type: ApplicationFiled: July 16, 2024Publication date: November 7, 2024Applicant: NIKON CORPORATIONInventor: Takashi SEO
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Publication number: 20240369797Abstract: Positioning assemblies for use with a robot include a gimbal assembly having a gimbal's rotational center is positioned directly above a center of gravity of a payload. One or more linear counter masses and/or one or more rotating masses (flywheels) can be provided, and each can include an actuator or brake to control forces acting between the counter masses and/or flywheels and the payload and stabilize the payload during and after movement of the payload with the robot.Type: ApplicationFiled: July 15, 2024Publication date: November 7, 2024Applicant: Nikon CorporationInventors: Yoon Jung Jeong, Michael Birk Binnard, Alton Hugh Phillips, Matthew Parker-McCormick Bjork
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Publication number: 20240367257Abstract: Systems and methods are disclosed that address the problem of large-scale optical manufacturing of microstructures. The systems and methods utilize one or more optical processing systems to generate a first set of alignment marks in a first region on a surface. The optical processing systems then move their focus to a second region on the surface. The second region generally partially overlaps the first region such that the optical processing systems can detect the location of the first set of alignment marks. The optical processing systems then generate a second set of alignment marks based on the location of the first set of alignment marks. This process is repeated in an iterative manner until alignment marks have been generated on all regions of the surface. The alignment marks can be used to optically align one or more optical processing systems configured to produce 3D structures on the surface.Type: ApplicationFiled: June 24, 2022Publication date: November 7, 2024Applicant: NIKON CORPORATIONInventors: Daniel Gene SMITH, Michael Birk BINNARD, Alton Hugh PHILLIPS, Heather Lynn DURKO, GO ICHINOSE, Kaneyuki NAITO
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Publication number: 20240361676Abstract: An accessory that is mountable at a camera body and is capable of communicating with the camera body, includes: a first transmission unit capable of transmitting information pertaining to a drive target member that is driven by a drive unit to the camera body according to at least one communication specification; and a second transmission unit that transmits to the camera body a first value specifying a communication specification according to which the information is transmitted to the camera body, wherein: the first transmission unit transmits the information pertaining to the drive target member to the camera body according to the communication specification specified by the first value.Type: ApplicationFiled: July 9, 2024Publication date: October 31, 2024Applicant: NIKON CORPORATIONInventor: Akihiko KAWAI
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Publication number: 20240359405Abstract: A processing system is configured to form a build object. The processing system includes: a first optical system that condenses an energy beam on a first irradiation position; and a material supply apparatus that is configured to supply build materials to the first irradiation position. The processing system is capable of forming the build object by irradiating the build materials supplied by the material supply apparatus, with the energy beam from the first optical system, and the processing system processes the build object by a second optical system irradiating a surface of the build object with the energy beam from the first optical system.Type: ApplicationFiled: July 1, 2020Publication date: October 31, 2024Applicant: NIKON CORPORATIONInventors: Toshimitsu KURAMI, Kazuki UENO
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Patent number: 12128478Abstract: We describe a calibration method for calibrating one or more optical elements of an additive layer manufacturing apparatus useable for producing a three-dimensional workpiece, the method comprising: projecting, using the one or more optical elements, an optical pattern onto a material in order to prepare, from said material, solidified material layers using an additive layer manufacturing technique to form a test sample; determining a geometry of the test sample; comparing the determined geometry with a nominal geometry to generate calibration data; and calibrating the one or more optical elements using said calibration data.Type: GrantFiled: March 31, 2020Date of Patent: October 29, 2024Assignee: NIKON SLM Solutions AGInventors: Lukas Roesgen, Daniel Brueck, Andreas Wiesner
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Patent number: 12129395Abstract: The present invention provides a composition for forming a hard coat layer, which is capable of forming a hard coat layer that exhibits excellent adhesion to an adjacent layer, while having excellent hardness. A composition for forming a hard coat layer according to the present invention contains: a (meth)acrylate which has at least one group that is selected from the group consisting of a phosphoric acid group and a sulfonic acid group; a silsequioxane which has a radically polymerizable group; and metal oxide particles.Type: GrantFiled: June 25, 2021Date of Patent: October 29, 2024Assignee: NIKON-ESSILOR CO., LTD.Inventor: Yuka Igami
