Patents Examined by Bradford M Gates
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Patent number: 11972946Abstract: The present inventive concept relates to a method for removing impurities in thin film and a substrate processing apparatus. The method for removing impurities in a thin film includes the steps of: providing a substrate having a thin film formed thereon in a process chamber; supplying a first gas reacting and coupling with impurities contained in the thin film, into the process chamber; exhausting a coupled product of the impurities and the first gas by depressurizing an interior of the process chamber after stopping the supply of the first gas; curing the thin film by supplying a second gas being different from the first gas into the process chamber; and stopping the supply of the second gas and exhausting the remaining second gas from the interior of the process chamber.Type: GrantFiled: January 12, 2022Date of Patent: April 30, 2024Assignee: EUGENE TECHNOLOGY CO., LTD.Inventors: Kyu Jin Choi, Gyu Ho Choi, Sang Hyuk Hwang
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Patent number: 11952666Abstract: A method for producing an abrasion-resistant coating on the inner wall of an aluminum alloy workpiece is provide. The steps include mixing a graphene powder and Al powder to obtain a mixed powder; combining and heating the mixed power with a polyvinyl alcohol (PVA) liquid, and performing spray granulation to obtain a low-temperature self-propagating composite; stirring a slurry comprising the low-temperature self-propagating composite and sodium silicate; injecting the slurry into a cylindrical inner cavity of an aluminum alloy workpiece mounted on a horizontal rotary table for rotation, the aluminum alloy workpiece is heated with the rotation at a second temperature of 80-100° C. so that the slurry is uniformly solidified on the cylindrical inner surface of the cylindrical inner cavity; and burning the slurry, after the slurry is uniformly solidified and while the rotation is maintained, with an oxyacetylene flame to form the wear-resistant coating.Type: GrantFiled: June 17, 2020Date of Patent: April 9, 2024Assignee: AECC BEIJING INSTITUTE OF AERONAUTICAL MATERIALSInventors: Haoliang Tian, Yang Yu, Changliang Wang, Mengqiu Guo, Zimin Zhou, Zhihui Tang, Ang Zhang, Yongjing Cui, Tianying Wang, Junguo Gao
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Patent number: 11938511Abstract: A coating method includes supplying a film forming liquid onto a center of a front surface of a substrate from a nozzle in a state that a distance between the front surface and the nozzle is maintained at a coating distance; rotating the substrate at a first rotation speed in a period during which the film forming liquid is supplied onto the front surface, to allow the film forming liquid to be diffused toward an edge of the substrate from an outer periphery of the nozzle; and rotating the substrate at a second rotation speed after the supplying of the film forming liquid is stopped, to allow the film forming liquid to be further diffused. The coating distance is set to allow the film forming liquid to be kept between the nozzle and the front surface when a discharge of the film forming liquid is stopped.Type: GrantFiled: June 30, 2022Date of Patent: March 26, 2024Assignee: TOKYO ELECTRON LIMITEDInventors: Masatoshi Kawakita, Yusaku Hashimoto, Kosuke Yoshihara
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Patent number: 11931774Abstract: Disclosed is a method for treating wood veneer, including the steps of providing at least one sheet of wood veneer; coating at least one side of the sheet of wood veneer with an aqueous coating composition including nanocellulose to obtain a coated sheet of wood veneer; and drying the coated sheet using compression pressure and heat. Also disclosed is a coated wood veneer including a sheet of wood veneer and a coating including nanocellulose arranged on at least one surface of the sheet.Type: GrantFiled: January 16, 2019Date of Patent: March 19, 2024Assignees: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY, AALTO UNIVERSITY FOUNDATION SRInventors: Jaakko Pere, Vesa Kunnari, Matti Kairi, Pekka Ahtila
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Patent number: 11913119Abstract: A manufacturing method is provided during which a preform component for a turbine engine is provided. The preform component includes a substrate and a locating feature at an exterior surface of the substrate. An outer coating is applied over the substrate. The outer coating covers the locating feature. At least a portion of the preform component and the outer coating are scanned with an imaging system to provide scan data indicative of a location of the locating feature. A cooling aperture is formed in the substrate and the outer coating based on the scan data.Type: GrantFiled: August 13, 2021Date of Patent: February 27, 2024Assignee: RTX CORPORATIONInventors: Brian Craig, James M. Koonankeil, Brian T. Hazel, Paul E. Denney, Dominic J. Mongillo
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Patent number: 11915926Abstract: A porous thin film includes a framework that includes a plurality of pores. The pores extend from an opening located at an upper surface of the framework to a bottom surface contained in the framework. A pore-coating film is formed on sidewalls and the bottom surface of the pores.Type: GrantFiled: September 27, 2021Date of Patent: February 27, 2024Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Leonidas Ernesto Ocola, Eric A. Joseph, Hiroyuki Miyazoe, Takashi Ando, Damon Brooks Farmer
