Abstract: An exposure method and apparatus simultaneously transfer patterns with various pitches with high resolution. On the pupil surface of an illumination system, nine areas are set. The nine areas are a first area including the optical axis, four second areas each smaller than the first area and arranged along a first circumference surrounding the first area, and four third areas each smaller than the first area and arranged along a second circumference surrounding the first circumference and arranged along a second circumference. The distribution of intensity of light over the pupil surface is so set that the intensities of light over the nine areas are approximately equal to one another, and the intensity of light over the other area is smaller than those over the nine areas. This distribution of intensity of light is set using a diffraction optical element or a diaphragm.

Abstract: A microscope system includes a casing in which an optical element is housed, an airtight specimen chamber, and an environment control unit that controls temperature and humidity in the specimen chamber and also controls temperature inside the casing. An upper plate of the specimen chamber is an open/close lid opened and closed when inserting or removing a biological specimen. The casing becomes sealed by a bottom plate of the specimen chamber as the specimen chamber is set on the casing.

Abstract: Techniques for minimizing contamination by particles that wear off of components that come into and out of contact with each other. The invention involves forming at least one of the components out of a magnetic material so that the particles that wear off of the component are magnetic themselves. Then a magnetic field is used to attract the particles. In one embodiment, the particles are attracted to and collected by a magnet. In this way, the particles are drawn away from any components that might be contaminated. In some embodiments, the magnetic component is also magnetized. In other embodiments, a magnet is placed in contact with the magnetic component. In other embodiments, each of the components that come into contact with each other are formed of a magnetic material.

Abstract: A system and method of calculating estimated image profiles. The system and method includes providing lens characteristic data and performing simulation calculations for various levels of aberration components using the lens characteristic data. A response surface functional relation is built between selected variables of the lens characteristics, in particular the lens aberration components, and the Image Profile using the simulation calculations. Evaluation is then performed on the arbitrary specified aberration values of a lens in relation to the response surface functional relations to provide a calculated estimate of the Image Profile for the specified aberration values. A machine readable medium and exposure apparatus are also provided.

Abstract: An image reproduction apparatus that sequentially reproduces and displays a plurality of images, includes: a display effect setting unit that sets a display effect for each image based upon image data of the image stored in a storage means; and a display unit that reproduces and displays the image with the display effect set by the display effect setting unit when sequentially reproducing and displaying the plurality of images.

Abstract: Based on adjustment information on the adjustment unit under predetermined exposure conditions and information on the corresponding image-forming performance of the projection optical system, pattern correction information, information on a permissible range of the image-forming performance, and the like, a calculation step (steps 114 to 118) and a setting step (steps 120, 124, and 126) are repeatedly performed in the case an image-forming performance in at least one exposure apparatus is outside the permissible range under the target exposure conditions until the image-forming performance in all the exposure apparatus is within the permissible range.

Abstract: A tone transformation apparatus of the present invention extracts or generates a signal Z[i, j] according to a pixel value of a pixel [i. j] of an original image or a pixel value of its immediate neighborhood. Further, it extracts or generates a signal ZL[i, j] according to a pixel value of a neighborhood area of the pixel [i, j]. A transformation gain k for the pixel [i. j] is determined according to these signals Z, ZL. For the tone transformation, a color component or the like of the pixel [i, j] is multiplied by the transformation gain k for the pixel [i. j].

Abstract: An apparatus takes in a plurality of still image frames, to generate an interpolated image frame. Next, moving addition of the still image frame and an interpolated image frame is performed in time-axis direction, to generate a superimposed image frame. At this time, high spatial frequency components in the superimposed image frame are suppressed strongly as alienation of motion between the still image frames becomes larger. Movie is reproduced by sandwiching these superimposed image frames between the still image frames. As a result of this, the movie reproduction with smooth motion is made possible even from a group of the still images photographed by an electronics still camera and the like.

