Abstract: A semiconductor device of the present invention includes a semiconductor layer composed of SiC, a metal layer directly bonded to one face of the semiconductor layer, and a high carbon concentration layer formed on a surface layer portion at one side of the semiconductor layer and containing more highly concentrated carbon than a surface layer portion of the other side. Further, a manufacturing method of a semiconductor device of the present invention includes the steps of forming, on a surface layer portion at one face side of a semiconductor layer composed of SiC, a high carbon concentration layer containing more highly concentrated carbon than a surface layer portion at the other face side by heat treatment and directly bonding metal to the high carbon concentration layer.
Abstract: A method of manufacturing a semiconductor device and a semiconductor device including a first semiconductor element mounted on a first surface of a base plate, wherein solder balls are formed on a second opposite surface of the base plate—such that the second opposite surface includes an area without solder balls. At least one second semiconductor element is mounted to the base plate at the area of the second surface without solder balls. The at least one semiconductor element may be mounted to the base plate using low molecular adhesive, or in the alternative, high temperature solder.
Abstract: A method for manufacturing a semiconductor light emitting device can result in a device that includes a housing having a cavity, a light emitting element on a bottom face of the cavity, and a wavelength conversion layer provided within the cavity. The wavelength conversion layer can include particles of a wavelength conversion material. The method includes forming the wavelength conversion layer within the cavity, which can include applying and hardening a first material to form a first wavelength conversion layer on the light emitting element, and applying and hardening a second material to substantially fill the remainder of the entire cavity, thereby forming a second wavelength conversion layer. The semiconductor light emitting device manufactured by the inventive method can achieve uniform light emitting characteristics without substantially any uneven color and can include high heat dissipation efficiency.
Abstract: A semiconductor device includes an active region defined by an isolation region formed in a cell area, buried gates disposed in the active region and the isolation region, conduction layers disposed on the active region and having the same heights as an surface of the isolation region, and a line type storage node contact connected with one of the conduction layers.
Abstract: One embodiment of the invention provides a semiconductor diode device including a first conductivity type region, a second conductivity type region, where the second conductivity type is different from the first conductivity type, an intrinsic region located between the first conductivity type region and the second conductivity type region; a first halo region of the first conductivity type located between the second conductivity type region and the intrinsic region, and optionally a second halo region of the second conductivity type located between the first conductivity type region and the intrinsic region.
Type:
Grant
Filed:
April 29, 2008
Date of Patent:
May 28, 2013
Assignee:
SanDisk 3D LLC
Inventors:
Xiying Chen, Mark H. Clark, S. Brad Herner, Tanmay Kumar
Abstract: A problem in the conventional technique is that metal contamination on a silicon carbide surface is not sufficiently removed in a manufacturing method of a semiconductor device using a monocrystalline silicon carbide substrate. Accordingly, there is a high possibility that the initial characteristics of a manufactured silicon carbide semiconductor device are deteriorated and the yield rate is decreased. Further, it is conceivable that the metal contamination has an adverse affect even on the long-term reliability of a semiconductor device. In a manufacturing method of a semiconductor device using a monocrystalline silicon carbide substrate, there is applied a metal contamination removal process, on a silicon carbide surface, including a step of oxidizing the silicon carbide surface and a step of removing a film primarily including silicon dioxide formed on the silicon carbide surface by the step.
Abstract: A short channel semiconductor device is formed with halo regions that are separated from the bottom of the gate electrode and from each other. Embodiments include implanting halo regions after forming source/drain regions and source/drain extension regions. An embodiment includes forming source/drain extension regions in a substrate, forming source/drain regions in the substrate, forming halo regions under the source/drain extension regions, after forming the source drain regions, and forming a gate electrode on the substrate between the source/drain regions. By forming the halo regions after the high temperature processing involved informing the source/drain and source/drain extension regions, halo diffusion is minimized, thereby maintaining sufficient distance between halo regions and reducing short channel NMOS Vt roll-off.
Abstract: The power device with low parasitic transistor comprises a recessed transistor and a heavily doped region at a side of a source region of the recessed transistor. The conductive type of the heavily doped region is different from that of the source region. In addition, a contact plug contacts the heavily doped region and connects the heavily doped region electrically. A source wire covers and contacts the source region and the contact plug to make the source region and the heavily doped region have the same electrical potential.
Abstract: A method for manufacturing a semiconductor device is provided. A gate structure is formed on a substrate. A first dopant implantation and a first strain atom implantation are performed. Thereafter, spacers are formed on sidewalls of the gate structure. A second dopant implantation and a second strain atom implantation are performed. A solid-phase epitaxy annealing process is performed to form source and drain regions made of a semiconductor compound solid-phase epitaxial layer beside the gate structure.
Abstract: A light emitting device includes: a first electrode, a conductor film, an organic layer having a light emitting layer made of an organic light emitting material provided therein, a semi-transmissive reflective film, a resistive layer, and a second electrode, all of which are laminated successively, wherein the conductor film transmits a part of light from the light emitting layer therethrough, the first electrode reflects the light having been transmitted through the conductor film, the second electrode transmits the light having been transmitted through the semi-transmissive reflective film therethrough, an average film thickness of the conductor film on the first electrode is from 1 nm to 6 nm, and an average film thickness of the semi-transmissive reflective film on the organic layer is from 1 nm to 6 nm.
