Abstract: A method that adjusts an optical apparatus that guides a radiation from a first surface to a second surface includes a number of steps, for example. A first step measures an aberration of the optical apparatus having a plurality of optical elements and at least one correction element. A second step calculates, based on a measurement result of the first step, a surface shape that the correction element should have, the aberration of the optical apparatus being a predetermined value when the correction element has the surface shape that the correction element should have. A third step removes the correction element from the optical apparatus and machines the correction element so that the surface shape of the correction element coincides with the surface shape calculated in the second step. A fourth step returns the correction element machined in the third step into the optical apparatus.

Abstract: This invention provides an in-vehicle computer system that makes it easy to handle an image data taken with a digital camera in a vehicle and the like. For example, a print order of an image data can be placed from a vehicle and a print can be picked up at a vehicle stopover location when the vehicle stops over. The vehicle is navigated toward a location where to be able to pick up the print. In a case of a rental vehicle, a print can be picked up when returning the vehicle. Furthermore, handling an image data in a vehicle is configured to have no effect on a safety drive. For example, when an in-vehicle computer communicates with an external computer, data necessary to drive a vehicle is delivered in preference to an image data. An operation to connect a digital camera and an in-vehicle computer is made easy. But, an operation of handling an image data at the wheel is configured to be impossible.

Abstract: A vibration correcting optical device includes: a vibration detection unit that detects a vibration of the vibration correcting optical device and outputs a vibration detection signal corresponding to the vibration; a vibration state judgment unit that judges a state of the vibration of the vibration correcting optical device to be one of at least three states, based upon the vibration detection signal; an image vibration correcting optical system that corrects an image vibration caused by the vibration of the vibration correcting optical device; a drive unit that drives the image vibration correcting optical system based upon a drive signal; a drive signal arithmetic operation unit that calculates the drive signal based upon the vibration detection signal and outputs the drive signal to the drive unit; and a drive signal calculation control unit that controls a method for calculating the drive signal adopted at the drive signal arithmetic operation unit in conformance to the state of the vibration ascertaine

Abstract: A flash apparatus operates on power supplied from internal batteries and an external battery in an auxiliary battery apparatus. A battery check is executed by detecting the charge speed at which a main capacitor is charged and comparing the charge speed with a threshold value. The threshold value is set higher when the auxiliary battery apparatus is mounted than the threshold value set when the auxiliary battery apparatus is not mounted. Thus, an accurate battery check reflecting the presence/absence of the auxiliary battery apparatus can be achieved.

Abstract: If after manufacture it is found that the thickness of a solid immersion lens is less than a target thickness value, an adjustment portion is adhered thereto by vapor deposition so as to reduce the amount of thickness deficiency. If the solid immersion lens is made of quartz glass, SiO2 is used as the material which is vapor deposited. If the thickness of the solid immersion lens is greater than the target value, then it is reduced by etching.

Abstract: An information processing device converts images to image data and records the image data to a recording medium. The device includes a selector, an arrangement adjuster and an output. The selector selects desired image data to be output to a printing device from among the image data recorded in the recording medium. The arrangement adjuster adjusts an arrangement of the image data when there is image data of more than one image selected by the selector. The output outputs the plurality of image data arranged by the arrangement adjuster to the printing device. The plurality of image data can be, for example, continuously shot image data.

Abstract: The movable part 21 is fastened to the substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable part 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror 12 which advances into and withdraws from the light path is disposed on the movable part 21. As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.

Abstract: A pattern arranged on an object is sequentially transferred onto a wafer arranged on an image plane side of a projection optical system so as to form a matrix shaped first area, which is made up of a plurality of divided areas, and in the periphery of the first area an overexposed second area is formed. And, a formed state of an image of the pattern in a plurality of divided areas is detected by an image processing method such as contrast detection. In this case, since the overexposed second area is located on the outer side of the first area, the borderline of the divided areas in the outermost section of the first area and the second area can be detected with a good S/N ratio, and the position of other divided areas can be calculated with substantial precision, with the borderline serving as datums. Accordingly, the formed state of the pattern image can be detected in a short period of time.

