Abstract: Embodiments of sensor devices for characterizing magnetic fields formed in substrate processing systems and methods of use thereof are provided herein. In some embodiments, an apparatus for characterizing a magnetic field in a substrate processing system may include a carrier having a form substantially similar to a substrate to be processed in the substrate processing system. One or more magnetic sensors are disposed on the carrier for measuring a magnitude of a magnetic field formed in the processing system in an x-, y-, and z-direction. A microprocessor is coupled to the one or more magnetic sensors to sample data representative of the magnitude of the magnetic field in the x-, y-, and z-directions proximate a position of each sensor. A memory device is coupled to the microprocessor for storing the sampled data. A power source is provided to supply power to each magnetic sensor and the microprocessor.
Type:
Grant
Filed:
January 27, 2009
Date of Patent:
April 3, 2012
Assignee:
Applied Materials, Inc.
Inventors:
Kartik Ramaswamy, Hiroji Hanawa, Lawrence Wong, Chinh Dinh
Abstract: Disclosed is an integrated electronic circuit comprising a core circuit that generates a useful signal as well as a buffer for storing the useful signal. The buffer stores the last read value of the useful signal for a predetermined period of time when the power supply is interrupted, and the buffer is disconnected from the power supply of the other circuits.
Type:
Grant
Filed:
November 10, 2006
Date of Patent:
March 20, 2012
Assignees:
Micronas GmbH, Denso Corporation
Inventors:
Hans-Jorg Fink, Martin Bayer, Reiner Bidenbach, Yoshiyuki Kono
Abstract: A gobo wheel with automatic detection system that automatically detects a rotational position of the gobo. The rotational position can be detected by a magnetic marking system. Each of the gobos can be randomly placed within the holder. The position of the gobos can be automatically determined during a start up routine for example, and then those positions can be stored and used for later determination of a position.
Abstract: An angle sensor device is for determining information of a movable object. The information includes angular position information and/or angular speed information. The angle sensor device includes (a) at least one magnetically encoded region arranged on the movable object, (b) at least one magnetic field detector, and (c) a unit. The at least one magnetic field detector is adapted to detect a signal generated by the at least one magnetically encoded region when the at least one magnetically encoded region moving with the movable object passes a surrounding area of the at least one magnetic field detector. The unit is adapted to determine the information based on the detected signal.
Abstract: A method of designing a sensor assembly having a housing, a first magnet and a second magnet includes forming each of the first magnet and the second magnet into a wedge shape. The method further includes tilting each of the first magnet and the second magnet at an angle within the housing.
Abstract: A balancing circuit for a metal detector. The metal detector includes an oscillating power source, a transmit coil connected to the oscillating power source, first and second receive coils inductively coupled to the transmit coil, a first amplitude balancing circuit connected to the first receive coil, and a first phase balancing circuit connected to the first receive coil. The first phase balancing circuit includes a capacitor and a variable resistor.
Abstract: A survey apparatus for surveying a subterranean structure includes an electromagnetic (EM) sensing element to measure an EM field received from the subterranean structure, and a sample collector activatable to collect a sample of soil.
Abstract: To perform marine electromagnetic (EM) surveying of a subterranean structure, a marine cable system is provided including a tow cable, a plurality of electromagnetic (EM) sources coupled to the tow cable, and a plurality of EM receivers coupled to the tow cable. The system is configured for deployment in a body of water to perform marine EM surveying of a subterranean structure.
Type:
Grant
Filed:
January 7, 2009
Date of Patent:
February 14, 2012
Assignee:
WesternGreco L.L.C.
Inventors:
David L. Alumbaugh, Guozhong Gao, Tarek M. Habashy, Frank H. Morrison, Michael Oristaglio, Kambiz Safinya, Andrea Zerilli
Abstract: There is provided a non-contact rotational detecting sensor comprising a ring-shaped permanent magnet which rotates integrally with a detection object of a rotational angle and of which a magnetic pole changes along the circumferential direction, a ring-shaped inside magnetic flux collecting yoke for surrounding an outer peripheral surface of the ring-shaped permanent magnet in a constant gap, a ring-shaped outside magnetic flux collecting yoke for surrounding an outer peripheral surface of the ring-shaped inside magnetic flux collecting yoke in a constant gap, and a hole IC arranged in a gap formed in the ring-shaped inside magnetic flux collecting yoke, wherein an axial height of the ring-shaped inside magnetic flux collecting yoke is changed along a circumferential direction of the ring-shaped inside magnetic flux collecting yoke.
Abstract: Methods and apparatuses for calibrating eddy current sensors. A calibration curve is formed relating thickness of a conductive layer in a magnetic field to a value measured by the eddy current sensors or a value derived from such measurement, such as argument of impedance. The calibration curve may be an analytic function having infinite number terms, such as trigonometric, hyperbolic, and logarithmic, or a continuous plurality of functions, such as lines. High accuracy allows the omission of optical sensors, and use of eddy current sensors for endpoint detection, transition call detection, and closed loop control in which a process parameter is changed based on the measured magnetic flux density change in one or more processing zones.
