Patents Examined by Eric Ward
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Patent number: 11888003Abstract: A photodetector includes: a semiconductor substrate having a first main surface and a second main surface; a first semiconductor layer that is of a first conductivity type, and is included in the semiconductor substrate and closer to the first main surface than to the second main surface; a second semiconductor layer that is of a second conductivity type different from the first conductivity type, and is included in the semiconductor substrate and interposed between the first semiconductor layer and the second main surface; a multiplication region that causes avalanche multiplication to a charge generated in the semiconductor substrate through photoelectric conversion; a circuit region disposed alongside the first semiconductor layer in a direction parallel to the first main surface; at least one isolation transistor disposed in the circuit region; and an isolation region interposed between the first semiconductor layer and the circuit region.Type: GrantFiled: September 30, 2020Date of Patent: January 30, 2024Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Akito Inoue, Yuki Sugiura, Yutaka Hirose
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Patent number: 11889689Abstract: According to one embodiment, a semiconductor memory device includes a first conductive layer, a second conductive layer, and at least one memory structure. The first conductive layer includes a first portion, a second portion, and a third portion, a fourth portion, and a fifth portion. The first portion is provided between the second portion and the third portion in a second direction. The second conductive layer includes a sixth portion, a seventh portion, and an eighth portion, a ninth portion, and a tenth portion. The sixth portion is provided between the seventh portion and the eighth portion in the second direction. The second portion is provided between the sixth portion and the eighth portion in the second direction.Type: GrantFiled: March 16, 2021Date of Patent: January 30, 2024Assignee: Kioxia CorporationInventors: Satoshi Nagashima, Fumitaka Arai
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Patent number: 11881683Abstract: A semiconductor device fabrication method in which a growing process is followed by a capping process in which a phosphor containing material cap layer is deposited over a final GaAs based layer. The wafer, containing many such substrates, can be removed from the reaction chamber to continue processing at a later time without creating an oxide layer on the final GaAs based layer. In continuing processing, a decomposition process selectively decomposes the phosphor containing material cap layer, after which a regrowing process is performed to grow additional layers of the device structure. The capping, decomposition and regrowth processes can be repeated multiple times on the semiconductor devices on the wafer during device fabrication.Type: GrantFiled: November 5, 2020Date of Patent: January 23, 2024Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventors: Constance J. Chang-Hasnain, Jiaxing Wang, Jonas H. Kapraun, Emil Kolev
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Patent number: 11881511Abstract: A transistor is disclosed. The transistor includes a substrate, a superlattice structure that includes a plurality of heterojunction channels, and a gate that extends to one of the plurality of heterojunction channels. The transistor also includes a source adjacent a first side of the superlattice structure and a drain adjacent a second side of the superlattice structure.Type: GrantFiled: December 19, 2018Date of Patent: January 23, 2024Assignee: Intel CorporationInventors: Nidhi Nidhi, Rahul Ramaswamy, Sansaptak Dasgupta, Han Wui Then, Marko Radosavljevic, Johann C. Rode, Paul B. Fischer, Walid M. Hafez
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Patent number: 11869956Abstract: A channel stop and well dopant migration control implant (e.g., of argon) can be used in the fabrication of a transistor (e.g., PMOS), either around the time of threshold voltage adjust and well implants prior to gate formation, or as a through-gate implant around the time of source/drain extension implants. With its implant depth targeted about at or less than the peak of the concentration of the dopant used for well and channel stop implants (e.g., phosphorus) and away from the substrate surface, the migration control implant suppresses the diffusion of the well and channel stop dopant to the surface region, a more retrograde concentration profile is achieved, and inter-transistor threshold voltage mismatch is improved without other side effects. A compensating through-gate threshold voltage adjust implant (e.g., of arsenic) or a threshold voltage adjust implant of increased dose can increase the magnitude of the threshold voltage to a desired level.Type: GrantFiled: September 30, 2021Date of Patent: January 9, 2024Assignee: Texas Instruments IncorporatedInventor: Mahalingam Nandakumar