Abstract: Image-capturing signal lines through which image-capturing signals are output from an image-capturing element include separate lines, i.e., an image-capturing signal line corresponding to G color and an image-capturing signal line corresponding to R color and B color. The level of the G color image-capturing signal is adjusted at a first gain circuit, whereas the levels of the image-capturing signals corresponding to R color and B color are adjusted at a second gain circuit.

Abstract: A picture image input method includes inputting a picture image of an object as a picture image signal. A histogram of a frequency with respect to brightness information of the picture image signal is created. A first brightness is created, which is a maximum brightness value within a region not greater than a first frequency value on a low brightness side of a brightness value which is lower by the a preset amount than the maximum brightness value within the histogram. A brightness group on a low brightness side of the first brightness side in the histogram is detected. A substantially maximum brightness value in the brightness group is set as a highlight point of the object. A gradation conversion table is created, which converts gradations of the picture image signal on the basis of the highlight point.

Abstract: The imaging device according to the present invention can alter characteristics of gradation conversion depending on a variety of subjects and thus perform optimum gradation conversion. To this end, the imaging device according to the present invention includes an imaging part which picks up a subject image via a photo-taking lens to generate image data, a gradation conversion part which performs gradation conversion of the image data generated by the imaging part, and an obtaining part which obtains subject information containing at least one of a focal length of the photo-taking lens and an object distance of the subject, in which the gradation conversion part alters the characteristic of the gradation conversion depending on the subject information obtained by the obtaining part when performing the gradation conversion.

Abstract: An exposure apparatus with optimum illumination conditions without dependence on the directionality of the fine pattern on a reticle comprises an illumination optical system for illuminating a reticle having a pattern to be transferred and a projection optical system for projecting and transforming the reticle pattern on a substrate. The illumination optical system has pupil shape forming unit for forming four substantially planar light sources on the plane in the vicinity of its pupil. These four substantially planar light sources are arranged at each substantial vertices of a narrow rectangle whose barycenter is located on the illumination optical axis.

Abstract: The electronic camera has a release switch, an image pickup part, an extraction processing part, and an image composition part. The image pickup part performs continuous shooting according to an operation to the release switch to generate data of plural images in a multi-shooting mode. The extraction processing part changes an extracting rate according to the number of images generated and extracts data of a predetermined number of images from the generated data. The image composition part arranges the extracted image data to generate a composite image. Therefore, when the predetermined number of images are extracted at such intervals that intervals at which the images have been shot become substantially uniform, the first and last frame images in the composite image will coincide with ones which have been shot at the beginning and end of the continuous shooting. That is, the total shooting time can be arbitrarily set.

Abstract: Reduced-pressure (“vacuum”) chambers, and microlithographic exposure systems including one or more of such chambers, are disclosed. The vacuum chamber exhibits reduced deformation of a bulkhead of the chamber during evacuation of the chamber during a change in pressure differential across the bulkhead. A secondary wall is situated relative to the bulkhead outside the chamber and at a gap distance from the bulkhead, so as to form a secondary reduced-pressure chamber in the gap. The secondary reduced-pressure chamber is isolated from the pressure outside the chamber and from the subatmospheric pressure inside the chamber. The differential between the pressure outside the chamber and the pressure inside the secondary reduced-pressure chamber is exerted on the secondary wall, but has substantially no effect on the bulkhead, thereby reducing deformation of the bulkhead.

Abstract: An image can be read during main scanning under an optimized image reading condition even if dust is attached to a document such as a photographic film or the like, or if there are scratches. A scanner irradiates visible light and infrared light from a light source, and an image of the document is separated into infrared and visible components. These components are detected for pixels of the image by an image sensor. A controller, e.g., of the scanner recognizes defective pixels based on the infrared component. Furthermore, the controller corrects a visible component level in the defective pixel based on the infrared component level of the defective pixel and a reference level obtained where there is no defect, in order to create a histogram. The controller determines image reading conditions such as, for example, an exposure amount (exposure time) for use during main scanning and an LUT gradation conversion characteristic based on this histogram.

