Abstract: Charged-particle-beam (CPB) mapping projection-optical systems and adjustment methods for such systems are disclosed that can be performed quickly and accurately. In a typical system, an irradiation beam is emitted from a source, passes through an irradiation-optical system, and enters a Wien filter (“E×B”). Upon passing through the E×B, the irradiation beam passes through an objective-optical system and is incident on an object surface. Such impingement generates an observation beam that returns through the objective-optical system and the E×B in a different direction to a detector via an imaging-optical system. An adjustment-beam source emits an adjustment beam used for adjusting and aligning the position of, e.g., the object surface and/or the Wien's condition of the E×B. The adjustment beam can be off-axis relative to the objective-optical system. For such adjusting and aligning, fiducial marks (situated, e.g.

Abstract: A point diffraction interference measuring method comprises forming a substantially ideal spherical wave by using a point light source-generating unit 101, 102, allowing a light flux composed of the spherical wave to pass through a test sample 109, thereafter dividing the light flux into two light fluxes by using an optical path-dividing element 105, allowing one light flux of the divided light fluxes to pass through a pinhole 129 to covert the one light flux into a reference light beam which is a substantially ideal spherical wave, and detecting interference fringes generated by causing interference between the reference light beam and a measuring light beam which is the other light flux of the divided light fluxes. The wavefront aberration of the test sample can be measured by observing the interference fringes without being affected by the disturbance which would be otherwise caused by any system vibration or the like.

Abstract: Methods and apparatus for controlling the boiling temperature of a fluid within a heat pipe are disclosed. According to one aspect of the present invention, a method for controlling a temperature associated with a heat pipe that contains a fluid and has an evaporator end includes measuring the temperature associated with the heat pipe and determining when the temperature associated with the heat pipe is at a desired level. The method also includes changing a pressure within the heat pipe when it is determined that the temperature associated with the heat pipe is not at a desired level. Changing the pressure within the heat pipe causes the temperature associated with the heat pipe to change.

Abstract: an image file processing method adopted in an image file processing apparatus, includes steps for: inputting from the outside an image file containing at least color information corresponding to each of pixels defined by a color space used in the image file, a color space identification tag indicating whether or not the color space used in the image file is a first color space and a color space information tag providing color space information related to the color space used in the image file; making a decision as to whether or not the color space used in the image file is the first color space based upon the color space identification tag; and referencing the color space information tag in the image file if the color space used in the image file is determined not to be in the first color space.

Abstract: An exposure method and apparatus illuminates a pattern of a mask with illumination light to transfer an image of the pattern onto a substrate via a projection optical system. At least a part of the pattern on the mask has a longitudinal direction extending in a first direction. The method and apparatus set a first incident angle range in the first direction of the illumination light illuminated onto the mask to be wider than a second incident angle range in a second direction orthogonal to the first direction of the illumination light illuminated onto the mask.

Abstract: An electronic camera of the present invention has an image pickup part, an ambient light calorimetric part, an operation member, a colorimetric calculation part, and a white balance adjustment part. The image pickup part captures an optical image through a photo-taking lens to generate color image data. The ambient light colorimetric part measures color of ambient light without passing through the photo-taking lens. The operation member receives an instruction for the calorimetric timing of ambient light from a user. The calorimetric calculation part obtains the calorimetric result from the ambient light colorimetric part in synchronization with the colorimetric timing, and calculates and stores color gain bringing the colorimetric result near to achromatic color. The white balance adjustment part performs white balance adjustment of image data in accordance with the stored color gain. The structure of the electric camera like this allows preset white balance to be executed in freer timing.

Abstract: A zoom lens system for an microscope comprises, in the following order from the object side, a first lens group having a positive refractive power, a second lens group having a negative refractive power, a third lens group having a positive refractive power, and a fourth lens group having a positive refractive power. Magnification of the zoom lens system is varied by moving the second lens group and the third lens group.

Abstract: A color image sensor has a first, second, and third color component pixels. The third color component pixel includes more intensity information than the first and second color component pixels. A difference estimating section estimates difference in a signal level exerted on a pixel signal of the third color component pixel, using the pixel signal of a pixel peripheral to the third color component pixel. A correcting section corrects the pixel signal of the third color component pixel on the basis of the estimated difference. Accordingly, when the third color component is green in a Bayer array, a pixel signal of a green pixel in a row of red pixels becomes equal to the pixel signal of a green pixel in a row of blue pixels. Therefore, line crawling can be suppressed without smoothing an image.