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Patent number: 12128480Abstract: An apparatus for producing a three-dimensional work piece is provided. The apparatus comprises an irradiation unit comprising at least one scanning unit configured to scan a radiation beam over an uppermost layer of raw material powder to predetermined sites of the uppermost layer of the raw material powder in order to solidify the raw material powder at the predetermined sites. An axis corresponding to the radiation beam when it impinges on the uppermost layer of raw material powder at an angle of 90° is defined as a central axis for the scanning unit. The apparatus further comprises a control unit configured to receive work piece data indicative of at least one layer of the three-dimensional work piece to be produced, and assign at least a part of a contour of the layer of the three-dimensional work piece to the at least one scanning unit.Type: GrantFiled: June 10, 2020Date of Patent: October 29, 2024Assignee: NIKON SLM Solutions AGInventors: Christiane Thiel, Daniel Brueck
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Publication number: 20240353224Abstract: A shape acquisition method includes acquiring information of a tilt angle of one surface of a target object at each of a plurality of measurement points on the surface using a plurality of sensors (Step S1) and calculating a shape of the surface of the target object through an arithmetic operation including function fitting using a discrete distribution of a physical quantity associated with the acquired information of the tilt angle (Step S2). Accordingly, it is possible to accurately perform areal evaluation in measurement management of the target object.Type: ApplicationFiled: October 25, 2022Publication date: October 24, 2024Applicant: NIKON CORPORATIONInventor: Takashi MIYAWAKI
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Publication number: 20240355862Abstract: An imaging element includes: a first substrate including first, second, third pixel blocks respectively including first, second, and third pixels; a second substrate including first, second, and third signal processing blocks respectively including first, second, and third signal converters; a first signal joint configured to output the signal from the first pixel to the first signal converter and to join the first and second substrates; a second signal joint configured to output the signal from the second pixel to the second signal converter and to join the first and second substrates; and a third signal joint configured to output the signal from the third pixel to the third signal converter and to join the first and second substrates. The second pixel block is between the first and third pixel blocks. An interval between the first and second signal joints is smaller than one between the second and third signal joints.Type: ApplicationFiled: August 22, 2022Publication date: October 24, 2024Applicant: NIKON CORPORATIONInventors: Shigeru MATSUMOTO, Shutaro KATO
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Publication number: 20240357252Abstract: An imaging element includes a first semiconductor substrate having a plurality of pixels arranged in a row direction and a second semiconductor substrate having a first load current source configured to supply a current to a first pixel among the plurality of pixels, a second load current source configured to supply a current to a second pixel among the plurality of pixels, a first pixel control unit configured to control supply of the current to the first pixel by the first load current source, and a second pixel control unit configured to control supply of the current to the second pixel by the second load current source.Type: ApplicationFiled: August 22, 2022Publication date: October 24, 2024Applicant: NIKON CORPORATIONInventor: Tomoki HIRATA
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Publication number: 20240352397Abstract: A passage timing calculation device includes a processor and a memory encoded with instructions executed by the processor, wherein the instructions causing the processor to perform operations comprising calculating a time change in an area occupied by an extraction target region that is a region in which a striated pattern appears from a plurality of images of pluripotent stem cells captured at different times, detecting a change point of the time change in an area occupied by the extraction target region, and calculating a passage timing of the pluripotent stem cells on the basis of the change point.Type: ApplicationFiled: July 3, 2024Publication date: October 24, 2024Applicants: NIKON CORPORATION, KYOTO UNIVERSITYInventors: Tomoro DAN, Hiroaki KII, Takayuki UOZUMI, Yoshiko SATO, Shinsuke YOSHIDA
