Patents Examined by David S. Blum
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Patent number: 10964613Abstract: A device includes a die comprising a sensor. The device also includes a substrate that is coupled to the die via the electrical coupling. The device further includes a packaging container. The packaging container and the substrate form a housing for the die. The packaging container comprises an opening that exposes at least a portion of the die to an environment external to the housing. The exposed surfaces of the die, interior of the housing, the electrical coupling, and the substrate to the environment external to the housing through the opening are coated with a conformal film. The conformal film prevents liquid, e.g., water, gas, etc., contact to the exposed surfaces of the die, the electrical coupling and the substrate.Type: GrantFiled: April 8, 2019Date of Patent: March 30, 2021Assignee: InvenSense, Inc.Inventor: Calin Miclaus
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Patent number: 10950498Abstract: Methods of dep-etch in semiconductor devices (e.g. V-NAND) are described. A metal layer is deposited in a feature. The metal layer is removed by low temperature atomic layer etching by oxidizing the surface of the metal layer and etching the oxide in a layer-by-layer fashion. After removal of the metal layer, the features are filled with a metal.Type: GrantFiled: September 26, 2019Date of Patent: March 16, 2021Assignee: APPLIED MATERIALS, INC.Inventors: Susmit Singha Roy, Srinivas Gandikota, Pramit Manna, Abhijit Basu Mallick
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Patent number: 10930570Abstract: Methods for manufacturing a display device are provided. A representative method includes: providing a substrate having a plurality of sub-pixel locations; providing a carrier substrate supporting a plurality of light emitting diodes (LEDs); conducting a testing to at least one of the plurality of LEDs on the carrier substrate; transferring at least a portion of the plurality of LEDs from the carrier substrate to the substrate; fixing the portion of the plurality of LEDs to the substrate; providing an insulator over the substrate; and providing a first electrode electrically connected to at least one of the portion of the plurality of LEDs.Type: GrantFiled: December 20, 2019Date of Patent: February 23, 2021Assignee: INNOLUX CORPORATIONInventors: Chia-Hsiung Chang, Ting-Kai Hung, Hsiao-Lang Lin
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Patent number: 10886172Abstract: Methods of wordline separation in semiconductor devices (e.g., 3D-NAND) are described. A metal film is deposited in the wordlines and on the surface of a stack of spaced oxide layers. The metal film is removed by high temperature oxidation and etching of the oxide or low temperature atomic layer etching by oxidizing the surface and etching the oxide in a monolayer fashion. After removal of the metal overburden, the wordlines are filled with the metal film.Type: GrantFiled: April 14, 2020Date of Patent: January 5, 2021Assignee: Applied Materials, Inc.Inventors: Yihong Chen, Ziqing Duan, Abhijit Basu Mallick, Kelvin Chan
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Patent number: 10873029Abstract: A vapor deposition mask preparation body in which a metal mask is provided on one surface of a resin plate for obtaining a resin mask, and a protective sheet with peel strength not less than about 0.0004 N/10 mm and less than about 0.2 N/10 mm in conformity with JIS Z-0237:2009 is provided on the other surface of the resin plate is prepared, with respect to the vapor deposition mask preparation body, the resin plate is irradiated with laser light from the metal mask side to form a resin mask opening corresponding to a pattern to be produced by vapor deposition in the resin plate, and the protective sheet is peeled off from the resin mask in which the resin mask opening corresponding to the pattern to be produced by vapor deposition is formed.Type: GrantFiled: April 7, 2020Date of Patent: December 22, 2020Assignee: Dai Nippon Printing Co., Ltd.Inventors: Toshihiko Takeda, Kumiko Hokari, Yasuko Sone, Katsunari Obata
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Patent number: 10854641Abstract: An object is to improve the drive capability of a semiconductor device. The semiconductor device includes a first transistor and a second transistor. A first terminal of the first transistor is electrically connected to a first wiring. A second terminal of the first transistor is electrically connected to a second wiring. A gate of the second transistor is electrically connected to a third wiring. A first terminal of the second transistor is electrically connected to the third wiring. A second terminal of the second transistor is electrically connected to a gate of the first transistor. A channel region is formed using an oxide semiconductor layer in each of the first transistor and the second transistor. The off-state current of each of the first transistor and the second transistor per channel width of 1 ?m is 1 aA or less.Type: GrantFiled: March 19, 2020Date of Patent: December 1, 2020Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hajime Kimura, Atsushi Umezaki, Shunpei Yamazaki
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Method for fabricating array substrate motherboard, array substrate motherboard and detection method
