Abstract: A substrate processing method capable of achieving uniform etch selectivity in the entire thickness range of a thin film formed on a stepped structure includes: forming a thin film on a substrate by performing a plurality of cycles including forming at least one layer and applying plasma to the at least one layer under a first process condition; and applying plasma to the thin film under a second process condition different from the first process condition.

Abstract: Methods are disclosed herein for depositing a passivation layer comprising fluorine over a dielectric material that is sensitive to chlorine, bromine, and iodine. The passivation layer can protect the sensitive dielectric layer thereby enabling deposition using precursors comprising chlorine, bromine, and iodine over the passivation layer.

Abstract: There is provided a plasma annealing device that can change the crystal structure of a film by processing the film (coating) on a substrate and that has excellent productivity. A method for producing a film includes step (A) irradiating a film on a substrate with atmospheric pressure plasma, wherein the crystal structure of a constituent of the film is changed. The step (A) may include generating plasma under atmospheric pressure by energization at a frequency of 10 hertz to 100 megahertz and a voltage of 60 volts to 1,000,000 volts, and directly irradiating the film on the substrate with the generated plasma. A method for changing a crystal structure of a constituent of a film includes step (A). A plasma generation device used in step (A). An electronic device produced through step (A).

Abstract: A power storage device and an applicator is obtained that achieve an increase in capacity and an improvement in productivity, and that enable the thickness of a mixture layer to be inhibited from varying. A positive electrode mixture slurry is discharged into discharge regions of a belt-like positive electrode current collector that extend in a length direction of the positive electrode current collector from discharge nozzles corresponding to the respective discharge regions to form a positive electrode mixture layer on the positive electrode current collector. The discharge regions are arranged such that a part of each of the discharge regions overlaps a part of another of the discharge regions adjacent thereto when viewed in the length direction to form overlapping portions. The positive electrode mixture slurry is intermittently discharged to form an exposed portion on at least one of the discharge regions.

Abstract: A method for manufacturing a mask may include the following steps: preparing a substrate; providing a first coating, which may be optically transparent, may cover a covered portion of the substrate, and may expose exposed portions of the substrate; forming a scattering layer between the first coating layer and the covered portion of the substrate; and removing the exposed portions of the substrate to form mask holes.

Abstract: An automated process for producing exposed electrical contact areas on the conductor part of an epoxy coated bus bar. When the epoxy coating is in the glassy state, one can safely and economically, preferably via automated apparatus, put the epoxy into the rubbery state by positioning the bar and applying localized heat at a select area of the coating; monitoring the heating to above the glass transition temperature of the epoxy, bringing cutting tools into contact with the epoxy for cutting and removing the rubbery coating away from the bus bar, and cooling the bus bar to bring adjacent coating back to the glassy state, thereby leaving an exposed electrical contact area of conductor on the bus bar with little or no surface damage.

Abstract: Methods of depositing uniform films on substrates using multi-cyclic atomic layer deposition techniques are described. Methods involve varying one or more parameter values from cycle to cycle to tailor the deposition profile. For example, some methods involve repeating a first ALD cycle using a first carrier gas flow rate during precursor exposure and a second ALD cycle using a second carrier gas flow rate during precursor exposure. Some methods involve repeating a first ALD cycle using a first duration of precursor exposure and a second ALD cycle using a second duration of precursor exposure.

Abstract: Subject matter disclosed herein may relate to construction of a correlated electron material (CEM) device. In particular embodiments, after formation of a film comprising layers of a transition metal oxide (TMO) material and a dopant, at least a portion of the film may be exposed to an elevated temperature. Exposure of the at least a portion of the film to the elevated temperature may continue until the atomic concentration of the dopant within the film is reduced, which may enable operation of the film as a correlated electron material CEM exhibiting switching of impedance states.

Abstract: A method for manufacturing a display device according to an exemplary embodiment of the present inventive concept includes: forming a digitizer assembly; and attaching the digitizer assembly to a bottom of a display panel, wherein the forming the digitizer assembly comprises forming through-hole portions in a heat dissipation sheet layer, forming a digitizer board by sequentially attaching a buffering sheet layer, a digitizer layer, a shield sheet layer, and the heat dissipation sheet layer, and forming a plurality of digitizer assemblies by cutting the digitizer board, wherein the through-hole portions partially expose the shield sheet layer and are disposed at corners of the digitizer assembly.

Abstract: A thin film deposition method with respect to a substrate including a pattern structure includes supplying RF power through a component disposed below a substrate, forming a potential on an exposed surface of the substrate exposed to a reaction space, moving the active species to the exposed surface in the reaction space using the potential, and forming a thin film including active species component on the exposed surface of the substrate.

