Patents Examined by Christine Sung
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Projection exposure apparatus for microlithography comprising an optical distance measurement system
Patent number: 9759550Abstract: A projection exposure apparatus (10) for microlithography has a plurality of optical components (M1-M6) forming an exposure beam path, as well as a distance measurement system (30, 130, 230) configured to measure a distance between at least one of the optical components and a reference element (40, 140, 240). The distance measurement system comprises a frequency comb generator (32, 132, 232), which is configured to generate electromagnetic radiation (36, 236) having a comb-shaped frequency spectrum.Type: GrantFiled: January 16, 2015Date of Patent: September 12, 2017Assignee: Carl Zeiss SMT GmbHInventors: Alexander Wolf, Markus Schwab, Toralf Gruner, Joachim Hartjes -
Patent number: 9755091Abstract: A dual-band infrared detector is provided. The dual-band infrared detector includes a first absorption layer sensitive to radiation in only a short wavelength infrared spectral band, a plurality of barrier layers coupled to the first absorption layer, and a second absorption layer coupled to the plurality of barrier layers opposite the first absorption layer. The second absorption layer is sensitive to radiation in only a medium wavelength infrared spectral band, and the first and second absorption layers are formed from materials having a lattice parameter mismatch less than a predetermined threshold.Type: GrantFiled: April 6, 2015Date of Patent: September 5, 2017Assignee: The Boeing CompanyInventor: Pierre-Yves Delaunay
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Patent number: 9728577Abstract: An infrared image sensor includes a bias circuit receiving a timing signal, the bias circuit generating a bias voltage having a first value and a second value in response to the timing signal; a semiconductor light-receiving device including a photodiode, the semiconductor light-receiving device receiving the bias voltage; a read-out circuit including a read-out electrode connected to the photodiode, the read-out electrode receiving an electrical signal from the photodiode; and a signal processing circuit processing a read-out signal from the read-out circuit synchronously with the timing signal. The photodiode includes an optical absorption layer made of a III-V group compound semiconductor. The optical absorption layer has a type II multi quantum well structure including first compound semiconductor layers containing antimony as a constituent element and second compound semiconductor layers that are stacked alternately.Type: GrantFiled: September 15, 2015Date of Patent: August 8, 2017Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.Inventors: Hiroshi Inada, Sundararajan Balasekaran
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Patent number: 9726548Abstract: A terahertz imager includes an array of pixel circuits. Each pixel circuit has an antenna and a detector. The detector is coupled to differential output terminals of the antenna. A frequency oscillator is configured to generate a frequency signal on an output line. The output line is coupled to an input terminal of the antenna of at least one of the pixel circuits.Type: GrantFiled: October 28, 2015Date of Patent: August 8, 2017Assignee: STMicroelectronics SAInventors: Hani Sherry, Andreia Cathelin, Andreas Kaiser, Ullrich Pfeiffer, Janusz Grzyb, Yan Zhao
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Projection exposure apparatus for microlithography comprising an optical distance measurement system
Patent number: 9714822Abstract: A projection exposure apparatus (10) for microlithography has a plurality of optical components (M1-M6) forming an exposure beam path, as well as a distance measurement system (30, 130, 230) configured to measure a distance between at least one of the optical components and a reference element (40, 140, 240). The distance measurement system comprises a frequency comb generator (32, 132, 232), which is configured to generate electromagnetic radiation (36, 236) having a comb-shaped frequency spectrum.Type: GrantFiled: January 16, 2015Date of Patent: July 25, 2017Assignee: Carl Zeiss SMT GmbHInventors: Alexander Wolf, Markus Schwab, Toralf Gruner, Joachim Hartjes -
Patent number: 9706146Abstract: An imager includes a flat panel configured to collect charges when the imager operates in a full-power charge integration mode. The imager switches to a low-power standby mode immediately after each image acquisition in the full-power charge integration mode. Bias current flowing through the flat panel is monitored in the standby mode. The imager switches to the full-power charge integration mode when detecting a change in the bias current indicating onset of an X-ray exposure.Type: GrantFiled: July 21, 2015Date of Patent: July 11, 2017Assignee: VARIAN MEDICAL SYSTEMS, INC.Inventors: Richard Colbeth, Richard Weisfield, Ivan Mollov, Cesar Proano, Pieter Roos
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Patent number: 9699422Abstract: Techniques and optically excited light-emitting devices based on phosphors are provided to use phosphor materials which absorb excitation light to emit visible light and include a composite phosphor material including two or more different transition metal compounds that, under optical excitation of the excitation light, emit visible light at spectrally close but different spectral wavelengths or bands that spectrally overlap to produce a desired color.Type: GrantFiled: October 4, 2011Date of Patent: July 4, 2017Assignee: PRYSM, INC.Inventor: Sergey A. Bukesov
