Abstract: An exposure apparatus wherein an image of a pattern is projected onto a substrate via a projection optical system to expose the substrate, includes: a substrate moving device that is movable while holding the substrate above the projection optical system; and a liquid immersion unit that fills at least a portion of the space between the projection optical system and the substrate with a liquid, wherein the image of the pattern is projected onto the substrate via the projection optical system and the liquid.

Abstract: In order to efficiently display a plurality of images on a display screen, the display screen is divided into a number of areas based on the number of images that are designated for display. For example, if four information items are selected and designated for display, the screen is divided into four areas, each area displaying one of the selected information items. Image information is reduced in size for display in each divided area, and sound information can be represented by a corresponding symbol (e.g., a musical note). If five or more information items are selected and designated for display, then the screen is divided into nine areas, and each of the selected images is displayed in one of the divided areas.

Abstract: An image processing apparatus reduces a distortion that occurs at a tile boundary (tile distortion) when an image is compressed or expanded on a tile-by-tile basis. It is equipped with a tone jump detecting section, a slope calculating section, and a slope correcting section. The tone jump detecting section calculates differences between the values of pixels on both sides of the tile boundary and detects a tone jump in the tile distortion according to the differences. The slope calculating section calculates slope-like correction values to be used for causing the tone jump to approach zero in a prescribed length ((prescribed length)<(tile length)), and adds the slope-like correction values to the values of pixels near the tile boundary. As a result, the steep tone jump due to the tile distortion is corrected into a gentle slope-like variation. Tile distortions are reduced properly by this processing.

Abstract: An electronic still camera embodying the invention converts images of an object into image data and records the image data onto a recording medium. A corresponding identification code is directly recorded with the image data so that the image data can be efficiently managed within the electronic still camera.

Abstract: An autofocus unit is provided to an immersion lithography apparatus in which a fluid is disposed over a target surface of a workpiece and an image pattern is projected onto this target surface through the fluid. The autofocus unit has an optical element such as a projection lens disposed opposite and above the target surface. An autofocus light source is arranged to project a light beam obliquely at a specified angle such that this light beam passes through the fluid and is reflected by the target surface of the workpiece at a specified reflection position that is below the optical element. A receiver receives and analyzes the reflected light. Correction lenses may be disposed on the optical path of the light beam for correcting propagation of the light beam.

Abstract: Methods and apparatus for using a flow of a relatively cool gas to establish a temperature gradient between a reticle and a reticle shield to reduce particle contamination on the reticle are disclosed. According to one aspect of the present invention, an apparatus that reduces particle contamination on a surface of an object includes a plate and a gas supply. The plate is positioned in proximity to the object such that the plate, which has a second temperature, and the object, which has a first temperature, are substantially separated by a space. The gas supply supplies a gas flow into the space. The gas has a third temperature that is lower than both the first temperature and the second temperature. The gas cooperates with the plate and the object to create a temperature gradient and, hence, a thermophoretic force that conveys particles in the space away from the object.

Abstract: The present invention provides a resin-cemented optical element comprising a base member 10 and a resin layer 11 formed on the surface of the base member; the resin layer 11 being in a thickness of 300 ?m or smaller at least at some part of a peripheral portion (i.e., a region within 1 mm from the peripheral edge face 17 of the resin layer 11, or a region outside an effective-diameter region), and being in a thickness 12 of 850 ?m or larger at a position which is thickest in the resin layer; a mold therefore; a manufacturing method thereof; and an optical article having this optical element.

Abstract: A projection optical system is a catoptric system in which a field of view region and an imaging region are located spaced from an optical axis, in which a numerical aperture of light reaching each point on an image plane is substantially uniform regardless of an image height and a direction. An aperture stop for defining the numerical aperture of the projection optical system is provided, and the aperture stop is provided with an aperture portion in a predetermined shape in which the numerical aperture of light reaching each point within a predetermined region is substantially uniform over the predetermined region, that is, in a shape in which dimensions concerning two directions perpendicular to each other are different from each other.

Abstract: This exposure system projects a pattern image onto a substrate via a projection optical system and a liquid to expose the substrate, with a space between the projection optical system and the substrate filled with the liquid. The exposure system is provided with a vaporization preventing unit for preventing the vaporization of the liquid.

