Patents Examined by Eric A. Ward
  • Patent number: 12040237
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate. The semiconductor device structure includes a gate stack over the substrate. The semiconductor device structure includes a spacer over a side of the gate stack. The semiconductor device structure includes a dielectric layer over the substrate. The dielectric layer has a first recess, the dielectric layer has an upper portion and a first lower portion, the upper portion is over the first recess, the first recess is between the first lower portion and the spacer, and the upper portion has a convex curved sidewall.
    Type: Grant
    Filed: May 24, 2022
    Date of Patent: July 16, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Heng Tsai, Chun-Sheng Liang, Pei-Lin Wu, Yi-Ren Chen, Shih-Hsun Chang
  • Patent number: 12040274
    Abstract: A microelectronic device comprises a stack structure comprising insulative structures vertically interleaved with conductive structures, first support pillar structures vertically extending through the stack structure in a first staircase region including steps defined at edges of tiers of the insulative structures and conductive structures, and second support pillar structures vertically extending through the stack structure in a second staircase region including additional steps defined at edges of additional tiers of the insulative structures and conductive structures, the second support pillar structures having a smaller cross-sectional area than the first support pillar structures. Related memory devices, electronic systems, and methods are also described.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: July 16, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Lingyu Kong, Lifang Xu, Indra V. Chary, Shuangqiang Luo, Sok Han Wong
  • Patent number: 12040257
    Abstract: Circuit-Under-Pad (CUP) device topologies for high-current lateral power switching devices are disclosed, in which the interconnect structure and pad placement are configured for reduced source and common source inductance. In an example topology for a power semiconductor device comprising a lateral GaN HEMT, the source bus runs across a center of the active area, substantially centered between first and second extremities of source finger electrodes, with laterally extending tabs contacting the underlying source finger electrodes. The drain bus is spaced from the source bus and comprises laterally extending tabs contacting the underlying drain finger electrodes. The gate bus is centrally placed and runs adjacent the source bus. Preferably, the interconnect structure comprises a dedicated gate return bus to separate the gate drive loop from the power loop. Proposed CUP device structures provide for lower source and common source inductance and/or higher current carrying capability per unit device area.
    Type: Grant
    Filed: October 27, 2022
    Date of Patent: July 16, 2024
    Assignee: GAN SYSTEMS INC.
    Inventors: Ahmad Mizan, Edward Macrobbie
  • Patent number: 12040366
    Abstract: A method for forming a semiconductor structure. Two isolation structures are formed in a semiconductor. A cavity is etched in the semiconductor between the two isolation structures in the semiconductor. Dopants are implanted into a bottom side of the cavity to form a doped region in the semiconductor below the cavity between the two isolation structures. A contact is formed in the cavity. The contact is on the doped region and in direct contact with the doped region.
    Type: Grant
    Filed: June 8, 2021
    Date of Patent: July 16, 2024
    Assignee: The Boeing Company
    Inventors: Kangmu Min Lee, Maxwell Daehan Choi, Jeffrey Alden Wright, Wonill Ha, Clayton Jackson, Michael Pemberton Jura, Adele Schmitz, James Chappell
  • Patent number: 12034047
    Abstract: Aspects of the present inventive concept provide a semiconductor device capable of enhancing performance and reliability through source/drain engineering in a transistor including an oxide semiconductor layer. The semiconductor device includes a substrate, a metal oxide layer disposed on the substrate, a source/drain pattern being in contact with the metal oxide layer and including a portion protruding from a top surface of the metal oxide layer, a plurality of gate structures disposed on the metal oxide layer with the source/drain pattern interposed therebetween and each including gate spacers and an insulating material layer, the insulating material layer being in contact with the metal oxide layer, and not extending along a top surface of the source/drain pattern, and a contact disposed on the source/drain pattern, the contact being connected to the source/drain pattern.
