Abstract: An ion implantation system for manufacturing semiconductor devices includes an ion generator, an ion extractor, an ion converter, an ion mass analyzer, an ion accelerator, an ion focusing device and an end station where a wafer is located and an ion beam is implanted, which are installed along the path of an ion beam. A first portion of the system, including the ion generator, ion extractor, ion converter, ion mass analyzer is arranged along a first horizontal layer. A remaining portion of the system is arranged along a second horizontal layer vertically removed from the first layer. As a result, floor space required for the ion implantation system is reduced, thereby lowering manufacturing costs.

Abstract: An asymmetric field ion mobility spectrometer with an ionization source for ionizing a sample media and creating ions. An ion filter is disposed in the analytical gap downstream from the ionization source for creating an asymmetric electric field to filter the ions. An ion flow generator for creating an electric field in a direction transverse to the asymmetric electric field and which propels the ions through the asymmetric electric field towards a detector.

Abstract: A conventional particle generation and magnet configuration are used in combination with a relatively low-power power amplifier, a resonant loop magnet driver system, an amplitude modulator that induces a homogeneous amplitude function proportional to (t)½ and, when individual X and Y magnets are used, a precision phase shifter that induces a 90° phase shift in the applied power to one of the magnets to produce a circular raster pattern of virtually uniform density.

Abstract: A dual sample-and-hold architecture in each unit cell of a read-in-integrated-circuit (RIIC) provides maximum frame rate without frame overlap. Analog pixel signals are updated sequentially in one sample-and-hold capacitor, while an emitter element displays a pixel of a display frame in response to a stored analog signal voltage on an isolated second sample-and-hold capacitor. After all unit cells are updated, the signals on the two capacitors are combined, updating all emitter elements for the next frame. A voltage mode amplifier as an emitter driver provides a more nearly linear dependence of infrared power output on signal voltage than do previous transconductance amplifiers. A digital to analog converter (DAC) on the RIIC substrate results in a simplified interface to the RIIC and in an increased immunity to noise.

Abstract: A workpiece is treated with particles where an apparatus, including a particle source, produces a particle beam and directs the particle beam toward a surface of a work piece. A Faraday cup assembly is positioned to intercept the particle beam for measuring a characteristic of the particle beam. The Faraday cup assembly includes a Faraday cup for gathering a charge and an aperture assembly having an aperture through which charged particles travel to the Faraday cup. The Faraday cup is located relative to the aperture assembly to intercept the charged particles. The aperture assembly is constructed to vary the size of the aperture.

Abstract: A tight transfer device (10) between two sterile volumes (12, 14), of the double door or port type (22, 26), is equipped with a decontamination system (44) using ultraviolet, pulsed ultraviolet or pulsed light radiation, of the facing points of the gaskets (30, 36) ensuring the necessary sealing action. This decontamination system (44) is integrated into one (20) of the flanges of the transfer device. It comprises a collar (46) made from a material able to diffuse radiation, as well as optical fibers (48), whereof one end is mounted on said collar. The other end of the optical fibers (48) is connected to a radiation source. When the source is used, the radiation, routed by fibers (48) over the entire periphery of the collar (46), diffuse into the same towards the points of the gaskets (30, 36) to be decontaminated.

Abstract: A method for determining a profile quality grade of inspected feature in a resist. The feature includes side walls. The method includes the steps of acquiring by a metrology device a signal that originates from the feature and analyzing the acquired signal, including fitting a curve from among a family of curves to the acquired signal. The curve is subjected to the following constraint: it corresponds to a signal portion that originates from part of the bottom of the feature. The method further includes the step of determining the profile quality grade of the feature depending upon characteristics of the fitted curve.

Abstract: A secondary charged particle image acquisition method and its apparatus for detecting a secondary charged particle image. The method includes the steps of irradiating a surface of a specimen with a focused charged particle beam and detecting a secondary charged particle emanated from the surface of the specimen, obtaining a secondary charged particle image based on the detected secondary charged particle, irradiating a positive ion beam on the surface of the specimen where the focused charged particle beam is irradiated and inducing a conductive layer on the surface of the specimen by the irradiation of the positive ion beam and diffusing an electric charge on the surface of the conductive layer.

Abstract: An ion implantation apparatus for use in manufacturing semiconductors includes a loopback device connected to a bias ring for a Faraday cup. The loopback device detects whether a current flows through the bias ring and generates an interlock signal to be supplied through an interface to a controller. In response to the interlock signal, the controller stops an implantation operation of the apparatus, and a driver circuit drives a warning device in response to the interlock signal.