Abstract: An electronic camera includes a menu providing section that provides a focus area selection menu that allows a user to select a focus area, a characterizing portion detecting section that detects a characterizing portion of an object, and an area setting section that sets a focus area based on the characterizing portion detected by the characterizing portion detecting section. The focus area selection menu that is provided by the menu providing section to the user includes, as a selection item, a focus area to be set by the area setting section.

Abstract: In an exposure apparatus, an exposure object 15 is exposed to light by applying pulsed light that has a wavelength of 300 nm or less and that has been passed through a plurality of optical components 2, 4a, 4b, 6, 7, 9, and 12. At least one of the plurality of optical components 2, 4a, 4b, 6, 7, 9, and 12 is made of a synthetic silica glass component. The thickness of the synthetic silica glass component, and the energy density per pulse and the pulse width of the pulsed light satisfy the following expression: ?I?2L?1.7?0.02 (ns·mJ?2·cm2.3·pulse2) (L is the thickness (unit: cm) of the synthetic silica glass component, I is the energy density (unit: mJ·cm?2·pulse?1) per pulse, and ? is the pulse width (unit: ns)).

Abstract: It is an object of the present invention to provide an projection imaging type electron microscope in which the imposition of restrictions on the design of the illumination electron optical system by the conditions of the projection electron optical system is alleviated, so that the degree of freedom in the design of the illumination electron optical system is increased. Generated electrons 6b (principal rays) emitted from the sample 5 parallel to the optical axis are focused by a cathode lens so that these electrons cross the optical axis 3 at one point. This point is the first crossover. The generated electrons 6b are oriented parallel to the optical axis by the cathode lens 4a, and are focused as an image at the position of the electromagnetic prism 2; these electrons pass through the stigmator 7, and are incident on the relay lens 8a. These electrons are again focused, and cross the optical axis 3 at one point. This position is the second crossover.

Abstract: A computer system comprises a first computer into which target information that an optical apparatus is to achieve is inputted and a second computer that determines the specification of a projection optical system based on the target information received from the first computer via a communication path with using a wave-front aberration amount, which the projection optical system is to satisfy, as a standard. Therefore, in the process of making the projection optical system, higher-order components of the aberration as well as lower-order components can be simultaneously corrected by adjusting the projection optical system based on the result of measuring the wave-front aberration to satisfy the specification, so that the making process becomes simpler. Furthermore, the target that the exposure apparatus is to achieve is securely achieved due to the projection optical system.

Abstract: The exposure system of the present invention inhibits baseline shift by carrying out temperature control as required by each composite equipment. This exposure system has a first control system that that sets the temperature of a first liquid, and controls the temperature of an object by circulating the first liquid for which the temperature has been set through at least one object of a projection optics and a substrate stage, and a second control system that sets the temperature of a second liquid independent from the first control system, and controls the temperature of a reticle stage by circulating the second liquid for which the temperature has been set through the reticle stage. The first and second control systems have mutually different setting capacities with respect to the size of the temperature range when setting the temperatures of the liquids.

Abstract: A projection optical system which uses, for example, an ArF excimer laser beam and can ensure a good imaging performance for an extended period while avoiding the variations in refractive index and the effect of the intrinsic double refraction of a fluorite containing a high-frequency component. A projection optical system for forming the demagnified image of a first plane (R) on a second plane (W). A first light transmitting member (L23) disposed closest to the second plane side and having almost no refraction power is provided. When the distance between the first light transmitting member and the second plane is WD, a numerical aperture on the second plane side NA, and the center wavelength of a light used L×10?6, the condition 0.06<WDNA/L<0.23 is satisfied. Or, a first light transmitting member disposed closest to a second plane side and having almost no refraction power, and a second light transmitting member (L22) disposed adjacent to the first plane side are provided.

Abstract: An optical member made of silica glass manufactured by the direct method where a material gas comprising an organosilicon compound is allowed to react in an oxidizing flame, said optical member having a 2×1014 molecules/cm3 or less concentration of formyl radical generated by X-ray irradiation whose dose is 0.01 Mrad or more and 1 Mrad or less.

Abstract: Embodiments of the present invention are directed to an apparatus and a method for through lens measurement for a projection system. In one embodiment, an apparatus for through lens image measurement comprises a projection lens housing containing lens elements therein, and a reflective member having a center of curvature on a first plane. The reflective member is attached to the lens housing. An optical system includes a light source, a position detector, and one or more optical elements. The optical system is attached to the lens housing and configured to direct a light from the light source through the lens elements to the reflective member which reflects the light back through the lens elements and toward the position detector. The position detector is configured to detect any image shift at the first plane due to misalignment of the lens elements with respect to the lens housing.