Abstract: An exposure apparatus which transfers a pattern image formed on a mask on to a substrate through a projection optical system, comprising a substrate table which holds said substrate, a first sensor which measures a gap between said substrate surface held by said substrate table and a control target position, and a second sensor which measures a distance between said projection optical system and said substrate table in an optical axis direction and corrects the control target position of said first sensor.

Abstract: When the ordinary exposure is performed, a wafer, to which a photoresist is applied by a resist coater, is transported onto a wafer stage of a projection exposure apparatus to perform the exposure, followed by development by a developing apparatus. When the characteristic is evaluated, respective shot areas on the wafer applied with the photoresist are exposed with an image of a predetermined evaluating mark in a narrow area in an effective field of a projection optical system of the projection exposure apparatus. The characteristic of the resist coater or the developing apparatus is evaluated by detecting a state of a resist pattern after the development. When the image formation characteristic of the projection exposure apparatus is evaluated, the wafer is exposed with images of a plurality of predetermined evaluating marks in a wide area in the effective field.

Abstract: A high exposure accuracy is obtained while mitigating the influence of vibration by using an exposure method and an exposure apparatus. Columns (59A, 59B) are installed on a base plate (12), a reticle base (62) is supported at the inside of the columns (59A, 59B) by the aid of variable mount sections (61A, 61B) having high rigidity, a finely movable stage (63) is movably placed on the reticle base.. (62) by the aid of air bearings, and a reticle (R1) as an exposure objective is placed on the finely movable stage (63). A coarsely movable stage (64) is hung on a bottom surface of a support plate (66) arranged over the reticle base (62) in a state capable of being driven in a scanning direction. The finely movable stage (63) is driven by the coarsely movable stage (64) in the scanning direction in a non-contact state with respect to the reticle base (62).

Abstract: In an optical amplifying section that includes a specific amplifying medium that may be effected by a giant pulse, light subject to amplifying is continuously incoming, while exciting light is continuously supplied. Therefore, in the specific amplifying medium, the giant pulse is not generated, which allows continuous amplified light to be emitted stably from the specific amplifying medium. Meanwhile, of the light outgoing from the optical amplifying section, a light quantity controlling section controls the light quantity of light proceeding a predetermined optical path to a wavelength conversion section, which controls the light quantity of light outgoing from wavelength conversion section as outgoing light of the light source unit. As a consequence, light with high luminance whose wavelength has been converted can be stably emitted.

Abstract: A print system receives an image file and a print order file from a customer, the image file having an image data area and an order data area. The print system copies information of the received print order file into the order data area of the received image file. The print system produces a print of the image data in the image file according to the information in the order data area of the image file. The print system has a printer capable of producing a print of a predetermined image data provided by a third party as well as that of the image data of the customer. The print system delivers to the customer the print ordered by the customer as well as the print of the predetermined image data. The print system selects a group of orders among all the orders in accordance with the destination of delivery for controlling the printer to give priority to the group of orders in producing the prints.

Abstract: Based on the information about the capability of a first exposure apparatus of correcting the distortion of a first mask transferred a wafer, the image forming characteristics of a second exposure apparatus is adjusted. Therefore, image forming characteristics can be appropriately adjusted (decreasing the correction residual error), considering the distortion of the pattern image of the first mask transferred onto the wafer by the first exposure apparatus. That is, in order to properly transfer the pattern of a second mask onto the wafer by using the second exposure apparatus, the image forming characteristics of the second exposure apparatus are so adjusted that the distortion of the image of the pattern of the second mask is almost the same of that of the first mask. Hence, good image registration is realized.

