Patents Examined by Igwe U. Anya
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Patent number: 11488855Abstract: A semiconductor device and a method of forming the same are provided. The method includes forming a trench in a substrate. A liner layer is formed along sidewalls and a bottom of the trench. A silicon-rich layer is formed over the liner layer. Forming the silicon-rich layer includes flowing a first silicon precursor into a process chamber for a first time interval, and flowing a second silicon precursor and a first oxygen precursor into the process chamber for a second time interval. The second time interval is different from the first time interval. The method further includes forming a dielectric layer over the silicon-rich layer.Type: GrantFiled: August 3, 2020Date of Patent: November 1, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Cheng-I Lin, Bang-Tai Tang
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Patent number: 11482649Abstract: A semiconductor package includes a photonic die, an encapsulated electronic die, a substrate, and a lens structure. The photonic die includes an optical coupler. The encapsulated electronic die is disposed over and bonded to the photonic die. The encapsulated electronic die includes an electronic die and an encapsulating material at least laterally encapsulating the electronic die. The substrate is disposed over and bonded to the encapsulated electronic die. The lens structure is disposed over the photonic die and is overlapped with the optical coupler from a top view. The optical coupler is configured to be optically coupled to an optical signal source through the lens structure.Type: GrantFiled: July 29, 2020Date of Patent: October 25, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Fa Chen, Hsien-Wei Chen, Jie Chen
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Patent number: 11482616Abstract: A semiconductor device includes a region of semiconductor material comprising a major surface and a first conductivity type and a shielded-gate trench structure. The shielded-gate trench structure includes an active trench, an insulated shield electrode in the lower portion of the active trench; an insulated gate electrode adjacent to the gate dielectric in an upper portion of the active trench; and an inter-pad dielectric (IPD) interposed between the gate electrode and the shield electrode. An interlayer dielectric (ILD) structure is over the major surface. A conductive region is within the active trench and extends through the ILD structure, the gate electrode, and the IPD, and is electrically connected to the shield electrode. The conductive region is electrically isolated from the gate electrode by a dielectric spacer. The gate electrode comprises a shape that surrounds the conductive region in a top view so that the gate electrode is uninterrupted by the conductive region and the dielectric spacer.Type: GrantFiled: January 5, 2021Date of Patent: October 25, 2022Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventor: Peter A. Burke
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Patent number: 11476355Abstract: A semiconductor device having IGBT, FWD and separate cell regions in a common semiconductor substrate, includes: a drift layer; a base layer; trench gate structures; an emitter region; a collector layer; a cathode layer; a first electrode; and a second electrode. The IGBT region having a first gate electrode in first and second IGBT trenches with a grid pattern is on the collector layer, and the FWD region with a second gate electrode in first and second FWD trenches with a grid pattern is on the cathode layer.Type: GrantFiled: March 10, 2021Date of Patent: October 18, 2022Assignee: DENSO CORPORATIONInventors: Tomoki Akai, Yuma Kagata, Masaru Senoo, Jun Okawara
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Patent number: 11476417Abstract: A phase change memory and a method of fabricating the same are provided. The phase change memory includes a lower electrode, an annular heater disposed over the lower electrode, an annular phase change layer disposed over the annular heater, and an upper electrode. The annular phase change layer and the annular heater are misaligned in a normal direction of the lower electrode. The upper electrode is disposed over the annular phase change layer, in which the upper electrode is in contact with an upper surface of the annular phase change layer. The present disclosure simplifies the manufacturing process of the phase change memory, reduces the manufacturing cost, and improves the manufacturing yield. In addition, a contact surface between the heater and the phase change layer of the phase change memory of the present disclosure is very small, so that the phase change memory has an extremely low reset current.Type: GrantFiled: August 10, 2020Date of Patent: October 18, 2022Assignees: JIANGSU ADVANCED MEMORY TECHNOLOGY CO., LTD., JIANGSU ADVANCED MEMORY SEMICONDUCTOR CO., LTD.Inventors: Sheng-Hung Cheng, Ming-Feng Chang, Tzu-Hao Yang
