Abstract: In an inert-gas circulating type EFEM, generation of any constraints on installation of incidental equipment, a maintenance door, or the like is inhibited, and the need for changing the placement position, etc. of a feedback path according to the specifications, etc. of a substrate processing device connected thereto is eliminated. An EFEM 1 is provided with: a transfer chamber 41 in which a wafer W is conveyed; a unit installation chamber 42 in which a FFU 44 for feeding nitrogen to the transfer chamber 41 is installed; and a return path 43 for feeding the nitrogen having flown through the transfer chamber 41, back to the unit installation chamber 42. A substrate processing apparatus 6 is connected to the rear-side end of the transfer chamber 41. The return path 43 is disposed at the front-side end of the transfer chamber 41.

Abstract: A wheelchair lift for mounting to a vehicle includes a platform assembly configured to support a wheelchair. The wheelchair lift includes a roll stop to be moved between an entry position to allow a wheelchair to be loaded to or unloaded from the platform assembly, and a barrier position to prevent the wheelchair from falling off the platform assembly. The wheelchair lift includes a mechanical actuator mechanism for moving the roll stop between the entry position and the barrier position. The mechanical actuator mechanism is configured to keep the roll stop in the entry position, when the platform assembly is in a ground level position, and to block the roll stop from moving from the barrier position to the entry level position, when the platform assembly is in the horizontal position.

Abstract: A substrate-handling robot includes an end-effector to support a substrate and an arm, coupled to the end-effector, to translate the end-effector between an extended position and a retracted position. The substrate-handling robot also includes an enclosure to at least partially enclose the substrate with the substrate on the end-effector in the retracted position. The enclosure includes a shower to provide a flow of purge gas to the substrate.

Abstract: An apparatus for emptying bags containing loose material. The apparatus comprises a cutting member for cutting the bags and a support grid including a row of rods arranged downstream of the cutting member and onto which the bags are carried once they have been cut. The rods are associated with a motovibrator designed to cause the rods to vibrate, facilitating the emptying of the bags. Furthermore, a resilient spacer is interposed between each pair of adjacent rods.

Abstract: A dump trailer comprising a goose neck adapted for removable coupling to a tractor unit and a dropped frame joined to the goose neck and extending rearwardly of the goose neck. A plurality of trailer wheel and axle assemblies are joined to the bottom of the rear of the dropped frame. Each of the plurality of trailer wheel and axle assemblies has left and right wheels suitable for highway travel. An open bed is joined to the top of the dropped frame for receiving cargo. The open bed extends below the goose neck and has a front and a rear opening for permitting discharge of the cargo from the open bed.

Abstract: A vehicular parking apparatus includes a frame defining horizontal rows and vertical columns of parking spaces. Subframes are configured to have a vehicle parked thereon and can move vertically in the columns. Platforms move horizontally in the rows and are configured to engage and move the subframes with the vehicles thereon. The subframes, the platforms and the frame provide electrical connections for charging parked electric vehicles.

Abstract: A produce loading and unloading device and system. The device and system has structures for lifting an entire stack of flats loaded with produce such as berries, moving the stack of flats to a conveyor, and dumping the produce off each flat of the stack, one flat at a time. During the process, the operator of the device doesn't have to lift a single flat of produce. The dumping operation operates continuously, with no pauses to load stacks of flats. Throughput and safety are greatly improved.

Abstract: A load port apparatus includes an installation section, a frame section, a first wheel, a second wheel, and a supporter. The installation section includes an installation surface for installing a container for containing a substrate. The frame section is disposed on one side of the installation section, extends upward from this one side, and includes a lower fixation unit located below the installation surface. The first wheel is attached below the installation section and has a first diameter. The second wheel is attached below the installation section and further away from the frame section than the first wheel and has a second diameter smaller than the first diameter. The supporter is attached below the installation section and further away from the frame section than the first wheel and has a vertically adjustable distance from the installation surface to a lower end of the supporter.

Abstract: A storage bin sweep system may include a sweep apparatus with a particulate material moving assembly configured to move particulate material toward an inboard end of the sweep apparatus and a drive unit carrying a portion of the particulate material moving assembly. The drive unit may include a surface engaging element configured to engage a surface below the sweep assembly to move the sweep apparatus with respect to the surface and a drive train configured to transmit power to the surface engaging element. The drive train may include a clutch assembly configured to transfer rotation utilizing a viscous fluid to permit a limited degree of slippage between elements of the drive train.

Abstract: An apparatus and method for reducing moisture within a wafer handling chamber is disclosed. The moisture reduction results in reduced oxidation of a wafer. The moisture reduction is made possible through use of valves and purging gas. Operation of the valves may result in improved localized purging.

