Patents Examined by Duane Smith
  • Patent number: 11938100
    Abstract: A formulation comprising at least on vitamin, at least one antioxidant, at least one mineral, at least one plant based nutrient and sodium.
    Type: Grant
    Filed: July 26, 2021
    Date of Patent: March 26, 2024
    Inventor: Kedar Prasad
  • Patent number: 11938152
    Abstract: This invention proposes that a mixture of high doses of multiple antioxidants in combination with therapeutic agents may improve the management of cancer without toxicity.
    Type: Grant
    Filed: August 6, 2020
    Date of Patent: March 26, 2024
    Inventor: Kedar N Prasad
  • Patent number: 11846884
    Abstract: A chemically amplified resist composition is provided comprising an acid generator and a quencher comprising a salt compound consisting of a nitrogen-containing cation and a 1,1,1,3,3,3-hexafluoro-2-propoxide anion having a trifluoromethyl, hydrocarbylcarbonyl or hydrocarbyloxycarbonyl group bonded thereto. The resist composition has a high sensitivity and forms a pattern with improved LWR or CDU, independent of whether it is of positive or negative tone.
    Type: Grant
    Filed: June 16, 2021
    Date of Patent: December 19, 2023
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Jun Hatakeyama, Takeshi Nagata, Chuanwen Lin
  • Patent number: 11796912
    Abstract: A radiation-sensitive composition contains: particles that include a metal oxide, a cation that includes a metal, an anion. The anion is preferably a conjugated base of an acid and the acid has preferably a pKa of no greater than 3. The content of the particles in terms of solid content equivalent is preferably no less than 50% by mass, and more preferably no less than 70% by mass. The hydrodynamic radius of the particles as determined by a dynamic light scattering analysis is preferably no greater than 10 nm. The total content of the cation and the anion with respect to 100 parts by mass of the particles is preferably no less than 5 parts by mass. The acid is preferably sulfonic acid, nitric acid, organic azinic acid, disulfonylimidic acid or a combination thereof.
    Type: Grant
    Filed: February 27, 2019
    Date of Patent: October 24, 2023
    Assignee: JSR CORPORATION
    Inventor: Motohiro Shiratani
  • Patent number: 11796918
    Abstract: A method includes providing a layered structure on a substrate, the layered structure including a bottom layer formed over the substrate, a hard mask layer formed over the bottom layer, a material layer formed over the hard mask layer, and a photoresist layer formed over the material layer, exposing the photoresist layer to a radiation source, developing the photoresist layer, where the developing removes portions of the photoresist layer and the material layer in a single step without substantially removing portions of the hard mask layer, and etching the hard mask layer using the photoresist layer as an etch mask. The material layer may include acidic moieties and/or acid-generating molecules. The material layer may also include photo-sensitive moieties and crosslinking agents.
    Type: Grant
    Filed: March 8, 2022
    Date of Patent: October 24, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: An-Ren Zi, Wei-Han Lai, Ching-Yu Chang
  • Patent number: 11774853
    Abstract: A resist composition comprising an iodized base polymer and an iodized benzene ring-containing quencher has a high sensitivity and improved LWR and CDU.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: October 3, 2023
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Jun Hatakeyama, Masaki Ohashi, Masahiro Fukushima, Takayuki Fujiwara, Kazuhiro Katayama
  • Patent number: 11767435
    Abstract: Provided is an anti-reflection coating composition. The anti-reflection coating composition includes an active component and a solvent B. The active component includes a matting resin A, a catalyst C, and a crosslinking agent D. The weight average molecular weight of the matting resin A is less than or equal to 20000. Also provided is use of the anti-reflection coating composition.
    Type: Grant
    Filed: December 23, 2021
    Date of Patent: September 26, 2023
    Assignee: PhiChem Corporation
    Inventors: Yun Zhang, Jiaqi Zhao, Fanjie Xu
  • Patent number: 11720018
    Abstract: A chemically amplified resist composition comprising a quencher containing an ammonium salt of an iodized or brominated phenol and an acid generator exerts a sensitizing effect and an acid diffusion suppressing effect and forms a pattern having satisfactory resolution, LWR and CDU.
