Patents Examined by Dion Ferguson
  • Patent number: 10431425
    Abstract: Embodiments of systems and methods for a poly-phased inductively coupled plasma source are described. In an embodiment, a system may include a metal source configured to supply a metal for ionized physical vapor deposition on a substrate in a process chamber. The system may also include a high-density plasma source configured to generate a dense plasma, the high-density plasma source comprising a plurality of inductively coupled antennas. Additionally, the system may include a substrate bias source configured to provide a potential necessary to thermalize and ionize the plasma. In such embodiments, each antenna is configured to receive power at a phase orientation determined according to a phase arrangement.
    Type: Grant
    Filed: March 29, 2016
    Date of Patent: October 1, 2019
    Assignee: Tokyo Electron Limited
    Inventor: Jozef Brcka
  • Patent number: 10431392
    Abstract: An electrical storage device includes an electrical storage element and an electrolytic solution. The electrical storage element is formed of an anode body, a cathode body facing the anode body, and a separator interposed between the anode body and the cathode body. The separator includes a separator substrate and a conductive polymer adhering to the separator substrate. The electrical storage element is impregnated with the electrolytic solution. The separator includes a first surface layer having a first surface facing the anode body and a second surface layer having a second surface facing the cathode body. The first surface layer includes a first region that is not provided with the conductive polymer, and the second surface layer includes a second region provided with the conductive polymer.
    Type: Grant
    Filed: December 13, 2017
    Date of Patent: October 1, 2019
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Daisuke Kubo, Masayuki Takahashi, Yukihiro Shimasaki, Tomoyuki Tashiro, Tatsuji Aoyama
  • Patent number: 10424461
    Abstract: Systems and methods controlling ion energy within a plasma chamber are described. One of the systems includes an upper electrode coupled to a sinusoidal RF generator for receiving a sinusoidal signal and a nonsinusoidal RF generator for generating a nonsinusoidal signal. The system further includes a power amplifier coupled to the nonsinusoidal RF generator. The power amplifier is used for amplifying the nonsinusoidal signal to generate an amplified signal. The system includes a filter coupled to the power amplifier. The filter is used for filtering the amplified signal using a filtering signal to generate a filtered signal. The system includes a chuck coupled to the filter. The chuck faces at least a portion of the upper electrode and includes a lower electrode. The lower electrode is used for receiving the filtered signal to facilitate achieving ion energy at the chuck to be between a lower threshold and an upper threshold.
    Type: Grant
    Filed: November 13, 2018
    Date of Patent: September 24, 2019
    Assignee: Lam Research Corporation
    Inventors: Thorsten Lill, Harmeet Singh, Alex Paterson, Gowri Kamarthy
  • Patent number: 10426022
    Abstract: A system uses one or more magnetrons to generate pulsed radio-frequency (RF) power, such as for powering an accelerating cavity. The one or more magnetrons each having a self-excitation threshold voltage and configured to operate with internal modulation using a pulsed RF input signal to produce the pulsed RF power when being powered by a direct-current power supply at a voltage level below the self-excitation threshold voltage.
    Type: Grant
    Filed: August 28, 2018
    Date of Patent: September 24, 2019
    Assignee: Muons, Inc.
    Inventor: Grigory M. Kazakevich
  • Patent number: 10420224
    Abstract: A dummy trace portion is provided in a region between at least a suspension board with circuit on one end side and a support frame of a suspension board assembly sheet with circuits. A base insulating layer is formed on a support substrate in the dummy trace portion. A plurality of conductor traces are formed on the base insulating layer, and a cover insulating layer is formed on the base insulating layer to cover each conductor trace. At least one of the base insulating layer and the cover insulating layer in the dummy trace portion has a groove.
    Type: Grant
    Filed: March 23, 2017
    Date of Patent: September 17, 2019
    Assignee: NITTO DENKO CORPORATION
    Inventors: Jun Ishii, Terukazu Ihara, Naohiro Terada
  • Patent number: 10418170
    Abstract: Systems and methods to reduce the amplitude of undesirable eddy currents in conducting structures, e.g., induced by the translation of an FRC into a confinement chamber, while leaving beneficial eddy currents unaffected. This is achieved by inducing opposing currents in the same conducting structures prior to plasma translation into the confinement chamber.
    Type: Grant
    Filed: November 9, 2017
    Date of Patent: September 17, 2019
    Assignee: TAE TECHNOLOGIES, INC.
    Inventor: Nikolaus Rath
  • Patent number: 10418181
    Abstract: Capacitors having form factors (e.g., dimensions and functionality) comparable with traditional single layer capacitors, but with considerably higher capacitance and methods of their manufacture are provided. Capacitors and methods that implement capacitors where at least one of the dielectric layers is reduced in thickness post firing to produce a device robust enough for automated handling and provide a stable surface for wire-bonding are also provided. Capacitors and methods that implement an internal electrode between at least two layers of pre-fired ceramic dielectric are also provided. Capacitors and methods that implement the integration of multiple dielectric types in a single device producing high frequency performance characteristics are also provided. Capacitors and dielectrics that implement the combination of a multi-layer capacitor with a thin single layer capacitor to further increase operating frequency and capacitance are also provided.