Abstract: The present invention makes it possible to obtain a multilayer film reflective mirror 61 comprising a first multilayer film 67 which is formed by alternately laminating Mo layers 671 and Si layers 673 on a substrate 63, and a second multilayer film 65 which is formed on top of the first multilayer film 67, and which is formed by alternately laminating Mo layers 651 and Si layers 653, wherein the thickness of the Mo layers in the first multilayer film is substantially equal to or smaller than the thickness of the Mo layers in the second multilayer film, and the ratio of the thickness of the Mo layers to the thickness of the Si layers in the first multilayer film is different from the ratio of these thicknesses in the second multilayer film. As a result, a multilayer film reflective mirror with a low internal stress in which a drop in the reflectivity is suppressed can be obtained.

Abstract: Embodiments of the present invention are directed to apparatus and methods of attenuating vibration, particularly for modern stepper machines and other types of vibration sensitive equipment. The attenuation system exhibits good vibration attenuation in the axial or support direction, and exhibits low or substantially zero lateral stiffness to prevent transmission of any vibrations between any of various portions of the machine. In one embodiment, an apparatus for attenuating transmission of lateral vibration between a first mass and a second mass comprises a vibration attenuation device including at least one bellows oriented along a support axis. The at least one bellows is connected between the first mass and the second mass and has an interior volume pressurized with a fluid to an internal fluid pressure which is greater than a zero-stiffness pressure such that the vibration attenuation device exhibits a negative lateral stiffness.

Abstract: An electronic camera records pictures and sound associated with the picture images, and enables reproduction of selected picture images. When one of the picture images of a range of continuously-shot picture images is reproduced, the sound corresponding to the entire range of continuously-shot picture images is reproduced.

Abstract: Methods and apparatus which are suitable for actuating a stage relative to a z-axis and supporting the weight of the stage against the force of gravity are disclosed. According to one aspect of the present invention, an actuator device includes a first arrangement, a magnetic system, a piston, and a guide bearing arrangement. The first arrangement includes a yoke and a center pole, and the magnetic system includes a magnet that is coupled to the yoke as well as a coil which cooperate to function as a voice coil motor. The piston supports at least a weight associated with the first arrangement, and the guide bearing arrangement includes a planar air bearing that enables the device to move over an external surface.

Abstract: Methods and apparatus for actuating a tubeless fine stage using E-I core actuators and voice coil motors (VCMs) are described. According to one aspect of the present invention, a stage device includes a first stage, an air bearing arrangement with at least one air bearing, and a second stage. The second stage has six degrees of freedom, and is supported relative to the first stage in a first degree of freedom. A first actuator arrangement provides a force to drive the second stage in the first degree of freedom, and a second actuator arrangement drives the second stage in at least a first planar degree of freedom. A third actuator arrangement controls the second stage in the first and second planar degrees of freedom. The third actuator arrangement also controls the second stage in a first rotational degree of freedom about an axis associated with the first degree of freedom.

Abstract: An exposure apparatus in which by filling at least a portion between a projection optical system and a substrate with a liquid and by projecting an image of a pattern onto the substrate via said projection optical system and said liquid, said substrate is exposed, said exposure apparatus includes: a substrate holding member that holds said substrate and keeps liquid so that said substrate is immersed in the liquid; and a liquid supply mechanism that supplies, at a vicinity of the projection area of said projection optical system, liquid onto said substrate from above said substrate.

Abstract: An image processing apparatus of the present invention receives a luminance signal indicating luminance or an amount of brightness and input signals indicating a plurality of color differences, and it includes: a signal generator generating a signal Z depending on the input signals indicating the plural color differences; a gain generator generating a transformation gain k(Z) by using the signal Z; and a tone transformation unit which multiplies the luminance signal by the transformation gain k(Z) to calculate a luminance signal after tone transformation.