Abstract: The preparation apparatus 4 determines the target distribution of the amount of polishing on the basis of the film thickness of the wafer 2 measured by the measuring apparatus 3. The preparation apparatus 4 assumes a control program for the purpose of controlling the polishing apparatus 1, and predicts the distribution of the amount of polishing that is obtained after the wafer 2 is polished by the polishing apparatus 1 in accordance with the assumed control program. In this case, the amount of polishing in individual partial regions of the polished surface of the wafer 2 is predicted using an indicator that indicates the height distribution of the polishing surface of the polishing pad 14 (when no pressure is applied to this polishing pad) as one parameter. The preparation apparatus 4 judges the acceptability of the assumed control program by comparing the predicted distribution of the amount of polishing and the target distribution of the amount of polishing.

Abstract: The object of the present invention is to provide a digital camera system capable of transmitting image information suitable for the purpose of image usage in a peripheral. Special information in connection with an application program used in the peripheral is output to a digital camera, an image data processed in the digital camera on the basis of the special information is output to the peripheral, and the peripheral executes the application program by inputting the processed image data into the application program. The special information is the size of a character, the number of colors, resolution, and the like used in the application program.

Abstract: A flash control device has selectable two light emission modes. The first light emission mode causes a remote flash part to perform a light emission with a main light emission of a master flash part. The second light emission mode causes a remote flash part to perform a light emission with a pulse light emission (communication light emission) of the master flash part. Light emission indication of the communication light emission is transmitted at a timing preceding the main light emission by a predetermined wait time period. When the main light emission is performed within a predetermined light-emission start time period after the shutter is released, the flash control device automatically selects the first light emission mode, and selects the second light emission mode otherwise. Accordingly, when performing a rear synchronous photographing operation, the remote flash part can be effectively prevented from mistakenly performing a light emission.

Abstract: An optical system comprises an optical member which is made of a crystal belonging to a cubic system and which is disposed along an optical axis which forms a predetermined angle between the optical axis and a direction of gravity, wherein the optical member is disposed such that a crystal axis [100] (or a crystal axis which is equivalent to the crystal axis [100]) of the crystal substantially coincides with the optical axis.

Abstract: A defect inspection apparatus for inspecting a defect of a substrate as an object to be inspected comprises an illumination optical system for illuminating the substrate, a receiving optical system for receiving diffracted light from the substrate and a polarizing element provided in either one of the illumination optical system or the receiving optical system.

Abstract: An exposure apparatus radiates an exposure light beam from an exposure light source onto a reticle via an illumination optical system including a first fly's eye lens, a second fly's eye lens, a lens system, a blind, and a condenser lens system, and it projects an image of a pattern on the reticle onto a wafer via a projection optical system. An illumination characteristic is measured by using an evaluation mark plate on a reticle stage and a spatial image-measuring system provided for a wafer stage. The states of the second fly's eye lens and the lens system are adjusted by the aid of a driving unit on the basis of the measured value. A concentration filter plate, which is formed with a pattern of a predetermined transmittance distribution, is rotatably arranged in the vicinity of a conjugate plane with respect to an image plane between the second lens system and the blind. The angle of rotation of the concentration filter plate 51 is controlled so that the uneven illuminance is corrected.

Abstract: An image processing unit, electronic camera, and image processing program have low probability of failure and high probability of success in white balance adjustment. The image processing unit includes: a first setting unit setting a value of a first adjusting parameter for white balance adjustment applied to an image of a subject; a calculation unit calculating a deviation in the balance of a color signal when an area of the image detected by achromatic color detection is subjected to white balance adjustment with the first adjusting parameter; and a second setting unit setting the as-is value of the first adjusting parameter as a second adjusting parameter when the deviation is equal to or more than a threshold value, correcting the value of the first adjusting parameter in a direction of reducing the deviation and setting it as the second adjusting parameter when the deviation is less than the threshold value.

Abstract: Prior to a photographing operation, an image blur quantity indicating the extent to which the image becomes blurred during the photographing operation is calculated based upon an image-capturing sensitivity having been set, and a decision is made as to whether or not the image-capturing sensitivity needs to be adjusted based upon the calculated image blur quantity. If it is decided that the sensitivity level needs to be adjusted, the image-capturing sensitivity is adjusted and the photographing operation is executed at the shutter speed calculated based upon the adjusted image-capturing sensitivity.