    Type: Grant
    Filed: April 20, 2017
    Date of Patent: September 17, 2019
    Assignee: Eulex Components Inc
    Inventors: Ali Moalemi, Euan Patrick Armstrong
  • Patent number: 10418189
    Abstract: The present disclosure is directed to structural supercapacitors and electrodes for structural supercapacitors having high energy storage and high mechanical characteristics and methods of making the structural supercapacitors and electrodes. The structural supercapacitors can include a solid electrolyte and carbon fiber electrodes comprising carbon nanotubes, surface functionalized redox-active moieties, and/or a conducting polymer.
    Type: Grant
    Filed: December 3, 2018
    Date of Patent: September 17, 2019
    Assignee: The MITRE Corporation
    Inventors: Nicholas Hudak, Alexander Schlichting, Kurt Eisenbeiser
  • Patent number: 10410836
    Abstract: Systems and methods for tuning to reduce reflected power in multiple states are described. The methods include determining values of one or more parameters of an impedance matching circuit so that reflected power is reduced for multiple states. Such a reduction in the reflected power increases a life of a radio frequency generator coupled to the impedance matching circuit while simultaneously processing a substrate using the multiple states.
    Type: Grant
    Filed: January 23, 2018
    Date of Patent: September 10, 2019
    Assignee: Lam Research Corporation
    Inventors: Jon McChesney, Alexander Paterson
  • Patent number: 10410835
    Abstract: A plasma impedance matching unit for a plasma power supply system includes a first power connector for coupling the matching unit to a RF power source, a second power connector for coupling the matching unit to a plasma load, a data link interface for directly coupling the matching unit to another plasma impedance matching unit via a data link, and a controller configured to control the matching unit to match an impedance from the first power connector to an impedance at the second power connector, to operate as a master for at least one other impedance matching unit and/or at least one RF power source of the plasma power supply system, and to communicate via the data link interface with the at least one other impedance matching unit and/or the at least one RF power source of the plasma power supply system.
    Type: Grant
    Filed: November 3, 2017
    Date of Patent: September 10, 2019
    Assignee: TRUMPF Huettinger Sp. z o. o.
    Inventors: Wojciech Glazek, Rafal Bugyi
  • Patent number: 10403436
    Abstract: A multilayer electronic component includes a body having a stacked structure in which a plurality of internal electrodes and dielectric layers are alternately stacked; and external electrodes disposed on an outer surface of the body and connected to the internal electrodes. The dielectric layer includes a plurality of grains and a plurality of graphene particles, and the plurality of graphene particles are disposed at boundaries of the plurality of grains.
    Type: Grant
    Filed: August 11, 2017
    Date of Patent: September 3, 2019
    Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Yu Ra Shin, Myeong Gi Kim, Eung Soo Kim, Hak Kwan Kim, Jang Yeol Lee, Seong Min Chin
  • Patent number: 10403467
    Abstract: To provide a magnetron capable of effectively suppressing a plurality of higher harmonic wave components with a simple configuration. A magnetron 1 is designed so that: a choke part 60 consisting of a first choke 30 and a second choke 32 being a plurality of chokes provided on the inside of a metal sealing body 7 on an output unit 5 are provided to suppress higher harmonic waves; and a plurality of choke grooves 31A, 31B and 31C that correspond to each of higher harmonic wave components larger than the number of the first choke 30 and second choke 32 and different in each frequency are formed by the choke part 60 and the metal sealing body 7.
    Type: Grant
    Filed: December 27, 2016
    Date of Patent: September 3, 2019
    Assignee: Toshiba Hokuto Electronics Corporation
    Inventor: Masatoshi Higashi
  • Patent number: 10405465
    Abstract: An electrical device includes an electrical component configured to generate heat during operation of the electrical device. A thermal management coating is configured to transfer heat from the electrical component by thermal conduction. The thermal management coating comprises a non-carbon based topological insulator.
    Type: Grant
    Filed: December 8, 2017
    Date of Patent: September 3, 2019
    Assignee: THE BOEING COMPANY
    Inventors: Jeffrey H. Hunt, Wayne R. Howe, Angela W. Li
  • Patent number: 10395902
    Abstract: A plasma chamber is provided to increase conductance within the plasma chamber and to increase uniformity of the conductance. A radio frequency (RF) path for supplying power to the plasma chamber is symmetric with respect to a center axis of the plasma chamber. Moreover, pumps used to remove materials from the plasma chamber are located symmetric with respect to the center axis. The symmetric arrangements of the RF paths and the pumps facilitate an increase in conductance uniformity within the plasma chamber.