Abstract: An illumination optical system for, when installed in an exposure system, realizing a suitable illumination condition by varying the polarized state of the illumination light according to the pattern characteristics of the mask while suppressing the loss of the intensity of the light. The illumination optical system has a light source unit for supplying a linearly polarized light for illuminating surfaces to be illuminated therewith, and a polarized state changing device for changing the polarized state of the illuminating light from a predetermined polarized state to a nonpolarized state and vice versa. The polarized state changing device is arranged in the optical path between the light source unit and the surfaces to be illuminated. The polarized state changing device can be removed from the illumination optical path and has a depolarizer for selectively depolarizing the incident linearly polarized light.

Abstract: 1 indicates the rotating point of the eyeball, 2 indicates the first eye position, 3 indicates the second eye position, and 4 indicates the third eye position. The lines indicated by thick lines at the respective eye positions are the horizontal meridian and vertical meridian (principal meridian) of the cornea. As is seen from the figure, the directions of the horizontal meridian and vertical meridian of the cornea at the third eye position 4, in particular, do not coincide with the directions of the horizontal meridian and vertical meridian at the first eye position 1. In the present means, in order to perform aberration correction of the ophthalmic lens not only in the first eye position and second eye position but also in the third eye position under conditions that are suited to the prescription of the user and conditions of use, the prescription surface is made aspherical while taking into account the astigmatic axis of the eye at arbitrary eye positions in accordance with the laws of Donders-Listing.

Abstract: An imaging device according to the present invention includes a registration unit, an imaging unit, a searching unit, and a color adjustment unit. The registration unit registers a reference subject. The imaging unit shoots a subject and outputs image data. The searching unit searches a specific area matching with the reference subject from an image area of the image data. The color adjustment unit performs color adjustment such that color information of the specific area approximates to the color information of the registered reference subject.

Abstract: A portable electronic device includes a display component and a device aperture component which are mounted on separate segments of the electronic device. Each segment can be rotated with respect to the other, thus permitting a user to photograph an object while adjusting the display to a desired viewing condition.

Abstract: An image processing device such as an electronic camera prevents external devices from writing to a first storage region of a memory, while allowing the external device to write to a second storage region of the memory. Accordingly, even when the external device operates irregularly, information stored in the first storage region cannot be erased or corrupted. According to a second aspect, two connectors provided on the electronic camera so that the camera can be attached to different external devices are arranged on the outer housing of the camera so that when the first connector is connected to an external device, the second connector is covered. Conversely, when the second connector is connected to an external device, the first connector is covered. This prevents both connectors from being simultaneously connected to two different external devices, and lessens the possibility of causing an excessive voltage within the camera.

Abstract: A digital still camera includes an image-capturing device, a recording device that records a subject image captured by the image-capturing device into an image recording medium, a first monitor device and a second monitor device. The images repeatedly captured by the image-capturing device are displayed in real time at the first monitor device and, at the same time, a photographic support image having been captured by the image-capturing device is displayed at the second monitor device. A single image or a plurality of images recorded in the image recording medium, for instance, may be displayed at the second monitor device as the photographic support image. Alternatively, an image obtained by partially enlarging the image displayed at the first monitor device may be displayed at the second monitor device.

Abstract: Methods and apparatus for enabling a coil to be used to provide a net force along more than one axis are disclosed. According to one aspect of the present invention, an actuator includes a magnet assembly and a coil assembly. The coil assembly moves at least partially within the magnet arrangement, and includes a top coil half and a bottom coil half. The top coil half and the bottom coil half are independently controllable such that a first current applied to the top coil half may be independently applied from a second current applied to the bottom coil half.

Abstract: A projector module adopts a structure having an optical image forming block and an optical block integrated via a locking member. The optical image forming block adopts a structure achieved by disposing an aluminum substrate at which an LED is mounted and a liquid crystal panel in a casing constituted with a plastic material having low thermal conductivity. The locking member is formed by bending a metal sheet through a sheet metal bending process and the locking member is set in surface contact with the substrate. The optical block adopts a structure achieved by disposing a PBS and a reflecting member at the casing constituted with a plastic material having low thermal conductivity with a quarter-wave plate disposed at the boundary of the two members.