Abstract: A position-sensing system includes a first component (e.g., a cylinder) and a second component (e.g., a piston rod) movably coupled to the first component for movement with respect thereto. A magnetically hard layer on the second component provides a recording medium. Regions of the magnetically hard layer are magnetized as magnetized rings around the second component. Magnetic-field sensors are coupled to the first component in proximity of the magnetically hard layer on the second component to sense the rings of magnetized regions. Each of the magnetic field sensors senses flux from each of the rings of magnetized regions as the second component is moving with respect to the first component and, in response to sensing the rings of magnetized regions, generates signals used to determine position of the second component.
Abstract: Systems, methods and apparatus are provided through which in some implementations determine the amplitude of an amplitude modulated signal, modulated by the position of an object being sensed. In some aspects, the apparatus accepts an excitation signal and the amplitude modulated signal and divides the amplitude modulated by the excitation signal to produce an output signal that is proportional to the position of the object being sensed. In other aspects, the division is performed only when the excitation signal is non-zero, such as close to the peaks in the excitation signal. In other aspects, the excitation signal and amplitude modulated signal are degraded due to an air gap and the degraded signals are used to correct for amplitude fluctuations due to the air gap, and produce an output signal, tolerant of the air gaps, that is proportional to the position of the object being sensed.
Type:
Grant
Filed:
July 15, 2008
Date of Patent:
January 17, 2012
Assignee:
The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
Inventors:
David E. Howard, Dean C. Alhorn, Dennis A. Smith, Kenneth R. Dutton
Abstract: A device, method and system for measuring characteristics of a geologic formation using a floating reference signal having a mud chamber, an electrode disposed within the mud chamber, and an electrically conductive plate disposed within the mud chamber, the plate separated from the electrode. An alternating current source is provided on the electrode, whereby an electric field is be maintained between the electrode and the conductive plate. An opening in the mud chamber allows drilling fluids to pass there through.
Abstract: A charging system has a battery pack and a charging device. The battery pack has a battery cell and a plurality of identifiers that identify a configuration of the battery cell. The charging device has a charging unit, a signal transmission unit, a reading unit, and a control unit. The charging unit charges the battery pack. The signal transmission unit transmits a first signal and a second signal to the battery pack separately to read the plurality of identifiers when the battery pack is attached to the charging unit. The reading unit reads the plurality of identifiers according to the first and second signals to determine the configuration of the battery cell. The control unit controls the charging unit according to the configuration of the battery cell.
Abstract: Systems, apparatus, and methods for automobile battery management is provided. In one embodiment, an apparatus for providing balanced and individualized charging to a battery pack is provided. The apparatus uses microcontrollers to determine a charge level of the batteries, and correspondingly controls a power balancer to apply a charge current to the battery in relation to the charge level, and dissipates the remaining charge current as heat energy. In one embodiment, a system controller controls a balanced charging operation of the battery system, provides an interface for a user to monitor cell-level parameters, and protects the battery cells from undercharging or overcharging during the charging or discharging operations.
Abstract: A charging apparatus is provided and is configured to accept temperature information corresponding to a temperature of a secondary battery or a battery pack, supply a charging current to the secondary battery or the battery pack when the temperature is within a set charge temperature range, and interrupt the charging current when the temperature is beyond the set charge temperature range.
Abstract: A power supply device includes a power storage unit capable of being charged and a control unit controlling charging of the power storage unit. Control unit includes a battery ECU for setting, at the start of charging of the power storage unit, a target value of state of charge of the power storage unit to a first value based on the condition of power storage unit and setting, when a temperature increase instruction (change instruction) is received after the start of charging, the target value to a predetermined second value higher than the first value, and a converter ECU for executing the charging process so that the state of charge of the power storage unit attains to the target value.
Abstract: An integrated circuit including an amplifier and a first circuit. The amplifier is configured to receive a sensed signal and provide an amplified signal. The first circuit is configured to track a first signal that is based on the amplified signal. The first circuit includes a first comparator, tracking logic and a first digital to analog converter. The first comparator is configured to respond to a second signal that is based on the first signal and provide a comparator output signal. The tracking logic is configured to receive the comparator output signal and update a digital output. The first digital to analog converter is configured to receive the digital output and provide a tracking signal that is summed with the first signal to provide the second signal.
Abstract: A positioning, communication, and detection system designed to provide a three dimensional location of an object, navigation tools, and bidirectional surface-to-subsurface communications, and methods of using the system. The system can include one or multiple transmitters comprising electromagnetic beacons, software defined radio receivers with an associated processing unit and data acquisition system, and magnetic antennas. The system may use theoretical calculations, scale model testing, signal processing, and sensor data.
Type:
Grant
Filed:
March 26, 2008
Date of Patent:
December 6, 2011
Assignee:
Raytheon UTD Inc.
Inventors:
Benjamin P. Dolgin, Michael Shore, Steven A. Cotten, Craig E. Matter, Kenneth D. Kuck, Luis B. Giraldo, John T. Ishibashi
Abstract: A method for electromagnetic exploration includes imparting a first electromagnetic signal into subsurface formations from a first location and imparting a second electromagnetic signal into the formations from a second location substantially contemporaneously with imparting the first electromagnetic signal. The first and second electromagnetic signals are substantially uncorrelated with each other. A combined electromagnetic response of the formations to the first and second imparted electromagnetic signals is detected at a third location. A response of the formations to each of the first and the second imparted signals is determined from the detected response.