Abstract: A projected beam smoke detector includes circuitry and control software to measure a distance a beam travels between the detector's transmitter and receiver. Either a time-based or a phase-based measurement methodology could be used. A sensitivity parameter of the detector could be set in response to the results of the measurement.

Abstract: An apparatus for determining an elevation of a working tool relative to a reference plane, includes a rotary laser system, a radio unit and a detector. The rotary laser system emits a rotating laser beam in a plane inclined relative to the reference plane. The radio unit is configured to measure a distance between the working tool and the rotary laser system and the detector is mounted on the working tool for detecting the laser beam. The elevation of the working tool can be determined on a basis of the inclination angle and the distance between the working tool and the rotary laser system.

Abstract: Methods and systems are provided for monitoring a solid-liquid interface, including providing a vessel configured to contain an at least partially melted material; detecting radiation reflected from a surface of a liquid portion of the at least partially melted material that is parallel with the liquid surface; measuring a disturbance on the surface; calculating at least one frequency associated with the disturbance; and determining a thickness of the liquid portion based on the at least one frequency, wherein the thickness is calculated based on L = f 2 ? w 2 g , where g is the gravitational constant, w is the horizontal width of the liquid, and f is the at least one frequency.

Abstract: A focused droplet nebulizer of the invention produces substantially uniform droplets of a predetermined size. Droplets are pushed out through a small outlet orifice by the contraction of a chamber. The droplets can be carried on a substantially non-divergent path in a drift tube. A piezo membrane micro pump acts in response to an electrical control signal to force a droplet out of the outlet orifice. The nebulizer can operate at frequencies permitting a stream of individual droplets of the predetermined size to be sent along the substantially non-divergent path in the drift tube in a preferred embodiment ELSD device.

Abstract: A relationship between surface decenter of a lens 1 under test and surface-decenter comatic aberration and a relationship between surface tilt of the lens 1 under test and surface-tilt comatic aberration are calculated by computer simulation. The surface tilt of the lens 1 under test is calculated by measuring a transmissive wavefront of a projecting portion 3, and comatic aberration of the lens 1 under test is calculated by measuring a transmissive wavefront of a lens portion 2. The surface-decenter comatic aberration that occurs due to the surface decenter is calculated by subtracting the surface-tilt comatic aberration from the calculated comatic aberration. The surface decenter of the lens 1 under test is calculated based on the calculated surface-decenter comatic aberration.

Abstract: Systems and methods for in-situ reflectivity degradation monitoring of optical collectors used in extreme ultraviolet (EUV) lithography processes are described. In one embodiment, a method comprises providing a semiconductor lithography tool employing an EUV source optically coupled to a collector within a vacuum chamber, the collector providing an intermediate focus area, measuring a first signal at the EUV source, measuring a second signal at the intermediate focus area, comparing the first and second signals, and monitoring a reflectivity parameter of the collector based upon the comparison. In another embodiment, a method comprises emitting a signal from a non-EUV light source optically coupled to the collector, measuring a signal reflected by the collector, and monitoring a reflectivity parameter of the collector based upon a comparison between the emitted and measured signals.

Abstract: The invention provides an optical measuring device capable of performing measuring using a transient diffraction grating by only adjusting probe light, and a nanoparticle measuring device using the same principle as the optical measuring device.

Abstract: A reference substrate for defect detection sensitivity calibration has: patterns and programmed defective portions which are cone defects with different sizes and are formed at random on a silicon substrate. By using the reference substrate for defect detection sensitivity calibration, it is possible to obtain an index, usable in manufacturing management, for determining sensitivity adjustment after a lamp is replaced in an illumination part of a defect inspection apparatus.

Abstract: An image data set acquired by an optical coherence tomography (OCT) system is corrected for effects due to motion of the sample. A first set of A-scans is acquired within a time short enough to avoid any significant motion of the sample. A second more extensive set of A-scans is acquired over an overlapping region on the sample. Significant sample motion may occur during acquisition of the second set. A-scans from the first set are matched with A-scans from the second set, based on similarity between the longitudinal optical scattering profiles they contain. Such matched pairs of A-scans are likely to correspond to the same region in the sample. Comparison of the OCT scanner coordinates that produced each A-scan in a matching pair, in conjunction with any shift in the longitudinal scattering profiles between the pair of A-scans, reveals the displacement of the sample between acquisition of the first and second A-scans in the pair.

Abstract: There is a need for inspecting a heightwise variation in a sample. A holder holds a sample. A charge control unit charges the sample held by the holder. A retarding power supply applies a voltage to the sample held by the holder. An electro-optic system radiates an electron beam to the sample applied with a voltage by the retarding power supply and images a mirror electron returning near the surface of the sample. An image processing unit processes a mirror image resulting from imaging the mirror electron. The image processing unit outputs information corresponding to a difference between mirror images, i.e., a mirror image acquired by imaging the mirror electron and a mirror image for a prepared standard preparation, as a heightwise variation in a sample.