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Patent number: 11869771Abstract: A manufacturing method of an anchorage element of a passivation layer, comprising: forming, in a semiconductor body made of SiC and at a distance from a top surface of the semiconductor body, a first implanted region having, along a first axis, a first maximum dimension; forming, in the semiconductor body, a second implanted region, which is superimposed to the first implanted region and has, along the first axis, a second maximum dimension smaller than the first maximum dimension; carrying out a process of thermal oxidation of the first implanted region and second implanted region to form an oxidized region; removing said oxidized region to form a cavity; and forming, on the top surface, the passivation layer protruding into the cavity to form said anchorage element fixing the passivation layer to the semiconductor body.Type: GrantFiled: August 26, 2021Date of Patent: January 9, 2024Assignee: STMICROELECTRONICS S.r.l.Inventors: Simone Rascuna′, Mario Giuseppe Saggio
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Patent number: 11869982Abstract: Junction field effect transistors (JFETs) and related manufacturing methods are disclosed herein. A disclosed JFET includes a vertical channel region located in a mesa and a first channel control region located on a first side of the mesa. The first channel control region is at least one of a gate region and a first base region. The JFET also includes a second base region located on a second side of the mesa and extending through the mesa to contact the vertical channel region. The vertical channel can be an implanted vertical channel. The vertical channel can be asymmetrically located in the mesa towards the first side of the mesa.Type: GrantFiled: October 27, 2022Date of Patent: January 9, 2024Assignee: Monolithic Power Systems, Inc.Inventors: Vipindas Pala, Sudarsan Uppili
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Patent number: 11862713Abstract: Doping techniques for fin-like field effect transistors (FinFETs) are disclosed herein. An exemplary method includes forming a fin structure, forming a doped amorphous layer over a portion of the fin structure, and performing a knock-on implantation process to drive a dopant from the doped amorphous layer into the portion of the fin structure, thereby forming a doped feature. The doped amorphous layer includes a non-crystalline form of a material. In some implementations, the knock-on implantation process crystallizes at least a portion of the doped amorphous layer, such that the portion of the doped amorphous layer becomes a part of the fin structure. In some implementations, the doped amorphous layer includes amorphous silicon, and the knock-on implantation process crystallizes a portion of the doped amorphous silicon layer.Type: GrantFiled: July 28, 2022Date of Patent: January 2, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Sai-Hooi Yeong, Sheng-Chen Wang, Bo-Yu Lai, Ziwei Fang, Feng-Cheng Yang, Yen-Ming Chen
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Patent number: 11854828Abstract: A semiconductor device includes a substrate, a first well, a second well, a metal gate, a poly gate, a source region, and a drain region. The first well and the second well are within the substrate. The metal gate is partially over the first well. The poly gate is over the second well. The poly gate is separated from the metal gate, and a width ratio of the poly gate to the metal gate is in a range from about 0.1 to about 0.2. The source region and the drain region are respectively within the first well and the second well.Type: GrantFiled: June 27, 2022Date of Patent: December 26, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Alexander Kalnitsky, Wei-Cheng Wu, Harry-Hak-Lay Chuang
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Patent number: 11849647Abstract: A semiconductor structure may include a magnetic tunnel junction layer on top and in electrical contact with a microstud, a hard mask layer on top of the magnetic tunnel junction layer, and a liner positioned along vertical sidewalls of the magnetic tunnel junction layer and vertical sidewalls of the hard mask layer. A top surface of the liner may be below a top surface of the hard mask layer. The semiconductor structure may include a spacer on top of the liner. The liner may separate the spacer from the magnetic tunnel junction layer and the hard mask layer. The semiconductor structure may include a first metal layer below and in electrical contact with the microstud and a second metal layer above the hard mask layer. A bottom portion of the second metal layer may surround a top portion of the hard mask layer.Type: GrantFiled: March 4, 2021Date of Patent: December 19, 2023Assignee: International Business Machines CorporationInventors: Tao Li, Yann Mignot, Ashim Dutta, Tsung-Sheng Kang, Wenyu Xu