    Type: Grant
    Filed: July 16, 2020
    Date of Patent: August 8, 2023
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventor: Jun Hatakeyama
  • Patent number: 11703766
    Abstract: A method includes forming a bottom layer over a semiconductor substrate, where the bottom layer includes a polymer bonded to a first cross-linker and a second cross-linker, the first cross-linker being configured to be activated by ultraviolet (UV) radiation and the second cross-linker being configured to be activated by heat at a first temperature. The method then proceeds to exposing the bottom layer to a UV source to activate the first cross-linker, resulting in an exposed bottom layer, where the exposing activates the first cross-linker. The method further includes baking the exposed bottom layer, where the baking activates the second cross-linker.
    Type: Grant
    Filed: July 25, 2022
    Date of Patent: July 18, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jing Hong Huang, Chien-Wei Wang, Shang-Wern Chang, Ching-Yu Chang
  • Patent number: 11703758
    Abstract: A photosensitive composition for EUV light includes a predetermined resin and a photoacid generator, or includes a predetermined resin having a repeating unit having a photoacid generating group, and satisfies Requirements 1 to 3, Requirement 1: The A value determined by Formula (1) is 0.14 or more, A=([H]×0.04+[C]×1.0+[N]×2.1+[O]×3.6+[F]×5.6+[S]×1.5+[I]×39.5)/([H]×1+[C]×12+[N]×14+[O]×16+[F]×19+[S]×32+[I]×127)??Formula(1) Requirement 2: The concentration of solid contents in the photosensitive composition for EUV light is 5.0% by mass or less, Requirement 3: The content of the photoacid generator is 5% to 50% by mass with respect to the total solid content in the photosensitive composition for EUV light.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: July 18, 2023
    Assignee: FUJIFILM Corporation
    Inventors: Michihiro Shirakawa, Hajime Furutani, Hironori Oka
  • Patent number: 11702695
    Abstract: Embodiments provided herewith are directed to self-assembled methods of preparing a patterned surface for sequencing applications including, for example, a patterned flow cell or a patterned surface for digital fluidic devices. The methods utilize photolithography to create a patterned surface with a plurality of microscale or nanoscale contours, separated by hydrophobic interstitial regions, without the need of oxygen plasma treatment during the photolithography process. In addition, the methods avoid the use of any chemical or mechanical polishing steps after the deposition of a gel material to the contours.
    Type: Grant
    Filed: May 5, 2022
    Date of Patent: July 18, 2023
    Assignee: Illumina, Inc.
    Inventors: Yir-Shyuan Wu, Yan-You Lin, M. Shane Bowen, Cyril Delattre, Fabien Abeille, Tarun Khurana, Arnaud Rival, Poorya Sabounchi, Dajun Yuan, Maria Candelaria Rogert Bacigalupo
  • Patent number: 11692066
    Abstract: An object of the present invention is to provide: a compound containing an imide group which is not only cured under film formation conditions of inert gas as well as air, generates no by-product and has excellent heat resistance and properties of filling and planarizing a pattern formed on a substrate, but can also form an organic underlayer film with favorable adhesion to a substrate.
    Type: Grant
    Filed: April 16, 2020
    Date of Patent: July 4, 2023
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Daisuke Kori, Keisuke Niida, Takashi Sawamura, Takeru Watanabe, Seiichiro Tachibana, Tsutomu Ogihara
  • Patent number: 11681218
    Abstract: The present invention can provide a salt capable of producing a resist pattern with satisfactory CD uniformity (CDU), and a resist composition.
    Type: Grant
    Filed: February 11, 2019
    Date of Patent: June 20, 2023
    Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventors: Tatsuro Masuyama, Yuichi Mukai, Koji Ichikawa
  • Patent number: 11681223
    Abstract: A photocurable composition for forming coating film having flattening properties on a substrate, with high fillability into patterns and capability of forming a coating film that is free from thermal shrinkage, which contains at least one compound that contains a photodegradable nitrogen-containing and/or sulfur-containing structure, a hydrocarbon structure, and a solvent. A compound which contains at least one photodegradable structure in one molecule. A compound which contains the photodegradable structures, and the hydrocarbon structure in one molecule, or a combination of compounds which contain the structures in separate molecules. The hydrocarbon structure is a saturated or unsaturated, linear, branched or cyclic hydrocarbon group having a carbon atom number of 1 to 40.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: June 20, 2023
    Assignee: NISSAN CHEMICAL CORPORATION
    Inventors: Hikaru Tokunaga, Takafumi Endo, Keisuke Hashimoto, Rikimaru Sakamoto
  • Patent number: 11680133
    Abstract: A material for forming an organic film contains a polymer having a repeating unit shown by the following general formula (1), and an organic solvent, where AR1 and AR2 each represent a benzene ring or a naphthalene ring which optionally have a substituent; W1 represents a divalent organic group having 2 to 20 carbon atoms and no aromatic ring, and a methylene group constituting the organic group is optionally substituted with an oxygen atom or a carbonyl group; and W2 represents a divalent organic group having 6 to 80 carbon atoms and at least one or more aromatic rings. This invention provides: an organic film material being excellent in film formability and enabling high etching resistance and excellent twisting resistance and filling property; a patterning process using this material; and a polymer suitable for such an organic film material.