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Publication number: 20240353933Abstract: A display device includes: a first display unit that displays a first image at a remote position; a second display unit that displays a second image and a third image at a position different from a position of the first image, the third image having luminance different from luminance of the second image; a detection unit that detects an operation performed by a user with respect to the first image; and a display control unit that adjusts a display mode for at least either one of the first image displayed by the first display unit and the second image displayed by the second display unit, based upon the operation detected by the detection unit.Type: ApplicationFiled: June 27, 2024Publication date: October 24, 2024Applicant: NIKON CORPORATIONInventor: Hidenori KURIBAYASHI
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Publication number: 20240350006Abstract: The ophthalmic optical system is configured to apply an angular scanning light ray to an eye. M=|?out/?in| is defined, where ?in represents an angle between an incident light ray to the ophthalmic optical system and an optical axis of the ophthalmic optical system, and ?out represents an angle between an exiting light ray exiting from the ophthalmic optical system toward the eye and the optical axis. The ophthalmic optical system satisfies a conditional expression Mpar<Mmax, where Mpar represents M in a case that the incident light ray is a paraxial ray, Mmax represents M in a case that the incident light ray is a ray of a maximum angle of ?in.Type: ApplicationFiled: June 27, 2024Publication date: October 24, 2024Applicants: NIKON CORPORATION, OPTOS PLCInventors: Gonzalo MUYO, Alistair GORMAN, David M. WILLIAMSON, Makoto FUJIMOTO, Yasufumi NISHI, Azuna NONAKA, Katsuya WATANABE, Miwako YOSHIDA, Kyoya TOKUNAGA, Masahiro MIZUTA
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Patent number: 12124018Abstract: A zoom optical system consists of a first lens group having negative refractive power, a second lens group having positive refractive power, and a rear lens group which are disposed in order from an object. The rear lens group comprises a last lens group and an F lens group in order from a side closest to an image. Lens groups forming the first lens group, the second lens group, and the rear lens group are configured in such a manner that, upon zooming, the respective lens groups move and a distance between the lens groups adjacent to each other changes. At least a part of the F lens group is configured to move upon focusing. Further, the following conditional expression is satisfied. ?0.220<f1/fE<0.280 where f1: a focal length of the first lens group, and fE: a focal length of the last lens group.Type: GrantFiled: January 24, 2023Date of Patent: October 22, 2024Assignee: Nikon CorporationInventor: Takeru Uehara
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Patent number: 12121991Abstract: A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.Type: GrantFiled: October 25, 2017Date of Patent: October 22, 2024Assignee: NIKON CORPORATIONInventors: Masayuki Shiraishi, Shigeki Egami, Yoshio Kawabe, Yosuke Tatsuzaki, Yuichi Shibazaki
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Patent number: 12125276Abstract: An imaging device includes an imaging portion that images a subject; a positional information acquisition portion that acquires positional information of an imaging position; a control portion which acquires information on the subject based on the positional information, and displays image data of the subject and the information on the subject on a display portion; and a hold control portion that outputs a hold control signal, which holds the image data of the subject and the information on the subject, to the control portion.Type: GrantFiled: July 6, 2023Date of Patent: October 22, 2024Assignee: NIKON CORPORATIONInventor: Hideya Inoue
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Publication number: 20240345486Abstract: There is provided an exposure device that irradiates an object scanned in a scanning direction with light from a spatial light modulator to expose the object, the exposure device including an illumination unit that illuminates the spatial light modulator with illumination light, wherein the illumination unit includes an optical integrator into which the illumination light enters, and a dimming member that is disposed on an optical path between an emission surface of the optical integrator and the spatial light modulator, is disposed at a position where the dimming member is not in contact with the optical integrator nor the spatial light modulator, and dims a part of the illumination light.Type: ApplicationFiled: June 26, 2024Publication date: October 17, 2024Applicant: NIKON CORPORATIONInventors: Masaki Kato, Yasushi Mizuno, Satoshi Kawado
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Patent number: 12116466Abstract: An object of the present invention is to provide a laminate which has a substrate, an intermediate layer, and a water-repellent layer laminated in this order, and has excellent abrasion resistance.Type: GrantFiled: April 22, 2020Date of Patent: October 15, 2024Assignees: NIKON-ESSILOR CO., LTD., SUMITOMO CHEMICAL COMPANY, LIMITEDInventors: Katsuyoshi Takeshita, Hideyuki Wakiyasu, Tomohiro Ito, Tomonori Miyamoto, Masayoshi Tokuda
