Patents Examined by Hwa (Andrew) Lee
  • Patent number: 7298497
    Abstract: Apparatus for splitting, imaging, and measuring wavefronts with a reference wavefront and an object wavefront. A wavefront-combining element receives and combines into a combined wavefront an object wavefront from an object and a reference wavefront. A wavefront-splitting element splits the combined wavefront into a plurality of sub-wavefronts in such a way that each of the sub-wavefronts is substantially contiguous with at least one other sub-wavefront. The wavefront-splitting element may shift the relative phase between the reference wavefront and the object wavefront of the sub-wavefronts to yield a respective plurality of phase-shifted sub-wavefronts. The wavefront-splitting element may then interfering the reference and object wavefronts of the phase-shifted sub-wavefronts to yield a respective plurality of phase-shifted interferograms. An imaging element receives and images the phase-shifted interferograms.
    Type: Grant
    Filed: February 7, 2006
    Date of Patent: November 20, 2007
    Assignee: MetroLaser, Inc.
    Inventors: James E. Millerd, Neal J. Brock
  • Patent number: 7295325
    Abstract: In one embodiment, a probe pulse is first stretched into a pulse of longer duration. The probe pulse comprises a plurality of wavelength components in a bandwidth, so that each temporal portion of the converted pulse corresponds to and comprises one of the wavelength components. This converted pulse is supplied to the sample at the time when it is affected by the disturbance of the sample caused by a pump pulse. Changes in characteristics of the sample at the wavelength components of the temporal portions of the converted pulse are then detected after the converted pulse has been modified by the sample. Such changes are then analyzed to derive characteristics of the sample. In another embodiment, a converter passes to a detector radiation from a probe beam that has been modified by the sample during a temporal sequence of time intervals, where the time intervals correspond to displacement in a spatial record.
    Type: Grant
    Filed: September 26, 2003
    Date of Patent: November 13, 2007
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Hidong Kwak, Gary Janik, Mehrdad Nikoonahad
  • Patent number: 7292349
    Abstract: A sensing system and method for biomolecular sensing. The system includes: a receptor for the at least one target, the receptor including a substrate and a transparent coating on the substrate having front and back surfaces; a light source positioned to direct at least a portion of light from the light source toward the coating on the receptor; and a detector positioned to capture the light reflected from the front and back surfaces of the coating, the detector identifying presence of at least one target based on a change in the interference pattern of captured light.
    Type: Grant
    Filed: October 28, 2002
    Date of Patent: November 6, 2007
    Assignee: University of Rochester
    Inventors: Benjamin Miller, Lewis Rothberg
  • Patent number: 7292342
    Abstract: Novel spectroscopy techniques using entangled photons are disclosed. In one technique, entangled photons are directed to a sample of interest, while the photons with which they are entangled are resolved according to frequency. The photons transmitted by or reflected from the sample and the frequency-resolved photons are detected. Such detection may be by way of an electronic coincidence counter or a biphoton sensitive material, which absorbs entangled photons while allowing other photon pairs to pass. Detection information is used to derive spectroscopic properties of the sample. In another technique, a Fourier transform spectroscopy technique using entangled photons is disclosed. Entangled photons are directed to a sample, while the photons with which they are entangled are directed to a Michelson interferometer. The photons transmitted by or reflected from the sample and the photons leaving the Michelson interferometer are detected.
    Type: Grant
    Filed: July 28, 2004
    Date of Patent: November 6, 2007
    Assignee: General Dynamics Advanced Information Systems Inc.
    Inventor: Thomas Zaugg
  • Patent number: 7292348
    Abstract: A stage apparatus including a stage capable of moving an object, first and second measurement units adapted to measure a displacement of the stage in a predetermined direction based on a variation of an optical path length of measurement light, which are arranged so as to have an overlap area to simultaneously measure a stage position while the stage is being moved, a switching unit to switch measurement by the first measurement unit to measurement by the second measurement unit by delivering a measurement value from the first measurement unit to the second measurement unit in the overlap area, and a correction unit, in the stage position upon switching by the switching unit, to correct a wavelength variation of the measurement light based on the measurement value delivered from the first measurement unit to the second measurement unit.
    Type: Grant
    Filed: October 13, 2005
    Date of Patent: November 6, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventor: Satoshi Akimoto
  • Patent number: 7289222
    Abstract: A method of processing a substrate having an optical surface includes using an interferometer which includes optics for providing a beam of measuring light. The optics polarize the beam of measuring light such that a tangential polarization component continuously increases relative to a radial polarization component with increasing distance from an optical axis. The substrate is positioned in the beam of measuring light. Using the system, the interferometer determines a surface map of the optical surface, and determines deviations of the optical surface from a target shape.