    Type: Grant
    Filed: July 18, 2018
    Date of Patent: August 27, 2019
    Assignee: Lam Research Corporation
    Inventors: Daniel Arthur Brown, John Patrick Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy, Theo Panagopoulos, Zhigang Chen
  • Patent number: 10398004
    Abstract: Circuitry 31 for a solid-state lighting arrangement 20 designed for as a replacement for a gas discharge lamp used in a lighting fixture having a ballast. The circuitry 31 unsafe flow of current through the solid-state lighting arrangement 20, under non-operational conditions and during installation of the lighting arrangement, so as to provide compatibility with safety standards for use with discharge lamps.
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: August 27, 2019
    Assignee: ELB ELECTRONICS, INC.
    Inventor: Xiaoxiang Cheng
  • Patent number: 10395827
    Abstract: An electronic component includes a laminated body including first and second end surfaces, first and second side surfaces, and first and second principal surfaces, a first external electrode, and a second external electrode, in which the first external electrode includes a first fired electrode layer and a first resin layer, the second external electrode includes a second fired electrode layer and a second resin layer, each of the first fired electrode layer and the second fired electrode layer is provided on the laminated body and includes a region including voids and glass, each of the first resin layer and the second resin layer includes metal particles, and a surface layer of each of the first resin layer and the second resin layer has a portion of the metal particles exposed in a ratio of about 72.6% or more and about 90.9% or less.
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: August 27, 2019
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Shuichi Ito, Hirokazu Yamaoka
  • Patent number: 10388463
    Abstract: An electrolytic capacitor includes an anode body, a dielectric layer formed on the anode body, and a conductive polymer layer covering at least a part of the dielectric layer. The conductive polymer layer includes a conductive polymer and a polymer dopant. The polymer dopant includes a first copolymer including: (A) a first unit derived from a first monomer having a sulfonate group; (B) a second unit derived from a second monomer having a carboxy group; and (C) a third unit derived from a third monomer having a hydroxy group.
    Type: Grant
    Filed: November 14, 2017
    Date of Patent: August 20, 2019
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Youichirou Uka, Katsuya Miyahara, Hiroshi Kojima
  • Patent number: 10388457
    Abstract: A multilayer ceramic capacitor includes: a multilayer structure in which each of a plurality of ceramic dielectric layers and each of a plurality of internal electrodes are alternately stacked and are alternately exposed to two edge faces of the multilayer structure; a first external electrode that is coupled to one of the two edge faces; and a second external electrode that is coupled to the other of the two edge faces, wherein: a main component of the plurality of ceramic dielectric layers is BaTiO3; the plurality of ceramic dielectric layers include a rare earth element; and an atomic concentration ratio of a total amount of Mn and V with respect to Ti in the plurality of ceramic dielectric layers is 0.035% or more and 0.120% or less.
    Type: Grant
    Filed: July 20, 2017
    Date of Patent: August 20, 2019
    Assignee: TAIYO YUDEN CO., LTD.
    Inventors: Kunihiko Nagaoka, Noriyuki Chigira
  • Patent number: 10390459
    Abstract: An arrangement for cooling components of a subsea electric system including a tank filled with a dielectric fluid. The tank includes first and second sections. The arrangement includes one first electric component within the first section, and one second electric component within the second section. The arrangement includes a first heat exchanger located outside the tank and in fluid contact with the tank, and arranged during operation to be in thermal contact with sea water. The arrangement includes a pump arranged to force a flow of dielectric fluid through the first heat exchanger. Flow of dielectric fluid in the tank is by both natural and forced convection generated by the pump. The first electric component generates more heat than the second electric component. Within the first section the share of the flow by natural convection is greater than within the second section.
    Type: Grant
    Filed: March 3, 2015
    Date of Patent: August 20, 2019
    Assignee: ABB Schweiz AG
    Inventors: Thomas Gradinger, Tor Laneryd
  • Patent number: 10383262
    Abstract: The power conversion device of the invention includes: a cooling unit that is a prism, the interior of which is hollow, and that has a refrigerant inlet portion and a refrigerant outlet portion the cooling unit having in the interior thereof a refrigerant channel through which a refrigerant flows from the refrigerant inlet portion towards the refrigerant outlet portion; electronic devices that are respectively disposed on three or more surfaces on the outside of side surfaces of the cooling unit, excluding a refrigerant inlet surface, in which the refrigerant inlet portion is disposed, and a refrigerant outlet surface, in which the refrigerant outlet portion is disposed, the electronic devices being cooled by boiling of the refrigerant; and a hollow outer case 4 that covers the electronic devices.
    Type: Grant
    Filed: March 25, 2015
    Date of Patent: August 13, 2019
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Masaru Shinozaki, Shigetoshi Ipposhi, Hiroyuki Higashino, Yugo Asai, Hiroyuki Yano, Haruyuki Matsuo