Patents Examined by Changhyun Yi
  • Patent number: 11837538
    Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, a first vertical structure and a second vertical structure formed over the substrate, and a conductive rail structure between the first and second vertical structures. A top surface of the conductive rail structure can be substantially coplanar with top surfaces of the first and the second vertical structures.
    Type: Grant
    Filed: April 18, 2022
    Date of Patent: December 5, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Bo Liao, Wei Ju Lee, Cheng-Ting Chung, Hou-Yu Chen, Chun-Fu Cheng, Kuan-Lun Cheng
  • Patent number: 11832429
    Abstract: A Static Random Access Memory (SRAM) cell includes a write port including a first inverter including a first pull-up transistor and a first pull-down transistor, and a second inverter including a second pull-up transistor and a second pull-down transistor and cross-coupled with the first inverter; and a read port including a read pass-gate transistor and a read pull-down transistor serially connected to each. A first doped concentration of impurities doped in channel regions of the second pull-down transistor and the read pull-down transistor is greater than a second doped concentration of the impurities doped in a channel region of the first pull-down transistor, or the impurities are doped in the channel regions of the second pull-down transistor and the read pull-down transistor and are not doped in the channel region of the first pull-down transistor.
    Type: Grant
    Filed: December 21, 2020
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shau-Wei Lu, Hao Chang, Kun-Hsi Li, Kuo-Hung Lo, Kang-Yu Hsu, Yao-Chung Hu
  • Patent number: 11832430
    Abstract: A semiconductor device may include a pull-down transistor and a pull-up transistor disposed on a substrate. Each of the pull-down transistor and the pull-up transistor may include an active pattern disposed on the substrate; two source/drain patterns disposed on the active pattern; a channel pattern interposed between the two source/drain patterns, the channel pattern including semiconductor patterns that are disposed in a noncontiguous stack, such that a semiconductor pattern does not contact an adjacent semiconductor pattern; and a gate electrode crossing the channel pattern in a first direction. There may be more or less semiconductor patterns of the pull-down transistor as compared to semiconductor patterns of the pull-up transistor.
    Type: Grant
    Filed: June 30, 2021
    Date of Patent: November 28, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Mingyu Kim, Munhyeon Kim, Daewon Ha
  • Patent number: 11810996
    Abstract: InGaN/GaN quantum layer nanowire light emitting diodes are fabricated into a single cluster capable of exhibiting a wide spectral output range. The nanowires having InGaN/GaN quantum layers formed of quantum dots are tuned to different output wavelengths using different nanowire diameters, for example, to achieve a full spectral output range covering the entire visible spectrum for display applications. The entire cluster is formed using a monolithically integrated fabrication technique that employs a single-step selective area epitaxy growth.
    Type: Grant
    Filed: February 7, 2022
    Date of Patent: November 7, 2023
    Assignee: The Regents of the University of Michigan
    Inventors: Zetian Mi, Yong-Ho Ra, Renjie Wang
  • Patent number: 11810949
    Abstract: A method of forming a semiconductor arrangement includes forming a first source pad over a semiconductor layer. A first nanosheet is formed contacting the first source pad. A gate pad is formed adjacent the first nanosheet. A first drain pad is formed over the gate pad and contacting the first nanosheet. A backside interconnect line is formed under the gate pad and the first source pad. A first backside contact is formed contacting at least one of the backside interconnect line, the first source pad, or the gate pad.
    Type: Grant
    Filed: June 2, 2021
    Date of Patent: November 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Shih-Wei Peng, Jiann-Tyng Tzeng
  • Patent number: 11810917
    Abstract: Methods of performing backside etching processes on source/drain regions and gate structures of semiconductor devices and semiconductor devices formed by the same are disclosed. In an embodiment, a semiconductor device includes a first transistor structure; a first interconnect structure on a front-side of the first transistor structure; and a second interconnect structure on a backside of the first transistor structure, the second interconnect structure including a first dielectric layer on the backside of the first transistor structure; a contact extending through the first dielectric layer to a source/drain region of the first transistor structure; and first spacers along sidewalls of the contact between the contact and the first dielectric layer, sidewalls of the first spacers facing the first dielectric layer being aligned with sidewalls of the source/drain region of the first transistor structure.
