Patents Examined by Farun Lu
-
Patent number: 11616128Abstract: A transistor structure includes a gate, a spacer, a channel region, a first concave, and a first conductive region. The gate is above a silicon surface. The spacer is above the silicon surface and at least covers a sidewall of the gate. The channel region is under the silicon surface. The first conductive region is at least partially formed in the first concave, wherein a conductive region of a neighborhood transistor structure next to the transistor structure is at least partially formed in the first concave.Type: GrantFiled: April 14, 2020Date of Patent: March 28, 2023Assignees: Etron Technology, Inc., Invention And Collaboration Laboratory Pte. Ltd.Inventors: Chao-Chun Lu, Li-Ping Huang
-
Patent number: 11600701Abstract: A silicon carbide substrate has a trench extending from a main surface of the silicon carbide substrate into the silicon carbide substrate. The trench has a trench width at a trench bottom. A shielding region is formed in the silicon carbide substrate. The shielding region extends along the trench bottom. In at least one doping plane extending approximately parallel to the trench bottom, a dopant concentration in the shielding region over a lateral first width deviates by not more than 10% from a maximum value of the dopant concentration. The first width is less than the trench width and is at least 30% of the trench width.Type: GrantFiled: April 6, 2021Date of Patent: March 7, 2023Assignee: Infineon Technologies AGInventors: Andreas Peter Meiser, Caspar Leendertz, Anton Mauder
-
Patent number: 11600688Abstract: A display device includes a substrate, a metal layer disposed on the substrate, a first conductive layer including a lower pattern disposed on the metal layer, an active layer disposed on the first conductive layer, a second conductive layer disposed on the active layer and including a first gate electrode, a pixel electrode disposed on the second conductive layer, and an emission layer and a common electrode disposed on the pixel electrode.Type: GrantFiled: March 30, 2020Date of Patent: March 7, 2023Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Jun Hyun Park, Dong Woo Kim, Sung Jae Moon, Kang Moon Jo
-
Patent number: 11594602Abstract: A semiconductor structure includes a metal gate structure (MG) formed over a substrate, a first gate spacer formed on a first sidewall of the MG, a second gate spacer formed on a second sidewall of the MG opposite to the first sidewall, where the second gate spacer is shorter than the first gate spacer, a source/drain (S/D) contact (MD) adjacent to the MG, where a sidewall of the MD is defined by the second gate spacer, and a contact feature configured to electrically connect the MG to the MD.Type: GrantFiled: April 16, 2020Date of Patent: February 28, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Li-Zhen Yu, Lin-Yu Huang, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
-
Patent number: 11587875Abstract: A connecting structure includes a substrate, a first conductive feature, a second conductive feature, a third conductive feature over the first conductive feature and a fourth conductive feature over the second conductive feature. The substrate includes a first region and a second region. The first conductive feature is disposed in the first region and has a first width. The second conductive feature is disposed in the second region and has a second width greater than the first width of the first conductive feature. The third conductive feature includes a first anchor portion surrounded by the first conductive feature. The fourth conductive feature includes a second anchor portion surrounded by the second conductive feature. A depth difference ratio between a depth of the first anchor portion and a depth of the second anchor portion is less than approximately 10%.Type: GrantFiled: August 11, 2020Date of Patent: February 21, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: U-Ting Chiu, Yu-Shih Wang, Chun-Cheng Chou, Yu-Fang Huang, Chun-Neng Lin, Ming-Hsi Yeh
-
Patent number: 11581480Abstract: A pressure sensor element and a receiving circuit are formed on an IC chip. A transmitting circuit and a piezoelectric element of an actuator are respectively formed on a transmitting chip and a piezoelectric chip. The piezoelectric chip and the pressure sensor face each other separated by a distance in an airtight first space surrounded by a package main body and a base substrate. Dielectric breakdown voltage of signal transmission from the primary side to the secondary side is set by the distance. The first space is a pressure propagation region including an insulating medium capable of transmitting vibrations of the piezoelectric element as pressure. The signal transmission is performed with high insulation by the pressure generated in the pressure propagation region between components integrated in a single module by insulating the primary side and the secondary side from each other by the insulating medium of the pressure propagation region.Type: GrantFiled: January 25, 2018Date of Patent: February 14, 2023Assignee: FUJI ELECTRIC CO., LTD.Inventor: Masashi Akahane
-
Patent number: 11575026Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, a fin structure over the substrate, a gate structure over the fin structure, an epitaxial region formed in the fin structure and adjacent to the gate structure. The epitaxial region can embed a plurality of clusters of dopants.Type: GrantFiled: March 19, 2021Date of Patent: February 7, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chien-Wei Lee, Chii-Horng Li, Heng-Wen Ting, Yee-Chia Yeo, Yen-Ru Lee, Chih-Yun Chin, Chih-Hung Nien, Jing-Yi Yan