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Publication number: 20240340542Abstract: An image capturing device includes: an image capturing element having a first image capturing region that captures an image of a photographic subject and outputs a first signal, and a second image capturing region that captures an image of the photographic subject and outputs a second signal; a setting unit that sets an image capture condition for the first image capturing region to an image capture condition that is different from an image capture condition for the second image capturing region; a correction unit that performs correction upon the second signal, for employment in interpolation of the first signal; and a generation unit that generates an image of the photographic subject that has been captured by the first image capturing region by employing a signal generated by interpolating the first signal according to the second signal as corrected by the correction unit.Type: ApplicationFiled: June 17, 2024Publication date: October 10, 2024Applicant: NIKON CORPORATIONInventors: Takashi SHIONOYA, Toshiyuki Kanbara, Naoki Sekiguchi
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Publication number: 20240337807Abstract: An interchangeable lens is removably attached to a camera body including a body-side mount, an image sensor, body-side terminals and a first to fourth body-side claws. The interchangeable lens includes the lens-side mount, lens-side terminals which are in contact with body-side terminals, a first to fourth lens-side claws engaged with the first to fourth body-side claws once the interchangeable lens is attached to the camera body. The first and third lens-side claws are disposed on a third lens-side line intersecting with the first lens-side line at an optical axis with approximately 45 degrees. The first lens-side line passes through a center between opposite ends of the first lens-side claw to the optical axis. The second and fourth lens-side claws are disposed on a fourth lens-side line orthogonal to the third lens-side line at the optical axis.Type: ApplicationFiled: June 20, 2024Publication date: October 10, 2024Applicant: NIKON CORPORATIONInventors: Koji NAGAOKA, Noriyasu KOTANI
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Publication number: 20240340444Abstract: A video compression apparatus for compressing video data as a series of frames outputted from an imaging element that has a plurality of imaging regions for imaging a subject and for which imaging conditions can be set for the respective imaging regions, includes: a setting unit configured to set, based on an imaging condition set in a compression target region of a frame different from a reference frame, a search region for detecting a specific region in the reference frame; and a detection unit configured to detect, based on the compression target region, the specific region in the search region set by the setting unit.Type: ApplicationFiled: June 21, 2024Publication date: October 10, 2024Applicant: NIKON CORPORATIONInventors: Daisaku KOMIYA, Naoki SEKIGUCHI
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Patent number: 12111264Abstract: A sample preparation method includes: irradiating a first region of a sample with light at a time t1; irradiating a second region different from the first region with the light at a time t2 after the time t1; and fixing the sample at a time t3 after the time t2. A sample preparing apparatus includes: a light radiating unit that irradiates a first region of a sample with light at time t1 and irradiates a second region different from the first region with the light at a time t2 after the time t1; and a fixing unit that fixes the sample at a time t3 after the time t2.Type: GrantFiled: April 15, 2021Date of Patent: October 8, 2024Assignee: NIKON CORPORATIONInventor: Ichiro Sase
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Publication number: 20240328478Abstract: An apparatus includes a processing unit, a reaction mass, and a rotary actuator that is coupled to the reaction mass. The rotary actuator is configured to couple to the processing unit and to move the reaction mass in response to a movement error of the processing unit to reduce the movement error of the processing unit. The apparatus can be used with robotic systems to reduce movement errors.Type: ApplicationFiled: June 14, 2024Publication date: October 3, 2024Applicant: Nikon CorporationInventors: Alton Hugh Phillips, Michael Birk Binnard, Yoon Jung Jeong, Matthew Parker-McCormick Bjork