    Type: Grant
    Filed: April 29, 2022
    Date of Patent: November 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Hsun Chiu, Ching-Wei Tsai, Yu-Xuan Huang, Cheng-Chi Chuang, Shang-Wen Chang
  • Patent number: 11804548
    Abstract: A semiconductor structure is provided. The semiconductor structure includes fin structures, a gate structure across the fin structures, and a dielectric layer. The gate structure includes a work function layer over the gate dielectric layer, and a contact layer over the work function layer. A portion of the work function layer is located between the fin structures, and a top surface of the portion is higher than a top surface of the fin structures. A top surface of the work function layer and a top surface of the dielectric layer are substantially on a same level. A method for forming a semiconductor structure is also provided.
    Type: Grant
    Filed: April 8, 2022
    Date of Patent: October 31, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yuan-Sheng Huang, Ryan Chia-Jen Chen
  • Patent number: 11804530
    Abstract: Disclosed are a semiconductor device and a method of fabricating the same. The device may include a substrate, an active pattern in an upper portion of the substrate and is extending in a first direction, a gate electrode crossing the active pattern and extending in a second direction intersecting the first direction, a first gate spacer covering a side surface of the gate electrode, a first inhibition layer between the gate electrode and the first gate spacer, and a gate insulating layer between the gate electrode and the active pattern. The gate insulating layer may include a high-k dielectric layer and a gate oxide layer. The gate oxide layer may be between the high-k dielectric layer and the active pattern. The high-k dielectric layer may be between the gate oxide layer and the gate electrode.
    Type: Grant
    Filed: April 30, 2021
    Date of Patent: October 31, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Munhyeon Kim, Myung Gil Kang, Wandon Kim
  • Patent number: 11804486
    Abstract: A semiconductor device according to the present disclosure includes a bottom dielectric feature on a substrate, a plurality of channel members directly over the bottom dielectric feature, a gate structure wrapping around each of the plurality of channel members, two first epitaxial features sandwiching the bottom dielectric feature along a first direction, and two second epitaxial features sandwiching the plurality of channel members along the first direction.
    Type: Grant
    Filed: January 10, 2022
    Date of Patent: October 31, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Huan-Chieh Su, Li-Zhen Yu, Chun-Yuan Chen, Shih-Chuan Chiu, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Patent number: 11798992
    Abstract: A semiconductor device includes a substrate; a first transistor formed over the substrate; a second transistor formed over the first transistor; a third transistor formed over the substrate; and a fourth transistor formed over the third transistor. The first, second, third, and fourth transistor include first, second, third, and fourth gate electrodes, respectively, and include first, second, third, and fourth source regions and first, second, third, and fourth drain region of first, second, third, and fourth conductivity types, respectively. The first conductivity type is different from the second conductivity type. The third conductivity type is the same as the fourth conductivity type. The first and second gate electrodes are integrated, and the third and fourth gate electrode are integrated.
    Type: Grant
    Filed: March 22, 2021
    Date of Patent: October 24, 2023
    Assignee: SOCIONEXT INC.
    Inventor: Sergey Pidin
  • Patent number: 11798944
    Abstract: A first gate-all-around (GAA) transistor and a second GAA transistor may be formed on a substrate. The first GAA transistor includes at least one silicon plate, a first gate structure, a first source region, and a first drain region. The second GAA transistor includes at least one silicon-germanium plate, a second gate structure, a second source region, and a second drain region. The first GAA transistor may be an n-type field effect transistor, and the second GAA transistor may be a p-type field effect transistor. The gate electrodes of the first gate structure and the second gate structure may include a same conductive material. Each silicon plate and each silicon-germanium plate may be single crystalline and may have a same crystallographic orientation for each Miller index.