    Type: Grant
    Filed: October 31, 2003
    Date of Patent: October 30, 2007
    Assignee: Carl Zeiss SMT AG
    Inventor: Karl-Heinz Schuster
  • Patent number: 7286239
    Abstract: A method for optical evaluation of a sample includes scanning a beam of coherent radiation over the sample, whereby the radiation is scattered from the sample, while directing a portion of the scanning beam toward a diffraction grating so that the portion of the beam is scanned over the grating, whereby a frequency-shifted reference beam is diffracted from the grating. The scattered radiation and the frequency-shifted reference beam are combined at a detector to generate an optical heterodyne signal.
    Type: Grant
    Filed: December 1, 2004
    Date of Patent: October 23, 2007
    Assignee: Applied Materials, Israel, Ltd.
    Inventor: Haim Feldman
  • Patent number: 7286241
    Abstract: A system and method for laser light amplification provides amplification of a laser light beam emitted from a laser light source as low-amplification seed laser light signal. The low-amplification seed laser light signal is transmitted to an amplification component. The amplification component amplifies the low-amplification seed laser light signal by stimulating emissions of the population inversion provided by a pumping diode to generate an amplified laser light signal. The system and method further directs the amplified laser light signal to an output destination. The destination may be an object undergoing laser ultrasound testing. The amplified laser light may reflect with a modulation characteristic of a sound energy wave about the object. The reflected laser light may be collected by an interferometer and used in the detection and characterization of the sound energy wave.
    Type: Grant
    Filed: May 22, 2002
    Date of Patent: October 23, 2007
    Assignee: Lockheed Martin Corporation
    Inventor: Thomas E. Drake, Jr.
  • Patent number: 7283216
    Abstract: A distributed fiber sensor based on spontaneous Brillouin scattering uses a single-frequency fiber laser as a source and a cw Brillouin fiber ring laser as an OLO to optically shift the frequency of the OLO to set the Brillouin/OLO beat frequency within the bandwidth of a conventional heterodyne receiver. The distributed fiber sensor is capable of real-time measurement of both temperature and strain.
    Type: Grant
    Filed: June 22, 2004
    Date of Patent: October 16, 2007
    Assignee: NP Photonics, Inc.
    Inventors: Jihong Geng, Shibin Jiang, Christine Spiegelberg
  • Patent number: 7283248
    Abstract: In general, in one aspect, the invention features an apparatus including a multi-axis interferometer configured to produce at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis, wherein at least three of the measurement axes are in a common plane, wherein the output beams each include a component that makes a pass to the measurement object along a common beam path.
    Type: Grant
    Filed: January 6, 2005
    Date of Patent: October 16, 2007
    Assignee: Zygo Corporation
    Inventor: Henry A. Hill
  • Patent number: 7283250
    Abstract: An interferometric profiler is used to measure object motion by modifying the motion of the scanner so that the phase variation at each scanning step is kept within the acceptable limits of the algorithm used to calculate phase changes. The scanner motion is so manipulated on the basis of prior knowledge about the nature of the object motion, or knowledge obtained by pre-calibration, or by real-time feedback based on current measurements. The object motion is recovered from the scanning information by subtracting the scanner position from the object position as it evolves during the scan.
    Type: Grant
    Filed: January 16, 2004
    Date of Patent: October 16, 2007
    Assignee: Veeco Instruments, Inc.
    Inventors: Joanna Schmit, Paul R. Unruh, Erik L. Novak
  • Patent number: 7280216
    Abstract: A method and apparatus for measuring the wavelength of an input light beam whereby the input light beam is split into two light beams which are directed through two paths of different optical length. The light beams are interfered with each other in order to form a fringe pattern at an observation plane, which fringe pattern is detected and analyzed to thereby determine the wavelength of the input light beam.
    Type: Grant
    Filed: September 26, 2003
    Date of Patent: October 9, 2007
    Assignee: Fizeau Electro-Optic Systems, LLC
    Inventors: James J. Snyder, Stephen L. Kwiatkowski
  • Patent number: 7280225
    Abstract: A stage apparatus including a stage movable in a first direction and a second direction, different from the first direction, the first and second directions being a horizontal direction, and first and second measurement systems each having a laser interferometer and a mirror system including a first reflecting mirror elongated in the first direction and a second reflecting mirror elongated in the second direction, and measuring a position of the stage with respect to a vertical direction based on measurement of a length of a laser beam light path formed by the mirror system. A switching unit transfers a measurement value from the first measurement system in use to the second measurement system and switches the measurement system in use from the first measurement system to the second measurement system within an overlapping zone of measurement systems. A first correcting unit corrects the transferred measurement value.
    Type: Grant
    Filed: February 23, 2005
    Date of Patent: October 9, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventor: Satoshi Akimoto
  • Patent number: 7277184
    Abstract: A method for simultaneous measuring a thickness of a liquid crystal layer and an average refractive index of the said liquid crystal in sealed liquid crystal cell is disclosed. The method is based on analysis of spectral positions of maxima and minima of interference oscillations, their magnitudes and their envelope in the spectrum of light mirrored by the liquid crystal cell at several different angles-of-incidence. The method is applicable to cells filled with different liquid crystals including cholesterics and smectics.
