Abstract: A vertical batch furnace assembly for processing wafers having a cassette handling space, a wafer handling space, and a first wall and separating the cassette handling space from the wafer handling space. The first wall has at least one wafer transfer opening in front of which, at a side of the first wall which is directed to the cassette handling space, a wafer transfer position for a wafer cassette is provided. The cassette handling space comprises a cassette storage having a plurality of cassette storage positions and a cassette handler configured to transfer wafer cassettes between the cassette storage positions and the wafer transfer position. The cassette handler has a first cassette handler arm and a second cassette handler arm.

Abstract: A rail can include first and transverse channels defined therein. A container can include a rod, a spring, a first plate assembly, and a second plate assembly. The first plate assembly can include a first transverse bearing disposed in the first transverse channel. The second plate assembly can include a second transverse bearing disposed in the second transverse channel. A robotic assembly can include a robotic arm. The robotic arm can include opposing grips defining a grip space therebetween. A processing system including one or more processors can be configured to, via the robotic assembly: align the grip space with the container rod; drive the rod against the spring; allow the spring to relax and thereby separate the first plate assembly from the second plate assembly; position the rod such that the first transverse bearing and the second transverse bearing are simultaneously withdrawn from the first and second transverse channels.

Abstract: Embodiments provide for systems and methods related to kiosks for personalizing a packaged article. The kiosks may also be used for storage, inventory management, retrieval, packaging, and/or personalization of packaged articles. The kiosks discussed herein differ from non-kiosk personalization systems, such as personalization systems installed on a factory or warehouse floor, in that the kiosks are self-contained personalization systems. In some embodiments, the kiosks are portable and can be moved between different sites or events. This portability allows the kiosks to personalize packaged articles for concerts, festivals, conventions, trade shows, and the like.

Abstract: An identifier associated with one or more assets is obtained in response to a reader component reading a tag associated with one or more assets as the one or more assets traverse a conveyor apparatus. At least partially in response to the obtaining of the identifier, a storage unit of a plurality of storage units is caused to automatically rotate to a loading location to receive the one or more assets.

Abstract: There is provided an EFEM, including: at least one load port; a housing closed by connecting the at least one load port to an opening provided on a side wall of the housing and configured to define, in the housing, a transfer chamber for transferring a substrate; a substrate transfer device disposed in the transfer chamber and configured to transfer the substrate; an inert gas supply unit configured to supply an inert gas to the transfer chamber; and a gas discharge unit configured to discharge a gas in the transfer chamber, wherein the at least one load port includes: an opening/closing mechanism capable of opening and closing a lid of a mounted FOUP; and an accommodation chamber kept in communication with the transfer chamber and configured to accommodate a part of the opening/closing mechanism.

Abstract: Methods and apparatus for selecting and combining items in an outbound container through the use of autonomous vehicles, each of which includes means for automatically loading and unloading a payload, to perform both transfer and transport functions in moving containers of items within a workspace via a network of roadways. Under computer control, said autonomous vehicles transfer and transport case containers of item units between incoming receiving stations, intermediate storage locations, and outgoing order-assembly stations where entire containers or individual item units are combined in the outbound container.

Abstract: A system and method are disclosed relating to an automated store or system including an automated fulfillment section having a storage structure for storing fungible and/or non-fungible goods. The fungible and/or non-fungible goods may be retrieved from storage in response to a customer order. The system and method of the present technology allows retrieved fungible and/or non-fungible goods to be sorted and packed in accordance with stored customer preferences.

Abstract: A processing system for processing a plurality of workpieces includes a transfer chamber in process flow communication with a first processing chamber and a second processing chamber, the transfer chamber having a first straight side, wherein the first process chamber includes at least one first processing station, and wherein the first processing chamber is disposed along the first straight side, wherein the second process chamber includes at least two second processing stations, wherein the second processing chamber is disposed along the first straight side, and wherein the second process chamber disposed in linear arrangement with the first process chamber along the first straight side, and wherein the transfer chamber includes at least one workpiece handling robot configured to transfer at least one workpiece to the at least one first processing station and the at least two second processing stations.

Abstract: A substrate processing apparatus configured to process a substrate includes a substrate receptacle placing unit configured to place thereon a substrate receptacle accommodating therein the substrate to be processed; and a storage zone provided adjacent to the substrate receptacle placing unit to store therein the substrate receptacle. The storage zone includes multiple storages which are vertically arranged in multiple levels and configured to place and store thereon the multiple substrate receptacles horizontally. The substrate receptacle is transferred between a first storage of the multiple storages at an uppermost position and a ceiling travelling vehicle configured to be moved above the substrate processing apparatus. A second storage of the multiple storages under the first storage is configured to place and store the substrate receptacle thereon such that a direction of the substrate receptacle on the second storage is different from a direction of the substrate receptacle on the first storage.

Abstract: Embodiments of the present disclosure relate to a substrate transfer device having a contactless latch and contactless coupling providing the ability to lock and unlock the substrate transfer device at atmospheric and vacuum pressure with without particle generation at a base of the substrate transfer device, the contactless latch, and the contactless coupling. The substrate transfer device includes a lid having one or more lid grooves, a base having one or more base grooves, and a rotation member rotatably coupled to the lid. Each flange of one or more flanges of the substrate transfer device is rotatable in aligned lid grooves and base grooves, and each flange of the one or more flanges has an arm with a ferromagnetic material coupled thereto. The base is coupled to the lid when the ferromagnetic material of the arm is aligned and spaced from a magnetic material of a slot of the one or more base grooves.