    Type: Grant
    Filed: April 4, 2022
    Date of Patent: October 24, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Shi Ning Ju, Kuo-Cheng Chiang, Chih-Hao Wang, Kuan-Lun Cheng, Guan-Lin Chen
  • Patent number: 11799037
    Abstract: Gate-all-around integrated circuit structures having asymmetric source and drain contact structures, and methods of fabricating gate-all-around integrated circuit structures having asymmetric source and drain contact structures, are described. For example, an integrated circuit structure includes a vertical arrangement of nanowires above a fin. A gate stack is over the vertical arrangement of nanowires. A first epitaxial source or drain structure is at a first end of the vertical arrangement of nanowires. A second epitaxial source or drain structure is at a second end of the vertical arrangement of nanowires. A first conductive contact structure is coupled to the first epitaxial source or drain structure. A second conductive contact structure is coupled to the second epitaxial source or drain structure. The second conductive contact structure is deeper along the fin than the first conductive contact structure.
    Type: Grant
    Filed: May 5, 2022
    Date of Patent: October 24, 2023
    Assignee: Intel Corporation
    Inventors: Biswajeet Guha, Mauro J. Kobrinsky, Tahir Ghani
  • Patent number: 11798976
    Abstract: A light emitting element array is provided and includes substrate; light emitting elements arrayed to substrate; first anisotropic diffusion layer facing substrate with light emitting elements interposed between first anisotropic diffusion layer and substrate; and second anisotropic diffusion layer, wherein first anisotropic diffusion layer and second anisotropic diffusion layer are layered, first anisotropic diffusion layer and second anisotropic diffusion layer each include a region in an in-plane direction including a high refractive index region and a low refractive index region in a mixed manner, and absolute value of first angle formed by boundary between high refractive index region and low refractive index region of first anisotropic diffusion layer and direction perpendicular to substrate is different from absolute value of second angle formed by boundary between high refractive index region and low refractive index region of second anisotropic diffusion layer and direction perpendicular to substrate
    Type: Grant
    Filed: March 29, 2022
    Date of Patent: October 24, 2023
    Assignee: Japan Display Inc.
    Inventor: Osamu Itou
  • Patent number: 11798996
    Abstract: A method includes performing a first etching process on a backside of a substrate to expose a dummy contact structure, performing a first deposition process to deposit a first dielectric layer around the dummy contract structure, performing a second deposition process to deposit an oxide layer on the first dielectric layer, removing the dummy contract structure to form a trench, depositing a sacrificial layer on sidewalls of the trench, depositing a second dielectric layer on the sacrificial layer, filling the trench with a conductive material, and removing the sacrificial layer to form an air spacer between the first dielectric layer and the second dielectric layer.
    Type: Grant
    Filed: July 20, 2022
    Date of Patent: October 24, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Ming Lee, Wei-Yang Lee
  • Patent number: 11777038
    Abstract: A semiconductor device with reduced parasitic capacitance is provided. A stack is formed on an insulating layer, the stack comprising a first oxide insulating layer, an oxide semiconductor layer over the first oxide insulating layer, and a second oxide insulating layer on the oxide semiconductor layer; a gate electrode layer and a gate insulating layer are formed on the second oxide insulating layer; a first low-resistance region is formed by adding a first ion to the second oxide semiconductor layer using the gate electrode layer as a mask; a sidewall insulating layer is formed on an outer side of the gate electrode layer; a second conductive layer is formed over the gate electrode layer, the sidewall insulating layer, and the second insulating layer; and an alloyed region in the second oxide semiconductor layer is formed by performing heat treatment.