Abstract: Methods and apparatus for enabling a fine stage to be moved using pneumatics such that disturbances associated with a pneumatic transfer system are not transmitted to the fine stage are disclosed. According to one aspect of the present invention, a stage apparatus includes a first stage, a second stage, and a pneumatic transfer system. The pneumatic transfer system includes at least one transfer mechanism and a transfer block. The transfer mechanism is substantially directly coupled be coupled between the first stage and the transfer block, and the first stage provides a flow through the transfer mechanism to the transfer block. The transfer block is arranged to be positioned over a surface of the second stage to provide the flow to the second stage substantially without contacting the second stage.

Abstract: A retractable lens camera includes: a lens barrel; three or more lens groups provided in the lens barrel; a retracting unit that retracts the lens barrel and the lens groups into a camera body; and a displacing unit that displaces at least two lens groups to an escaping space out of an optical axis.

Abstract: An imaging apparatus is disclosed which can increase recording resolution while reducing data amount handled during compression processing. The imaging apparatus includes a first imaging unit capturing an image of a subject and outputting a frame in first resolution in first time intervals, a second imaging unit capturing the image of the subject and outputting a frame in second resolution higher than the first resolution in second time intervals longer than the first time intervals, a detecting unit detecting motion vectors between the adjacent frames outputted from the first imaging unit and outputting the motion vectors as vector distribution information in the first resolution, a converting unit converting the vector distribution the in the first resolution into vector distribution information in the second resolution, and a recording unit recording on a storage media the vector distribution information in the second resolution and the frames outputted from the second imaging unit.

Abstract: Recorded information is grouped in recording units. The information of each recording unit is displayed by the order of older recording date based upon information recorded in memory. The recording time of each recording unit is displayed on the left edge of the display screen, to the right of which is a memo icon indicating memo information, a thumbnail image indicating shooting image information, a sound icon indicating sound, and reproduction time information for each recording unit. If a predetermined recording unit is designated and reproduced, the screen is re-displayed so that the reproduced recording unit appears at the lowermost line of the screen. If a new recording unit is recorded, the newest recording unit is displayed at the lowermost line. If the screen is scrolled and another display screen is displayed by operation of a scroll key, a screen similar to the previously displayed screen is displayed.

Abstract: An alignment method enabling reduction of the effects on throughput and nonlinear correction for the optimum shot alignment for each wafer. According to the present invention, the nonlinear error is corrected by EGA calculation having higher order terms. One or more correction conditions (correction coefficients) are selected with reference EGA log data or overlay measurement data in advance for each process condition and registered in an exposure apparatus. At the time of lot processing of the exposure apparatus, the shot alignment of several sample shots is detected to detect the trend in nonlinear error and a single optimum correction coefficient is selected based on this from the registered plurality of correction coefficients. Further, after ordinary EGA, higher order EGA is performed using the selected correction coefficient to correct the nonlinear component and position each shot area.

Abstract: Methods and apparatus for isolating or separating a reticle stage arrangement from a lens assembly are disclosed. According to one aspect of the present invention, an apparatus includes a reticle stage assembly, a lens assembly, and an isolator assembly. The isolator assembly is arranged to substantially prevent vibrations from being transmitted from the reticle stage assembly to the lens assembly. In one embodiment, the apparatus also includes a frame structure that supports the lens assembly and the reticle stage assembly.

Abstract: The light from the image forming element 2 is reflected by the PBS 8, and is incident on the ?/4 plate 7 so that this light is converted into circularly polarized light. Subsequently, the light is subjected to a reflection/diffraction effect and image focusing effect by the reflective type HOE 6. Then, this light again passes through the ?/4 plate 7, and is transmitted through the PBS 8. As a result, the light enters the eye of the user after being synthesized with light from the outside world. The system is devised so that the relationships of ?5<?1<5 and |?1??2|<3 are established between the angle of incidence ?1 (°) at which the principal rays emitted from the center of the display part of the image forming means are incident on the reflective type holographic optical element, and the reflection/diffraction angle ?2 (°) when this light is diffracted/reflected by the reflective type holographic optical element.