    Type: Grant
    Filed: May 19, 2003
    Date of Patent: October 2, 2007
    Assignees: Swedish LCD Center
    Inventors: Kent Skarp, Oleksandr Slobodyanyuk, Sergiy Valyukh
  • Patent number: 7277179
    Abstract: A system for estimating a parameter selected from the group consisting of a current, a magnetic field, or combinations thereof comprises a resonant frequency tunable magneto-optical loop resonator, wherein the loop resonator comprises a magneto-optical sensing element coupled to an optical waveguide, and wherein the loop resonator is configured for receiving an originating optical signal from a broadband light source and providing a modulated signal indicative of the estimated parameter.
    Type: Grant
    Filed: December 13, 2004
    Date of Patent: October 2, 2007
    Assignee: General Electric Company
    Inventors: Kung-Li Justin Deng, Glenn Alan Forman
  • Patent number: 7274468
    Abstract: Beam shearing apparatus for introducing a lateral shear between the components of a light beam. The apparatus is an optical assembly having a polarizing interface and input and output facets and two reflecting surfaces one of which is arranged at an angle generally opposite the input facet and the other of which is arranged at an angle generally opposite the output facet.
    Type: Grant
    Filed: May 19, 2005
    Date of Patent: September 25, 2007
    Assignee: Zygo Corporation
    Inventors: Henry Allen Hill, Justin L. Kreuzer
  • Patent number: 7274466
    Abstract: A surface of a dynamic object such as a polygon mirror is measured to determine configuration. In measuring the surface configuration, a light is emitted onto the surface, and interference stripes are analyzed to determine the surface configuration. In analysis of the interference stripes, a correct sign for the peak frequency is required so as to measure a configuration at a high precision level without much prior preparation. The correct sign is obtained in a substantially improved manner by using a relationship between the object light that has been reflected by an object to be measured and the reference light that has been emitted from the light source.
    Type: Grant
    Filed: March 11, 2005
    Date of Patent: September 25, 2007
    Assignee: Ricoh Company, Ltd.
    Inventor: Nobuhiro Morita
  • Patent number: 7268882
    Abstract: A gas sensor arrangement comprises a first half-shell mateable with a second half-shell. The first half-shell has a detector receiving opening and radiation source receiving apertures. A gas measuring chamber is formed between the first half-shell and the second half-shell. The gas measuring chamber extends between the detector receiving opening and the radiation source receiving apertures. Concave mirrors are arranged around the radiation source receiving apertures. The concave mirrors are formed by inner surfaces of the first and second half-shells. Tubes extend from the concave mirrors to the detector receiving opening. The tubes are formed by the inner surfaces of the first and second half-shells. The inner surfaces are coated with a reflective material.
    Type: Grant
    Filed: February 16, 2005
    Date of Patent: September 11, 2007
    Assignees: Tyco Electronics Raychem GmbH, Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Joerg Fischer, Marco Forlenza, Rudi Minuth, Kuno Straub, Thomas Tille
  • Patent number: 7268889
    Abstract: A frequency-shifting interferometer gathers intensity data from a set of interference patterns produced at different measuring beam frequencies. A periodic function is matched to the intensity data gathered from the set of interference patterns over a corresponding range of measuring beam frequencies. Localized correlations involving phase offsets between the interfering portions of the measuring beam are used to inform a determination of a rate of phase change with measuring beam frequency corresponding to the optical path length difference between the interfering beam portions.
    Type: Grant
    Filed: September 22, 2004
    Date of Patent: September 11, 2007
    Assignee: Corning Incorporated
    Inventors: Andrew Kulawiec, Joseph C. Marron, Don McClimans, Mark J. Tronolone
  • Patent number: 7268884
    Abstract: Devices and methods of accurately determining optical wavelengths, such as the Bragg wavelengths of an FBG sensor array. Wavelength-swept light having a characteristic spectrum is swept over a bandwidth and is applied to an interference filter. The interference filter produces an optical spectrum having one or more reference peaks that are identifiable because of the characteristic spectrum. The optical spectrum is converted into electrical signals having at least one electrical signal that is identifiable because of the characteristic spectrum. The identifiable electrical signal is used by a signal processor as an absolute, high accuracy wavelength reference. Temperature compensation or temperature stabilization can compensate the characteristic wavelength. Fiber Bragg sensor systems can use the wavelength reference to determine the Bragg wavelength of FBG elements. The characteristic spectrum can be imparted by the light source or an optical element such as a transmission line filter.
    Type: Grant
    Filed: December 23, 2003
    Date of Patent: September 11, 2007
    Assignee: Optoplan AS
    Inventors: Jon Thomas Kringlebotn, Hilde Nakstad, Dag Thingbo