Abstract: A method of improving an initial color filter comprises a numerical generation of sinusoidal spectra. Two steps of selecting said spectra are then executed. The first selection is carried out according to a criterion of colorimetric similitude with respect to the initial filter. The second selection is carried out according to the capacity of dummy filters corresponding to each spectrum to restore hues in a natural manner. To do this, observations of samples of hues through each dummy filter are simulated numerically, using a color appearance model to take account of a visual perception of a human observer. In this way, an improved filter is determined, which has a color close to that of the initial filter and which affords a natural rendition of hues.

Abstract: Methods and systems for evaluating pigment dispersions with desired characteristics. More specifically, methods and systems for evaluating particle size of colorless or light color dispersions using a novel parameter described as particle size related scattering index (PSRSI).

Abstract: The capabilities of the Modulated Optical Reflectance (MOR) technology in dopant metrology applications are combined with the sensitivity of the PhotoReflectance (PR) method in the present system to provide stress and other measurements in semiconductor samples. Such combination enhances the measurement performance of MOR based systems in ion implant applications (implantation dose and energy) and expands system capabilities into a new area of structural parameters measurements, for example, strain in silicon wafers.

Abstract: A scattered light measurement device includes an illumination mask providing measuring radiation on an entrance side (1a) of a test component (1) and a detection part (3-6) for detection of light scattered by the test component and disposed on an exit side (1b) of the test component. The illumination mask includes at least one scattered light measurement structure, wherein the scattered light measurement structure has a scattered light marker zone and wherein the scattered light marker zone has a rotationally non-symmetric shape.

Abstract: An optical method and system for measuring characteristics of a sample using a broadband metrology tool in a purge gas flow environment are disclosed. In the method a beam path for the metrology tool is purged with purge gas at a first flow rate. A surface of the sample is illuminated by a beam of source radiation having at least one wavelength component in a vacuum ultraviolet (VUV) range and/or at least one wavelength component in an ultraviolet-visible (UV-Vis) range. A flow rate of a purge gas is adjusted between the first flow rate for metrology measurements made when the source radiation is in the VUV spectral region and a second flow rate for metrology measurements made when the source radiation is in the UV-Vis spectral region. The system includes a light source, illumination optics, collection optics, detector, a purge gas source and a controller.

Abstract: In respective measurement operations on a first sample surface area having a layer structure (81) and a characterized second sample surface area (82), light reflected by the region of the sample surface and the reference surface interfere and a sensing device (10) senses light intensity representing interference fringes at intervals during the relative movement along a measurement scan path to provide first intensity data in the form of a first series of intensity values resulting from a measurement operation on the first sample surface area and second intensity data in the form of a second series of intensity values resulting from a measurement operation on the second sample surface area.

Abstract: An optical sensor device (10) is able to be coupled to a window (14), in particular to a windscreen of a motor vehicle. The optical sensor device (10) comprises a sensor unit (12), which includes a emitter (26), a receiver (28) and a light conductor unit (30). By the light conductor unit (30), a light beam (34) emitted by the emitter (26) is coupled into the window (14), coupled out of the window (14) and directed onto the receiver (28). The light conductor unit (30) includes Fresnel lens regions and associated reflecting regions.

Abstract: The present invention provides an optical displacement meter in which light receiving elements are disposed two-dimensionally, capable of stably obtaining a reception light amount in accordance with a work.

Abstract: A fluid quality monitoring apparatus (100) comprising a fluid flow channel (120) having a photo sensing material (104) disposed upon a first surface and a light source emitting light (132) through an opposing light transitive surface (106). The condition of the fluid affects the absorption and reflection of the light. The penetrating light is received by the photo sensing material (104), which provides an output that can be utilized to analyze the condition of the fluid. The light can be provided via a plurality of LEDS, the incorporation of a radially distributed series of fiber optic strands, or any other light source. The sensing material can include defraction gratings, improving the monitoring process. The sensing material can be incorporated in a variety of configurations. The apparatus is preferably designed to be integrated between a fluid filter and the respective filter mounting bracket.

Abstract: There is provided a surface plasmon resonance imaging sensor capable of performing absolute calibration comprising: a transparent substrate; a first prism and a second prism formed at one surface of the substrate and symmetrically positioned with reference to the center axis of the substrate; an optical system for providing light to the first and second prisms; and a light receiving part for detecting the light reflected from the substrate, wherein a surface plasmon resonance (SPR) angle change of an object to be measured by the first prism is measured, and a refractive index change on each pixel of the object is obtained as a two-dimensional difference image by the second prism.