Abstract: New and improved scanning device and corresponding method that include and involve a movable stage on which a specimen is positioned, irradiation means which irradiates an electron beam onto an irradiation region of the specimen, secondary beam detection means used in generating a picture of the irradiation region by detecting a secondary beam which consists of at least one of secondary electrons or reflected electrons from the irradiation region of the electron beam, an imaging electron optical system which causes imaging of the secondary beam on a detection surface of the secondary beam detection means, and which is arranged between the specimen and the secondary beam detection means.

Abstract: Either of two power off modes can be selected in a digital camera that reads out images from an image-capturing element, temporarily stores them in a buffer memory and then transfers and records the images from the buffer memory into a recording medium. In a first power off mode, the supply of stabilized power is stopped in response to a main switch off operation only after unrecorded images present in the buffer memory are all recorded into the recording medium. In a second power off mode, the supply of the stabilized power is stopped immediately in response to a main switch off operation regardless of whether or not there are yet-to-be recorded images present in the buffer memory. The power is cut off in conformance to the current power off mode setting when the main switch is turned off.

Abstract: A grindstone 1 has a pedestal 2 and an abrasive-grain layer 9 provided on the pedestal 2. The abrasive-grain layer 9 is a plating film which contains abrasive grains. An intermediate layer 7 which has physical properties different from those of the abrasive-grain layer 9 is provided between the abrasive-grain layer and the pedestal. The intermediate layer 7 is a plating film which contains abrasive grains, and the plating film of this intermediate layer 7 has a color tone different from the color tone of the plating film of the abrasive-grain layer 9. As being so made up, in the grindstone having an abrasive-grain layer formed of a plating film as a binder, the grindstone lifetime can be judged with ease.

Abstract: A microscope system according to the present invention comprises a stage on which a specimen is placed, an image forming optical system that forms an image of the specimen placed on the stage, an image-capturing device that captures the image of the specimen formed by the image forming optical system, a focused position detection device that detects a focused position for the specimen based upon the specimen image captured by the image-capturing device and a focused position storage device that stores in memory the focused position detected by the focused position detection device. The focused position detection device sets a search range centered around the focused position stored in memory at the focused position storage device and detects the focused position anew by causing the stage and the image forming optical system to move relative to each other over the search range thus set each time a focusing operation is executed.

Abstract: A method for manufacturing an optical member of a fluoride crystal includes: a growing step of growing an ingot of a fluoride crystal; a cutting-out step of cutting out from the ingot a cylindrical basic material with two parallel planes which have a certain crystal plane orientation; an orientation-determining step of determining a crystal orientation of a side surface of the cylindrical basic material; a birefringence-measuring step of measuring birefringence in a specific crystal axis direction at the side surface determined based on the crystal orientation determined in the orientation-determining step; and an evaluating step of evaluating the fluoride crystal on the basis of a result of measurement of the birefringence. A fluoride crystal is obtained in which a maximum value of birefringence in a specific crystal axis direction at a side surface is not more than 10 nm/cm at a measurement wavelength of 633 nm.

Abstract: A target for surveying includes: a reference point and at least one first light emitting body disposed on a vertical line passing through the reference point; and at least one second light emitting body disposed on a horizontal line passing through the reference point and achieving light emitting characteristics different from the light emitting characteristics of the first light emitting body.

Abstract: A first image sensor receiving light from a subject and a second image sensor capable of receiving light of the same image as the first image sensor and having a spectral sensitivity characteristic different from that of the first image sensor are provided. A color-correcting coefficient determining part calculates, based on each output value photoelectrically converted in the first and the second image sensors, a color-correcting coefficient with which a color-correcting part performs color correction on the output value of the first image sensor. Using the first and the second image sensors of different spectral sensitivity characteristics, parameters for receiving/recognizing light from a subject field can be easily increased to obtain a favorable color reproduction characteristic.

Abstract: A shading correction circuit of the present invention includes an image pickup device having photo detectors arranged on its receptive surface, and a shading correction part for performing shading correction on an output signal of the image pickup device. The image pickup device has an effective pixel area and an upper optical black part. The shading correction part has a correction coefficient generating part and a correction processing part. The correction coefficient generating part thereof extracts shading variation according to an output of the upper optical black part, and generates a correction coefficient for the shading variation. The correction processing part thereof performs shading correction on an image signal by using the correction coefficient generated by the correction coefficient generating part.

Abstract: An exposure apparatus and method to expose an object with an illumination beam irradiated on a mask from a light source disposes an optical unit between the light source and an optical integrator of an illumination optical system to illuminate the mask with an illumination beam, of which an intensity distribution on a Fourier transform plane with respect to a pattern on the mask has an increased intensity portion apart from the optical axis relative to a portion of the intensity distribution on the optical axis.