    Type: Grant
    Filed: November 18, 2022
    Date of Patent: July 9, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Woo Bin Song, Sang Woo Lee, Min Hee Cho
  • Patent number: 12027449
    Abstract: A lateral power semiconductor device structure comprises a pad-over-active topology wherein on-chip interconnect metallization and contact pad placement is optimized to reduce interconnect resistance. For a lateral GaN HEMT, wherein drain, source and gate finger electrodes extend between first and second edges of an active region, the source and drain buses run across the active region at positions intermediate the first and second edges of the active region, interconnecting first and second portions of the source fingers and drain fingers which extend laterally towards the first and second edges of the active region. External contact pads are placed on the source and drain buses. For a given die size, this interconnect structure reduces lengths of current paths in the source and drain metal interconnect, and provides, for example, at least one of lower interconnect resistance, increased current capability per unit active area, and increased active area usage per die.
    Type: Grant
    Filed: October 27, 2022
    Date of Patent: July 2, 2024
    Assignee: GAN SYSTEMS INC.
    Inventors: Hossein Mousavian, Edward Macrobbie
  • Patent number: 12027417
    Abstract: Integrated circuit structures having source or drain structures with a high germanium concentration capping layer are described. In an example, an integrated circuit structure includes source or drain structures including an epitaxial structure embedded in a fin at a side of a gate stack. The epitaxial structure has a lower semiconductor layer and a capping semiconductor layer on the lower semiconductor layer with an abrupt interface between the capping semiconductor layer and the lower semiconductor layer. The lower semiconductor layer includes silicon, germanium and boron, the germanium having an atomic concentration of less than 40% at the abrupt interface. The capping semiconductor layer includes silicon, germanium and boron, the germanium having an atomic concentration of greater than 50% at the abrupt interface and throughout the capping semiconductor layer.
    Type: Grant
    Filed: June 26, 2020
    Date of Patent: July 2, 2024
    Assignee: Intel Corporation
    Inventors: Cory Bomberger, Suresh Vishwanath, Yulia Tolstova, Pratik Patel, Szuya S. Liao, Anand S. Murthy
  • Patent number: 12027464
    Abstract: A semiconductor module parallel circuit includes: a plurality of power semiconductor modules; and a multilayer substrate that interconnects the plurality of power semiconductor modules, each of the power semiconductor modules includes: a power semiconductor switching element; a first signal terminal connected to a gate potential of the power semiconductor switching element; and a second signal terminal connected to a source potential of the power semiconductor switching element, the multilayer substrate includes: an external connection terminal; first signal terminal connection patterns connected to the first signal terminals of the power semiconductor modules; and second signal terminal connection patterns connected to the second signal terminals of the power semiconductor modules, and inductances of gate wiring for the plurality of power semiconductor modules, from the external connection terminal to the first signal terminal connection pattern and from the second signal terminal connection pattern to the e
    Type: Grant
    Filed: March 29, 2019
    Date of Patent: July 2, 2024
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Ryota Hamaguchi, Yasushi Nakayama, Shuichi Nagamitsu
  • Patent number: 12015061
    Abstract: A radio frequency (RF) switch is provided. The RF switch is configured to switch a RF signal input to a first terminal. The RF switch includes a first transistor, disposed at a first distance from the first terminal, and configured to switch the RF signal, and a second transistor, disposed at a second distance from the first terminal, and configured to switch the RF signal. The first distance is shorter than the second distance, and a number of first contact vias formed in a first electrode in the first transistor is greater than a number of second contact vias formed in a second electrode of the second transistor.
    Type: Grant
    Filed: February 5, 2021
    Date of Patent: June 18, 2024
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Jongmo Lim, Wonsun Hwang, Byeonghak Jo, Yoosam Na, Youngsik Hur
  • Patent number: 12002880
    Abstract: There is provided a method for manufacturing a nitride-based high electron mobility transistor, including: providing a conductive member on a nitride semiconductor crystal substrate, outside an element region in a plan view; forming a mask on the substrate, the mask having an opening in at least one of a source recess etching region and a drain recess etching region; performing photoelectrochemical etching by irradiating the substrate with light to form at least one of a source recess and a drain recess, in a state where the substrate on which the conductive member is provided and the mask is formed is in contact with an etching solution containing an oxidizing agent that receives electrons; and forming an element separation structure of the high electron mobility transistor.