Patent number: 10847554Abstract: A method for fabricating an array substrate motherboard, an array substrate motherboard and a detection method are provided. The method for fabricating an array substrate motherboard includes depositing a first film on a substrate, wherein a first gap is present between the edge of the first film and the edge of the substrate, coating photoresist on the substrate on which the first film is deposited, and exposing and developing the photoresist to form a first scale pattern from the photoresist. One end of the first scale pattern is flush with the edge of the substrate and the other end covers the first film.Type: GrantFiled: May 2, 2018Date of Patent: November 24, 2020Assignees: BEIJING BOE DISPLAY TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.Inventors: Fangbin Fu, Huibin Guo, Shoukun Wang, Hao Han, Yongzhi Song -
Patent number: 10840310Abstract: A display device includes a substrate having a display area and a non-display area located at an outer periphery of the display area; a transistor layer disposed on the substrate; a plurality of partition walls disposed on the transistor layer in the display area; a light emitting element disposed between the partition walls; and a spacer configured to be disposed in the non-display area of the substrate, wherein the spacer may include a spacer body disposed on the same layer as the partition walls and on at least a portion of the transistor layer.Type: GrantFiled: March 8, 2019Date of Patent: November 17, 2020Assignee: Samsung Display Co., Ltd.Inventors: Ji Hye Heo, Soon Jung Wang, Eun Ju Lee
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Patent number: 10840320Abstract: Systems, methods, and computer-readable media for sensing ambient light with a display assembly are provided. A display assembly may include at least one light-generating component and at least one light-detecting component, each of which may be positioned underneath a single opening in an electronic device housing.Type: GrantFiled: December 14, 2018Date of Patent: November 17, 2020Assignee: APPLE INC.Inventors: Mohammad Yeke Yazdandoost, Giovanni Gozzini, Volodymyr Borshch
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Patent number: 10840291Abstract: Some embodiments provide a color image sensor and color image sampling method that uses multiple-layer pixels and is capable of producing color images without using absorption color filters (e.g., such as employed in conventional CFAs). In accordance with some embodiments of the color image sensor device and color image sampling method, frequency-dependent reflectors are incorporated between the photodetection layers of multiple-layer (e.g., two layer) pixels.Type: GrantFiled: December 25, 2018Date of Patent: November 17, 2020Assignee: Trustees of Dartmouth CollegeInventors: Leo Anzagira, Eric R. Fossum
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Patent number: 10840410Abstract: Various embodiments of SST dies and solid state lighting (“SSL”) devices with SST dies, assemblies, and methods of manufacturing are described herein. In one embodiment, a SST die includes a substrate material, a first semiconductor material and a second semiconductor material on the substrate material, an active region between the first semiconductor material and the second semiconductor material, and a support structure defined by the substrate material. In some embodiments, the support structure has an opening that is vertically aligned with the active region.Type: GrantFiled: February 28, 2020Date of Patent: November 17, 2020Assignee: Micron Technology, Inc.Inventors: Vladimir Odnoblyudov, Martin F. Schubert
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Patent number: 10833177Abstract: Semiconductor device and fabrication method are provided. The method includes: providing a substrate having a fin which has first fin layers and second fin layers; forming a dummy gate structure across the fin; after forming the dummy gate structure, respectively forming a first groove and a second groove in the fin on two sides of the dummy gate structure; removing a portion of the second fin layer adjacent to the first groove to form a first fin recess; removing a portion of the second fin layer adjacent to the second groove to form a second fin recess; forming a first spacer layer in the first fin recess and forming a second spacer layer in the second fin recess; after forming the first spacer layer, forming a doped drain layer in the first groove; and after forming the second spacer layer, forming a doped source layer in the second groove.Type: GrantFiled: August 1, 2019Date of Patent: November 10, 2020Assignees: Semiconductor Manufacturing International (Beijing) Corporation, Semiconductor Manufacturing International (Shanghai) CorporationInventor: Fei Zhou
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Patent number: 10825849Abstract: A solid-state image pickup device 1 according to the present invention includes a semiconductor substrate 2 on which a pixel 20 composed of a photodiode 3 and a transistor is formed. The transistor comprising the pixel 20 is formed on the surface of the semiconductor substrate, a pn junction portion formed between high concentration regions of the photodiode 3 is provided within the semiconductor substrate 2 and a part of the pn junction portion of the photodiode 3 is extended to a lower portion of the transistor formed on the surface of the semiconductor substrate 2. According to the present invention, there is provided a solid-state image pickup device in which a pixel size can be microminiaturized without lowering a saturated electric charge amount (Qs) and sensitivity.Type: GrantFiled: February 15, 2019Date of Patent: November 3, 2020Assignee: Sony CorporationInventors: Takayuki Ezaki, Teruo Hirayama
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Patent number: 10818648Abstract: A semiconductor module includes: a semiconductor package in which a semiconductor device is incorporated; a snubber circuit having a snubber capacitor and a snubber resistor which are connected in parallel to the semiconductor device; a first light-emitting device emitting light when residual voltage between an anode and a cathode of the semiconductor device becomes equal to or higher than first voltage; and a second light-emitting device emitting light when the residual voltage becomes equal to or higher than second voltage, wherein the first and second voltages are different from each other.Type: GrantFiled: May 7, 2019Date of Patent: October 27, 2020Assignee: Mitsubishi Electric CorporationInventor: Kouichi Yoshimura
