Patents Examined by Dale E Page
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Patent number: 11751416Abstract: A display device including a display panel having a first surface and a second surface opposite to the first surface, a guide structure disposed on the first surface of the display panel, and a window disposed on the second surface of the display panel, in which the guide structure includes a guide film configured to apply a preliminary pressure to the display panel, and a cover panel disposed between the guide film and the display panel, the cover panel including a cushion layer.Type: GrantFiled: February 21, 2020Date of Patent: September 5, 2023Assignee: Samsung Display Co., LTD.Inventors: Eunjoong Mun, Hyung-Don Na, Dong Yeon Lee, Jungkyu Jo, Hyeon Deuk Hwang
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Patent number: 11749595Abstract: A method to produce a semiconductor package or system-on-flex package comprising bonding structures for connecting IC/chips to fine pitch circuitry using a solid state diffusion bonding is disclosed. A plurality of traces is formed on a substrate, each respective trace comprising at least four different conductive materials having different melting points and plastic deformation properties, which are optimized for both diffusion bonding of chips and soldering of passives components.Type: GrantFiled: May 10, 2021Date of Patent: September 5, 2023Assignee: Compass Technology Company LimitedInventors: Kelvin Po Leung Pun, Chee Wah Cheung
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Patent number: 11749564Abstract: Embodiments herein include void-free material depositions on a substrate (e.g., in a void-free trench-filled (VFTF) component) obtained using directional etching to remove predetermined portions of a seed layer covering the substrate. In several embodiments, directional etching followed by selective deposition can enable fill material (e.g., metal) patterning in tight spaces without any voids or seams. Void-free material depositions may be used in a variety of semiconductor devices, such as transistors, dual work function stacks, dynamic random-access memory (DRAM), non-volatile memory, and the like.Type: GrantFiled: September 22, 2020Date of Patent: September 5, 2023Assignee: Applied Materials, Inc.Inventors: M. Arif Zeeshan, Kelvin Chan, Shantanu Kallakuri, Sony Varghese, John Hautala
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Patent number: 11749185Abstract: A display device including a display panel, in which a display region including a plurality of organic light emitting devices and a non-display region adjacent to the display region are defined, a protection film disposed below the display panel, a first adhesive layer contacting a bottom surface of the protection film, a supporting layer comprising a metallic material, at least overlapping the entire display region, and contacting the first adhesive layer, an input-sensing unit disposed on the display panel, an anti-reflection unit disposed on the input-sensing unit, and a window panel disposed on the input-sensing unit.Type: GrantFiled: September 16, 2020Date of Patent: September 5, 2023Assignee: Samsung Display Co., Ltd.Inventors: Seongsik Ahn, Gyunsoo Kim, Minki Kim, Jeongjin Kim, Soon-Sung Park
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Patent number: 11749639Abstract: Die-substrate assemblies having sinter-bonded backside via structures, and methods for fabricating such die-substrate assemblies, are disclosed. In embodiments, the method includes obtaining an integrated circuit (IC) die having a backside over which a backmetal layer is formed and into which a plated backside via extends. The IC die is attached to an electrically-conductive substrate by: (i) applying sinter precursor material over the backmetal layer and into the plated backside via; (ii) positioning a frontside of the electrically-conductive substrate adjacent the plated backmetal layer and in contact with the sinter precursor material; and (iii) sintering the sinter precursor material to yield a sintered bond layer attaching and electrically coupling the IC die to the frontside of the electrically-conductive substrate through the backmetal layer and through the plated backside via. The sintered bond layer contacts and is metallurgically bonded to the backside via lining.Type: GrantFiled: October 13, 2021Date of Patent: September 5, 2023Assignee: NXP USA, Inc.Inventors: Lakshminarayan Viswanathan, Jaynal A. Molla
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Patent number: 11749632Abstract: A power electronics module includes a glass layer with one or more vias extending through the glass layer and having an electrically and thermally conductive material disposed within the one or more vias, a power electronic device directly bonded to a first surface of the glass layer, and, a cooling structure thermally coupled to a second surface of the glass layer.Type: GrantFiled: March 31, 2021Date of Patent: September 5, 2023Assignee: Toyota Motor Engineering & Manufacturing North America, Inc.Inventors: Shailesh N. Joshi, Hiroshi Ukegawa
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Patent number: 11742210Abstract: The present disclosure provides a method to enlarge the process window for forming a source/drain contact. The method may include receiving a workpiece that includes a source/drain feature exposed in a source/drain opening defined between two gate structures, conformally depositing a dielectric layer over sidewalls of the source/drain opening and a top surface of the source/drain feature, anisotropically etching the dielectric layer to expose the source/drain feature, performing an implantation process to the dielectric layer, and after the performing of the implantation process, performing a pre-clean process to the workpiece. The implantation process includes a non-zero tilt angle.Type: GrantFiled: April 15, 2021Date of Patent: August 29, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Meng-Han Chou, Kuan-Yu Yeh, Wei-Yip Loh, Hung-Hsu Chen, Su-Hao Liu, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo
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Patent number: 11735435Abstract: A quad flat no lead (“QFN”) package that includes a die having an active side positioned substantially in a first plane and a backside positioned substantially in a second plane parallel to the first plane; a plurality of separate conductive pads each having a first side positioned substantially in the first plane and a second side positioned substantially in the second plane; and mold compound positioned between the first and second planes in voids between the conductive pads and the dies. Also a method of producing a plurality of QFN packages includes forming a strip of plastic material having embedded therein a plurality of dies and a plurality of conductive pads that are wire bonded to the dies and singulating the strip into a plurality of QFN packages by cutting through only the plastic material.Type: GrantFiled: April 20, 2020Date of Patent: August 22, 2023Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Dan Okamoto, Hiroyuki Sada
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Patent number: 11735431Abstract: In a pattern formation method, a first organic film is formed on a film to be etched and contains a metal. A second organic film is formed on the first organic film, and has a higher density than a density of the first organic film. The first and second organic films are patterned to form a mask, and the film to be etched is etched using the mask.Type: GrantFiled: September 3, 2020Date of Patent: August 22, 2023Assignee: KIOXIA CORPORATIONInventor: Yusuke Kasahara
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Patent number: 11735474Abstract: A FinFET device structure is provided. The FinFET device structure includes a fin structure formed over a substrate, and a gate structure formed over the fin structure. The FinFET device structure includes a source/drain (S/D) structure formed over the fin structure and adjacent to the gate structure, and an S/D contact structure formed over the S/D structure and adjacent to the gate structure. The FinFET device structure also includes a protection layer formed on the S/D contact structure, and the protection layer and the S/D contact structure are made of different materials. The protection layer has a bottommost surface in direct contact with a topmost surface of the S/D contact structure.Type: GrantFiled: December 14, 2020Date of Patent: August 22, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Yuan Chen, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang
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Patent number: 11735420Abstract: Methods of depositing a film selectively onto a first material relative to a second material are described. The substrate is pre-cleaned by heating the substrate to a first temperature, cleaning contaminants from the substrate and activating the first surface to promote formation of a self-assembled monolayer (SAM) on the first material. A SAM is formed on the first material by repeated cycles of SAM molecule exposure, heating and reactivation of the first material. A final exposure to the SAM molecules is performed prior to selectively depositing a film on the second material. Apparatus to perform the selective deposition are also described.Type: GrantFiled: September 8, 2020Date of Patent: August 22, 2023Assignee: Applied Materials, Inc.Inventors: Chang Ke, Lei Zhou, Biao Liu, Cheng Pan, Yuanhong Guo, Liqi Wu, Michael S. Jackson, Ludovic Godet, Tobin Kaufman-Osborn, Erica Chen, Paul F. Ma
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Patent number: 11735547Abstract: A method of selectively transferring micro devices from a donor substrate to contact pads on a receiver substrate. Micro devices being attached to a donor substrate with a donor force. The donor substrate and receiver substrate are aligned and brought together so that selected micro devices meet corresponding contact pads. A receiver force is generated to hold selected micro devices to the contact pads on the receiver substrate. The donor force is weakened and the substrates are moved apart leaving selected micro devices on the receiver substrate. Several methods of generating the receiver force are disclosed, including adhesive, mechanical and electrostatic techniques.Type: GrantFiled: January 6, 2022Date of Patent: August 22, 2023Assignee: VueReal Inc.Inventors: Gholamreza Chaji, Ehsanollah Fathi
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Patent number: 11735545Abstract: A method of selectively transferring micro devices from a donor substrate to contact pads on a receiver substrate. Micro devices being attached to a donor substrate with a donor force. The donor substrate and receiver substrate are aligned and brought together so that selected micro devices meet corresponding contact pads. A receiver force is generated to hold selected micro devices to the contact pads on the receiver substrate. The donor force is weakened and the substrates are moved apart leaving selected micro devices on the receiver substrate. Several methods of generating the receiver force are disclosed, including adhesive, mechanical and electrostatic techniques.Type: GrantFiled: July 1, 2021Date of Patent: August 22, 2023Assignee: VueReal Inc.Inventors: Gholamreza Chaji, Ehsanollah Fathi
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Patent number: 11735415Abstract: A first main surface is a (000-1) plane or a plane inclined by an angle of less than or equal to 8° relative to the (000-1) plane. A reaction chamber has a cross-sectional area of more than or equal to 132 cm2 and less than or equal to 220 cm2 in a plane perpendicular to a direction of movement of a mixed gas. When an X axis indicates a first value and a Y axis indicates a second value, the first value and the second value fall within a hexagonal region surrounded by first coordinates, second coordinates, third coordinates, fourth coordinates, fifth coordinates and sixth coordinates in XY plane coordinates, where the first coordinates are (0.038, 0.0019), the second coordinates are (0.069, 0.0028), the third coordinates are (0.177, 0.0032), the fourth coordinates are (0.038, 0.0573), the fifth coordinates are (0.069, 0.0849), and the sixth coordinates are (0.177, 0.0964).Type: GrantFiled: June 28, 2019Date of Patent: August 22, 2023Assignee: Sumitomo Electric Industries, Ltd.Inventors: Takaya Miyase, Keiji Wada
