Patents Examined by Hwa S Lee
  • Patent number: 7643212
    Abstract: A rotationally tunable time delay line device for providing a continually adjustable time delay between two orthogonally polarized laser pulses is described. The device is comprised of one or more rotational delay crystals, each made of a flat uniaxially birefringent crystal with a special orientation of its internal optical axis. The time delay generated between the two orthogonally polarized laser pulses that travel through the rotationally tunable delay line can be continually adjusted by rotating the constituent rotational delay crystals around their surface normals. An application is demonstrated in detail where the rotationally tunable time delay line device is used to form an optical autocorrelator for measuring femtosecond or picosecond duration laser pulses.
    Type: Grant
    Filed: October 9, 2008
    Date of Patent: January 5, 2010
    Inventors: Jason P. Sokoloff, Lawrence Sokoloff
  • Patent number: 7643150
    Abstract: An optical apparatus includes a first element, a second element, a support which supports the first element, a first measuring device which measures the position of the first element relative to the support, a second measuring device which measures the position of the second element relative to the support, a third measuring device which measures any deformation of the support, and a controller. The controller controls the relative position between the first element and the second element on the basis of the measurement results obtained by the first measuring device, the second measuring device, and the third measuring device.
    Type: Grant
    Filed: August 7, 2007
    Date of Patent: January 5, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventor: Ryo Nawata
  • Patent number: 7639363
    Abstract: An Electro-Optic Imaging Fourier Transform Spectrometer (EOIFTS) for Hyperspectral Imaging is described. The EOIFTS includes an input polarizer, an output polarizer, and a plurality of birefringent phase elements. The relative orientations of the polarizers and birefringent phase elements can be changed mechanically or via a controller, using ferroelectric liquid crystals, to substantially measure the spectral Fourier components of light propagating through the EIOFTS. When achromatic switches are used as an integral part of the birefringent phase elements, the EIOFTS becomes suitable for broadband applications, with over 1 micron infrared bandwidth.
    Type: Grant
    Filed: September 7, 2006
    Date of Patent: December 29, 2009
    Assignee: California Institute of Technology
    Inventors: Tien-Hsin Chao, Hanying Znod
  • Patent number: 7636165
    Abstract: A displacement measurement system configured to provide measurement of the relative displacement of two components in six degrees of freedom with improved consistency and without requiring excessive space.
    Type: Grant
    Filed: March 21, 2006
    Date of Patent: December 22, 2009
    Assignee: ASML Netherlands B.V.
    Inventors: Renatus Gerardus Klaver, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch
  • Patent number: 7619742
    Abstract: A high-speed absorption spectrographic system employs a slit-less spectroscope to obtain high-resolution, high-speed spectrographic data of combustion gases in an internal combustion engine allowing precise measurement of gas parameters including temperature and species concentration.
    Type: Grant
    Filed: June 28, 2007
    Date of Patent: November 17, 2009
    Assignee: Wisconsin Alumni Research Foundation
    Inventor: Scott T. Sanders
  • Patent number: 7616318
    Abstract: An electric field waveform of an optical signal is precisely measured with high time resolution. Particularly, determination of inter-symbol interference has been difficult. Output light from the laser source is divided into first and second portions. The first portion is modulated by an optical modulator. The second portion is delayed by a delay line for the same quantity of delay as that of the first portion. The first and second portions are fed to a phase diversity circuit to configure a homodyne interferometer. An optical input sampling oscilloscope stabilizes a variable optical phase shifter to set an optical phase at a particular point of time to a fixed value using a pattern sync signal as a reference. An optical input sampling oscilloscope repeatedly averages optical waveforms and a CPU conducts three-dimensional display of the optical electric field waveform from which noise has been removed.
    Type: Grant
    Filed: August 29, 2006
    Date of Patent: November 10, 2009
    Assignee: Hitachi Communication Technologies, Ltd.
    Inventor: Nobuhiko Kikuchi
  • Patent number: 7612890
    Abstract: The invention is directed to a system and method for implementing process control for temperature of a semiconductor wafer using sonic NDE techniques. The system may, for example, generate ultrasound waves in a test object during the manufacturing process. A detector such as an interferometer may be used to detect the ultrasound waves. An interpreter or analyzer may determine the temperature of the semiconductor wafer from the waves. Then, a control system may determine and implement an appropriate control action on the process.
    Type: Grant
    Filed: May 9, 2002
    Date of Patent: November 3, 2009
    Assignee: Lockheed Martin Corporation
    Inventor: Thomas E. Drake, Jr.