Abstract: An automatic case loader for loading product in a trailer is disclosed. A mobile base structure provides a support framework for a drive subassembly, conveyance subassembly, an industrial robot, a distance measurement sensor, and a control subassembly. Under the operation of the control subassembly, product advances through a powered transportation path to an industrial robot which places the product within the trailer. The control subassembly coordinates the selective articulated movement of the industrial robot and the activation of the drive subassembly based upon the distance measurement sensor detecting objects within a detection space, dimensions of the trailer provided to the control subassembly, and dimensions of the product provided to the control subassembly.

Abstract: A liquid transport method is disclosed for efficiently producing cell cultures. The liquid transport method of the present disclosure, which is in processing of cells, includes: a) a step in which a container holding a liquid is gripped by a gripping tool of a robot; and b) a step in which the liquid in the container is transported to a collection container by rotating the gripped container. In steps a) and b) the robot operates such as not to pass over a vertical line of an opening of the collection container.

Abstract: A system includes a robot configured to load and/or unload from a location, such as a cargo carrier or building. The robot includes a base unit that has a transport system to move the base unit. A mast extends from the base unit, and the mast has a mast conveyor. An End of Arm Tool (EoAT) is coupled to the mast. The EoAT includes an EoAT conveyor configured to move a cargo item to and from the mast conveyor. A gripper mechanism is configured to move between a retracted position where the gripper mechanism is clear of the cargo item on the EoAT conveyor and an extended position where the gripper mechanism is able to grip the cargo item.

Abstract: A system for allowing a chassis for an intermodal shipping container having fittings and a floor to be secured to a loading dock is provided. The system is capable of being stowed away into the chassis when not in use, and moveable to a locking position for interfacing with the dock's restraining system when the chassis is to be secured to the loading dock.

Abstract: Systems and methods for processing workpieces, such as semiconductor workpieces are provided. One example embodiment is directed to a processing system for processing a plurality of workpieces. The plasma processing system can include a loadlock chamber. The loadlock chamber can include a workpiece column configured to support a plurality of workpieces in a stacked arrangement. The system can further include at least two process chambers. The at least two process chambers can have at least two processing stations. Each processing station can have a workpiece support for supporting a workpiece during processing in the process chamber. The system further includes a transfer chamber in process flow communication with the loadlock chamber and the process chamber. The transfer chamber includes a rotary robot. The rotary robot can be configured to transfer a plurality of workpieces from the stacked arrangement in the loadlock chamber to the at least two processing stations.

Abstract: Features for loading, transporting and unloading of items are disclosed. Systems, devices and methods for such operations using a tray are described. In some embodiments, a tray having a moveable bottom allows for switching between a configuration for loading and unloading items in and out of the tray and a configuration for transportation of items inside the tray. The trays may also be stacked, for transportation of multiple trays at once, and nested, for saving space when storing the trays. In some embodiments, the trays may be used in conjunction with loading and unloading systems.

Abstract: A wafer sorting and stoking system provides automated storage and retrieval of wafer frames carrying semiconductor wafers. A wafer frame cassette is received at a transfer port from a transfer system. A robot arm retrieves the wafer frames from the cassette and stores each wafer frame in a respective storage slot in one of a plurality of storage towers. The storage location of each wafer frame is recorded. Each wafer frame can be selectively retrieved and loaded into a wafer frame cassette by the robot arm for further processing.

Abstract: A vehicle carrier mountable to a vehicle frame, and a method for using same, including a tiltable subframe pivotally attached to a rear end of the vehicle frame, and a slidable bed with a transverse hinge mounted on and slidably attached to the subframe. The subframe is tiltable, enabling a rear portion of the bed to lay generally horizontally flat along the ground, and thereby provide an essentially zero-degree loading angle for a vehicle to be transported, while the front portion of the bed remains slidably attached to the inclined subframe.

Abstract: Electronic device manufacturing apparatus and robot apparatus are described. The apparatus are configured to efficiently pick and place substrates wherein the robot apparatus includes an upper arm and three blades B1, B2, B3 that are independently rotatable. The three blades are configured to service a first dual load lock and second dual load lock wherein each dual load lock includes a different pitch. In some embodiments, a first pitch P1 is smaller than a second pitch P2. Blades B2 and B3 (or optionally blades B1 and B2) can service the first dual load lock with Pitch P1 and blades B1 and B3 can service the second dual load lock including the second pitch P2. Methods of operating the electronic device manufacturing apparatus and the robot apparatus are provided, as are numerous other aspects.

Abstract: A stocker is disposed above a processing device and includes: a plurality of shelves provided in multiple stages in an up-down direction, to place articles thereon; and a crane to place an article on the shelves or take out an article placed on the shelves. The shelves include: a carry-in/out port used for an overhead transport vehicle to place an article thereon; and storage shelves used for the crane to place an article thereon. The carry-in/out port has a vertical dimension that allows a grip of the overhead transport vehicle to place the article from above. More storage shelves are provided than the carry-in/out port and are provided to have a smaller vertical dimension than that of the carry-in/out port. The crane places an article on the carry-in/out port onto the storage shelves or place an article on the storage shelves onto the carry-in/out port by a transfer device.