Abstract: In nonlinear optical crystal 183D, each step of wavelength conversion can be performed using another fundamental wave that is output from light output unit 1612, without using the fundamental wave whose output level has been attenuated after going through wavelength conversion for several steps (wavelength conversion in nonlinear optical crystals 183A to 183C). Therefore, the wavelength conversion efficiency improves and the peak power of optical amplifiers 1611 and 1612 can be suppressed, which allows the wavelength of lights that are output from optical amplifiers 1611 and 1612 to be further narrowed.

Abstract: An environmental system controls an environment in a gap between an optical assembly and a device and includes a fluid barrier and an immersion fluid system. The fluid barrier is positioned near the device. The immersion fluid system delivers an immersion fluid that fills the gap and collects the immersion fluid that is directly between the fluid barrier and the device. The fluid barrier can include a scavenge inlet that is positioned near the device, and the immersion fluid system can include a low pressure source that is in fluid communication with the scavenge inlet. The fluid barrier confines any vapor of the immersion fluid and prevents it from perturbing a measurement system. Additionally, the environmental system can include a bearing fluid source that directs a bearing fluid between the fluid barrier and the device to support the fluid barrier relative to the device.

Abstract: The present invention relates to a holographic optical element, a viewfinder display of a camera using thereof, and a camera. The purpose of the present invention is to show various superimposed displays for various information with securing a bright viewfinder image. In the holographic optical element according to the present invention, a liquid crystal (13) whose orientation is changeable and a liquid crystal (14) whose orientation is fixed are arranged alternately with a striped shape between the transparent members (12a) (12b) on which the transparent electrodes (11a) (11b) are formed facing with each other.

Abstract: In step 401, a subset of an arbitrary plurality of numbers of shot areas is selected from a plurality of shot areas. Then, in step 403, based on the design value of position information related to shot areas included in the subset information on a predetermined accuracy index relative to the position information, the maximum likelihood estimates of the error parameter information for the arrangement on a wafer is calculated in the case where the shot areas are used as measurement shot areas. Then, in step 405, based on the estimated error parameters, overlay error is calculated, and in step 407, subsets whose overlay error satisfies a predetermined condition are selected in step 407. And from the subsets that have been selected, a subset having the most preferable moving sequence related to the total movement time between shot areas is selected.

Abstract: Methods and apparatus for providing a stage with a relatively high positioning bandwidth and low transmissibility are disclosed. According to one aspect of the present invention, a method for positioning a stage including providing a first force of a first magnitude to the stage using a primary actuator and providing a second force of a second magnitude to the stage using a secondary actuator. The first force is arranged to cause the stage to translate along a first axis. The secondary actuator is also arranged to cause the stage to translate along the first axis, and has a relatively high positioning bandwidth. The first force is arranged to enable the stage to be relatively coarsely positioned and the second force is arranged to enable the stage to be relatively finely positioned. In one embodiment, the secondary actuator is one of a voice coil motor and a piezoelectric motor.

Abstract: The invention provides an electronic camera system which operates an electronic camera in a minimum power mode when a not-genuine secondary battery is attached to the electronic camera. Namely, for the electronic camera which uses a detachable secondary battery as a power source, it determines from identification information whether the secondary battery is a genuine battery of the electronic camera. When determining that the secondary battery is a genuine battery, the electronic camera system allows the electronic camera to normally operate. When determining that the secondary battery is not a genuine battery, it places the electronic camera into the minimum power mode.