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Patent number: 11843053Abstract: A semiconductor device is provided. The semiconductor comprises an active pattern including a lower pattern and a plurality of sheet patterns that are spaced apart from the lower pattern in a first direction, a source/drain pattern on the lower pattern and in contact with the plurality of sheet patterns, and a gate structure on opposing sides of the source/drain pattern in a second direction different from the first direction, the gate structure including a gate electrode on the plurality of sheet patterns, wherein the source/drain pattern includes an epitaxial region that comprises a semiconductor material and a cavity region that is inside the epitaxial region and that is surrounded by the semiconductor material.Type: GrantFiled: August 10, 2021Date of Patent: December 12, 2023Inventors: Su Jin Jung, Ki Hwan Kim, Sung Uk Jang, Young Dae Cho
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Patent number: 11830916Abstract: A semiconductor device includes first and second nitride semiconductor layers. The second layer on the first nitride has a first region, a second region, and a third region between the first and second regions. A first gate electrode is in the first region and extends parallel to a surface of a substrate. A first source electrode is in the first region and extends in the first direction. A second gate electrode in the second region and extends in the first direction. A second source electrode is in the second region and extends in the first direction. A drain electrode coupled to a first and a second wiring. The first wiring directly contacts the second nitride semiconductor layer in the first region. The second wiring directly contacts the second nitride semiconductor layer in the second region. An insulation material is in the third region.Type: GrantFiled: March 2, 2021Date of Patent: November 28, 2023Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage CorporationInventors: Akira Yoshioka, Yasuhiro Isobe, Hung Hung, Hitoshi Kobayashi, Tetsuya Ohno, Toru Sugiyama
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Patent number: 11830940Abstract: The present disclosure relates to a semiconductor device and a method of fabricating the same. The semiconductor device includes: a substrate including a vertical interface; a channel layer disposed outside the vertical interface; and a channel supply layer disposed outside the channel layer; wherein at least one of a vertical two-dimensional electron gas 2DEG and two-dimensional hole gas 2DHG is formed in the channel layer adjacent to an interface between the channel layer and the channel supply layer.Type: GrantFiled: March 6, 2020Date of Patent: November 28, 2023Assignee: GUANGDONG ZHINENG TECHNOLOGIES, CO. LTD.Inventor: Zilan Li
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Patent number: 11825655Abstract: A memory structure including a substrate and memory cells is provided. The memory cells are stacked on the substrate. Each memory cell includes a first conductive layer, a first gate, a second gate, a second conductive layer, a channel layer, and a first charge storage layer. The first conductive layer, the first gate, the second gate, and the second conductive layer are sequentially stacked. The first conductive layer and the first gate are electrically insulated from each other. The first gate and the second gate are electrically insulated from each other. The second gate and the second conductive layer are electrically insulated from each other. The first gate and the second gate are electrically insulated from the channel layer. The first conductive layer and the second conductive layer are electrically connected to the channel layer. The first charge storage layer is located between the first gate and the channel layer.Type: GrantFiled: September 9, 2021Date of Patent: November 21, 2023Assignee: Powerchip Semiconductor Manufacturing CorporationInventor: Zih-Song Wang
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Patent number: 11817387Abstract: A semiconductor device includes a cell semiconductor pattern disposed on a semiconductor substrate. A semiconductor dummy pattern is disposed on the semiconductor substrate. The semiconductor dummy pattern is co-planar with the cell semiconductor pattern. A first circuit is disposed between the semiconductor substrate and the cell semiconductor pattern. A first interconnection structure is disposed between the semiconductor substrate and the cell semiconductor pattern. A first dummy structure is disposed between the semiconductor substrate and the cell semiconductor pattern. Part of the first dummy structure is co-planar with part of the first interconnection structure. A second dummy structure not overlapping the cell semiconductor pattern is disposed on the semiconductor substrate. Part of the second dummy structure is co-planar with part of the first interconnection structure.Type: GrantFiled: May 23, 2022Date of Patent: November 14, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jang-Gn Yun, Jaesun Yun, Joon-Sung Lim