Abstract: The invention provides a fisheye lens system having an angle of view of 170 degrees or more capable of being used with a plurality of cameras having different image formats in size. The lens system includes a first lens group G1 having negative refractive power disposed to the most object side and a second lens group G2 having positive refractive power disposed to an image side of the first lens group. A distance between the first lens group G1 and the second lens group G2 is variable. The lens system takes the maximum focal length state when the distance is minimum and the minimum focal length state when the distance is maximum. The maximum image height in the maximum focal length state is different from that in the minimum focal length state. In each focal length state, the fisheye lens system has an angle of view of 170 degrees or more.

Abstract: A temperature adjusting unit is attached to a support member supporting a laser interferometer, and a temperature of air sent out of an air sending outlet is measured by a sensor, while a temperature of the support member is measured by a sensor, so that the temperature of the air sent and the temperature of the support member are made to coincide with each other. Thereby, the occurrence of temperature fluctuation in the optical path of detection light of the laser interferometer is suppressed.

Abstract: An object of the present invention is to provide an imaging device which can reliably correct dark current components that locally occur in an imaging sensor, such as those caused by an FDA. The imaging device includes: a storage unit which pre-stores information representing a relation between one of dark current components and an output signal of an optical black pixel arranged in a predetermined optical black area on an imaging sensor, the dark current components being superimposed on pixel signals of effective pixels, respectively, arranged in a predetermined effective pixel area on the imaging sensor; a dark current obtaining unit which obtains dark current components based on both the information stored in the storage unit and output signal of the optical black pixel; and a correcting unit which corrects the dark current components obtained by the dark current obtaining unit according to the pixel signals.

Abstract: A dioptric projection objective for forming an image of an object, includes a plurality of lenses arranged in an optical path between the object and the image. At least two lenses of the plurality of lenses have respective mutually adjacent lens surfaces which are aspheric to define a double asphere, and the plurality of lenses include positive lens groups, each having at least two lenses, and negative lens groups each having at least two lenses. In addition, a dioptric projection objective having an image side numerical aperture that is greater than or equal to 0.75 for forming an image of an object, includes a plurality of lenses arranged in an optical path between the object and the image, with at least two of the lenses of the plurality of lenses having respective mutually proximal lens surfaces which are aspheric to define a double asphere.

Abstract: A predetermined processing operation and an address used to identify and call a next function are provided in each function for performing predetermined data processing. The functions are stored in memory. This enables data processing operations that involve a plurality of different functions to be edited and performed easily and quickly. For example, after image processing function A has been called, image processing function A executes its predetermined process, and subsequently calls image processing function C. Image processing function C executes its predetermined process, and subsequently returns to the former process.

Abstract: A projection type display device includes: a color separation optical system which separates light from a light source into light beams of a plurality of colors; and a plurality of polarization beam splitters, one being provided for each of the light beams of the plurality of colors which have been separated by the color separation optical system.

Abstract: An object is to provide a zoom lens system having compactness of about a normal lens, small number of lens elements, a zoom ratio about 2.9, good productivity, and high optical performance. The system includes, in order from the object, a first lens group with negative power and a second lens group with positive power. Zooming is performed by varying a distance between the first lens group and the second lens group. The first lens group includes at least a negative lens and a positive lens. The second lens group includes a front lens group with positive power and a rear lens group with positive power. The front lens group includes a positive lens and a cemented lens constructed by a positive lens cemented with a negative lens. The rear lens group includes a cemented lens constructed by a negative lens cemented with a positive lens. Given conditions are satisfied.

Abstract: In a collaborating work, it is to provide a digital camera in which camera information about each camera is displayed on a monitor of a master camera and a memory status of each memory card in use is also displayed and further, when monitoring a video from a slave camera, a size of a display screen can be manually set and in a digital camera system at collaborating work, a first digital camera is provided with camera information about each digital camera, a total memory capacity, a total sum of shot-taken frame numbers, a total remaining memory capacity or a display device indicating a total sum of remaining frame numbers. Camera information is information that is required to be set when instructing a shooting work or a storage work or to specify a second digital camera.