Abstract: An apparatus and method maintain immersion fluid in the gap adjacent to the projection lens during the exchange of a work piece in a lithography machine. The apparatus and method include an optical assembly that projects an image onto a work piece and a stage assembly including a work piece table that supports the work piece adjacent to the optical assembly. An environmental system is provided to supply and remove an immersion fluid from the gap between the optical assembly and the work piece on the stage assembly. After exposure of the work piece is complete, an exchange system removes the work piece and replaces it with a second work piece. An immersion fluid containment system maintains the immersion liquid in the gap during removal of the first work piece and replacement with the second work piece.

Abstract: An exposure apparatus wherein an image of a pattern is projected onto a substrate via a projection optical system to expose the substrate, includes: a substrate moving device that is movable while holding the substrate above the projection optical system; and a liquid immersion unit that fills at least a portion of the space between the projection optical system and the substrate with a liquid, wherein the image of the pattern is projected onto the substrate via the projection optical system and the liquid.

Abstract: An image signal resulting from an image-capturing operation performed at a CCD undergoes analog processing at an image processing unit. Image data resulting from the analog processing are first digitized at an A/D conversion circuit and then undergo image processing at a DSP. The image data having undergone the image processing are stored in a frame memory. At a peaking processing circuit, a brightness signal Y stored in a Y signal memory of the frame memory is read out and differentiated at a differentiation circuit. The differentiated signal is amplified at an amplifier circuit and then the amplified signal is added to the original brightness signal Y at an adder circuit. A brightness signal Y? representing the sum is output to a display LCD. The edges in the image signal are emphasized in the display on the display LCD.

Abstract: A table with six degrees of freedom, such as a wafer table for a lithography system, has an upper table stacked on top of a lower table. Each of these two stacked tables has three degrees of freedom and is provided with actuators for controlling its motions in these three degrees of freedom. The vertical motion, the pitching and the rolling of the lower table may be controlled by actuators that may be voice coil motors. The upper table is supported on the flat top surface of the lower table so as to be slidable laterally, or two dimensionally. This two dimensional motion of the upper table and its yaw may be controlled by another set of actuators which may be smaller voice coil motors. A wafer holder supporting a workpiece such as a wafer for the lithography system may be secured onto the upper table by a vacuum suction mechanism.

Abstract: An imaging device according to the present invention includes: an image-capturing optical system forming an image of a subject on a surface of an image sensor; a blur-detecting unit detecting a blur of an optical axis in the image-capturing optical system; an image-capturing unit which divides a total exposure time by a predetermined dividing number to repeat image capturing, and generates a number of images corresponding to the dividing number; and a composing unit which finds a motion vector based on the images in the dividing number generated by the image-capturing unit and on the blur detected by the blur-detecting unit and composes the generated images in the dividing number based on the motion vector. Therefore, it is possible to precisely correct a blur while shortening the time required for the blur correction.

Abstract: An environmental system controls an environment in a gap between an optical assembly and a device and includes a fluid barrier and an immersion fluid system. The fluid barrier is positioned near the device. The immersion fluid system delivers an immersion fluid that fills the gap and collects the immersion fluid that is directly between the fluid barrier and the device. The fluid barrier can include a scavenge inlet that is positioned near the device, and the immersion fluid system can include a low pressure source that is in fluid communication with the scavenge inlet. The fluid barrier confines any vapor of the immersion fluid and prevents it from perturbing a measurement system. Additionally, the environmental system can include a bearing fluid source that directs a bearing fluid between the fluid barrier and the device to support the fluid barrier relative to the device.

Abstract: A fluid control system for immersion lithography that uses an optical member such as a lens, a workpiece such as a semiconductor wafer with a surface disposed opposite to the optical member with a gap in between, includes a fluid-supplying device for providing an immersion fluid such as water to a specified exposure area in the gap, and a fluid control device that activates a force on the fluid so that the immersion fluid is retained in the exposure area and its vicinity at least while the immersion lithography operation is being carried out. A pressured gas may be caused to apply a hydrodynamic force on the fluid to keep it in its place.

