Patents Examined by Angel Roman
  • Patent number: 11150584
    Abstract: An image forming apparatus includes: a board; a semiconductor integrated circuit that is provided on the board and has a real-time clock circuit; a radiator that is provided at a position for covering the semiconductor integrated circuit and receives heat from the semiconductor integrated circuit and radiates the heat; and an oscillator that is provided in a space sandwiched between the board and the radiator and vibrates to supply a clock signal to the real-time clock circuit.
    Type: Grant
    Filed: March 5, 2019
    Date of Patent: October 19, 2021
    Assignee: FUJIFILM Business Innovation Corp.
    Inventor: Shimpei Kawashima
  • Patent number: 11152268
    Abstract: A method is provided for area-selective deposition on a semiconductor workpiece using an integrated sequence of processing steps executed on a common manufacturing platform hosting film-forming modules, etching modules, and transfer modules. A workpiece having a target surface of a first material an non-target surface of a second material different than the first material is received into the platform. An additive material is selectively deposited on the workpiece with the additive material forming on the target surface at a higher deposition rate than on the non-target surface, followed by etching to expose the non-target surface. The integrated sequence of processing steps is executed within the platform without leaving the controlled environment and the transfer modules are used to transfer the workpiece between the processing modules while maintaining the workpiece within the controlled environment.
    Type: Grant
    Filed: March 18, 2019
    Date of Patent: October 19, 2021
    Assignee: Tokyo Electron Limited
    Inventors: Robert Clark, Kandabara Tapily, Jason Mehigan
  • Patent number: 11101391
    Abstract: A method for screen printing, including: by using a screen printing apparatus provided with a screen printing plate having an opening part corresponding to a printing pattern, a scraper, and a squeegee, filling a paste supplied on an upper surface of the screen printing plate into the opening part of the screen printing plate by the scraper; and, after that, pushing out the paste to a predetermined position of an object to be printed from the opening part of the screen printing plate by the squeegee to screen-print the paste corresponding to the printing pattern on the object to be printed, wherein the humidity in the screen printing apparatus is adjusted during the screen printing. As a result, by controlling an amount of moisture in the paste on the screen printing plate, a screen printing method is capable of improving the printing property of the paste.
    Type: Grant
    Filed: July 15, 2016
    Date of Patent: August 24, 2021
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Shintarou Tsukigata, Norifumi Takahashi, Hiroyuki Otsuka
  • Patent number: 11101401
    Abstract: Disclosed herein are approaches to fabricating solar cells, solar cell strings and solar modules using roll-to-roll foil-based metallization approaches. Methods disclosed herein can comprise the steps of providing at least one solar cell wafer on a first roll unit and conveying a metal foil to the first roll unit. The metal foil can be coupled to the solar cell wafer on the first roll unit to produce a unified pairing of the metal foil and the solar cell wafer. We disclose solar energy collection devices and manufacturing methods thereof enabling reduction of manufacturing costs due to simplification of the manufacturing process by a high throughput foil metallization process.
    Type: Grant
    Filed: March 13, 2020
    Date of Patent: August 24, 2021
    Assignee: SunPower Corporation
    Inventors: Richard Hamilton Sewell, Gabriela Elena Bunea
  • Patent number: 11094648
    Abstract: A power module includes a base plate, a ceramic insulating substrate bonded on the base plate, and a semiconductor element bonded on the ceramic insulating substrate, wherein a surface of the base plate on a side opposite to the ceramic insulating substrate has a warp with a convex shape, and a linear thermal expansion coefficient ?1 (×10?6/K) of the base plate and a linear thermal expansion coefficient ?2 (×10?6/K) of the ceramic insulating substrate when a temperature decreases in the range of 25° C. to 150° C. satisfy the following Expression (1).
    Type: Grant
    Filed: July 30, 2018
    Date of Patent: August 17, 2021
    Assignee: DENKA COMPANY LIMITED
    Inventors: Hideki Hirotsuru, Yoshitaka Taniguchi, Kohki Ichikawa, Atsushi Sakai
  • Patent number: 11088028
    Abstract: In an embodiment, a method of forming a semiconductor device includes forming a fin protruding above a substrate; forming a gate structure over the fin; forming a recess in the fin and adjacent to the gate structure; performing a wet etch process to clean the recess; treating the recess with a plasma process; and performing a dry etch process to clean the recess after the plasma process and the wet etch process.
    Type: Grant
    Filed: June 3, 2019
    Date of Patent: August 10, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Che-Yu Lin, Chien-Wei Lee, Chien-Hung Chen, Wen-Chu Hsiao, Yee-Chia Yeo
  • Patent number: 11069603
    Abstract: A semiconductor device includes: a first electrode terminal; a second electrode terminal; a semiconductor element having an electrode on one surface connected to one surface of the first electrode terminal; a wire that connects an electrode on the other surface of the semiconductor element and the second electrode terminal; and a resin portion formed of an insulator covering the semiconductor element, a part of the second electrode terminal, and the one surface of the first electrode terminal, wherein a chamfered portion is formed on at least one of end portions where the first electrode terminal and the second electrode terminal face each other.