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Patent number: 11905592Abstract: In various aspects of the disclosure, a method of operating a process group that performs at least a first reactive coating process and a second reactive coating process may comprise: coating of a substrate by means of the first reactive coating process and by means of the second reactive coating process; closed-loop control of the process group by means of a first manipulated variable of the first coating process and a second manipulated variable of the second coating process and using a correction element; wherein the correction element relates the first manipulated variable and the second manipulated variable to one another in such a way that their control values are different from one another.Type: GrantFiled: September 2, 2020Date of Patent: February 20, 2024Inventors: Ralf Biedermann, Bernd Teichert, Thomas Meyer, Torsten Dsaak
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Patent number: 11905598Abstract: An object is to coat a target position on a substrate with a dense film. In order to achieve the object, while a substrate on which a base containing a coating material is formed is transported, an auxiliary agent is applied to the substrate, and then a main agent containing a coating material is applied to the substrate to react the main agent with the auxiliary agent, so that a portion on the substrate where the base is formed is coated with the coating material.Type: GrantFiled: September 2, 2022Date of Patent: February 20, 2024Assignee: FUJIFILM CorporationInventors: Eijiro Iwase, Keio Okano, Katsuyuki Nukui
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Patent number: 11885013Abstract: Methods and systems for depositing vanadium nitride layers onto a surface of the substrate and structures and devices formed using the methods are disclosed. An exemplary method includes using a cyclical deposition process, depositing a vanadium nitride layer onto a surface of the substrate. The cyclical deposition process can include providing a vanadium halide precursor to the reaction chamber and separately providing a nitrogen reactant to the reaction chamber. The cyclical deposition process may desirably be a thermal cyclical deposition process.Type: GrantFiled: December 7, 2020Date of Patent: January 30, 2024Assignee: ASM IP Holding B.V.Inventors: Giuseppe Alessio Verni, Qi Xie, Henri Jussila, Charles Dezelah, Jiyeon Kim, Eric James Shero, Paul Ma
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Patent number: 11886122Abstract: A method comprising providing a carbonaceous material, the substrate having a first thermal conductivity. The method further comprises depositing a first masking layer having a second thermal conductivity on at least a portion of the substrate, a ratio of the second thermal conductivity to the first thermal conductivity being less than or equal to 1:30. The method further comprises depositing a second masking layer on the first masking layer to form an etch mask, and etching an exposed portion of the substrate.Type: GrantFiled: June 24, 2021Date of Patent: January 30, 2024Assignees: FRAUNHOFER USA, INC., THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORKInventors: Jung-Hun Seo, Yixiong Zheng, Matthias Muehle
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Patent number: 11878323Abstract: A powder-coating process of a brake caliper has in sequence the steps of: (a) preparing the brake caliper; (b) applying masking elements to at least one seat and/or duct of said brake caliper; (c) distributing the coating powder on at least one portion of said brake caliper; (d) removing the at least one masking element by automated de-masking means; (e) curing inside a curing oven.Type: GrantFiled: May 16, 2019Date of Patent: January 23, 2024Assignee: Brembo S.p.A.Inventors: Gianluigi Roncalli, Alessio Garghentini
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Patent number: 11875973Abstract: Methods for preparing a void-free protective coating are disclosed herein. The void-free protective coating is used on a dielectric window having a central hole, which is used in a plasma treatment tool. A first protective coating layer is applied to the window, leaving an uncoated annular retreat area around the central hole. The first protective coating layer is polished to produce a flat surface and fill in any voids on the window. A second protective coating layer is then applied upon the flat surface of the first protective coating layer to obtain the void-free coating. This increases process uptime and service lifetime of the dielectric window and the plasma treatment tool.Type: GrantFiled: February 8, 2022Date of Patent: January 16, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shih-Tsung Chen, Tsung-Cheng Ho, Chien-Yu Wang, Yen-Shih Wang, Jiun-Rong Pai, Yeh-Chieh Wang
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Patent number: 11859288Abstract: A corrosion-resistant member including: a metal base material (10); a corrosion-resistant coating (30) formed on the surface of the base material (10); and a buffer layer (20) formed between the base material (10) and the corrosion-resistant coating (30). The base material (10) contains a main element having the highest mass content ratio among elements contained in the base material (10) and a trace element having a mass content ratio of 1% by mass or less. The corrosion-resistant coating (30) contains at least one kind selected from magnesium fluoride, aluminum fluoride, and aluminum oxide. The buffer layer (20) contains an element of the same kind as the trace element, and the content ratio obtained by energy dispersive X-ray analysis of the element of the same kind as the trace element contained in the buffer layer (20) is 2% by mass or more and 99% by mass or less.Type: GrantFiled: September 3, 2020Date of Patent: January 2, 2024Assignee: Resonac CorporationInventors: So Miyaishi, Masahiro Okubo, Masayuki Yoshimura, Wataru Sakane, Teppei Tanaka, Saeko Nakamura, Saori Yamaki