Abstract: A beam source of an inspection apparatus discharges a beam, and a stage system holds a specimen and moves in at least one direction. A primary optical system directs the beam to the specimen, and a secondary optical system guides a secondary beam coming from the specimen. A sensor outputs an electric signal of the specimen image from the secondary beam, an image processor generates image information of the specimen by processing the electric signal output by the sensor, and a host computer generates an inspection timing signal for controlling the sensor to transfer the image information at a preset data transfer rate.

Abstract: An immersion lithography apparatus has a reticle stage arranged to retain a reticle, a working stage arranged to retain a workpiece, and an optical system including an illumination source and an optical element opposite the workpiece for having an image pattern of the reticle projected by radiation from the illumination source. A gap is defined between the optical element and the workpiece, and a fluid-supplying device serves to supply an immersion liquid into this gap such that the supplied immersion liquid contacts both the optical element and the workpiece during an immersion lithography process. A cleaning device is incorporated for removing absorbed liquid from the optical element during a cleanup process. The cleaning device may make use of a cleaning liquid having affinity to the absorbed liquid, heat, a vacuum condition, ultrasonic vibrations or cavitating bubbles for the removal of the absorbed liquid.

Abstract: An environmental system controls an environment in a gap between an optical assembly and a device and includes a fluid barrier, an immersion fluid system, and a transport region. The fluid barrier is positioned near the device and maintains the transport region near the gap. The immersion fluid system delivers an immersion fluid that fills the gap. The transport region transports at least a portion of the immersion fluid that is near the fluid barrier and the device away from the device. The immersion fluid system can include a fluid removal system that is in fluid communication with the transport region. The transport region can be made of a porous material.

Abstract: An exposure apparatus for transferring an image to a device includes an optical assembly, an immersion fluid system, and a device stage assembly. The optical assembly is positioned so that there is a gap above the device. The immersion fluid system fills the gap with an immersion fluid. The device stage assembly includes a sloped region that facilitates movement of the immersion fluid that exits the gap away from the device. The device stage assembly can include a collection region and a recovery system that recovers immersion fluid from the collection region.

Abstract: An apparatus and method maintain immersion fluid in the gap adjacent to the projection lens during the exchange of a work piece in a lithography machine. The apparatus and method include an optical assembly that projects an image onto a work piece and a stage assembly including a work piece table that supports the work piece adjacent to the optical assembly. An environmental system is provided to supply and remove an immersion fluid from the gap between the optical assembly and the work piece on the stage assembly. After exposure of the work piece is complete, an exchange system removes the work piece and replaces it with a second work piece. An immersion fluid containment system maintains the immersion liquid in the gap during removal of the first work piece and replacement with the second work piece.

Abstract: A liquid jet and recovery system for an immersion lithography apparatus has arrays of nozzles arranged to have their openings located proximal to an exposure region through which an image pattern is projected onto a workpiece such as a wafer. These nozzles are each adapted to serve selectively either as a source nozzle for supplying a fluid into the exposure region or as a recovery nozzle for recovering the fluid from the exposure region. A fluid controlling device functions to cause nozzles on selected one or more sides of the exposure region to serve as source nozzles and to cause nozzles on selected one or more of the remaining sides to serve as recovery nozzles such that a desired flow pattern can be established for the convenience of immersion lithography.

Abstract: An environmental system that controls an environment in a gap between an optical assembly and a device includes a fluid barrier, an immersion fluid system, an electro-osmotic element, and a control system. The fluid barrier is positioned near the device and maintains the electro-osmotic element near the gap. The immersion fluid system delivers an immersion fluid that fills the gap. The control system applies an electrical voltage to the electro-osmotic element that causes the electro-osmotic element to transport at least a portion of the immersion fluid that is near the fluid barrier and the device away from the device. The electro-osmotic element can be made of a porous material.