    Type: Grant
    Filed: August 26, 2021
    Date of Patent: October 3, 2023
    Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventor: Shunpei Yamazaki
  • Patent number: 11777001
    Abstract: A semiconductor device includes; a substrate including a first region and a second region, a first active pattern extending upward from the first region, a first superlattice pattern on the first active pattern, a first active fin centrally disposed on the first active pattern, a first gate electrode disposed on the first active fin, and first source/drain patterns disposed on opposing sides of the first active fin and on the first active pattern. The first superlattice pattern includes at least one first semiconductor layer and at least one first blocker-containing layer, and the first blocker-containing layer includes at least one of oxygen, carbon, fluorine and nitrogen.
    Type: Grant
    Filed: May 12, 2022
    Date of Patent: October 3, 2023
    Inventors: Ilgyou Shin, Minyi Kim, Myung Gil Kang, Jinbum Kim, Seung Hun Lee, Keun Hwi Cho
  • Patent number: 11776998
    Abstract: A device comprises a plurality of nanosheets, source/drain stressors, and a gate structure wrapping around the nanosheets. The nanosheets extend in a first direction above a semiconductor substrate and are arranged in a second direction substantially perpendicular to the first direction. The source/drain stressors are on either side of the nanosheets. Each of the source/drain stressors comprises a first epitaxial layer and a second epitaxial layer over the first epitaxial layer. The first and second epitaxial layers are made of a Group IV element and a Group V element. An atomic ratio of the Group V element to the Group IV element in the second epitaxial layer is greater than an atomic ratio of the Group V element to the Group IV element in the first epitaxial layer.
    Type: Grant
    Filed: January 24, 2022
    Date of Patent: October 3, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Chung-En Tsai, Chia-Che Chung, Chee-Wee Liu, Fang-Liang Lu, Yu-Shiang Huang, Hung-Yu Yeh, Chien-Te Tu, Yi-Chun Liu
  • Patent number: 11776962
    Abstract: An integrated circuit device is provided. The integrated circuit device includes a fin-type active region that extends in a first direction on a substrate, a gate structure that intersects with the fin-type active region and extends in a second direction, perpendicular to the first direction, on the substrate, and a first contact structure that is disposed on the gate structure, and has a greater width at a top surface than a bottom surface thereof.
    Type: Grant
    Filed: April 7, 2022
    Date of Patent: October 3, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hong-sik Shin, Heung-sik Park, Do-haing Lee, In-keun Lee, Seung-ho Chae, Ha-young Choi
  • Patent number: 11769787
    Abstract: A display device includes a substrate; a first electrode and a second electrode arranged to be spaced apart from each other on the substrate; a first insulating layer on the substrate; a light emitting element on the first insulating layer, located between the first electrode and the second electrode, and including a first end portion and a second end portion; a third electrode on the substrate and electrically connected to the first electrode and the first end portion; a fourth electrode on the substrate and electrically connected to the second electrode and the second end portion; a second insulating layer on the substrate and covering the light emitting element, the third electrode, and the fourth electrode; and a light diffusion layer on the second insulating layer and including a light diffusion particle.
    Type: Grant
    Filed: August 16, 2021
    Date of Patent: September 26, 2023
    Assignee: Samsung Display Co., Ltd.
    Inventors: Dong Gyun Kim, Moon Jung An, Dong Eon Lee, Hye Lim Kang, Hoo Keun Park, Byung Ju Lee
  • Patent number: 11769769
    Abstract: An integrated circuit device is provided as follows. A fin-type active region extends on a substrate in a first horizontal direction. A gate line extends on the fin-type active region in a second horizontal direction intersecting the first horizontal direction. A source/drain region is disposed in the fin-type active region at one side of the gate line. An insulating cover extends parallel to the substrate, with the gate line and the source/drain region arranged between the insulating cover and the substrate. A source/drain contact that vertically extends through the insulating cover has a first sidewall covered with the insulating cover and an end connected to the source/drain region. A fin isolation insulating unit vertically extends through the insulating cover into the fin-type active region. The source/drain region is arranged between the fin isolation insulating unit and the gate line.
    Type: Grant
    Filed: March 21, 2022
    Date of Patent: September 26, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hwi-Chan Jun, Heon-jong Shin, In-chan Hwang, Jae-ran Jang