Abstract: Guide numbers tgn1, tgn2 as expected light amounts of a main flashlight and a remote flashlight are added for the calculation of an expected illumination amount of each divided photometric region. If there is an over-illuminated region, among the divided photometric regions, in which the expected illumination amount exceeds a proper illumination amount for a subject, the guide numbers tgn1 and tgn2 are decreased such that of the two flashlights, the one illuminating the over-illuminated region more is given a larger decrease. In this manner, guide numbers gn1, gn2 for main flash of the main flashlight and the remote flashlight are calculated so as to adjust the expected illumination amount of the over-illuminated region to a proper value.

Abstract: An image-processing device of the invention can appropriately correct a gradation of an image to be processed in accordance with the image. Thus, it divides the image into plural small areas; generates image information indicating a characteristic of the image for each small area; determines an evaluation value indicating luminosity of each pixel constituting the image, according to the image information generated for each small area and image information generated for each of adjacent small areas to the each small area; and performs an image processing on each pixel of the image according to the determined evaluation value. A digital still camera of the invention can appropriately correct a gradation of an image created by shooting in accordance with the image. Moreover, an image-processing program and an image-processing method of the invention realize appropriate gradation correction in accordance with an image to be processed.

Abstract: An exposure apparatus and method to expose an object with an illumination beam irradiated on a mask from a light source disposes an optical unit between the light source and an optical integrator of an illumination optical system to illuminate the mask with an illumination beam, of which an intensity distribution on a Fourier transform plane with respect to a pattern on the mask has an increased intensity portion apart from the optical axis relative to a portion of the intensity distribution on the optical axis.

Abstract: A scanning exposure apparatus exposes a sensitive substrate by projecting a pattern formed on a mask onto the sensitive substrate while moving the substrate. The apparatus includes a projection system, a stage system, a first detector and a control system. The projection system is disposed in a path of an exposure beam and projects a pattern image onto the substrate. The stage system is disposed on an image plane side of the projection system, and has first and second stages, each of which is movable independently in a plane while holding the substrate. The first detector detects focusing information of a vicinity of an outer circumference of the substrate during a detecting operation. The control system controls the stage system to perform the detecting operation with the first stage, while performing a first exposure operation with the second stage, the substrate held by the second stage being exposed in the first exposure operation.

Abstract: A CPU calculates integrating values of image-capturing signals in a band 1 obtained by removing through a band pass filter a low frequency component of image-capturing signal output from an image-capturing device and integrating values of the image-capturing signals in a band 3 retaining the low frequency component intact, each calculated in correspondence to one of a plurality of lens positions. The CPU then obtains focal point evaluation values based upon these integrating values in correspondence to the individual bands. In addition, when it is judged that the image-capturing signals are saturated, the CPU calculates a new evaluation value parameter 1 history record=(focal point evaluation value history record in band 3−focal point evaluation value history record in band 1). The CPU then determines a new evaluation value parameter 1 history record extremal value through a 3-point interpolation operation and calculates a lens position corresponding to the extremal value.

Abstract: The optical member used in an actual-use wavelength region in the infrared region has a substrate 11 and an optical thin film consisting of a plurality of layers that are formed on the substrate 11. The film forming apparatus comprises an optical monitor 4 which measures the spectroscopic characteristics in a specified wavelength region in the visible region, an optical monitor 5 which measures the spectroscopic characteristics in a specified region in the infrared region, and an actual-use wavelength region optical monitor which measures the spectroscopic characteristics in the actual-use wavelength region. The film thicknesses of the respective layers that are formed are determined on the basis of the spectroscopic characteristics measured by either the monitor 4 or monitor 5, and the set film thickness values of layers that have not yet been formed are adjusted on the basis of these film thicknesses.

Abstract: An exposure apparatus and method to expose an object with an illumination beam irradiated on a mask from a light source disposes an optical unit between the light source and an optical integrator of an illumination optical system to illuminate the mask with an illumination beam, of which an intensity distribution on a Fourier transform plane with respect to a pattern on the mask has an increased intensity portion apart from the optical axis relative to a portion of the intensity distribution on the optical axis.

Abstract: A mark position detection apparatus has an illumination optical system for illuminating a measurement mark with illumination light and an imaging optical system for converging light reflected from the measurement mark to form an image of the measurement mark on an image pickup apparatus. The mark position detection apparatus measures a positional displacement of the measurement mark by processing an image signal obtained by the image pickup apparatus. The mark position detection apparatus has an optical element provided in the illumination optical system for compensating a difference in asymmetry of the image signal that depends on the wavelength of the illumination light.