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Patent number: 11476345Abstract: Techniques are disclosed herein for ferroelectric-based field-effect transistors (FETs) with threshold voltage (VT) switching for enhanced RF switch transistor on-state and off-state performance. Employing a ferroelectric gate dielectric layer that can switch between two ferroelectric states enables a higher VT during the transistor off-state (VT,hi) and a lower VT during the transistor on-state (VT,lo). Accordingly, the transistor on-state resistance (Ron) can be maintained low due to the available relatively high gate overdrive (Vg,on?VT,lo) while still handling a relatively high maximum RF power in the transistor off-state due to the high VT,hi ?Vg,off value. Thus, the Ron of an RF switch transistor can be improved without sacrificing maximum RF power, and/or vice versa, the maximum RF power can be improved without sacrificing the Ron. A ferroelectric layer (e.g., including HfxZryO) can be formed between a transistor gate dielectric layer and gate electrode to achieve such benefits.Type: GrantFiled: June 22, 2020Date of Patent: October 18, 2022Assignee: Intel CorporationInventors: Han Wui Then, Sansaptak Dasgupta, Marko Radosavljevic
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Patent number: 11469317Abstract: An RC IGBT includes, in an active region, an IGBT section and at least three diode sections. The arrangement of the diode sections obeys a design rule.Type: GrantFiled: March 16, 2021Date of Patent: October 11, 2022Assignee: Infineon Technologies Austria AGInventors: Frank Dieter Pfirsch, Erich Griebl, Viktoryia Lapidus, Anton Mauder, Christian Philipp Sandow, Antonio Vellei
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Patent number: 11462615Abstract: Provided is a semiconductor device having improved breakdown resistance during recovery operation. A semiconductor device according to the present application is a semiconductor device in which an insulated gate bipolar transistor region and a diode region are provided adjacent to each other. The insulated gate bipolar transistor region includes an emitter layer having a short-side direction in a first direction in a plan view. The diode region includes carrier injection suppression layer having a short-side direction in a second direction in a plan view. In a plan view, a width of the carrier injection suppression layer in the second direction is smaller than a width of the emitter layer in the first direction.Type: GrantFiled: November 23, 2020Date of Patent: October 4, 2022Assignee: Mitsubishi Electric CorporationInventors: Ryu Kamibaba, Shinya Soneda, Tetsuya Nitta
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Patent number: 11456376Abstract: A semiconductor device includes an IGBT region and a diode region provided to be adjacent to each other in a semiconductor substrate further includes: a boundary trench having, in a position in which the IGBT region and the diode region are adjacent to each other in plan view, a bottom surface positioned in a drift layer to be deeper than an active trench or a dummy trench, and one side wall and another side wall that face each other; and a boundary trench gate electrode, which faces a base layer, an anode layer, and the drift layer via a boundary trench insulating film and is provided from the one side wall to the other side wall of the boundary trench across a region that faces the drift layer in the boundary trench.Type: GrantFiled: March 17, 2021Date of Patent: September 27, 2022Assignee: Mitsubishi Electric CorporationInventors: Kohei Sako, Tetsuo Takahashi, Hidenori Fujii
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Patent number: 11453822Abstract: A lighting device is specified. The lighting device comprises a phosphor having the general molecular formula (MA)a(MB)b(MC)c(MD)d(TA)e(TB)f(TC)g(TD)h(TE)i(TF)j(XA)k(XB)l(XC)m(XD)n:E. In this case, MA is selected from a group of monovalent metals, MB is selected from a group of divalent metals, MC is selected from a group of trivalent metals, MD is selected from a group of tetravalent metals, TA is selected from a group of monovalent metals, TB is selected from a group of divalent metals, TC is selected from a group of trivalent metals, TD is selected from a group of tetravalent metals, TE is selected from a group of pentavalent elements, TF is selected from a group of hexavalent elements, XA is selected from a group of elements which comprises halogens, XB is selected from a group of elements which comprises O, S and combinations thereof, XC=N and XD=C and E=Eu, Ce, Yb and/or Mn. The following furthermore hold true: a+b+c+d=t; e+f+g+h+i+j=u; k+l+m+n=v; a+2b+3c+4d+e+2f+3g+4h+5i+6j?k?2l?3m?4n=w; 0.8?t?1; ?3.Type: GrantFiled: July 13, 2020Date of Patent: September 27, 2022Assignee: OSRAM OLED GMBHInventors: Markus Seibald, Dominik Baumann, Tim Fiedler, Stefan Lange, Hubert Huppertz, Daniel Dutzler, Thorsten Schroeder, Daniel Bichler, Gudrun Plundrich, Simon Peschke, Gregor Hoerder, Gina Maya Achrainer, Klaus Wurst