    Type: Grant
    Filed: October 30, 2020
    Date of Patent: June 20, 2023
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Daisuke Kori, Takayoshi Nakahara, Kenta Ishiwata, Yasuyuki Yamamoto
  • Patent number: 11667620
    Abstract: The composition contains a compound and a solvent. The compound includes a group represented by formula (1). The compound has a molecular weight of no less than 200 and has a percentage content of carbon atoms of no less than 40% by mass. In the formula (1), R1 and R2 each independently represent a hydrogen atom, a fluorine atom, a monovalent hydrocarbon group having 1 to 20 carbon atoms or a monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms, or R1 and R2 taken together represent a part of an alicyclic structure having 3 to 20 ring atoms constituted together with the carbon atom to which R1 and R2 bond; Ar1 represents a group obtained by removing (n+3) hydrogen atoms from an arene or heteroarene having 6 to 20 ring atoms; and X represents an oxygen atom, —CR3R4—, —CR3R4—O— or —O—CR3R4—.
    Type: Grant
    Filed: March 5, 2020
    Date of Patent: June 6, 2023
    Assignee: JSR CORPORATION
    Inventors: Hiroki Nakatsu, Kazunori Takanashi, Kazunori Sakai, Yuushi Matsumura, Hiroki Nakagawa
  • Patent number: 11662663
    Abstract: A composition comprising (A) a polymer comprising recurring units (a1) having a carboxyl group protected with an acid labile group and recurring units (a2) having a cyclic ester, cyclic carbonate or cyclic sulfonate structure, (B) a thermal acid generator, and (C) an organic solvent is suited to form a protective film between a substrate and a resist film. Even when a metal-containing resist film is used, the protective film is effective for preventing the substrate from metal contamination.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: May 30, 2023
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Tomohiro Kobayashi, Kenichi Oikawa, Masayoshi Sagehashi, Teppei Adachi
  • Patent number: 11650499
    Abstract: There is provided a highly sensitive colorant-containing photosensitive resin composition that can form an excellent crack resistant cured product for use in the formation of organic EL element barrier ribs. One embodiment of the photosensitive resin composition for use in organic EL element barrier ribs comprises: (A) a binder resin; (B) a phenolic hydroxyl group-containing compound having a molecular weight of 260 to 5,000 and a phenolic hydroxyl group equivalent of 80 to 155; (C) a radiation sensitive compound; and (D) a colorant selected from the group consisting of black dyes and black pigments.
    Type: Grant
    Filed: October 25, 2019
    Date of Patent: May 16, 2023
    Assignee: SHOWA DENKO K.K.
    Inventors: Kentaro Furue, Yoshikazu Arai
  • Patent number: 11650497
    Abstract: A resist composition which generates an acid upon exposure and whose solubility in a developing solution is changed due to an action of the acid, the resist composition including a base material component whose solubility in a developing solution is changed due to the action of an acid, an acid generator component which generates an acid upon exposure, and an organic acid which contains at least one carboxy group, in which the acid generator component contains a compound represented by formula (b1) in which R2011 to R2031 represent an aryl group, an alkyl group, or an alkenyl group. R2011 to R2031 have a total of four or more substituents containing fluorine atoms, Xn? represent an n-valent anion, and n represents an integer of 1 or greater.
    Type: Grant
    Filed: November 13, 2019
    Date of Patent: May 16, 2023
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Yasuhiro Yoshii, Yoichi Hori
  • Patent number: 11642725
    Abstract: This invention relates to a method for calibrating the delay settings of a laser or scanner head in a laser additive manufacturing process. More particularly, the invention relates to calibrating delay settings during run-ins and run-outs of a laser scanning process.
    Type: Grant
    Filed: January 19, 2016
    Date of Patent: May 9, 2023
    Assignee: GENERAL ELECTRIC COMPANY
    Inventor: Scott Alan Gold