Abstract: An exposure apparatus EX exposes a substrate P by projecting an image of a predetermined pattern through a liquid 1 onto the substrate. The exposure apparatus includes a projection optical system which performs the projection, and a liquid supply mechanism 10 which supplies the liquid onto the substrate to form a liquid immersion area AR2 on a part of the substrate. The liquid supply mechanism supplies the liquid 1 onto the substrate P simultaneously from a plurality of positions which are apart, in a plurality of different directions, from the projection area AR1. The exposure apparatus is capable of forming the liquid immersion area stably and recovering the liquid satisfactorily. It is possible to perform the exposure process accurately while avoiding, for example, the outflow of the liquid to the surroundings.

Abstract: A digital camera has a memory for storing a plurality of programs each to embed a watermark on a digital image data. The digital camera embeds the watermark on the image data according to the program selected by a program selector. In the case of a digital camera capable of selecting whether or not to embed a watermark, the digital camera forcibly controls to embed the watermark if the selection is failed. The digital camera has a processor for processing a digital image data in accordance with one of a plurality of selective data forms, one of the data forms being suitable for a watermark, and another unsuitable. In this case, the digital camera controls the processor to replace the unsuitable data form by the suitable one under the necessity of embedding the watermark on the digital image data.

Abstract: An exposure apparatus that irradiates an energy beam to a substrate includes a projection optical system that projects the energy beam to the substrate, and a support device having a flexible structure to support the projection optical system. According to one embodiment, the flexible structure includes three flexible rods that support the projection optical system from an upper side of the projection optical system. According to an embodiment, extended lines of the respective rods cross at a reference point of the projection optical system.

Abstract: A surface inspection apparatus includes: a light source unit that emits a divergent light flux of predetermined linearly polarized light to be used to illuminate a test substrate; a first optical member that allows the divergent light flux of the predetermined linearly polarized light to enter therein with a predetermined angle of incidence and then guides a light flux to the test substrate; a second optical member that allows a light flux from the test substrate to enter therein, emits a convergent light flux thereof with a predetermined angle of emergence and forms an image at a specific surface; an extraction unit that extracts linearly polarized light in the convergent light flux from the second optical member, which is perpendicular to the predetermined linearly polarized light; a light-receiving unit that receives an image of the test substrate formed via the second optical member and the extraction unit; and at least one polarization correcting member disposed within a light path extending between the

Abstract: A method for quickly removing pollutants adhered to a predetermined optical member in an optical system. To remove the pollutants adhered to a lens (32A) disposed at the upper end of a projection optical system (PL), a cylindrical protecting member (53) is disposed through the openings in a reticle stage (22) and a reticle base (23). The bottom surface of a support section (56) at the tip section of a rod section (58) is brought into contact with the surface of the lens (32A) through the inner surface of the protecting member (53). A wiping cloth soaked with a washing solution containing hydrofluoric acid is attached to the bottom surface of the support section (56). The support section (56) is reciprocated via the rod section (58) to remove the pollutants on the lens (32A) with the wiping cloth.

Abstract: Methods and apparatus for reducing particle contamination on a reticle used in an extreme ultraviolet (EUV) lithography process. According to one aspect of the present invention, an apparatus that protects a surface of an object includes a plate that is positioned in proximity to the surface and protects at least a first portion of the surface. An opening is defined within the plate, and is such that a second portion of the surface is exposed through the opening. The apparatus also includes at least one magnetic component which creates a static magnetic field that is arranged to deflect charged particles away from the opening and the surface of the object.

Abstract: An image scanning apparatus enables the user who lacks knowledge and experiences to easily perform image processing on the image data of a scanned original that is suitable therefor. For that purpose, the image scanning apparatus identifies at least one of a type of transmitting film originals and a picture pattern formed thereon on the basis of the image data (Ir-image data) obtained by illumination with infrared light from among the image data obtained by preparatory scanning (pre-scan), and sets up the conditions for the image processing based on the identified result.

Abstract: A vibration reduction apparatus estimates a reference value from a vibration detection signal, and determines a target drive position from a difference between the vibration detection signal and the estimated reference value. A driving unit drives a vibration reduction mechanism so that the vibration reduction mechanism makes a follow-up movement to the target drive position. The vibration reduction apparatus has a feedback path for feeding back a motion signal to the reference value. A feedback control unit for changing the feedback amount of the motion signal in accordance with a difference in an analytical condition of the motion signal is provided on the feedback path.