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Patent number: 11851766Abstract: The chemical conversion treatment liquid according to the present invention, which is cobalt-free and is capable of forming a chemical conversion film having excellent corrosion resistance, contains a water-soluble trivalent chromium-containing substance, a water-soluble titanium-containing substance, and a water-soluble lactic acid-containing substance as essential components and may optionally contain a component at least a part of which is any of a water-soluble glycolic acid-containing substance and a water-soluble ineffective organic acid-containing substance. The water-soluble ineffective organic acid-containing substance is a water-soluble organic acid-containing substance based on an ineffective organic acid that is an organic acid other than lactic acid and other than glycolic acid.Type: GrantFiled: December 8, 2021Date of Patent: December 26, 2023Inventors: Tsukasa Niwa, Masayuki Ooguchi, Yoshiki Hiramatsu
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Patent number: 11846028Abstract: Disclosed herein are embodiments of a molybdate-based composition and a conversion coating obtained therefrom that can replace conventional and toxic chromate-based conversion coatings in a variety of applications and industries. The molybdate-based composition provides conversion coatings that exhibit anodic inhibition and rapid repassivation when applied to objects, such as metal-based objects, and do not contain hexavalent chromium. The molybdate-based composition and conversion coating can be used to reduce corrosion. Embodiments of methods of protecting objects, such as metal surfaces, with the molybdate-based conversion coating also are disclosed.Type: GrantFiled: December 7, 2018Date of Patent: December 19, 2023Assignee: Nevada Research & Innovation CorporationInventors: Dev Chidambaram, David Rodriguez
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Patent number: 11845105Abstract: A method for depositing a coating on a substrate is disclosed. A first precursor comprising fluoro-acrylate monomers, fluoro-alkyl acrylate monomers, fluoro-methacrylate monomers, fluoro-alkyl methacrylate monomers, fluoro-silane monomers, or a combination or derivates thereof is provided. A second precursor comprising linear siloxanes, silane monomers, cyclosiloxanes, cyclosilane monomers, or a combination or derivates thereof is provided. The first and second precursors are co-injected in a treatment region. An atmospheric or reduced pressure plasma discharge is created in said treatment region. The substrate coating comprises alternated multi-stacked nanostructures and is formed by copolymerization of the first and second precursors.Type: GrantFiled: August 23, 2018Date of Patent: December 19, 2023Assignee: MOLECULAR PLASMA GROUP SAInventors: Régis Heyberger, Gill Scheltjens
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Patent number: 11846020Abstract: A particle coating method includes a heating step of heating soft magnetic metal particles containing an amorphous phase within a temperature range of 100° C. or higher and 500° C. or lower for 0.1 hours or more and 300 hours or less, and an insulating film formation step of forming an insulating film at surfaces of the soft magnetic metal particles by a chemical vapor deposition method. The soft magnetic metal particles preferably contain the amorphous phase at 50 vol % or more.Type: GrantFiled: November 25, 2020Date of Patent: December 19, 2023Inventor: Momoko Wakabayashi
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Patent number: 11837465Abstract: A deposition method for embedding a SiN film in a recessed pattern formed on a surface of a substrate includes: (a) activating and supplying a first process gas containing NH3 to the surface of the substrate and causing NHx groups to adsorb on the surface of the substrate, where x is 1 or 2; (b) supplying a silicon-containing gas to the surface of the substrate on which the NHx groups are adsorbed and causing the silicon-containing gas to adsorb on the NHx groups; and (c) activating and supplying a second process gas containing N2 to the surface of the substrate on which the NHx groups are adsorbed and partly replacing the NHx groups with N groups, wherein (a) and (b) are repeated, and (c) is performed every time (a) and (b) are repeated a predetermined number of times.Type: GrantFiled: September 8, 2021Date of Patent: December 5, 2023Assignee: Tokyo Electron LimitedInventors: Jun Ogawa, Takayuki Karakawa
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Patent number: 11834585Abstract: Powder coating compositions, particularly metal packaging powder coating compositions, coated metal substrates, and methods; wherein the powder coating compositions include powder polymer particles comprising a polymer having a number average molecular weight of at least 2000 Daltons, wherein the powder polymer particles have a particle size distribution having a D50 of less than 25 microns; and, in certain embodiments, one or more charge control agents in contact with the powder polymer particles.Type: GrantFiled: December 30, 2021Date of Patent: December 5, 2023Assignee: SWIMC LLCInventors: Richard D. Joslin, Charles I. Skillman, Joseph Desousa
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Patent number: 11826776Abstract: A method of coating a high-pressure fluid vessel comprises filling a high-pressure fluid vessel with a coating solution, draining the coating solution, and drying a remainder of the coating solution in the high-pressure fluid vessel. The coating solution may include a thermoplastic elastomer that is hard with a low glass transition temperature and a high melting temperature. Drying the remainder of the coating solution may form a food grade coating within the high-pressure fluid vessel.Type: GrantFiled: July 21, 2020Date of Patent: November 28, 2023Assignee: GOODRICH CORPORATIONInventors: Jin Hu, Nathaniel Ching, Phi Doan, Casey Slane