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Publication number: 20240334067Abstract: An image processing device includes: an input unit, first image data being a portion of an image with first and second photographic subjects being imaged being inputted therein, the second subject to be displayed after the first, and the first subject again to be displayed by repeating control to shift a portion of the image displayed upon the display unit in a first direction and to display a portion not displayed; and an image generation unit generating, from the first image data, second image data including the first and second subjects, and the second subject is arranged towards the first direction from the first subject, if a first distance by which the image displayed shifts from the first subject being displayed until the second subject is displayed is 10 longer than a second distance by which the image displayed shifts from the second subject until the first subject is displayed.Type: ApplicationFiled: June 10, 2024Publication date: October 3, 2024Applicant: NIKON CORPORATIONInventor: Hidenori KURIBAYASHI
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Publication number: 20240331693Abstract: A speech recognition apparatus includes an acquisition portion that is configured to acquire state information regarding at least one of a movable portion in a target device operated according to an input speech or a connected device connected to the target device; a recognition control portion that is configured to set a control content for recognizing the speech based on the state information acquired by the acquisition portion and to recognize the speech; and an output portion that is configured to output a command signal for operating the target device to the target device according to a recognition result of the recognition control portion.Type: ApplicationFiled: July 12, 2022Publication date: October 3, 2024Applicant: NIKON CORPORATIONInventors: Yasunori ITO, Seiji TAKANO, Yusuke TAKUMA
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Publication number: 20240334086Abstract: An imaging element includes: an imaging unit in which a plurality of pixel groups including a plurality of pixels that output pixel signals according to incident light are formed, and on which incident light corresponding to mutually different pieces of image information is incident; a control unit that controls, for each of the pixel groups, a period of accumulating in the plurality of pixels included in the pixel group; and a readout unit that is provided to each of the pixel groups, and reads out the pixel signals from the plurality of pixels included in the pixel group.Type: ApplicationFiled: June 12, 2024Publication date: October 3, 2024Applicant: NIKON CORPORATIONInventors: Shiro TSUNAI, Hironobu MURATA
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Patent number: 12105428Abstract: There is provided a reflective image-forming optical system which is applicable to an exposure apparatus using, for example, EUV light and which is capable of increasing numerical aperture while enabling optical path separation of light fluxes. In a reflective imaging optical system (6) forming an image of a first plane (4) onto a second plane (7), the numerical aperture on a side of the second plane with respect to a first direction (X direction) on the second plane is greater than 1.1 times a numerical aperture on the side of the second plane with respect to a second direction (Y direction) crossing the first direction on the second plane. The reflecting imaging optical system has an aperture stop (AS) defining the numerical aperture on the side of the second plane, and the aperture stop has an elliptic-shaped opening of which size in a major axis direction (X direction) is greater than 1.1 times that in a minor axis direction (Y direction).Type: GrantFiled: September 26, 2022Date of Patent: October 1, 2024Assignee: Nikon CorporationInventor: Hideki Komatsuda
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Patent number: 12107098Abstract: An image sensor includes a plurality of pixels each including: a first and a second photoelectric conversion unit that perform photoelectric conversion upon light that has passed through a micro lens and generates a charge; a first accumulation unit that accumulates the charge generated by the first conversion unit; a second accumulation unit that accumulates the charge generated by the second conversion unit; a third accumulation unit that accumulates the charges generated by the first and second conversion units; a first transfer unit that transfers the charge generated by the first conversion unit to the first accumulation unit; a second transfer unit that transfers the charge generated by the second conversion unit to the second accumulation unit; and a third transfer unit that transfers the charges generated by the first and second conversion units to the third accumulation unit.Type: GrantFiled: June 7, 2022Date of Patent: October 1, 2024Assignee: NIKON CORPORATIONInventors: Sota Nakanishi, Wataru Funamizu, Masahiro Juen
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Patent number: 12107068Abstract: A manufacturing method is provided, which includes processing at least one of a plurality of substrates; stacking the plurality of substrates to manufacture a stacked substrate; and correcting, in the processing, a part of an amount of positional misalignment that is generated among a plurality of substrates in the stacking and correcting, in the stacking, at least a part of the remainder of the amount of positional misalignment.Type: GrantFiled: May 27, 2020Date of Patent: October 1, 2024Assignee: Nikon CorporationInventors: Hajime Mitsuishi, Isao Sugaya