Abstract: An electronic camera capable of exposure control is disclosed which flexibly responds to situations during the display of confirmation moving image before photographing.

Abstract: When a wafer is moved from a first position to a second position along a path where alignment marks pass through an alignment detection system, wafer table is to be moved along a path whose standstill time of a Y linear motor, which drives the wafer table in the Y-axis direction, and an X linear motor, which drives the wafer table in the X-axis direction orthogonal to the Y-axis direction, is minimum. In this case, the time for both linear motors to drive the wafer table simultaneously is increased as much as possible, and during such simultaneous drive, the movement distance of the wafer can be increased compared with the case when the wafer table is driven using only one of the linear motors. As a result, the time required to move wafer from the first position to the second position can be reduced.

Abstract: An illuminating device for photographing includes: an illuminating unit having a plurality of current-controlled light emitting elements, which illuminates a subject with light emitted from the plurality of light emitting elements; a storage unit in which light emission brightness information is stored in correspondence to each of the plurality of light emitting elements; and a light emission control unit that controls light emission at the plurality of light emitting elements based upon the light emission brightness information stored in the storage unit so that the plurality of light emitting elements achieve uniform brightness levels at the subject.

Abstract: An exposure apparatus, wherein an exposure of a substrate (P) is carried out by filling at least a portion of the space between a projection optical system and the substrate (P) with a liquid and projecting an image of a pattern onto the substrate (P) via the projection optical system and the liquid, includes a bubble detector (20) which detects air bubble or bubbles in the liquid between the projection optical system and the substrate (P). Consequently, the exposure apparatus is capable of suppressing deterioration of a pattern image caused by bubbles in the liquid when an exposure is carried out while filling the space between the projection optical system and the substrate with the liquid.

Abstract: When the quantity of light diagonally entering light-receiving portions of an image-capturing element in an electronic camera is large and thus an electrical charge is generated readily in an electrical charge transfer line, hue correction processing is executed to correct any change occurring in the hue induced by the charge generated in the electrical charge transfer line.

Abstract: An illumination device includes a light source constituted with an LED which is a trichromatic (three-wavelength) light source achieving maximum light emission wavelengths in separate wavelength ranges corresponding to the three primary colors of light, blue, green and red. As the shutter is released at an electronic camera set in a portrait photographing mode, the electronic camera transmits a light emission command for the illumination device to illuminate the main subject with illuminating light emitted from the LED. The LED assumes a structure that allows it to emit light at maximum light emission wavelengths matching maximum transmission wavelengths achieved through the spectral transmission characteristics of a color filter disposed at an image-capturing element.

Abstract: A print system receives an image file and a print order file from a customer, the image file having an image data area and an order data area. The print system copies information of the received print order file into the order data area of the received image file. The print system produces a print of the image data in the image file according to the information in the order data area of the image file. The print system has a printer capable of producing a print of a predetermined image data provided by a third party as well as that of the image data of the customer. The print system delivers to the customer the print ordered by the customer as well as the print of the predetermined image data. The print system selects a group of orders among all the orders in accordance with the destination of delivery for controlling the printer to give priority to the group of orders in producing the prints.

Abstract: The noise reduction device includes an image storage unit, a blackout image processing unit, and a noise processing unit. The image storage unit captures image data obtained by imaging a field with an image sensor, and stores the image data therein. The blackout image processing unit captures blackout image data obtained by imaging by the image sensor that is shaded, and extracts a specific noise component of the blackout image data. The noise processing unit reduces a noise in the image data based on the specific noise component of the blackout image data.

Abstract: Liquid is supplied by a supply mechanism to a space between a lens and a wafer via a supply nozzle on one side of the lens, and the liquid is recovered by a recovery mechanism via a recovery pipe on the other side of the lens. When the supply and the recovery of the liquid are performed in parallel, a predetermined amount of liquid (exchanged at all times) is held between the lens and the substrate on the stage. Accordingly, when exposure (pattern transfer on the substrate) is performed in this state, an immersion method is applied and a pattern is transferred with good precision onto the substrate. In addition, in the case the liquid leaks out from under the lower edge of a peripheral wall, the liquid that could not be recovered is recovered by an auxiliary recovery mechanism via a slit. And, by such operations, the substrate is freed from the residual liquid on the substrate.