Abstract: An apparatus to support a proppant container includes a frame to receive and support the proppant container. The frame has a top surface that receives and positions the proppant container in an elevated position. The apparatus also includes a box guide assembly positioned on the top surface a box guide assembly connected to the top surface of the frame for defining a cradle section having four corners. The box guide assembly including a box guide positioned at each of the corners. Each box guide has a corner member extending upwardly from the top surface along a peripheral edge of the frame and a guide member extending adjacent the corner member. The guide member include an inclined face for aligning the proppant container in the cradle section. The box guide assembly guides the proppant container into the cradle section when loaded onto the frame in the elevated position.

Abstract: An interface device for a purging unit for purging a wafer container with a purging gas, which comprises a contact piece for contacting a purging interface of a wafer container, wherein the contact piece is movably arranged in the purging unit and has a gas passage in its interior. A corresponding interface device is provided. The object is to specify an interface device which, when the wafer container is coupled to the purging unit, makes it possible to seal a gas inlet or a gas outlet, to introduce or to discharge a purging gas into the wafer container, thereby compensating for and adapting to vertical and horizontal movements, preventing wear, and fulfilling a passive coupling and sealing function as well as offering maximum durability and reliability. This is achieved by a contact piece which is suspended directly or indirectly in the purging unit by means of a spring device.

Abstract: An article storage facility is disclosed which has a relatively high article storage efficiency and which can reduce the possibility of degradation, etc., of articles that may occur within a storage structure. The article storage facility includes: a storage structure; a first support station provided inside the storage structure and configured to support a storage container; a second support station configured to support a transporting container; and an article transfer device. A transporting container is a container that is used to transport articles outside the storage structure whereas a storage container is a container that is used to transport and store articles inside the storage structure, and is configured to hold a plurality of articles with greater holding efficiency than a transporting container.

Abstract: A system and method for robotic container storage, handling, and transfer system and method includes a grid structure formed of two substantially perpendicular sets of rails above a portion of at least one transport network, a robotic load handling device operating on the grid structure, a vehicle means located on the at least one transport network below the grid structure configured to receive a container, the robotic load handling device being provided with an engaging means for engaging the container and a lifting means configured for lifting the container from the vehicle means for movement to an alternative location, wherein one or more portions of the rails above the vehicle means of the transport network are missing in a direction transverse to a direction of the transport network forming one or more open grid spaces enabling alignment of the robotic load handling device above the vehicle means.

Abstract: A loading frame includes a base and two walls arranged on opposite sides of the base. The walls are flexible and are arranged to permit movement, preferably sliding, between the wall and the load space's side, the wall being supported on the side. A system and a method for loading articles utilize the loading frame.

Abstract: A robot hand is provided. The robot hand includes a transfer plate that has a loading region; an electrostatic chuck configured to adsorb a wafer disposed on the loading region of the transfer plate; and a heating element configured to heat the loading region of the transfer plate.

Abstract: A fuel tank assembly includes a shell defining an opening therein, an access panel connectable to the shell and movable between a closed position where the opening is closed and an open position where the opening is open, and a fuel tank disposed in the shell and slidably engaged with the shell. The fuel tank and the opening are dimensioned such that the fuel tank is slidable out of the shell via the opening when the access panel is in the open position. A generator assembly and a method of servicing a fuel tank of a generator are also described.

Abstract: A load port includes a dock plate on which a container storing a substrate is placed, a port plate, a moving mechanism configured to move the dock plate between a dock position and an undock position, a gas supply nozzle unit provided in the dock plate and configured to contact a bottom surface of the container placed on the dock plate and supply a gas into the container, and a pressing unit provided above the dock plate and configured to press the container placed on the dock plate downward. The pressing unit includes a contact member brought into contact with the container placed on the dock plate, and a driving mechanism configured to move the contact member between a first position apart from the container and a second position in contact with the container.

Abstract: In combination, a storage unit storable within a three-dimensional storage system and a storage/retrieval vehicle navigable through the three-dimensional storage system to storage locations therein at which the storage unit is selectively storable and retrievable. The storage/retrieval vehicle comprises a frame conveyable through the three-dimensional storage system, a platform atop the frame for receipt of the storage unit on the platform, and a loading/unloading mechanism operable to load and unload the storage unit to and from the platform at four different sides thereof. The storage unit and the storage/retrieval vehicle are configured to enable unloading of the storage unit from the platform in any one of four different directions at four different respective sides of the vehicle regardless of an original orientation in which the storage unit was previously loaded onto the platform and without reorienting the storage unit from the original orientation.

Abstract: A seed containing and dispensing system may include a mobile base, a primary hopper on the mobile base with an interior to hold particulate material and having a dispensing opening, and a conveyor to transfer particulate material received by the conveyor from the hopper. The conveyor may rotatable with respect to the primary hopper about a rotation axis to at least two positions. The system also including a dispensing apparatus configured to dispense a substance into the particulate material conveyed by the conveyor, and the dispensing apparatus may be configured to move with the conveyor as the conveyor rotates with respect to the primary hopper to permit dispensing of the substance at each of the at least two positions.