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Patent number: 11817488Abstract: In some embodiments, a method for forming an integrated chip (IC) is provided. The method incudes forming an interlayer dielectric (ILD) layer over a substrate. A first opening is formed in the ILD layer and in a first region of the IC. A second opening is formed in the ILD layer and in a second region of the IC. A first high-k dielectric layer is formed lining both the first and second openings. A second dielectric layer is formed on the first high-k dielectric layer and lining the first high-k dielectric layer in both the first and second regions. The second high-k dielectric layer is removed from the first region. A conductive layer is formed over both the first and second high-k dielectric layers, where the conductive layer contacts the first high-k dielectric layer in the first region and contacts the second high-k dielectric in the second region.Type: GrantFiled: June 8, 2021Date of Patent: November 14, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tung Ying Lee, Shao-Ming Yu, Tzu-Chung Wang
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Patent number: 11800708Abstract: A nonvolatile memory device and method for fabricating the same are provided. The nonvolatile memory device comprising: a substrate; a mold structure including a first insulating pattern and a plurality of gate electrodes alternately stacked in a first direction on the substrate; and a word line cut region which extends in a second direction different from the first direction and cuts the mold structure, wherein the word line cut region includes a common source line, and the common source line includes a second insulating pattern extending in the second direction, and a conductive pattern extending in the second direction and being in contact with the second insulating pattern and a cross-section in the second direction.Type: GrantFiled: August 17, 2020Date of Patent: October 24, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Yoo Jin Choi, Jung-Hwan Lee
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Patent number: 11800715Abstract: A semiconductor storage device includes: a substrate layer; and a stacked body that is provided on the substrate layer. The semiconductor storage device includes a columnar portion that includes a semiconductor body extending within the stacked body in a stacking direction. The semiconductor storage device includes: an insulating layer provided on the plurality of terrace portions; and a plurality of columnar bodies extending in a first direction and provided within the insulating layer. The semiconductor storage device includes slit portions that split the stacked body into a plurality of string units. Each of the columnar bodies adjacent to each of the slit portions has a core film, the semiconductor body, a tunnel insulating film, and a block insulating film formed in sequence from a shaft center side to an outer periphery side of the columnar body, and the columnar body does not have the charge storage portion.Type: GrantFiled: August 30, 2021Date of Patent: October 24, 2023Assignee: KIOXIA CORPORATIONInventor: Akihito Ikedo
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Patent number: 11784247Abstract: A MOS controlled thyristor device according to the concept of the present invention includes a substrate comprising a first surface and a second surface, which face each other, gate patterns disposed on the first surface, a cathode electrode configured to cover the gate patterns, and an anode electrode disposed on the second surface, The substrate includes a lower emitter layer having a first conductive type, a lower base layer having a second conductive type on the lower emitter layer, an upper base region provided in an upper portion of the lower emitter layer and having a first conductive type, wherein the upper base region is configured to expose a portion of a top surface of the lower base layer, an upper emitter region having a second conductive type and provided in an upper portion of the upper base region, a first doped region having a first conductive type and a second doped region surrounded by the first doped region and having a second conductive type, wherein the first and second doped regions areType: GrantFiled: June 10, 2021Date of Patent: October 10, 2023Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTEInventors: Kun Sik Park, Jong Il Won, Doo Hyung Cho, Dong Yun Jung, Hyun Gyu Jang
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Patent number: 11785777Abstract: In some embodiments, the present disclosure relates to a method of forming an integrated chip including forming a ferroelectric layer over a bottom electrode layer, forming a top electrode layer over the ferroelectric layer, performing a first removal process to remove peripheral portions of the bottom electrode layer, the ferroelectric layer, and the top electrode layer, and performing a second removal process using a second etch that is selective to the bottom electrode layer and the top electrode layer to remove portions of the bottom electrode layer and the top electrode layer, so that after the second removal process the ferroelectric layer has a surface that protrudes past a surface of the bottom electrode layer and the top electrode layer.Type: GrantFiled: January 12, 2022Date of Patent: October 10, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Hsiang Chang, Kuo-Chi Tu, Sheng-Hung Shih, Wen-Ting Chu, Tzu-Yu Chen, Fu-Chen Chang