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Patent number: 12104932Abstract: An encoder for detecting rotation information of a first rotation shaft includes a first detector which detects a pattern provided in the first rotation shaft, a first housing case which houses the pattern provided in the first rotation shaft and the first detector, a second housing case which houses at least a part of a shaft portion different from a portion where the pattern is provided, of the first rotation shaft, and an adjusting mechanism which adjusts at least one of an atmospheric pressure and a temperature in the first housing case to be higher than at least one of an atmospheric pressure and a temperature in the second housing case. The inflow of the high-humidity air from a motor into the encoder is prevented or suppressed, so that the condensation in the encoder can be prevented or suppressed.Type: GrantFiled: July 10, 2018Date of Patent: October 1, 2024Assignee: NIKON CORPORATIONInventors: Kou Ohno, Hiroyuki Kishida
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Publication number: 20240316646Abstract: An information processing apparatus includes: an acquisition unit that acquires measurement information about building of a build object acquired in a build period of the build object that is built by solidification of a powdery metal material melted by irradiation with an energy beam; and an information processing unit that generates defect information about a defect formed inside the build object, by using the measurement information, wherein the measurement information includes information about a temperature of at least a part of a melt pool formed by melting of the metal material caused by the irradiation with the energy beam.Type: ApplicationFiled: September 17, 2021Publication date: September 26, 2024Applicant: NIKON CORPORATIONInventors: Koki TAKESHITA, Chika KATO, Kensaku NAKAMURA
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Patent number: 12099253Abstract: A lens barrel capable of increasing the moving range of a lens includes: a lens retainer frame for holding a lens; a drive unit for driving the lens retainer frame along the optical axis direction; a first cylinder that holds the drive unit and has a cam follower; a second cylinder that has a cam groove for engaging the cam follower; and a bias part for biasing the first cylinder along the optical axis.Type: GrantFiled: June 4, 2019Date of Patent: September 24, 2024Assignees: NIKON CORPORATION, TOCHIGI NIKON CORPORATIONInventors: Kunihiko Shimizu, Satoshi Waizumi, Takehiro Koizumi
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Patent number: 12100667Abstract: A substrate stacking apparatus that stacks first and second substrates on each other, by forming a contact region where the first substrate held by a first holding section and the second substrate held by a second holding section contact each other, at one portion of the first and second substrates, and expanding the contact region from the one portion by releasing holding of the first substrate by the first holding section, wherein an amount of deformation occurring in a plurality of directions at least in the first substrate differs when the contact region expands, and the substrate stacking apparatus includes a restricting section that restricts misalignment between the first and second substrates caused by a difference in the amount of deformation. In the substrate stacking apparatus above, the restricting section may restrict the misalignment such that an amount of the misalignment is less than or equal to a prescribed value.Type: GrantFiled: November 18, 2021Date of Patent: September 24, 2024Assignee: Nikon CorporationInventors: Isao Sugaya, Kazuya Okamoto, Hajime Mitsuishi, Minoru Fukuda
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Patent number: 12092804Abstract: An optical system (ZL(1)) comprises a plurality of lens groups including a first focusing lens group (G2) and a second focusing lens group (G4) that are disposed side by side on an optical axis, and the second focusing lens group (G4) is disposed at a position closer to an image surface than the first focusing lens group (G2). The first focusing lens group (G2) has positive refractive power, and moves toward an object along the optical axis from focusing on an infinite-distance object to focusing on a short-distance object. The second focusing lens group (G4) moves toward the image surface along the optical axis from focusing on the infinite-distance object to focusing on the short-distance object. The optical system (ZL(1)) satisfies the following conditional expression. ?020<?F1/?F2<0.Type: GrantFiled: June 28, 2023Date of Patent: September 17, 2024Assignee: Nikon CorporationInventor: Keisuke Tsubonoya