-
Patent number: 11574841Abstract: The present application relates to a semiconductor device with an intervening layer and a method for fabricating the semiconductor device with the intervening layer. The semiconductor device includes a substrate, a bottom conductive plug positioned on the substrate, an intervening conductive layer positioned on the bottom conductive plug, and a top conductive plug positioned on the intervening conductive layer. A top surface of the intervening conductive layer is non-planar.Type: GrantFiled: August 27, 2020Date of Patent: February 7, 2023Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Ping Hsu
-
Patent number: 11552198Abstract: A transistor comprises a pair of source/drain regions having a channel region there-between. A transistor gate construction is operatively proximate the channel region. The channel region comprises a direction of current flow there-through between the pair of source/drain regions. The channel region comprises at least one of GaP, GaN, and GaAs extending all along the current-flow direction. Each of the source/drain regions comprises at least one of GaP, GaN, and GaAs extending completely through the respective source/drain region orthogonal to the current-flow direction. The at least one of the GaP, the GaN, and the GaAs of the respective source/drain region is directly against the at least one of the GaP, the GaN, and the GaAs of the channel region. Each of the source/drain regions comprises at least one of elemental silicon and metal material extending completely through the respective source/drain region orthogonal to the current-flow direction. Other embodiments are disclosed.Type: GrantFiled: December 4, 2020Date of Patent: January 10, 2023Assignee: Micron Technology, Inc.Inventor: Durai Vishak Nirmal Ramaswamy
-
Patent number: 11545552Abstract: A semiconductor structure and a method for forming the same are provided. One form of a forming method includes: providing a base, the base including a device region and a dummy device region, the base including an isolation layer, gate structures located on the isolation layer, a first mask layer located on the gate structures, a source-drain plug located between the gate structures and on the isolation layer, and a second mask layer located on the source-drain plug. In implementations of the present disclosure, the first mask layer and the second mask layer on the dummy device region are separately removed. Correspondingly, the first opening and the second opening respectively expose the gate structures and the source-drain plug in the dummy device region. The gate structures exposed by the first opening and the source-drain plug exposed by the second opening are removed in the same step.Type: GrantFiled: November 25, 2020Date of Patent: January 3, 2023Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATIONInventor: Nan Wang
-
Patent number: 11543748Abstract: Disclosed is a thin film circuit substrate and a manufacturing method thereof, which are capable of forming a pattern having a feature size of less than 10 ?m by forming a seed layer and a plating layer on a base substrate and then forming, through electrospinning, a photoresist layer having a thickness in a set range. The disclosed thin film circuit substrate comprises: a base substrate; a thin film seed layer formed on the top surface of the base substrate; a metal layer formed on the top surface of the thin film seed layer; and a photoresist layer formed on the top surface of the metal layer, wherein the thickness of the photoresist layer is in a range of 1 ?m to 5 ?m.Type: GrantFiled: September 13, 2018Date of Patent: January 3, 2023Assignee: AMOGREENTECH CO., LTD.Inventor: Sung-Baek Dan
-
Patent number: 11532547Abstract: Interconnect structures and methods of forming the same are provided. An interconnect structure according to the present disclosure includes a first conductive feature in a first dielectric layer, a second conductive feature aligned with and over the first conductive feature, a first insulation layer over the first dielectric layer and the second conductive feature, a second dielectric layer over the first insulating layer, and a contact via through the first insulation layer and the second dielectric layer.Type: GrantFiled: August 22, 2019Date of Patent: December 20, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Cheng-Hsiung Tsai, Ming-Han Lee, Chung-Ju Lee
-
Patent number: 11532712Abstract: A method for making a semiconductor device includes forming a first patterned structure over an interlayer dielectric. The interlayer dielectric overlays a first source/drain structure and a second source/drain structure. The first patterned structure extends along a first lateral direction and a vertical projection of the first patterned structure is located between the first and second source/drain structures along a second lateral direction perpendicular to the first lateral direction. The method includes reducing a width of the first patterned structure that extends along the second lateral direction. The method includes forming, based on the first patterned structure having the reduced width, contact holes that expose the first source/drain structure and the second source/drain structure, respectively.Type: GrantFiled: February 3, 2021Date of Patent: December 20, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Yu-Lien Huang, Ching-Feng Fu, Guan-Ren Wang, Che-Ming Hsu
-