  • Patent number: 7609388
    Abstract: A method of wavefront (100) analysis including applying a transform to the wavefront, applying a plurality of different phase changes (110, 112, 114) to the transformed wavefront (108), obtaining a plurality of intensity maps (130, 132, 134) wherein the plurality of different phase changes are applied to region of the transformed wavefront, corresponding to a shape of the light source.
    Type: Grant
    Filed: October 16, 2002
    Date of Patent: October 27, 2009
    Assignee: ICOS Vision Systems NV
    Inventors: Yoel Arieli, Shay Wolfling, David Banitt, Yosi Weitzman, Yoram Saban, Emmanuel Lanzmann, Shay Levavi
  • Patent number: 7602498
    Abstract: A dome-shaped chemical sensing probe comprises an optical fiber or may be mounted on an optical fiber. The probe has a chemically sensitive measuring material which exhibits a change in volume and/or a change in refractive index in the presence of a given chemical. The change in volume and/or refractive index gives a change in an optical path length through the probe which can be measured interferometrically.
    Type: Grant
    Filed: March 14, 2006
    Date of Patent: October 13, 2009
    Assignee: Invivosense ASA
    Inventors: Dag R. Hjelme, Arne Berg, Reinold Ellingsen, Berit Falch, Astrid Bjørkøy, Dan Østling
  • Patent number: 7602503
    Abstract: A method for measuring a wavefront of an optical system. A first step of the method includes directing electromagnetic radiation uniformly at an object plane having a first grating positioned therein. Lines of the first grating comprise a plurality of dots. A second step of the method includes projecting an image of the first grating onto a focal plane having a second grating positioned therein. A third step of the method includes measuring the wavefront of the optical system based on a fringe pattern produced by the second grating.
    Type: Grant
    Filed: February 21, 2007
    Date of Patent: October 13, 2009
    Assignee: ASML Holdings N.V.
    Inventor: Sherman K. Poultney
  • Patent number: 7580134
    Abstract: This invention provides a method and an apparatus of measuring a micro-structure, capable of evaluating a geometry of a micro-structure formed typically on the surface of a semiconductor substrate, in a non-destructive, easy, precise and quantitative manner. A reflection spectrum of a sample having a known dimension of a target micro-geometry is measured (A1), features (waveform parameters) which strongly correlate to a dimension of the measured micro-geometry are determined (A2), a relation between the dimension of the micro-geometry and the waveform parameters is found (A3), and a dimension of the micro-structure having an unknown dimension is finally determined using this relation and based on the reflection spectrum obtained therefrom (A4, A5).
    Type: Grant
    Filed: August 27, 2008
    Date of Patent: August 25, 2009
    Assignee: NEC Electronics Corporation
    Inventor: Yoshiharu Muroya
  • Patent number: 7576864
    Abstract: An interferometric measuring device for recording geometric data for surfaces of at least one object, including a beam supply section including a modulation interferometer fed by a light source including temporarily coherent broadband radiation, a measuring interferometer system that is connected thereto and includes a plurality of probe units for emitting radiation of measuring beams onto the assigned surface locations and recording the radiation reflected by the surface locations, the radiation forming interference with radiation reflected by a related reference element system, and including a downstream receiving and evaluation device for determining geometric data on the basis of the interfering radiation.
    Type: Grant
    Filed: August 17, 2004
    Date of Patent: August 18, 2009
    Assignee: Robert Bosch GmbH
    Inventors: Michael Lindner, Bernd Schmidtke
  • Patent number: 7573577
    Abstract: Methods for chemically-resolved optical microscopy are presented. The methods can provide a wide-field, spatial interference imaging using multiple nonlinear scattering channels to produce multiple, spatially coherent anti-Stokes Raman scattering (CARS).
    Type: Grant
    Filed: October 19, 2006
    Date of Patent: August 11, 2009
    Assignee: Southwest Research Institute
    Inventor: Robert E. Martinez
  • Patent number: 7564561
    Abstract: A method of absolute optical frequency measurement is realized by using mode-locked laser frequency combs to measure the optical frequency of an unknown laser. By varying the repetition frequency, the relative frequency location of the unknown laser to the beating comb line is determined according to the corresponding variation of the beat frequency. Also, by varying the offset frequency of the mode-locked laser, the real offset frequency detected by a self-referencing technique can be determined according to the corresponding variation of the beat frequency between the unknown laser and the mode-locked laser frequency combs. The mode number of the frequency comb is uniquely and adequately determined through measuring the beat frequencies between the unknown laser and the mode-locked laser frequency combs at various repetition frequencies and through measuring the corresponding mode number change, and hence the optical frequency of the unknown laser is determined.