    Type: Grant
    Filed: July 14, 2021
    Date of Patent: June 4, 2024
    Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventors: Fumimasa Horikiri, Noboru Fukuhara
  • Patent number: 11997914
    Abstract: A method of manufacturing an organic light-emitting display device is provided. The method includes: forming a lower electrode pattern on a substrate, which includes a transistor area and a capacitor area, to correspond to the transistor area and forming a buffer layer on the substrate including the lower electrode pattern; forming a thin-film transistor including an oxide semiconductor layer on the buffer layer; forming an interlayer insulating film on the thin-film transistor; forming a photoresist film pattern including first and second holes, which have different depths, on the interlayer insulating film; and forming a first contact hole, which exposes the lower electrode pattern, and second contact holes, which expose the oxide semiconductor layer, at the same time using the photoresist film pattern.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: May 28, 2024
    Assignee: Samsung Display Co., Ltd.
    Inventors: Hyun Min Cho, Shin Il Choi, Sang Gab Kim, Tae Sung Kim
  • Patent number: 11990409
    Abstract: Provided is a semiconductor device including a front-end-of-line (FEOL) structure and a back-end-of-line (BEOL) structure connected to the FEOL structure, wherein the FEOL structure includes at least one source/drain region and at least one gate structure, and the BEOL structure includes: a plurality of 1st fine metal lines arranged in a row with a same pitch, each of the plurality of 1st fine metal lines having a same width; and at least one 1st wide metal line formed at a side of the plurality of 1st fine metal lines, the 1st wide metal line having a width greater than the width of the 1st fine metal line, and wherein each of the plurality of 1st fine metal lines includes a material different from a material included in the 1st wide metal line.
    Type: Grant
    Filed: June 22, 2021
    Date of Patent: May 21, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Taeyong Bae, Hoonseok Seo
  • Patent number: 11990539
    Abstract: A semiconductor device includes a substrate, a semiconductor channel layer, a semiconductor barrier layer, a gate capping layer, a dielectric layer, and a gate electrode. The semiconductor channel layer is disposed on the substrate, and the semiconductor barrier layer is disposed on the semiconductor channel layer. The gate capping layer is disposed on the semiconductor barrier layer, and the dielectric layer conformally covers the gate capping layer and surrounds the periphery of the gate capping layer. The gate electrode is disposed on the dielectric layer and covers at least one sidewall of the gate capping layer.
    Type: Grant
    Filed: January 13, 2021
    Date of Patent: May 21, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventor: Po-Yu Yang
  • Patent number: 11990413
    Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers. The electrically conductive layers include an intermetallic alloy of aluminum and at least one metal other than aluminum. Memory openings vertically extend through the alternating stack. Memory opening fill structures are located in a respective one of the memory openings and include a respective vertical semiconductor channel and a respective vertical stack of memory elements.
    Type: Grant
    Filed: August 11, 2021
    Date of Patent: May 21, 2024
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Linghan Chen, Raghuveer S. Makala, Fumitaka Amano
  • Patent number: 11984479
    Abstract: The present disclosure relates to a field effect transistor (FET) structure. The FET structure has a substrate, an active region, a dielectric layer provided over a channel of the active region and a gate provided over the dielectric layer. The active region comprises a source, a drain and the channel provided between the source and the drain. The active region is surrounded by an isolation trench, such that width edges of the channel are directly adjacent to the isolation trench. Current paths run between the source and the drain, through the channel. The FET is configured such that current paths running proximal to the channel edges are reduced or weaker in comparison to a dominant current path running through a center of the channel. One or more of the channel, the dielectric layer or the substrate can be modified or adapted to provide the reduced and dominant current paths.