Abstract: A digital still camera of the invention includes: an image-capturing unit which generates an image; a selecting unit which decides whether a date where the generating is done is to be written onto the image; a writing unit which writes the date when the selecting unit decides that the date is to be written; a creating unit which creates print-order information; a determining unit which determines whether the image has the date thereon, when the creating unit creates the print-order information for the image; a changing unit which deletes the date from the print-order information when the determining unit determines that the image has the date thereon, and the print-order information includes the date; and a recording unit which records the image and the print-order information, associating them with each other. Therefore, it can avoid a problem in printing the date, and properly set print-order information with simple operation.

Abstract: A digital still camera includes an image-capturing unit capturing a subject image via an image-capturing lens to create an image, a focus detecting unit detecting focus in accordance with the image created by the image-capturing unit, an image-capturing lens driving unit driving the image-capturing lens in accordance with a result of the focus detection provided by the focus detecting unit, and a receiving unit receiving an instruction to initiate image capture by the image-capturing unit. When the receiving unit receives the instruction to initiate image capture, the image-capturing unit captures the subject image successively to create a plurality of images, while the image-capturing lens driving unit drives the image-capturing lens successively. Accordingly, it is possible to provide an image in a high in-focus state while shortening the time required until an image is actually captured after an instruction is provided to initiate the capture of the image.

Abstract: A method for providing an electronic shop using a network includes receiving purchase information of purchasing a plurality of commodities from a same user from a terminal of a user via the network, judging whether or not a deliverable date of the plurality of commodities varies with each commodity by a computer, and transmitting information asking if the plurality of commodities are delivered at one time or separately to the terminal of the user via the network, when the deliverable date of the plurality of commodities varies for each commodity.

Abstract: The present invention aims at providing a digital camera that enables to readily check a focus status of a principle subject by employing a new action sequence. The present invention includes a display device that displays image data, an extraction device that extracts a feature portion of a subject from image data, and a controller that controls so as to cut out a screen having a predetermined range including at least a part of a subject corresponding to the feature portion extracted by the extraction device from the image data and display a cut-out screen in a predetermined location on the display device and an area around the extracted subject is displayed separately in a part on the display screen by a small-sized screen. Furthermore, this feature portion is set as the AF area, so that a check of a focus status becomes easy.

Abstract: Optical Projection System and Method for Photolithography. A lithographic immersion projection system and method for projecting an image at high resolution over a wide field of view. The projection system and method include a final lens which decreases the marginal ray angle of the optical path before light passes into the immersion liquid to impinge on the image plane.

Abstract: A microscope digital image acquiring system 1 includes a microscope 2 composed of a microscope unit 10 forming an enlarged image of an object O and a microscope controller 20 controlling movement of the microscope unit 10, an imaging instrument 3 composed of a camera head unit 30 that is attached to the microscope 2 and has an imaging device detecting the enlarged image of the object O and a camera controller 40 that receives a detected signal output from the imaging device and outputs image information of the object O. The microscope controller 20 and the camera controller 40 operate cooperatively in response to control commands sent externally. The system 1 has a connecting cable 52 connecting with both instruments 20 [sic] and 40 to carry out communication with each other. Both instruments 20 [sic] and 40 operate cooperatively by communicating control commands with each other through the connecting cable 52.

Abstract: During use, a plate-form part 5 which is constructed from an optical material and which corresponds to a spectacle lens is positioned in front of the eye of the user which is disposed in the vicinity of the exit pupil P of an image combiner 1. The combiner 1 causes light from an image display element 2 to be superimposed on light that is transmitted through the plate-form part 5 so as to pass through the thickness of the plate-form part 5 from the front of the plate-form part 5, and conducts this light to the eye. The light from the image display element 2 reaches the eye of the user after being diffracted and reflected by a reflective type HOE 6 inside the plate-form part 5. The HOE 6 has a third-order or higher phase conversion action that depends on the position on the hologram plane.

Abstract: A clamp level adjusting apparatus of the invention includes: an image pickup device which has an effective pixel area for producing an image signal and a lightproof area formed around the effective pixel area to produce a black level standard signal; a clamp level calculating section for extracting the black level standard signal from an extracting range of a plurality of horizontal rows in the lightproof area and for producing a clamp level value corresponding to each horizontal row in the effective pixel area based on a vertical moving average value of black level standard signals in the extracting range; and a clamp section for correcting a black level of the image signal based on the clamp level value.