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Patent number: 9678221Abstract: When a scintillator and a reinforcing member are bonded by using an adhesive, scattering and reflection occur at interfaces between the scintillator and the adhesive and between the adhesive and the reinforcing member. Due to this, a blurred image is formed on a sensor, and the resolution deteriorates. A radiation detecting element comprises: a substrate transparent to visible light; and a fluorescent screen that emits fluorescence in response to radiation by a dopant added to a material that is the same as a material of the substrate, wherein the fluorescent screen is thinner than the substrate, and the substrate and the fluorescent screen are bonded while maintaining continuity of a refractive index.Type: GrantFiled: August 27, 2015Date of Patent: June 13, 2017Assignee: RIKENInventor: Takashi Kameshima
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Patent number: 9671330Abstract: A portable spectrometer device includes an illumination source for directing at a sample, and a tapered light pipe (TLP) for capturing light interacting with the sample at a first focal ratio and for delivering the light at a second focal ratio lower than the first focal ratio. A linearly variable filter (LVF) separates the captured light into a spectrum of constituent wavelength signals; and a detector array, including a plurality of pixels, each of the plurality of pixels disposed to receive at least a portion of a plurality of the constituent wavelength signals provides a power reading for each constituent wavelength. Preferably, the TLP is lensed at one end, and recessed in a protective boot with stepped inner walls. The gap between the TLP and LVF is minimized to further enhance resolution and robustness.Type: GrantFiled: December 28, 2015Date of Patent: June 6, 2017Assignee: Viavi Solutions Inc.Inventors: Curtis R. Hruska, Charles A. Hulse, Brett J. Bryars, Marc K. Von Gunten, Christopher G. Pederson, Nada A. O'Brien, Jerry Zieba, Benjamin F. Catching
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Patent number: 9651689Abstract: A detector arrangement (10) for the detection of ionizing radiation comprises at least one light sensing device (14) and a multifunctional coating (12) arranged in an interacting relation to said at least one light sensing device (14), whereby said multifunctional coating (12) is configured to perform the functions of reflecting light of a given wavelength; and converting at least part of thermal and/or epi-thermal neutrons entering said multifunctional coating (12) into light (15).Type: GrantFiled: June 24, 2013Date of Patent: May 16, 2017Assignee: Arktis Radiation Detectors LtdInventors: Ulisse Gendotti, Rico Chandrasekharan, Leonard Goeltl, Giovanna Davatz
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Patent number: 9645257Abstract: A radiation sensor can include a first layer and a second layer. The first layer can include a first scintillation material to produce first light in response to receiving a first targeted radiation, and the second layer can include a second scintillation material to produce second light in response to receiving a second targeted radiation. The first scintillation material can be different from the second scintillation material, and the first targeted radiation can be different from the second targeted radiation. The first layer can be configured to receive and transmit the second light. In an embodiment, the radiation sensor can be part of a radiation detection system that includes a photosensor that can produce an electronic pulse in response to the first and second lights. A method of detecting radiation can include using the radiation detection system to distinguish different radiations by differences in pulse shape.Type: GrantFiled: April 28, 2014Date of Patent: May 9, 2017Assignee: SAINT-GOBAIN CERAMICS & PLASTICS, INC.Inventor: Michael R. Kusner
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Patent number: 9645098Abstract: The invention relates to a detection system (1) for detecting a soldered joint (16, 17) of an electronic component (10), particularly an integrated circuit. The component comprises a cuboid enclosure. The detection system comprises a detection device (2) with an emitter (5) for electromagnetic radiation and a detector (6) for the electromagnetic radiation. The detection device is designed to generate electromagnetic radiation (18, 19) with the emitter and to transmit said radiation to the component. The detector is arranged and designed to detect electromagnetic radiation (18?, 19?) reflected by the component and to generate an image data set representing the reflected radiation.Type: GrantFiled: May 26, 2014Date of Patent: May 9, 2017Assignee: Robert Bosch GmbHInventors: Stefan Scheller, Torsten Hundert, Marco Braun
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Patent number: 9625378Abstract: A fluid analyzer includes an optical source and an optical detector defining an optical beam path through an interrogation region of a fluid flow cell. Flow-control devices conduct analyte and reference fluids through a channel and the interrogation region, and manipulate fluid flow in response to control signals to move a fluid boundary separating the analyte and reference fluids across the interrogation region. A controller generates control signals to (1) cause the fluid boundary to be moved across the interrogation region accordingly, (2) sample an output signal from the optical detector at a first interval during which the interrogation region contains more analyte fluid than reference fluid and at a second interval during which the interrogation region contains more reference fluid than analyte fluid, and (3) determine from samples of the output signal a measurement value indicative of an optically measured characteristic of the analyte fluid.Type: GrantFiled: March 30, 2015Date of Patent: April 18, 2017Assignee: Redshift Bioanalytics, Inc.Inventors: Charles McAlister Marshall, Donald Kuehl, Jeffrey Guasto