Abstract: A flash control device for controlling a slave SB that emits a flash upon receiving an operational instruction via optical communication has a flash emitting part for emitting an optical signal used for the optical communication, and a power supply detecting part detecting the attachment of a power pack. The detection result is transmitted to a camera microcomputer via an SB microcomputer. A communication intensity designating part and a communication intensity determining part decide, based on the detection result received via the camera microcomputer, the intensity of the optical signal to be emitted by the flash emitting part.

Abstract: Devices are disclosed for attenuating vibration transmission between a first mass and a second mass. An embodiment includes a housing defining a chamber configured to be pressurized with a fluid, at least one first pivot element coupled to the housing and the first mass, and at least one second pivot element coupled to the housing and the second mass. Lateral motion of the second mass relative to the first mass results in movement of the housing. Each of the pivot elements can be a diaphragm.

Abstract: The present invention provides an exposure method and exposure apparatus that enable the effects on an apparatus main body of heat generated by a control system to be suppressed when an error occurs in an air-conditioning system or temperature control system. In the exposure apparatus of the present invention, if an error occurs in an air-conditioning system (50) that air-conditions an interior of a chamber (11 to 16) in which an exposure body section (STP) is housed or occurs in a temperature control system (52) that controls a temperature of the exposure body section (STP), a power supply of a control system (53 to 56) that controls the exposure body section (STP) is shut down.

Abstract: When a photographing apparatus that is in a photographing enabled state but, at the same time, in a blur correction disabled state, is expected to be subjected to a shock, e.g., when an flash device in the photographing apparatus is about to be deployed, a blur correcting optical system is held at a constant position over a necessary length of time. In addition, at the start of a photographing operation, the blur correcting optical system is moved to a position at which the optical axis of the photographic optical system and the optical axis of the blur correcting optical system are substantially aligned with each other and the blur correcting optical system is held at the position. As a result, it becomes possible to dispense with a lock mechanism for holding the blur correcting lens and, at the same time, power consumption is reduced.

Abstract: An image stabilization apparatus is adapted, in order to maintain the position of at least one optical member that constitutes an optical system, to control the angle of the at least one optical member relative to the optical axis of the optical system. The image stabilization apparatus comprises fixing means for, when a predetermined event is detected while the aforementioned control is performed, fixing the angle of the at least one optical member to the angle it assumes at the moment said event is detected.

Abstract: A variable focal length lens system realizing compactness and high zoom ratio is provided. The lens system includes four lens groups that are, in order from an object, a first lens group having positive refractive power, a second lens group having negative refractive power, a third lens group having positive refractive power, and a fourth lens group having positive refractive power. When the state of lens group positions varies from a wide-angle end state to a telephoto end state, at least the first lens group is moved to the object such that a distance between the first and the second lens groups increases, a distance between the second and the third lens groups decreases, and a distance between the third and the fourth lens groups varies. An aperture stop is arranged in the vicinity of the third lens group. Given conditional expressions are satisfied.

Abstract: Vibration-attenuation devices and methods are disclosed that utilize a bellows situated between a first and second mass and pressurized with a fluid to an internal fluid pressure substantially equal to a zero-stiffness pressure such that the bellows exhibits a substantially zero lateral stiffness. The devices may include various components configured to measure, regulate, and control the internal pressure of the bellows in order to maintain a desired pressure. The devices may include an active support, such as a secondary bellows or linear actuator, that provides a secondary support force. The active support may be connected to various components configured to measure and control the secondary support force. The vibration-attenuation devices disclosed may be used in a lithography exposure apparatus to attenuate vibrations between: (1) a support frame and a support surface; (2) a base and a stage-supporting platform; and (3) a supporting stage and a wafer stage.