Abstract: Electron microscopes (e.g., scanning electron microscopes, mapping SEMs) are disclosed in which the amount of charging of the specimen is controlled to between a minimum amount needed to view an image and a maximum amount beyond which a viewable image cannot be obtained, and such that the image has low distortion and the specimen is not damaged. Multiple irradiation-electron beams, or multiple segments of a single irradiation-electron beam, are directed to a specimen surface. The irradiation beams (or segments) are decelerated by a retarding voltage applied by a cathode lens and are incident on the specimen surface. The respective current and incident energy of each irradiation beam (or segment thereof) are controlled independently to a predetermined relationship so as to impart predetermined amounts of charging to different insulator regions of the specimen.

Abstract: A CPU calculates integrating values of image-capturing signals in band 1 obtained by removing a frequency component equal to or lower than a first cutoff frequency from an image-capturing signal output from an image-capturing element through a band pass filter and integrating values of an image-capturing signal in band 2 obtained by removing a frequency component equal to or lower than a second cutoff frequency through a band pass filter, each in correspondence to one of a plurality of lens positions. The CPU then calculates focal point evaluation values by using these integrating values in correspondence to the individual bands. In addition, when the largest evaluation value in band 1 is judged to correspond to the closeup end position of the lens, the CPU makes a decision as to whether or not a focus match is achieved at the closeup end.

Abstract: An imaging apparatus includes a connector that is directly connectable to a bus of an information processing apparatus that is separate from the imaging apparatus. This enables the set-up of the various parameters of the imaging apparatus to be performed rapidly while the imaging apparatus is directly electrically connected to the bus of the information processing apparatus, which can be, for example, a personal computer. The connector is coupled to a controller of the imaging apparatus. The imaging apparatus can also include a photographic lens and a photoelectric converter arranged relative to the photographic lens to receive light focused by the photographic lens. The photoelectric converter outputs an image signal of an object based on the image formed by the photographic lens. The controller is coupled to the photoelectric converter to control the imaging apparatus. According to one embodiment, the connector is a Personal Computer Memory Card International Association-conforming connection terminal.

Abstract: This position measuring device comprising a calculation unit 19 calculates mark position information relating to the position of the mark by using a mark signal obtained by irradiating a detection beam onto the mark formed on an object W, and a correction device 19 for correcting the calculation results from the calculation unit 19 based on the asymmetry of the mark signal.

Abstract: An optical device for a photolithography apparatus comprises a lens formed of a fluoride crystal material, a holder holding the lens, and a pressing member attached to the holder and pressing the lens to generate a stress in the lens. The stress can be generated in the lens by pressing the lens in a specified orientation with the pressing member to reduce the birefringence of the lens. When the lens is composed of a calcium fluoride crystal, the maximum value of the birefringence amount with respect to a light beam having a wavelength of about 157 nm can be made not more than 2.0 nm/cm within an effective aperture (light-transmitting area) of the lens, or the maximum value of the birefringence amount with respect to a light beam having a wavelength of about 193 nm can be made not more than 1.0 nm/cm within the effective aperture of the lens.

Abstract: A control system for the adjustment and calibration of electromagnetic devices, such as E-I core electromagnetic devices, using adaptive gain adjustment. A controller is provided with an input current and an output force and provides an output signal indicative of a force gain estimate, wherein the force gain estimate is the ratio of the output force to the input current.

Abstract: When a reticle stage capable of moving while holding a reticle is at a predetermined unloading position, an unloading arm performs unloading of a reticle. Also, the instant or immediately after the reticle is separated from the reticle stage by the unloading arm, the reticle stage is moved to a predetermined loading position where a reticle is loaded onto the reticle stage by a loading arm. This allows the reticle to be loaded onto the reticle stage before the unloading arm completely withdraws from the unloading position, which reduces the downtime between the retile unloading and the reticle loading. Accordingly, the throughput of the exposure apparatus can be improved, since the time required for reticle exchange is reduced.

Abstract: An object is to provide a vibration reduction (VR) zoom lens system having high optical performance and compactness suitable for an SLR camera, a video camera and the like. The zoom lens system includes, in order from an object, a first lens group having positive refractive power, a second lens group having negative refractive power, a third lens group having positive refractive power, a fourth lens group having negative refractive power, and a fifth lens group having positive refractive power. All distances between adjacent lens groups are moved upon zooming from a wide-angle end state to a telephoto end state. The third lens group includes a plurality of lenses including a cemented lens constructed by a negative lens cemented with a positive lens. Only the cemented lens is used as a vibration reduction lens shifting substantially perpendicularly to the optical axis for correcting camera shake. Given conditional expressions are satisfied.