Abstract: To provide a manufacturing method for a field-effect transistor, such as a thin-film transistor, enabling reductions in the number patterning steps and the number of photomasks and improvements in the throughput and the yield. In the method, an oxide film is formed by processing the surface of a crystalline semiconductor with ozone water or hydrogen peroxide water. Using the oxide film thus formed as an etch stop, a gate electrode, a source electrode, and a drain electrode of the field-effect transistor are simultaneously formed from a same starting film in one patterning step by use of one photomask. After forming the gate electrode, the source electrode, and the drain electrode, heating is performed thereon at 800° C. or higher for a predetermined time. Thereby, the contact resistances between the source electrode and the crystalline semiconductor and between the drain electrode and the crystalline semiconductor are reduced, whereby improving the electrical conductivity.
Type:
Grant
Filed:
May 7, 2010
Date of Patent:
April 16, 2013
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
Abstract: A layered chip package includes a main body, and wiring disposed on a side surface of the main body. The main body includes: a main part including a plurality of layer portions stacked; a plurality of first terminals disposed on the top surface of the main part and connected to the wiring; and a plurality of second terminals disposed on the bottom surface of the main part and connected to the wiring. The plurality of layer portions include a first-type layer portion and a second-type layer portion. The first-type layer portion includes a conforming semiconductor chip, and a plurality of first-type electrodes that are connected to the semiconductor chip and the wiring. The second-type layer portion includes a defective semiconductor chip, and a plurality of second-type electrodes that are connected to the wiring and not to the semiconductor chip.
Abstract: A bipolar power semiconductor component configured as an IGBT includes a semiconductor body, in which a p-doped emitter, an n-doped base, a p-doped base and an n-doped main emitter are arranged successively in a vertical direction. The p-doped emitter has a number of heavily p-doped zones having a locally increased p-type doping.
Abstract: Provided is a nonvolatile semiconductor memory device highly integrated and highly reliable. A plurality of memory cells are formed in a plurality of active regions sectioned by a plurality of isolations (silicon oxide films) extending in the Y direction and deeper than a well (p type semiconductor region). In each memory cell, a contact is provided in the well (p type semiconductor region) so as to penetrate through a source diffusion layer (n+ type semiconductor region), and the contact that electrically connects bit lines (metal wirings) and the source diffusion layer (n+ type semiconductor region) is also electrically connected to the well (p type semiconductor region).
Abstract: A method of forming an electronic device including forming a first trench in a workpiece including a substrate, the first trench having side walls and a bottom surface extending for a width between the side walls and forming a charge-storage layer along the side walls and bottom surface of the first trench. The method further includes implanting ions within the substrate underlying the bottom surface of the first trench to form an implant region and annealing the implant region, wherein after annealing, the implant region extends the width of the bottom surface and along a portion of the side walls.
Type:
Grant
Filed:
April 14, 2008
Date of Patent:
April 2, 2013
Assignee:
Spansion LLC
Inventors:
Suketu Arun Parikh, Olov B. Karlsson, Yun Sun, Shankar Sinha, Timothy Thurgate
Abstract: A semiconductor device production method according to the present invention includes the steps of: forming a LOCOS oxide film in a surface of a silicon layer by a LOCOS method; forming an impurity region in the silicon layer by introducing an impurity into the silicon layer; and sequentially removing parts of the LOCOS oxide film and the silicon layer to form a trench for isolation of the impurity region after the formation of the LOCOS oxide film and the impurity region.
Abstract: In a solid-state image sensor device, the efficiency of light collection to a light-receiving region of a photodiode PD through a microlens is enhanced by arranging a wiring line configuration. Each of the first metal layer and the second metal layer is arranged to have a ring-like portion formed along a profile of the light-receiving region of the photodiode PD in a fashion that an upper position over the photodiode PD is surrounded by the first and second metal layers and a third metal layer.
Abstract: In a semiconductor integrated circuit device and a method of formation thereof, a semiconductor device comprises: a semiconductor substrate; an insulator at a top portion of the substrate, defining an insulator region; a conductive layer pattern on the substrate, the conductive layer pattern being patterned from a common conductive layer, the conductive layer pattern including a first pattern portion on the insulator in the insulator region and a second pattern portion on the substrate in an active region of the substrate, wherein the second pattern portion comprises a gate of a transistor in the active region; and a capacitor on the insulator in the insulator region, the capacitor including: a lower electrode on the first pattern portion of the conductive layer pattern, a dielectric layer pattern on the lower electrode, and an upper electrode on the dielectric layer pattern.
Abstract: A phase change random access memory includes a semiconductor substrate, a switching device pattern formed on the semiconductor substrate, a bottom electrode contact pattern formed on the switching device pattern, a phase change layer pattern formed on the bottom electrode contact pattern, and an insulating layer disposed at a portion of an contact surface between the bottom electrode contact pattern and the phase change layer pattern.
Abstract: A method for providing self aligned contacts for a trench power MOSFET is disclosed. The method includes, etching trenches in a substrate through a mask of silicon nitride deposited on an oxide layer, forming a gate oxide layer on the walls of the trenches, applying polysilicon to fill the trenches and to cover the surface of the mask of silicon nitride, removing the polysilicon from the surface of the mask of silicon nitride and applying a photoresist mask to cover a location of a gate bus.