Abstract: A zoom lens system having an exit pupil far away from the image plane, zoom ratio of about three, and in particular having compactness and high optical performance includes, in order from an object, a first lens group having negative refractive power, an aperture stop, a second lens group having positive refractive power, and a third lens group having positive refractive power. When zooming from a wide-angle end state to a telephoto end state, the first and second lens groups are moved and the third lens group is fixed such that a distance between the first lens group and the second lens group varies, and a distance between the second lens group and the third lens group increases. The second lens group is composed of four lenses or less and includes a diffractive optical surface formed on a lens surface except the most object side lens surface.

Abstract: An electronic camera that creates an image file by processing image data obtained through an image-capturing operation, includes: an image-capturing unit that generates the image data by capturing a subject image; a data extraction unit that sets an image plane range corresponding to an image portion of the image data and extracts data of the image portion in the image plane range; a data insertion unit that writes data of a predetermined specific image over the image plane range of the image data and generates data of a processed image; and a file creation unit that creates an image file by storing the data of the processed image into an image data area of the image file, which is referenced as image data and storing the data of the image portion into a non-image data area of the image file which is not referenced as image data.

Abstract: An illumination optical system for illuminating an illumination area on an illumination surface based on a light from a light source has a wavefront dividing type optical integrator and a light source image enlarging member. The wavefront dividing type optical integrator is arranged in an optical path between the light source and the illumination surface which forms a plurality of light source image. The light source image enlarging member is arranged in an optical path between the light source and the optical integrator at or near a position optically conjugate with the illumination surface. The light source image enlarging member enlarges the light source image. The illumination area has a slot shape with a first dimension and a second dimension which is perpendicular to the first dimension and the light source image enlarging member stretches the light source image along the first direction corresponding to the first dimension.

Abstract: For a wafer earlier than a n'th wafer (n≧2) in a lot, a method (and an apparatus) of this invention detects positions of all shot areas, separates a nonlinear component and linear component of each of position deviation amounts, evaluates nonlinear distortion of the wafer based on the position deviation amounts and an evaluation function, and calculates nonlinear components of the position deviation amounts of all shot areas according to a complement function determined based on the evaluation results. On the other hand, for the n'th or later wafer, the method (and the apparatus) calculates position coordinates, of all shot areas, having linear components of position deviation amounts thereof corrected by using EGA, and detects positions of the shot areas based on the position coordinates having linear components thereof corrected and the nonlinear components calculated in the above.

Abstract: Microlithography reticles are disclosed that include a high-contrast reticle-identification code (bar code). The bar code is configured as a pattern (usually linearly arrayed) of high-scattering regions (bar-code elements) each exhibiting a relatively high degree of reflection-scattering of irradiated probe light. The high-scattering regions are separated from one another by respective low-scattering regions each exhibiting a relatively low degree of reflection-scattering of incident probe light. For example, the low-scattering regions have smooth surfaces from which very little probe light is reflection-scattered, wherein each high-scattering region includes multiple scattering features such as line, channels, projections, or the like that provide multiple edges and/or points that reflection-scatter probe light.

Abstract: A reflective type projection optical system has good reflection characteristics with X rays and can correct aberrations well while controlling the size of reflective mirrors. The projection optical system includes six reflective mirrors and forms a reduced image of a first plane onto a second plane. The system includes a first reflective image forming optical system (G1) for forming an intermediate image of the first plane and a second reflective image forming optical system (G2) for forming an image of the intermediate image of the second plane. The first reflective image forming optical system has, in order of an incidence of light from the side of the first plane, a first reflective mirror (M1), an aperture stop (AS), a second reflective mirror (M2), a third reflective mirror (M3), and a fourth reflective mirror (M4).