Abstract: An exposure apparatus includes a projection optical system, which projects an image of a pattern of a mask onto a substrate, and a substrate stage which holds the substrate and positions the substrate in both first and second intersecting directions. The apparatus also includes first and second interferometers which respectively detect positions in the first and second directions of the substrate stage, and a temperature-control device having first, second, and third blower outlets to supply temperature-controlled gas to an optical path of a measurement beam of the first interferometer, to an optical path of a measurement beam of the second interferometer, and onto the substrate, respectively.

Abstract: A used viewfinder determination section determines whether an optical viewfinder is being used or if a liquid crystal monitor is being used, based upon signals from an eye approach detection section. A blur correction operation changing section changes a blur correction operation by a blur correction lens in accordance with determination results from the used viewfinder determination section. When it is determined that the optical viewfinder is not being used, a blur correction operation using the blur correction lens is not carried out.

Abstract: An image reading device includes a document reader that reads an image of a document, and a controller. The controller performs prescanning of the document with the document reader, and performs at least one of: (i) generating a preview image of the document, and (ii) determining a reading condition of the document. The controller receives a reading resolution to be used during main scanning. When the reading resolution for use during main scanning is higher than a reading resolution used for prescanning, the controller causes the main scanning of the document, and outputs a main scanning image of the document. When the reading resolution to be used during main scanning is not greater than the reading resolution used for prescanning, the controller, instead of causing main scanning, outputs an alternative image that is based on the read image obtained from the prescanning.

Abstract: An electronic camera comprises an image-capturing element; a recording device that records image data constituted of image capturing signals output from the image-capturing element into a data recording medium; a frame number calculating device that calculates a number of frames of image data that have been recorded or can be recorded into the data recording medium; a display device at which the number of frames is displayed; and a control device that controls the display device so as to display at least the number of frames when a main switch is in an OFF state.

Abstract: A method for focus adjusting through which a subject image formed with a photographic optical system is captured by an image-capturing device and a focus match position for the photographic optical system is calculated based upon focus evaluation values calculated by using image-capturing signals includes steps for: obtaining focus evaluation values over first sampling increments in a focus adjustment range of the photographic optical system; making a decision as to whether or not a sampling position corresponding to a largest value among the focus evaluation values obtained over the first sampling increments is substantially at an end point of the focus adjustment range; obtaining focus adjustment values over second sampling increments smaller than the first sampling increments in a range that contains the end point and is smaller than the focus adjustment range if the sampling position corresponding to the largest value among the focus evaluation values is at the end point of the focus adjustment range; and

Abstract: An electronic camera includes an image-capturing element that captures a subject image and outputs image-capturing signals each corresponding to a pixel; and a control device that executes gradation correction on the image-capturing signals output by the image-capturing element.

Abstract: A digital camera system capable of operating by detecting a feature point, which has not been accomplished, in addition to ordinary functions of a conventional camera is provided. According to an aspect of the present invention, a digital camera system includes a detecting means that detects a given feature point from an image data, a receiving means that receives an order from a user, a selecting means that selects each feature point in accordance with a given order instructed by the receiving means when a plurality of feature points are detected, and a display that displays feature point information identifying the feature point selected by the selecting means.

Abstract: A microactuator array includes a plurality of first terminals equal in number to a first number, a plurality of second terminals equal in number to a second number, and a plurality of microactuators equal in number to the product of the first number and the second number. Each microactuator comprises a fixed electrode and a movable electrode which is movable with respect to the fixed electrode by electrostatic force. Each first terminal is electrically connected to fixed electrodes of microactuators equal in number to the second number. Each second terminal is electrically connected to movable electrodes of microactuators equal in number to the first number. The first terminals are not connected to any of the second terminals.

Abstract: Methods and apparatus for enabling both isolated and dense patterns to be accurately patterned onto a wafer are disclosed. According to one aspect of the present invention, an illumination system that is suitable for use as a part of a projection tool includes an illumination source and an illuminator aperture. The illuminator aperture has a center point and an outer edge, and also includes a first pole and a second pole. The first pole is defined substantially about the center point, and the second pole is defined substantially between the first pole and the outer edge of the first pole. The illumination source is arranged to provide a beam to the illuminator aperture.