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Patent number: 11735546Abstract: A method of selectively transferring micro devices from a donor substrate to contact pads on a receiver substrate. Micro devices being attached to a donor substrate with a donor force. The donor substrate and receiver substrate are aligned and brought together so that selected micro devices meet corresponding contact pads. A receiver force is generated to hold selected micro devices to the contact pads on the receiver substrate. The donor force is weakened and the substrates are moved apart leaving selected micro devices on the receiver substrate. Several methods of generating the receiver force are disclosed, including adhesive, mechanical and electrostatic techniques.Type: GrantFiled: January 6, 2022Date of Patent: August 22, 2023Assignee: VueReal Inc.Inventors: Gholamreza Chaji, Ehsanollah Fathi
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Patent number: 11735642Abstract: A method includes providing a layer of porous silicon carbide supported by a silicon carbide substrate, providing a layer of epitaxial silicon carbide on the layer of porous silicon carbide, forming a plurality of semiconductor devices in the layer of epitaxial silicon carbide, and separating the substrate from the layer of epitaxial silicon carbide at the layer of porous silicon carbide. Additional methods are described.Type: GrantFiled: May 7, 2021Date of Patent: August 22, 2023Assignee: Infineon Technologies AGInventors: Hans-Joachim Schulze, Roland Rupp, Francisco Javier Santos Rodriguez
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Patent number: 11728295Abstract: In a method of manufacturing a semiconductor device, an opening is formed in a first dielectric layer so that a part of a lower conductive layer is exposed at a bottom of the opening, one or more liner conductive layers are formed over the part of the lower conductive layer, an inner sidewall of the opening and an upper surface of the first dielectric layer, a main conductive layer is formed over the one or more liner conductive layers, a patterned conductive layer is formed by patterning the main conductive layer and the one or more liner conductive layers, and a cover conductive layer is formed over the patterned conductive layer. The main conductive layer which is patterned is wrapped around by the cover conductive layer and one of the one or more liner conductive layers.Type: GrantFiled: July 6, 2021Date of Patent: August 15, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tsung-Chieh Hsiao, Hsiang-Ku Shen, Yuan-Yang Hsiao, Ying-Yao Lai, Dian-Hau Chen
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Patent number: 11728394Abstract: A semiconductor structure and a method of forming the same are provided. In an embodiment, an exemplary method of forming the semiconductor structure includes forming a fin structure extending from a front side of a substrate, recessing a source region of the fin structure to form a source opening, forming a semiconductor plug under the source opening, planarizing the substrate to expose the semiconductor plug from a back side of the substrate, performing a pre-amorphous implantation (PAI) process to amorphize the substrate, replacing the amorphized substrate with a dielectric layer, and replacing the semiconductor plug with a backside source contact. By performing the PAI process, crystalline semiconductor is amorphized and may be substantially removed. Thus, the performance and reliability of the semiconductor structure may be advantageously improved.Type: GrantFiled: January 27, 2021Date of Patent: August 15, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Po-Yu Huang, Chen-Ming Lee, I-Wen Wu, Fu-Kai Yang, Mei-Yun Wang
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Patent number: 11728421Abstract: A power semiconductor device includes a semiconductor layer having a first conductivity type. A pillar is provided in the semiconductor layer and has a second conductivity type that is different than the first conductivity type. A first trench gate is provided in the pillar proximate to a first vertical edge of the pillar. A second trench gate is provided in the pillar proximate to a second vertical edge of the pillar, the second vertical edge being on an opposing side of the pillar of the first vertical edge. A first electrode is provided over a first side of the semiconductor layer. A second electrode is provided over a second side of the semiconductor layer.Type: GrantFiled: February 27, 2020Date of Patent: August 15, 2023Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventor: Wonhwa Lee
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Patent number: 11728306Abstract: A method of selectively transferring micro devices from a donor substrate to contact pads on a receiver substrate. Micro devices being attached to a donor substrate with a donor force. The donor substrate and receiver substrate are aligned and brought together so that selected micro devices meet corresponding contact pads. A receiver force is generated to hold selected micro devices to the contact pads on the receiver substrate. The donor force is weakened and the substrates are moved apart leaving selected micro devices on the receiver substrate. Several methods of generating the receiver force are disclosed, including adhesive, mechanical and electrostatic techniques.Type: GrantFiled: January 6, 2022Date of Patent: August 15, 2023Assignee: VueReal Inc.Inventors: Gholamreza Chaji, Ehsanollah Fathi