    Type: Grant
    Filed: February 6, 2018
    Date of Patent: July 20, 2021
    Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
    Inventor: Hisato Michikoshi
  • Patent number: 11054707
    Abstract: A method of manufacturing a via hole, a method of manufacturing an array substrate and an array substrate are provided. The method of manufacturing an via hole includes: providing a base substrate; forming an insulation layer on the base substrate; etching the insulation layer by using a first etching process to forma groove in the insulation layer; performing an ion implantation process with ions on a portion of the insulation layer exposed by the groove to form an ion implantation region; and etching a portion of the insulation layer in the ion implantation region by using a second etching process to form a via hole penetrating the insulation layer.
    Type: Grant
    Filed: October 9, 2017
    Date of Patent: July 6, 2021
    Assignees: BOE Technology Group Co., Ltd., Hefei BOE Optoelectronics Technology Co., Ltd.
    Inventors: Xianxue Duan, Kui Gong
  • Patent number: 11037823
    Abstract: Described herein is a technique capable of providing a semiconductor device having good characteristics. According to the technique described herein, there is provided a method of manufacturing a semiconductor device, including: (a) loading a substrate into a process chamber; and (b) forming a stacked etch stopper film by performing: (b-1) forming a first etch stopper film containing a first element and a second element by supplying a first element-containing gas and a second element-containing gas onto the substrate; and (b-2) forming a second etch stopper film containing the first element, the second element and a third element by supplying the first element-containing gas, the second element-containing gas and a third element-containing gas onto the first etch stopper film.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: June 15, 2021
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Tsuyoshi Takeda, Naofumi Ohashi, Toshiyuki Kikuchi
  • Patent number: 11027395
    Abstract: A polishing unit 3A includes a state acquisition section 846 and a learning section. The state acquisition section can acquire a state variable including at least one of data on a state of a top ring making up the polishing unit and data on a state of a semiconductor wafer. The learning section has learned a relationship between the state variable and a change in film thickness of the semiconductor wafer using a neural network, the learning section being capable of receiving the state variable from the state acquisition section to predict the change and/or receiving the state variable from the state acquisition section to determine that the change is abnormal.
    Type: Grant
    Filed: September 23, 2019
    Date of Patent: June 8, 2021
    Assignee: Ebara Corporation
    Inventor: Yuta Suzuki
  • Patent number: 11014199
    Abstract: The invention relates to a method for creating a detachment zone (2) in a solid (1) in order to detach a solid portion (12), especially a solid layer (12), from the solid (1), said solid portion (12) that is to be detached being thinner than the solid from which the solid portion (12) has been removed.
    Type: Grant
    Filed: April 30, 2020
    Date of Patent: May 25, 2021
    Assignee: Siltectra GmbH
    Inventor: Christian Beyer
  • Patent number: 11014256
    Abstract: According to one embodiment, the stacked body includes a plurality of stacked units and a first intermediate layer. Each of the stacked units includes a plurality of electrode layers and a plurality of insulating layers. Each of the insulating layers is provided between the electrode layers. The first intermediate layer is provided between the stacked units. The first intermediate layer is made of a material different from the electrode layers and the insulating layers. The plurality of columnar portions includes a channel body extending in a stacking direction of the stacked body to pierce the stacked body, and a charge storage film provided between the channel body and the electrode layers.
    Type: Grant
    Filed: May 12, 2020
    Date of Patent: May 25, 2021
    Assignee: Kioxia Corporation
    Inventor: Toshiyuki Sasaki
  • Patent number: 11011209
    Abstract: A semiconductor structure includes a memory die, which includes an alternating stack of insulating layers and electrically conductive layers located over a substrate and memory stack structures vertically extending through the alternating stacks. A contact-level dielectric layer embeds drain contact via structures that are electrically connected to a respective drain region and contact-level metal interconnects, and a via-level dielectric embedding drain-to-bit-line connection via structures, bit-line-connection via structures, and pad-connection via structures. A bit-line-level dielectric layer overlies the via-level dielectric layer, and embeds bit lines that contact a respective subset of the drain-to-bit-line connection via structures, and embeds metal pads that contact a respective one of the pad-connection via structures.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: May 18, 2021
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Jee-Yeon Kim, Kwang-Ho Kim, Yuki Mizutani, Fumiaki Toyama
  • Patent number: 10985052
    Abstract: A method of cleaning a contact hole of a semiconductor device, can include: removing a first portion of an object to be removed in the contact hole by a dry cleaning process, where a second portion of the object to be removed remains after the dry cleaning process has completed; and removing the second portion of the object to be removed by a wet cleaning process. The method can further include: forming an interlayer dielectric layer on a semiconductor substrate having a contact region; etching the interlayer dielectric layer to form the contact hole, where the contact hole penetrates the interlayer dielectric layer and exposes the contact region; and after the cleaning of the contact hole, filling the contact hole by a metal material to form a metal plug that is in contact with the contact region.