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Patent number: 11437551Abstract: A light emitting device package including a printed circuit board having a front surface and a rear surface, at least one light emitting device disposed on the front surface and emitting light in a direction toward the front surface, and a molding layer disposed on the printed circuit board and surrounding the light emitting device, in which the light emitting device includes a light emitting structure disposed on the printed circuit board, a substrate disposed on the light emitting structure, and a plurality of bump electrodes disposed between the light emitting structure and the printed circuit board, and the molding layer covers an upper surface of the substrate and includes a fine concavo-convex part formed on a surface of the molding layer exposed to the outside.Type: GrantFiled: March 16, 2020Date of Patent: September 6, 2022Assignee: Seoul Viosys Co., Ltd.Inventors: Jong Min Jang, Chang Youn Kim
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Patent number: 11437509Abstract: A main semiconductor device element is a vertical MOSFET with a trench gate structure, containing silicon carbide as a semiconductor material, and having first and second p+-type regions that mitigate electric field applied to bottoms of trenches. The first p+-type regions are provided separate from the p-type base regions and face the bottoms of the trenches in a depth direction. The first p+-type regions are disposed at an interval that is at most 1.0 ?m, in a first direction that is a direction in which gate electrodes extend. The second p+-type regions are provided between adjacent trenches of the trenches, separate from the first p+-type regions and the trenches, and in contact with the p-type base regions. In the first direction that is the direction in which the trenches, the second p+-type regions extend in a linear shape having a length that is substantially equal to that of the trenches.Type: GrantFiled: March 30, 2021Date of Patent: September 6, 2022Assignee: FUJI ELECTRIC CO., LTD.Inventor: Yasuyuki Hoshi
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Patent number: 11430885Abstract: According to one embodiment, a semiconductor device includes a first electrode, first and third semiconductor regions of a first conductivity type, second and fourth semiconductor regions of a second conductivity type, a gate electrode and a second electrode. The third semiconductor region is disposed on one portion of the second semiconductor region. The fourth semiconductor region is disposed on another portion of the second semiconductor region, is positioned below the third semiconductor region. The second electrode includes first and second portions separated from each other and allowing the fourth semiconductor region to be positioned therebetween, and the third portion disposed on the first and second portions and arranged with the third semiconductor region. The first, second, and third portions are in contact with the fourth semiconductor region.Type: GrantFiled: March 10, 2021Date of Patent: August 30, 2022Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATIONInventor: Toshifumi Nishiguchi
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Patent number: 11424357Abstract: A semiconductor device, including a semiconductor substrate of a first conductivity type, a first semiconductor layer of the first conductivity type, provided on the semiconductor substrate and having an impurity concentration lower than that of the semiconductor substrate, a second semiconductor layer of a second conductivity type, selectively provided on the first semiconductor layer, a plurality of first semiconductor regions of the first conductivity type, selectively provided in the second semiconductor layer at a surface thereof, a plurality of gate insulating films in contact with the second semiconductor layer, a plurality of gate electrodes respectively provided on the gate insulating films, a plurality of first electrodes provided on the second semiconductor layer and the first semiconductor regions, and a second electrode provided on a back surface of the semiconductor substrate.Type: GrantFiled: January 27, 2021Date of Patent: August 23, 2022Assignee: FUJI ELECTRIC CO., LTD.Inventor: Akimasa Kinoshita
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Patent number: 11417835Abstract: A magnetic tunnel junction (MTJ) is disclosed wherein first and second interfaces of a free layer (FL) with a first metal oxide (Hk enhancing layer) and second metal oxide (tunnel barrier), respectively, produce perpendicular magnetic anisotropy (PMA) to increase thermal stability. In some embodiments, a capping layer that is a conductive metal nitride such as MoN contacts an opposite surface of the Hk enhancing layer with respect to the first interface to reduce interdiffusion of oxygen and nitrogen compared with a TiN capping layer and maintain an acceptable resistance x area (RA) product. In other embodiments, the capping layer may comprise an insulating nitride such as AlN that is alloyed with a conductive metal to minimize RA. Furthermore, a metallic buffer layer may be inserted between the capping layer and Hk enhancing layer. As a result, electrical shorts are reduced and the magnetoresistive ratio is increased.Type: GrantFiled: May 18, 2020Date of Patent: August 16, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Jodi Mari Iwata, Guenole Jan, Ru-Ying Tong, Vignesh Sundar, Jian Zhu, Huanlong Liu