Abstract: A small-sized, high-resolution, time-of-flight (TOF) mass spectrometer has a closed ion orbit formed by plural electric sectors. Ions can make plural revolutions in the closed orbit. An entrance path is formed in the closed orbit to introduce ions into the closed orbit. An exit path is formed in the closed orbit to take ions from the closed orbit. The entrance and exit paths can be formed at the exit and entrance of the electric sectors forming the closed orbit or can be positioned in the orbit between the electric sectors forming the closed orbit.

Abstract: The invention relates to quadrupole RF ion traps used in a mass spectrometer, either as storage elements or as mass separators for the measurement of the mass spectrum of stored ions. The invention particularly relates to ion traps, which should show a pure quadrupole field without superimpositions of higher multipoles or, on the other hand, a quadrupole field with superimposition of one or several higher multipole fields of a precisely defined intensity, but no others, particularly no higher multipole fields. The limitation of ring and end cap electrodes to finite dimensions induces components of higher multipole fields within the ion trap, which may cause negative influences on the storage and scanning behavior.

Abstract: A method for controlling a force acting on a scanning probe of a cantilever by setting bandwidth of a feedback loop constituted by detecting minute displacement of the cantilever and controlling a force of the scanning probe to be greater than a primary resonant frequency of the cantilever.

Abstract: The invention relates to a method of fast real time evaluation of mass spectra for analytical methods where in tens of thousands of spectra a day the only result to be established is whether previously known mass signals are present or not present. The invention consists of calculating the positions of those signals within the measured raw data of a spectrum (e.g. the time coordinates of a time-of-flight spectrum) from the known masses by an inverted mass calibration curve, and investigating the raw data for the presence of ion current peaks only at these positions. By weighted summation with special weight functions the signal-to-noise ratio can be improved so that even very small signals can be detected reliably. Data evaluation can therefore be reduced to about one microsecond per expected mass on modern computers so even if there is a large number of expected masses the establishing procedure only takes a few milliseconds.

Abstract: A method and apparatus for creating density images of an object through the 3-dimensional tracking of protons that have passed through the object are provided. More specifically, the 3-dimensional tracking of the protons is accomplished by gathering and analyzing images of the ionization tracks of the protons in a closely packed stack of scintillating fibers.

Abstract: A time-of-flight mass spectrometer for measuring the mass-to-charge ratio of a sample molecule is described. The spectrometer provides independent control of the electric field experienced by the sample before and during ion extraction. Methods of mass spectrometry utilizing the principles of this invention reduce matrix background, induce fast fragmentation, and control the transfer of energy prior to ion extraction.

Abstract: In order to make it possible to direct fluids in motion such as a sound wave motion without any mechanical means of guidance, it is proposed a method and a device capable of directing the fluid in motion by using a curtain (10) of electromagnetic radiation for exciting the fluid (14) at the curtain to form a fluid directional layer (16) in the fluid.

Abstract: A shielded radiation assembly provides easy access to a radiation treatment space while minimizing radiation leakage. The shielded radiation assembly includes a support structure and a radiation shield supported on the support structure. A radiation emitting device is movably supported on the support structure for movement independent of the radiation shield. The radiation shield may be flexible, including a plurality of radiation shielding sections which are supported by the support structure. The radiation shielding section may be formed of the radiation absorbing material.

Abstract: A quantitative and qualitative analysis of a nitrogen (N) kinetic energy peak in a spectrum of a titanium nitride (TiN) film using Auger Electron Spectroscopy (AES). The N kinetic energy peak analysis is used to set the base energy level of the AES, and is achieved by selecting a kinetic energy of an N peak which does not overlap with the Ti kinetic energy peak.

Abstract: The invention provides mass spectrometer systems, including time-of-flight mass spectrometers, and methods of performing mass spectroscopy. The systems are capable of operating in tandem or conventional mode. The systems include an ion reflector that, when operating in tandem mode, provides a discontinuous voltage to control the collision energy of the parent ions with the dissociation element. By controlling the collision energy, particular compositional information from the sample may be examined, such as specific bonding energies.

Abstract: A method and a device for repelling pit vipers (rattlesnakes, copperheads, water moccasins) and boids (pythons, anacondas, boa constrictors) are disclosed whereby the snakes are irradiated with IR radiation having an appropriate wavelength and intensity to stimulate the IR-receptors of the snakes, thereby “jamming” the IR-receptors and/or producing an inimical electromagnetic environment that the snakes cannot tolerate.