Patent number: 11532714Abstract: A device includes a device layer including a first transistor, a first interconnect structure on a front-side of the device layer, and a second interconnect structure on a backside of the device layer. The second interconnect structure includes a first dielectric material on the backside of the device layer, a contact extending through the first dielectric material to a first source/drain region of the first transistor, and a first conductive layer including a first conductive line electrically connected to the first source/drain region through the contact.Type: GrantFiled: November 9, 2020Date of Patent: December 20, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Li-Zhen Yu, Huan-Chieh Su, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
-
Patent number: 11527612Abstract: Gate-all-around integrated circuit structures having vertically discrete source or drain structures, and methods of fabricating gate-all-around integrated circuit structures having vertically discrete source or drain structures, are described. For example, an integrated circuit structure includes a vertical arrangement of horizontal nanowires. A gate stack is around the vertical arrangement of horizontal nanowires. A first epitaxial source or drain structure is at a first end of the vertical arrangement of horizontal nanowires, the first epitaxial source or drain structure including vertically discrete portions aligned with the vertical arrangement of horizontal nanowires. A second epitaxial source or drain structure is at a first end of the vertical arrangement of horizontal nanowires, the second epitaxial source or drain structure including vertically discrete portions aligned with the vertical arrangement of horizontal nanowires.Type: GrantFiled: September 28, 2018Date of Patent: December 13, 2022Assignee: Intel CorporationInventors: Glenn Glass, Anand Murthy, Biswajeet Guha, Dax M. Crum, Sean Ma, Tahir Ghani, Susmita Ghose, Stephen Cea, Rishabh Mehandru
-
Patent number: 11515303Abstract: A SGT MOSFET having ESD diode and a method of manufacturing the same are disclosed. The SGT trench MOSFET according to the present invention, has n+ doped shielded electrode in an N channel device and requires only two poly-silicon layers, making the device can be shrunk with reducing shielded gate width for Rds reduction without increasing switching loss and having dynamic switching instability.Type: GrantFiled: March 12, 2021Date of Patent: November 29, 2022Assignee: NAMI MOS CO., LTD.Inventor: Fu-Yuan Hsieh
-
Patent number: 11515257Abstract: An upper surface of a plug (PL1) is formed so as to be higher than an upper surface of an interlayer insulating film (PIL) by forming the interlayer insulating film (PIL) on a semiconductor substrate (1S), completing a CMP method for forming the plug (PL1) inside the interlayer insulating film (PIL), and then, making the upper surface of the interlayer insulating film (PIL) to recede. In this manner, reliability of connection between the plug (PL1) and a wiring (W1) in a vertical direction can be ensured. Also, the wiring (W1) can be formed so as not to be embedded inside the interlayer insulating film (PIL), or a formed amount by the embedding can be reduced.Type: GrantFiled: October 1, 2020Date of Patent: November 29, 2022Assignee: Renesas Electronics CorporationInventor: Takeshi Kawamura
-
Patent number: 11508826Abstract: A method includes forming a gate dielectric layer on a semiconductor region, and depositing a first aluminum-containing work function layer using a first aluminum-containing precursor. The first aluminum-containing work function layer is over the gate dielectric layer. A second aluminum-containing work function layer is deposited using a second aluminum-containing precursor, which is different from the first aluminum-containing precursor. The second aluminum-containing work function layer is deposited over the first aluminum-containing work function layer. A conductive region is formed over the second aluminum-containing work function layer.Type: GrantFiled: November 19, 2020Date of Patent: November 22, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsin-Yi Lee, Cheng-Lung Hung, Chi On Chui
-
Patent number: 11508827Abstract: A semiconductor structure includes a first device and a second device. The first device includes: a first gate structure formed over an active region and a first air spacer disposed adjacent to the first gate structure. The second device includes: a second gate structure formed over an isolation structure and a second air spacer disposed adjacent to the second gate structure. The first air spacer and the second air spacer have different sizes.Type: GrantFiled: July 26, 2019Date of Patent: November 22, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Hsiu Liu, Feng-Cheng Yang, Tsung-Lin Lee, Wei-Yang Lee, Yen-Ming Chen, Yen-Ting Chen
-
Patent number: 11508659Abstract: A semiconductor device includes a gate electrode extending in a first direction in a first layer over an active region, a first conductive line extending in the first layer adjacent to the gate electrode, a first power rail extending in a second direction perpendicular to the first direction in a second layer over the first layer, a second conductive line arranged in a third layer over the second layer, and a conductive via extending through the first power rail and electrically connecting the second conductive line to one of the gate electrode and the first conductive line. The conductive via is electrically insulated from the first power rail.Type: GrantFiled: September 10, 2020Date of Patent: November 22, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Guo-Huei Wu, Shun-Li Chen, Hui-Zhong Zhuang, Chih-Liang Chen, Li-Chun Tien