Abstract: Disclosed is a projection exposure apparatus by a scan-exposure method. The apparatus includes an illuminating means for illuminating a mask transfer region,with illumination light for an exposure through an aperture of a variable field stop disposed in a position substantially conjugate to the mask; a driving means for configuring the aperture of the variable field stop in a rectangular shape (having edges orthogonal to a direction of the scan-exposure) and simultaneously making variable a width of the rectangular aperture of the stop in a widthwise direction (the scan-exposure direction) of the transfer region (pattern forming region) on the mask; and a control means for controlling the driving means to change a width of the rectangular aperture of the variable field stop in interlock with variations in position of the variable field stop on the mask transfer region which varies due to the one-dimensional movements of the mask stage.

Abstract: A thermal treatment apparatus includes a furnace of a refractory, a stage capable of carrying synthetic silica glass and moving between a first stage position for letting the synthetic silica glass into the furnace and a second stage position for letting the synthetic silica glass out of the furnace, a heat generator for heating the synthetic silica glass, and a driving section connected to the stage, for moving the stage between the first stage position and the second stage position. The thermal treatment apparatus also can include a rotational driving section for rotating the stage.

Abstract: In a projection optical system which forms an image of a first plane on a second plane, using extreme ultraviolet illumination light, an object of the invention is to form an image on the first plane on the second plane under suitable conditions. This projection optical system comprises a first diffractive optical element arranged in an optical path between the first plane and the second plane; a second diffractive optical element arranged in the optical path on the side of the second plane from the first diffractive optical element; and an optical system having a negative power, arranged in the optical path between the first diffractive optical element and the second diffractive optical element.

Abstract: A vibration isolation system is provided. A frame is provided. A stage supported by the frame is provided. The stage comprises a stage body supported by the frame, a first isolation stage supported by the stage body, a first stage vibration isolation device that reduces vibrations transferred from the stage body to the first isolation stage, a second isolation stage supported by the first isolation stage, and a second stage vibration isolation device that reduces vibrations transferred from the first isolation stage to the second isolation stage.

Abstract: An image processing device of the present invention includes a color-gamut determining part, a color-space determining part, and a color-space conversion part. The color-gamut determining part determines a color gamut as a range of color distribution from input image data. The color-space determining part determines a color space substantially covering the color gamut determined by the color-gamut determining part. The color-space conversion part converts the input image data into such image data that is rendered in the determined color space. The colors of the subject can thus be reproduced accurately from the converted image data.

Abstract: An autofocus system according to the present invention comprises: a light source; a focusing illumination optical system that forms an optical image generated with light from the light source on a target object through an objective lens; a focusing image forming optical system that receives through the objective lens reflected light generated as the optical image is reflected off the target object and forms a reflected image of the optical image; a photoelectric converter that is provided at an image forming position at which the reflected image is formed by the focusing image forming optical system to detect the reflected image; a signal output device that outputs a signal for controlling a focus actuator based upon a signal corresponding to the reflected image obtained at the photoelectric converter; and an image forming position adjustment device that adjusts an offset quantity between a focus position of the objective lens and an image forming position of the optical image by moving at least one of the im

Abstract: A mark position detection apparatus includes: an illumination unit that illuminates a substrate having a mark formed thereupon; an image-capturing unit that captures an image of the substrate by using reflected light from the substrate and outputs image signals; a storage unit at which information related to fixed pattern noise contained in the image signals output by the image-capturing unit is stored in memory; and a control unit that calculates a position of the mark on the substrate based upon the information related to the fixed pattern noise stored in memory at the storage unit and the image signals output from the image-capturing unit.

Abstract: Charged-particle-beam (CPB) microlithography systems are disclosed that detect displacements of certain components and implement corrective countermeasures to the displacements so that pattern-exposure accuracy and precision are not compromised by the displacements. In an embodiment, displacement sensors and corrective actuators are installed at respective locations in or on the microlithography system. If the displacement sensors detect displacements at the respective locations, corresponding electrical signals produced by the sensors are fed-back or fed-forward to the corrective actuators. Alternatively, the electrical signals are routed directly to a beam-position-control system or routed indirectly to a displacement predictor. The displacement predictor calculates estimates of displacements based on data obtained previously concerning operation of certain displacement-generating components of the system.