Abstract: A stage device includes a stage and a frame-shaped member that move in three degrees of freedom directions in a two-dimensional plane while floating above a surface plate. The stage also holds an object. First fixed elements and second fixed elements are fitted to the frame-shaped member, and cooperate with first movable elements and second movable elements to generate drive forces to drive the stage in the two-dimensional plane. A reaction force generated by the driving of the stage acts on the first and/or second fixed elements, and causes the frame-shaped member to move in the two-dimensional plane. Because the reaction force caused by the movement of the stage is substantially completely cancelled, and because the movement of a center of gravity of a system including the stage and the frame-shaped member does not occur, no unbalanced load acts on the surface plate.

Abstract: An exposure apparatus exposes a substrate by projecting an image of a pattern onto the substrate via a projection optical system and a liquid that fills a gap between the projection optical system and the substrate. The exposure apparatus has a liquid recovery mechanism with a drive section powered by electric power supplied from a commercial power source and an uninterruptible power source separate from the commercial power source. When the commercial power source has a failure, the supply of electric power to the drive section is switched to the uninterruptible power source.

Abstract: An object of the invention is to shorten the release time lag of an electronic camera. The electronic camera of the invention includes an image pickup section generating image data using light received from an object, a displaying section displaying the image data, a release section, and a shooting mode controlling section. By receiving user operation, the release section is switched from a standby mode to a preparation mode and instructs the image pickup section to prepare for shooting, and is switched from the preparation mode to a shooting mode and instructs the image pickup section to start shooting. The shooting mode controlling section sets the image pickup section to an appropriate mode for moving image photographing when the release section is in the standby mode, and sets the image pickup section to an appropriate mode for still image photographing when the release section is in the preparation mode and before the release section is switched to the shooting mode.

Abstract: An electronic camera includes an imaging unit for continuously capturing images of a subject to create a plurality of frames of RAW data, an evaluation unit for evaluating quality of the RAW data, and a recording unit for selecting a highly evaluated frame from the RAW data according to a result of the quality evaluation by the evaluation unit, and storing the selected frame of RAW data.

Abstract: As a shutter release button is pressed down, a front end portion of a sequence drive lever moves toward the rear side and, as a result, a mirror-up lever is caused to rotate to the right by the force applied from a mirror up spring. In this state, a mirror drive end presses a mirror drive pin upward to raise a main mirror. In addition, a shutter drive end comes in contact with a shutter drive boss at a switching lever to push the shutter drive boss upward, thereby pulling the shutter blades downward. During a reset operation, the front end portion moves to the front side causing the mirror-up lever to rotate to the left. The main mirror is thus lowered. Since the switching lever is caused to rotate to the right with the force applied from a switching lever reset spring, the shutter blades are pulled upward to shield an opening.

Abstract: A three-dimensional structure element having a plurality of three-dimensional structural bodies and capable of being uniformly formed without producing a dispersion in shape of the three-dimensional structural bodies, comprising a substrate (11) and the three-dimensional structural bodies (1) disposed in a predetermined effective area (20) on the substrate (11), the three-dimensional structural bodies (1) further comprising space parts formed in the clearances thereof from the substrate (11) by removing sacrificing layers, the substrate (11) further comprising a dummy area (21) having dummy structural bodies (33) so as to surround the effective area (20), the dummy structural body (33) further comprising space parts formed in the clearances thereof from the substrate (11) by removing the sacrificing layers, whereby since the dummy area (21) is heated merely to approx.

Abstract: An electromagnetic actuator apparatus that utilizes coolant fluid to remove heat generated by the actuator is described. The apparatus includes a solid base plate that is formed to house electrically conductive materials, such as wire loops. The solid base plate is a single piece of material that is formed with embedded channels. The conductive materials are situated within a cavity of the actuator apparatus within which the coolant fluid can flow over and remove heat from the conductive materials. A flow guide having vanes can be inserted into the cavity of an actuator apparatus to guide the flow of coolant fluid to efficiently cool the wire loops. An actuator array that includes multiple actuators is also described.

Abstract: A drive device has movable elements connected to a stage and stationary elements arranged in one predetermined axial direction. The drive device causes the stage to generate drive force parallel to a two-dimensional plane and drives the stage in a direction in the two-dimensional plane and in a direction inclined relative to the two-dimensional plane. The structure above makes it possible to move the stage in the directions in the two-dimensional plane and the inclined plane without employing, as conventionally used, a structure having a two-dimensionally moving stage and a table movable on the stage in the inclined direction, and thus the stage can be formed as a simple integrated body.