    Type: Grant
    Filed: February 17, 2021
    Date of Patent: May 14, 2024
    Assignee: Analog Devices International Unlimited Company
    Inventors: Dennis A. Dempsey, Andrew Christopher Linehan, Seamus P. Whiston, David J. Rohan
  • Patent number: 11984501
    Abstract: A semiconductor device includes a semiconductor layer that has a first main surface at one side and a second main surface at another side, a plurality of gate electrodes that are arranged at intervals on the first main surface of the semiconductor layer, an interlayer insulating film that is formed on the first main surface of the semiconductor layer such as to cover the gate electrodes, an electrode film that is formed on the interlayer insulating film, and a plurality of tungsten plugs that, between a pair of the gate electrodes that are mutually adjacent, are respectively embedded in a plurality of contact openings formed in the interlayer insulating film at intervals in a direction in which the pair of mutually adjacent gate electrodes face each other and each have a bottom portion contacting the semiconductor layer and a top portion contacting the electrode film.
    Type: Grant
    Filed: March 28, 2023
    Date of Patent: May 14, 2024
    Assignee: ROHM CO., LTD.
    Inventors: So Nagakura, Satoshi Iwahashi
  • Patent number: 11984444
    Abstract: A semiconductor device and method of manufacturing the same are provided. The semiconductor device includes a first active region extending along a first direction. The semiconductor device also includes a second active region extending along the first direction. The semiconductor device further includes a first gate extending along a second direction perpendicular to the first direction. The first gate has a first segment disposed between the first active region and the second active region. In addition, the semiconductor device includes a first electrical conductor extending along the second direction and across the first active region and the second active region, wherein the first segment of the first gate and the first electrical conductor are partially overlapped to form a first capacitor.
    Type: Grant
    Filed: June 24, 2021
    Date of Patent: May 14, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chung-Hui Chen, Wan-Te Chen, Tzu Ching Chang, Tsung-Hsin Yu
  • Patent number: 11980085
    Abstract: A display device includes a sensing line and a data driver. The sensing line is in a display panel. The data driver includes a plurality of integrated circuits. Each of the integrated circuits includes an interface, which includes a mobile industry processor interface (MIPI) and a crack detector. The crack detector detects cracks of the panel based on the sensing line and transmits and receives information corresponding to the crack to and from adjacent ones of the integrated circuits using a transmission terminal and a reception terminal in the MIPI.
    Type: Grant
    Filed: July 16, 2021
    Date of Patent: May 7, 2024
    Assignee: Samsung Display Co., Ltd.
    Inventor: Ho Seok Han
  • Patent number: 11973024
    Abstract: A semiconductor memory device according to an embodiment includes a substrate, conductive layers, pillars, and contacts. The substrate includes first and second areas, and block areas. The conductive layers are divided for each of the block areas. The conductive layers includes terraced portions. The contacts are respectively provided on the terraced portions for each of the block areas. The second area includes a first sub area and a second sub area. The first sub area includes a first stepped structure. The second sub area includes a second stepped structure and a first pattern. The first pattern is continuous with any one of the conductive layers. The first pattern is arranged between the first stepped structure and the second stepped structure.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: April 30, 2024
    Assignee: Kioxia Corporation
    Inventor: Hisashi Kato
  • Patent number: 11967589
    Abstract: A micro multi-color LED device includes two or more LED structures for emitting a range of colors. The two or more LED structures are vertically stacked to combine light from the two more LED structures. Light from the micro multi-color LED device is emitted horizontally from each of the LED structures and reflected upward via some reflective structures. In some embodiments, each LED structure is connected to a pixel driver and/or a common electrode. The LED structures are bonded together through bonding layers. In some embodiments, planarization layers enclose each of the LED structures or the micro multi-color LED device. In some embodiments, one or more of reflective layers, refractive layers, micro-lenses, spacers, and reflective cup structures are implemented in the device to improve the LED emission efficiency. A display panel comprising an array of the micro tri-color LED devices has a high resolution and a high illumination brightness.
    Type: Grant
    Filed: June 3, 2021
    Date of Patent: April 23, 2024
    Assignee: Jade Bird Display (Shanghai) Limited
    Inventors: Qunchao Xu, Huiwen Xu, Qiming Li