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Patent number: 11410989Abstract: A semiconductor device is operable a forward current mode and a reverse current mode and comprises a semiconductor region, and a controllable charge carrier injector, and a gate. A method includes detecting, in the reverse current mode, if the present load current in the reversed direction does not exceed a threshold value, providing a gate signal such that the gate electrode causes the charge carrier injector to induce a first charge carrier density within the semiconductor region so as to conduct a nominal load current in the reverse direction; if the present load current in the reverse direction does exceed the threshold value, operating the semiconductor device in an overload state by providing the gate signal with a voltage that causes the semiconductor region to conduct an overload current in the reverse direction, wherein the second charge carrier density is higher than the first charge carrier density.Type: GrantFiled: April 9, 2020Date of Patent: August 9, 2022Assignee: Infineon Technologies AGInventors: Johannes Georg Laven, Roman Baburske, Thomas Basler, Philip Christoph Brandt, Maria Cotorogea
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Patent number: 11411135Abstract: A gallium and nitrogen containing optical device has a base region and no more than three major planar side regions configured in a triangular arrangement provided from the base region.Type: GrantFiled: September 20, 2016Date of Patent: August 9, 2022Assignee: KORRUS, INC.Inventors: Rajat Sharma, Andrew Felker, Aurelien J. F. David
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Patent number: 11411076Abstract: Power transistors relying on planar MOS cell designs suffer from the “hole drainage effect”; addition of an enhancement layer creates significant loss of breakdown voltage capability. The Fortified Enhanced Planar MOS cell design provides an alternative that uses enhancement layers, field oxides, and gate trenches without suffering from the loss of blocking voltage. A low doped P-type “fortifying layer” reduces the high peak electric fields that develop in blocking mode in critical regions. The fortifying layer can be electrically biased through an additional electrical contact, which can be arranged at die level, not at transistor cell level. Due to the low dopant concentration of the fortifying layer, no additional MOS channels need to be formed, and the electrons will flow thru the non-inverted regions of the fortifying layer. The new design shows advantages in performance, ease of processing, and applicability.Type: GrantFiled: March 10, 2021Date of Patent: August 9, 2022Assignee: mqSemi AGInventors: Munaf Rahimo, Iulian Nistor
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Patent number: 11411105Abstract: A semiconductor device includes an active region through which a main current passes during an ON state. In the active region, the semiconductor device includes a semiconductor substrate of a first conductivity type, a first semiconductor layer of the first conductivity type, a second semiconductor layer of a second conductivity type, first semiconductor regions of the first conductivity type, gate insulating films, gate electrodes, an interlayer insulating film, first electrodes, a second electrode, first trenches, a second trench, a polycrystalline silicon layer provided in the second trench via one of the gate insulating films, and a silicide layer selectively provided in a surface layer of the polycrystalline silicon layer. The polycrystalline silicon layer and the silicide layer are electrically connected with the gate electrodes.Type: GrantFiled: January 29, 2021Date of Patent: August 9, 2022Assignee: FUJI ELECTRIC CO., LTD.Inventor: Akimasa Kinoshita
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Patent number: 11404542Abstract: A power transistor layout structure is described that includes a planar cell with a planar gate electrode forming an horizontal MOS channel, and a plurality of trench recesses with gate electrodes, which are arranged at various angles to the longitudinal direction of the planar cells. This cell concept can adopt both planar MOS channels, and Trench MOS channels in a single MOS cell structure. As an alternative, the planar cell gate electrode may be grounded. The device is easy to manufacture based on a self-aligned process with minimum number of masks, with the potential of applying additional layers.Type: GrantFiled: February 12, 2021Date of Patent: August 2, 2022Assignee: mqSemi AGInventors: Munaf Rahimo, Iulian Nistor