    Type: Grant
    Filed: June 4, 2019
    Date of Patent: April 20, 2021
    Assignee: Silergy Semiconductor Technology (Hangzhou) LTD
    Inventor: Huan Wang
  • Patent number: 10964535
    Abstract: A method of fabricating a ceramic substrate structure includes providing a ceramic substrate, encapsulating the ceramic substrate in a barrier layer, and forming a bonding layer coupled to the barrier layer. The method further includes removing a portion of the bonding layer to expose at least a portion of the barrier layer and define fill regions, and depositing a second bonding layer on the at least a portion of the exposed barrier layer and the fill regions.
    Type: Grant
    Filed: January 27, 2020
    Date of Patent: March 30, 2021
    Assignee: QROMIS, INC.
    Inventors: Vladimir Odnoblyudov, Cem Basceri, Shari Farrens
  • Patent number: 10964631
    Abstract: A semiconductor package includes a package main body. The package main body includes: a lead frame that includes first terminals and a die pad; two or more integrated circuit chips that are disposed on the die pad; one or more electrically conductive members that are disposed on the die pad; wires that connect the first terminals and the integrated circuit chips electrically; and a molded member that seals the lead frame, the integrated circuit chips, the electrically conductive member, and the wires. An upper surface, a bottom surface, and side surfaces of the package main body are formed by the molded member. The electrically conductive member is exposed through the upper surface of the package main body, and the die pad is exposed through the bottom surface of the package main body.
    Type: Grant
    Filed: February 25, 2016
    Date of Patent: March 30, 2021
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Hideharu Yoshioka, Akimichi Hirota, Naofumi Yoneda, Hidenori Ishibashi, Shintaro Shinjo, Kiyoshi Ishida, Hideki Morishige
  • Patent number: 10964608
    Abstract: A method is provided for gate contact formation on a semiconductor workpiece using an integrated sequence of processing steps executed on a common manufacturing platform (CMP) hosting one or more film-forming modules, one or more etching modules, and one or more transfer modules. A workpiece having a contact feature formed therein, and inspected throughout, the contact feature having a semiconductor contact surface exposed, is received into the CMP. A plurality of metal layers is deposited at a bottom of the contact feature after the workpiece is treated to remove contamination. The integrated sequence of processing steps is executed within the CMP without leaving the controlled environment, the transfer modules used to transfer the workpiece between the modules while maintaining the workpiece within the controlled environment.
    Type: Grant
    Filed: March 18, 2019
    Date of Patent: March 30, 2021
    Assignee: Tokyo Electron Limited
    Inventor: Robert Clark
  • Patent number: 10930625
    Abstract: A method of fabricating a semiconductor package includes providing a semiconductor chip, forming a redistribution substrate, and fabricating a package including the semiconductor chip disposed on the redistribution substrate. The forming of the redistribution substrate may include forming a first insulating layer on a substrate, the first insulating layer having a first opening formed therein, forming an integrally formed first redistribution pattern in the first opening and on the first insulating layer, forming a second insulating layer on the first insulating layer to cover the first redistribution pattern, and performing a planarization process on the second insulating layer to expose the first redistribution pattern.
    Type: Grant
    Filed: June 4, 2019
    Date of Patent: February 23, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kyoung Lim Suk, Seokhyun Lee
  • Patent number: 10930861
    Abstract: According to one embodiment, a radiation detector includes a detection element. The detection element includes a first conductive layer, a second conductive layer, and an organic semiconductor layer provided between the first conductive layer and the second conductive layer. The organic semiconductor layer includes a first compound and a second compound. The first compound is bipolar. A thickness of the organic semiconductor layer is 50 ?m or more.
    Type: Grant
    Filed: March 5, 2019
    Date of Patent: February 23, 2021
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Isao Takasu, Hyangmi Jung, Kohei Nakayama, Yuko Nomura, Rei Hasegawa
  • Patent number: 10923380
    Abstract: An edge ring for use in a plasma processing chamber with a chuck is provided. An edge ring body has a first surface to be placed over and facing the chuck, wherein the first surface forms a ring around an aperture. A first elastomer ring is integrated to the first surface and extending around the aperture.
    Type: Grant
    Filed: February 12, 2018
    Date of Patent: February 16, 2021
    Assignee: Lam Research Corporation
    Inventors: Christopher Kimball, Keith Gaff, Feng Wang