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Patent number: 10811594Abstract: A method for fabricating an array of pillars. The method includes fabricating an MTJ (magnetic tunnel junction) film deposition metal stack on a CMOS wafer. The method selects between subsequent electron beam patterning for the wafer and photolithography patterning for the wafer. For electron beam patterning, an electron beam lithography hard mask is deposited onto the metal stack, and an electron beam is used to pattern a first array of pillars into the electron beam lithography hard mask to produce a first resulting pillar array. For photolithography patterning, a photolithography hard mask is deposited onto the metal stack, and photolithography is used to pattern a second array of pillars into the photolithography hard mask to produce a second resulting pillar array. The first resulting pillar array is substantially the same as the second resulting pillar array.Type: GrantFiled: December 28, 2017Date of Patent: October 20, 2020Assignee: Spin Memory, Inc.Inventors: Prachi Shrivastava, Daniel Liu, Yuan Tung Chin
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Patent number: 10811411Abstract: Disclosed are a method of forming a fin-type field effect transistor (FINFET) and a FINFET structure. In the method, isolation regions are formed on opposing sides of a semiconductor fin. Each isolation region is shorter than the fin, has a lower isolation portion adjacent to a lower fin portion, and has an upper isolation portion that is narrower than the lower isolation portion and separated from a bottom section of an upper fin portion by a space. Surface oxidation of the upper fin portion thins the top section, but leaves the bottom section relatively wide. During gate formation, the gate dielectric layer fills the spaces between the bottom section of the upper fin portion and the adjacent isolation regions. Thus, the gate conductor layer is formed above any fin bulge area and degradation of gate control over the channel region due to a non-uniform fin width is minimized or avoided.Type: GrantFiled: July 2, 2019Date of Patent: October 20, 2020Assignee: GLOBALFOUNDRIES INC.Inventors: Jiehui Shu, Bharat V. Krishnan
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Patent number: 10797197Abstract: A thin film, flexible optoelectronic device is described. In an aspect, a method for fabricating a single junction optoelectronic device includes forming a p-n structure on a substrate, the p-n structure including a semiconductor having a lattice constant that matches a lattice constant of substrate, the semiconductor including a dilute nitride, and the single-junction optoelectronic device including the p-n structure; and separating the single-junction optoelectronic device from the substrate. The dilute nitride includes one or more of GaInNAs, GaInNAsSb, alloys thereof, or derivatives thereof.Type: GrantFiled: June 18, 2018Date of Patent: October 6, 2020Assignee: ALTA DEVICES, INC.Inventors: Nikhil Jain, Brendan M. Kayes, Gang He
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Patent number: 10797151Abstract: The present disclosure describes a method for the formation of gate stacks having two or more titanium-aluminum (TiAl) layers with different Al concentrations (e.g., different Al/Ti ratios). For example, a gate structure can include a first TiAl layer with a first Al/Ti ratio and a second TiAl layer with a second Al/Ti ratio greater than the first Al/Ti ratio of the first TiAl layer.Type: GrantFiled: June 11, 2019Date of Patent: October 6, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Wei Wang, Chia-Ming Tsai, Ke-Chih Liu, Chandrashekhar Prakash Savant, Tien-Wei Yu
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Patent number: 10797042Abstract: A semiconductor device includes a semiconductor substrate, a first standard cell including a first active region and a second active region, and a power switching circuit including a first switching transistor electrically connected between a first interconnect and a second interconnect over the semiconductor substrate, and including a first buffer connected to a gate of the first switching transistor, the first buffer including a third active region and a fourth active region, and wherein the first buffer adjoins, in a plan view, the first standard cell in a first direction, wherein an arrangement of the first active region matches an arrangement of the third active region in a second direction different from the first direction, and wherein an arrangement of the second active region matches an arrangement of the fourth active region in the second direction.Type: GrantFiled: June 11, 2019Date of Patent: October 6, 2020Assignee: SOCIONEXT INC.Inventors: Wenzhen Wang, Hirotaka Takeno, Atsushi Okamoto
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Patent number: 10790185Abstract: Some embodiments include a method of forming an integrated assembly. A construction is formed to include a structure having an exposed surface, and to include an opening proximate the structure. An aperture extends into the opening. A first material is deposited to form a mass along the exposed surface of the structure. Particles are sputtered from the mass and across the aperture. The particles agglomerate to form a sealant material which traps a void within the opening.Type: GrantFiled: August 8, 2019Date of Patent: September 29, 2020Assignee: Micron Technology, Inc.Inventor: Guangjun Yang