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Patent number: 12096678Abstract: A film forming apparatus, a substrate processing apparatus, and a device manufacturing method are provided, which improve the film thickness uniformity of a thin film that is formed on a substrate by spraying a thin film material. The film forming apparatus which forms a thin film on a substrate is provided with a nozzle that sprays a thin film material and an exhaust unit that discharges a gas. An exhaust port of the exhaust unit is arranged on a side that is opposite to the direction in which the gravity acts with respect to the substrate. The substrate processing apparatus performs a predetermined process on the substrate using the film forming apparatus. The device manufacturing method manufactures a device using the film forming apparatus.Type: GrantFiled: October 3, 2016Date of Patent: September 17, 2024Assignee: NIKON CORPORATIONInventors: Yasutaka Nishi, Makoto Nakazumi
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Patent number: 12092769Abstract: With a ranging device and a ranging method according to the present embodiment, occurrence of a first event in which the intensity of a detection signal corresponding to reflected light output from a detection unit exceeds a first threshold and occurrence of a second event in which the intensity falls below a second threshold smaller or larger than the first threshold are counted for each predetermined elapsed time after the measuring beam emission from a projector. Based on integration results (i.e., histograms) obtained by integrating the counts for a plurality of times of light emission, a target signal derived from the reflected light can be extracted from the detection signal including random noise derived from external light, a detection time from the light emission to the detection by the detection unit can be determined, and a distance to an object can be precisely determined.Type: GrantFiled: November 24, 2020Date of Patent: September 17, 2024Assignee: NIKON VISION CO., LTD.Inventor: Takehito Nonomura
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Patent number: 12092803Abstract: A zoom optical system (ZL) comprises, in order from an object: a first lens group (G1) having a positive refractive power; a second lens group (G2) having a negative refractive power; a third lens group (G3) having a positive refractive power; and a subsequent lens group (GR), wherein upon zooming, a distance between the first lens group (G1) and the second lens group (G2) changes, a distance between the second lens group (G2) and the third lens group (G3) changes, and a distance between the third lens group (G3) and the subsequent lens group (GR) changes, the subsequent lens group (GR) comprises a focusing lens group that moves upon focusing, and the second lens group (G2) comprises a partial group that satisfies following conditional expressions, 1.40<fvr/f2<2.30, 1.80<f1/fw<3.Type: GrantFiled: July 13, 2023Date of Patent: September 17, 2024Assignee: Nikon CorporationInventor: Kosuke Machida
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Patent number: 12092802Abstract: A variable magnification optical system comprising a plurality of lens groups which includes a first negative lens group having negative refractive power, a second negative lens group disposed at a more image side than the first negative lens group and having negative refractive power, a third negative lens group disposed at a more image side than the second negative lens group and having negative refractive power; upon varying a magnification, distances between adjacent lens groups being varied; the first negative lens group being movable to include a component in a direction perpendicular to the optical axis as a vibration reduction lens group; the second negative lens group being moved along the optical axis upon carrying out focusing; and the predetermined conditional expression(s) being satisfied. The variable magnification optical system can attain a high optical performance and be made in small in size.Type: GrantFiled: April 17, 2023Date of Patent: September 17, 2024Assignee: Nikon CorporationInventors: Takahiro Ishikawa, Norikazu Yokoi
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Patent number: 12094910Abstract: An imaging element includes a first substrate provided with a photoelectric conversion portion that photoelectrically converts light and generates charge, and a readout circuit that outputs a signal based on the charge generated by the photoelectric conversion portion, a second substrate laminated on the first substrate and provided with a processing portion that processes the signal output from the readout circuit, and a connection portion provided with a bent portion bending in a portion other than the vicinity of the first substrate and the second substrate, and electrically connecting the readout circuit to the processing portion.Type: GrantFiled: September 30, 2020Date of Patent: September 17, 2024Assignee: NIKON CORPORATIONInventor: Daiki Ogura
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Patent number: D1042587Type: GrantFiled: February 1, 2022Date of Patent: September 17, 2024Assignee: NIKON CORPORATIONInventors: Hiroaki Ishii, Masanori Hasuda, Kenji Tonegawa
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Patent number: D1043783Type: GrantFiled: November 8, 2023Date of Patent: September 24, 2024Assignee: NIKON VISION CO., LTD.Inventor: Hiroyuki Asano