    Type: Grant
    Filed: February 12, 2007
    Date of Patent: July 21, 2009
    Assignee: Industrial Technology Research Institute
    Inventor: Jin-Long Peng
  • Patent number: 7561275
    Abstract: A laser cavity optical architecture of a solid-state laser gyro measures rotational velocity or angular position and is based on a global conservation of the scale factor so that each parameter varies with temperature and avoids optical mode hops.
    Type: Grant
    Filed: October 6, 2005
    Date of Patent: July 14, 2009
    Assignee: Thales
    Inventors: Gilles Feugnet, Sylvain Schwartz, Jean-Paul Pocholle, Christian Larat, Francois Gutty
  • Patent number: 7561281
    Abstract: The invention is directed to a system and method for implementing process control for tubing thickness using sonic NDE techniques. The system may, for example, generate ultrasound waves in a test object during the manufacturing process. A detector such as an interferometer may be used to detect the ultrasound waves. An interpreter or analyzer may determine the tubing or sheet thickness from the waves. Then, a control system may determine and implement an appropriate control action on the process.
    Type: Grant
    Filed: May 9, 2002
    Date of Patent: July 14, 2009
    Assignee: Lockheed Martin Corporation
    Inventor: Thomas E. Drake, Jr.
  • Patent number: 7557931
    Abstract: Low coherence light is divided into measuring light and reference light. The measuring light is collected to be projected onto an object of measurement. Intensities of the reflected light in a plurality of positions in the direction of depth are detected by carrying out a Fourier analysis on each channeled spectrum obtained by decomposing the detected interference light into frequency components. The optical path length of the reference light is stepwise changed to adjust the optical path length within the focusing range of the measuring light. A plurality of pieces of data representing the intensity of the reflected light are obtained in a plurality of positions in the direction of depth each time the position of the focusing range changes, and data on the position in the direction of depth where the measuring light is in the focusing range is extracted out of the pieces of data.
    Type: Grant
    Filed: September 29, 2006
    Date of Patent: July 7, 2009
    Assignee: FUJIFILM Corporation
    Inventor: Masahiro Toida
  • Patent number: 7554670
    Abstract: A double pass apparatus for detecting defects on a disk surface includes a light source that generates a light beam and a beamsplitter that splits the light beam into a first light beam portion and a second light beam portion. A modulator is provided that modulates the second light beam portion into a frequency shifted modulated light beam for illuminating the surface of the disk. The frequency shifted modulated light beam is twice reflected from the surface of the disk, thus doubling the frequency shift of the reflected light beam. A polarizing beamsplitter combines the first light beam portion with the reflected light beam portion providing an interference signal.
    Type: Grant
    Filed: January 17, 2007
    Date of Patent: June 30, 2009
    Assignee: Seagate Technology LLC
    Inventors: Peter C. Jann, Wafaa Abdalla
  • Patent number: 7551288
    Abstract: A system for determining at least one condition of a bearing including an optical fiber for transmitting light from a light source. The optical fiber is embedded in the bearing and operatively coupled to an interferometric system. The interferometric system is operatively coupled to a processor. The interferometric system provides the processor with information relating to wear of the optical fiber, and the processor determines wear of the bearing, rate of wear and remaining useful life of the bearing based on the information relating to wear of the optical fiber.
    Type: Grant
    Filed: July 25, 2000
    Date of Patent: June 23, 2009
    Assignee: Rockwell Automation Technologies, Inc.
    Inventor: Frederick M. Discenzo
  • Patent number: 7545510
    Abstract: An imaging, differential optical sectioning interference microscopy (DOSIM) system and method for measuring refractive indices and thicknesses of transparent thin-films. The refractive index and thickness are calculated from two interferometric images of the sample transparent thin-film having a vertical offset that falls within the linear region of an axial response curve of optically sectioning microscopy. Here, the images are formed by a microscope objective in the normal direction, i.e., in the direction perpendicular to the latitudinal surface of the thin-film. As a result, the lateral resolution of the transparent thin-film is estimated based on the Rayleigh criterion, 0.61?/NA.
    Type: Grant
    Filed: April 25, 2007
    Date of Patent: June 9, 2009
    Assignee: Academia Sinica
    Inventors: Chau-Hwang Lee, Chun-Chieh Wang