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Patent number: 9625386Abstract: An imaging system includes: a first lighting device for irradiating an imaging target object with visible light; a second lighting device for irradiating the imaging target object with near-infrared light; and an image sensor for photodetecting visible light caused by the visible light and coming from the imaging target object and fluorescence caused by the near-infrared light and coming from the imaging target object during a predetermined shutter open period every frame of a predetermined period. The image sensor outputs photodetection signals corresponding to photodetection amounts of the visible light and the fluorescence. The imaging system also includes a controller that generates a composite image of a visible image and a fluorescence image based on the photodetection signals, and has a lighting controller that turns on the second lighting device with optical power corresponding to the shutter open period in synchronism with the shutter open period.Type: GrantFiled: September 10, 2014Date of Patent: April 18, 2017Assignees: IWASAKI ELECTRIC CO., LTD., KOCHI UNIVERSITYInventors: Mitsuyuki Hatanaka, Takashi Sato, Nozomu Kajiwara, Takaaki Komiya, Takayuki Sato
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Patent number: 9618824Abstract: Systems and methods may provide for an integrated miniature sensor that operates in the Terahertz region of the electromagnetic spectrum. The integrated miniature sensor may detect a remote target and operate in a non-contact, non-invasive manner. Numerous signal analysis techniques may be employed such as Doppler radar technology, absorption spectroscopy, and others when the integrated miniature sensor is used in biomedical, physiological and other settings where prolonged recording of bio-signals is needed.Type: GrantFiled: September 27, 2014Date of Patent: April 11, 2017Assignee: Intel CorporationInventors: Edris M. Mohammed, Ibrahim Ban
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Patent number: 9612344Abstract: Methods of a high resolution, stationary imaging detector for use in systems for positron emission tomography or single photon emission tomography that uses shadowing effects from intensity attenuation to provide three dimensional positioning information for a source of activity within a field of view of the detector.Type: GrantFiled: January 27, 2015Date of Patent: April 4, 2017Assignee: THETA POINT, LLCInventors: Everett Eugene Van Zuiden, Nicholas Disher, Weidong Luo, Lorenzo Ramirez Lugo
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Patent number: 9586060Abstract: Radiotherapy is one of the most effective treatments for cancer and its success depends critically on accurate targeting and delivery of the correct radiation dose. Accurate dosimetry is therefore essential to maintain and improve patient survival rates. However, size and long wait times currently limit water and graphite based calorimeters to standards laboratories leaving field-based dosimetry to ionization chamber measurements which depend upon a reference field-specified calibration factor. It would therefore be beneficial to provide radiotherapy equipment operators a direct approach of clinical reference dosimetry wherein the dosimeter provides increased independence on dose, dose rate, radiation energy, and energy type, etc. It would be further beneficial for such novel clinical dosimeters to be compact, function as secondary standards used routinely for measurements and allow radiotherapy doses to be measured directly and in an absolute manner.Type: GrantFiled: May 29, 2013Date of Patent: March 7, 2017Assignee: The Royal Institution for the Advancement of Learning/McGill UniversityInventors: Jan Seuntjens, Arman Sarfehnia, James Renaud
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Patent number: 9568618Abstract: Provided is a radiation detector including a scintillator which generates, when a radial ray enters, scintillation light having light intensity according to energy of the radial ray, and then supplies a photon of the scintillation light to each of a plurality of pixels, a radial ray detection unit which detects whether or not the radial ray is made to enter based on a number of the photons supplied in an exposure period whenever the plurality of pixels are exposed by the scintillation light over the exposure period, and an exposure period adjusting unit which adjusts the exposure period based on an incident frequency of the detected radial ray.Type: GrantFiled: April 9, 2013Date of Patent: February 14, 2017Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATIONInventors: Toshiyuki Nishihara, Hirofumi Sumi
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Patent number: 9569953Abstract: A motion sensor includes an infrared detector with a first set of detector elements and a second set of detector elements. The motion sensor also includes an optical system to direct electromagnetic energy from a first set of monitored volumes spaced at a pitch in a first direction onto the first set of detector elements and to direct electromagnetic energy from a second set of monitored volumes spaced at the pitch in the first direction onto the second set of detector elements. The second set of monitored volumes have an offset from the first set of monitored volumes in the first direction.Type: GrantFiled: September 17, 2015Date of Patent: February 14, 2017Assignee: Greenwave Systems PTE LTDInventor: Eric Scott Micko
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Patent number: 9568620Abstract: Embodiments of a solid state photomultiplier are provided herein. In some embodiments, a photosensor may include a sensing element; and readout electronics, wherein the sensing element is AC coupled to the readout electronics. In some embodiments, a solid state photomultipler may include a microcell having; a sensing element; and readout electronics, wherein the sensing element is AC coupled to the readout electronics.Type: GrantFiled: September 11, 2015Date of Patent: February 14, 2017Assignee: General Electric CompanyInventors: JianJun Guo, Sergei Ivanovich Dolinsky, David Leo McDaniel, Jonathan David Short