Abstract: A method of fabricating a glassy carbon film is described. The method includes forming a soluble layer on a substrate, forming a lift-off stack that includes a lift-off mask layer and a hard-mask layer, and forming a pattern in the lift-off stack to expose a portion of the soluble layer. The exposed portions of the soluble layer are removed to expose a portion of the substrate. A carbon material is over the exposed portion of the substrate. The soluble layer is dissolved in a solvent, and the lift-off stack is lifted-off.

Abstract: A ceramic substrate is irradiated in an atmospheric air with a laser having a power density of 1.0×107-1.0×109 W/cm2 for an action time on an irradiation area of 1.0×10?7-1.0×10?5 s to roughen a surface of the ceramic substrate, as well as to form an oxide layer on a roughened surface. A thermal sprayed coating formed on the ceramic substrate sufficiently adheres to the ceramic substrate via the oxide layer.

Abstract: Provided is a self-processing synthesis of hybrid nanostructures, novel nanostructures and uses thereof in the construction of electronic and optoelectronic devices.

Abstract: The present disclosure generally relates to a system and method for multiple beam laser deposition of thin films wherein separate laser beams are used to ablate material from separate targets for concurrent deposition on a common substrate. The targets may include, but not limited to polymers, organics, inorganics, nanocrystals, solutions, or mixtures of materials. A target may be disposed on a tiltable mount to adjust the direction of the ablation plumes. Multiple ablation modes may be concurrently employed at the various targets, including, but not limited to pulsed laser, MAPLE, IR-MAPLE and other modes. The system may include a camera and processor for plume axis determination and feedback control of the plume axis by controlling a tilt of a target holder. Maple target loading sequences and liquid states are described. Fluorescent image monitoring is described.

Abstract: A method of fabricating nanocomposite anode material embodying a lithium titanate (LTO)-multi-walled carbon nanotube (MWNT) composite intended for use in a lithium-ion battery includes providing multi-walled carbon nanotube (MWNTs), including nanotube surfaces, onto which functional oxygenated carboxylic acid moieties are arranged, generating 3D flower-like, lithium titanate (LTO) microspheres, including thin nanosheets and anchoring the acid-functionalized MWNTs onto surfaces of the 3D LTO microspheres by ?-? interaction strategy to realize the nanocomposite anode material.

Abstract: A circuit forming method where a metal ink is ejected to a planned formation position of a first wiring at an upper face of a base material. Then, the metal ink is baked, and first wiring is formed. Further, a planned connection section of the first wiring and a second wiring is unbaked. The metal-ink is ejected over an upper face of the unbaked metal ink and a planned formation position of the second wiring at the upper face of the base material. Since the wettability of the upper face of the unbaked metal ink and the wettability of the upper face of the base material are equal to each other, the ejected metal ink ejected and the unbaked metal ink are not separated from each other, so that it is possible to properly connect the first wiring and the second wiring to each other.

Abstract: Provided are an insulation-coated oriented magnetic steel sheet having an insulating coat with excellent heat resistance; and a method for manufacturing the same. This insulation-coated oriented magnetic steel sheet has an oriented magnetic steel sheet, and an insulating coat arranged on the surface of the oriented magnetic steel sheet, the insulating coat containing Si, P, O, and Cr, and at least one element selected from the group consisting of Mg, Ca, Ba, Sr, Zn, Al, and Mn. The XPS spectrum of the outermost surface of the insulating coat has peaks observed at Cr2p1/2 and Cr2p3/2.

Abstract: A method for forming a Data Matrix Code or like two dimensional code on a beverage can tab uses a laser having a focal ratio of between 40 and 70 to produce spots having an average diameter of between 200 and 400 microns. The code is smaller than 6 mm by 6 mm, at least 12 modules by 12 modules, and smaller than 21 modules by 21 modules, thereby providing sufficient quantity of unique codes for use with commercial beverage can quantities. Preferably each module is formed by one laser spot. Alternatively, nine spots may be used to form a module.

Abstract: Provided are an insulating-coated oriented magnetic steel sheet having an insulating coating of excellent heat resistance, and a method for manufacturing the same. This insulating-coated oriented magnetic steel sheet has an oriented magnetic steel sheet, and an insulating coating arranged on the surface of the oriented magnetic steel sheet. The insulating coating contains Si, P, and O, and at least one element selected from the group consisting of Mg, Ca, Ba, Sr, Zn, Al, and Mn, the K-absorption edge of the P in the insulating coating having an XAFS spectrum that exhibits three absorption peaks from 2156 eV to 2180 eV.

Abstract: The present invention relates to a method for printing touch panel cover glass and a touch panel cover glass manufactured by using the same, the method comprising the steps of: a) inkjet-printing both black ink for a bezel and infrared-transmissive ink on a glass by using two or more inkjet heads; and b) forming a bezel layer and an infrared-transmissive layer by curing the substrate, wherein a gap between the inkjet-printed black ink for a bezel and infrared-transmissive ink printed in the step a) is 1 ?m to 500 ?m.