Patents Examined by James M. Mitchell
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Patent number: 7169691Abstract: A method of fabricating a chip-scale or wafer-level package having passivation layers on substantially all surfaces thereof to form a hermetically sealed package. The package may be formed by disposing a first passivation layer on the passive or backside surface of a semiconductor wafer. The semiconductor wafer may be attached to a flexible membrane and diced, such as by a wafer saw, to separate the semiconductor devices. Once diced, the flexible membrane may be stretched so as to laterally displace the individual semiconductor devices away from one another and substantially expose the side edges thereof. Once the side edges of the semiconductor devices are exposed, a passivation layer may be formed on the side edges and active surfaces of the devices. A portion of the passivation layer over the active surface of each semiconductor device may be removed so as to expose conductive elements formed therebeneath.Type: GrantFiled: January 29, 2004Date of Patent: January 30, 2007Assignee: Micron Technology, Inc.Inventor: Trung T. Doan
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Patent number: 7170184Abstract: Methods are provided to improve the adhesive bonding of a semiconductor die to a substrate through an adhesive paste by forming a layer of silicon dioxide on the back surface of the semiconductor die prior to applying the adhesive paste. Contacting the semiconductor die with ozone, in a gas mixture or in a mixture with water provides rapid oxidation of the silicon layer at the back of the semiconductor die to a silicon dioxide layer of at least 10 angstroms thick, which is sufficient to greatly improve bonding to the adhesive. The formation of a silicon dioxide surface layer prior to application of the adhesive is particularly beneficial when combined with rapid, snap curing processes, where the adhesive can be reliably cured by heating the semiconductor die for less than about 1 minute.Type: GrantFiled: January 13, 2003Date of Patent: January 30, 2007Assignee: Micron Technology, Inc.Inventors: Tongbi Jiang, Mike Connell, Li Li, Curtis Hollingshead
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Patent number: 7164169Abstract: A semiconductor device has a substrate and a dielectric film formed directly or indirectly on the substrate. The dielectric film contains a metal silicate film, and a silicon concentration in the metal silicate film is lower in a center portion in the film thickness direction than in an upper portion and in a lower portion.Type: GrantFiled: August 22, 2002Date of Patent: January 16, 2007Assignee: NEC CorporationInventors: Heiji Watanabe, Haruhiko Ono, Nobuyuki Ikarashi
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Patent number: 7157753Abstract: There are disclosed TFTs that have excellent characteristics and can be fabricated with a high yield. The TFTs are fabricated, using an active layer crystallized by making use of nickel. Gate electrodes are comprising tantalum. Phosphorus is introduced into source/drain regions. Then, a heat treatment is performed to getter nickel element in the active layer and to drive it into the source/drain regions. At the same time, the source/drain regions can be annealed out. The gate electrodes of tantalum can withstand this heat treatment.Type: GrantFiled: September 29, 2004Date of Patent: January 2, 2007Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 7148158Abstract: A semiconductor device includes a semiconductor device comprising a semiconductor substrate, source/drain regions formed in the semiconductor substrate, a gate insulation film formed on the semiconductor substrate, a gate electrode formed on the gate insulation film between the source/drain regions, and a gate sidewall spacer formed on side surfaces of the gate electrode, wherein the gate sidewall spacer is composed of silicon oxide containing 0.1–30 atomic % of chlorine.Type: GrantFiled: August 12, 2004Date of Patent: December 12, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Yoshio Ozawa, Masayuki Tanaka, Kiyotaka Miyano, Shigehiko Saida
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Patent number: 7148083Abstract: In one implementation, a circuit substrate includes a substrate having opposing sides. At least one of the sides is configured for transfer mold packaging and has conductive traces formed thereon. A soldermask is received on the one side, and has a plurality of openings formed therethrough to locations on the conductive traces. The soldermask includes a peripheral elongated trench therein positioned on the one side to align with at least a portion of an elongated mold void perimeter of a transfer mold to be used for transfer mold packaging of the one side. In one implementation, the invention includes a transfer mold semiconductor packaging process. In one implementation, the invention includes a semiconductor package. In one implementation, the invention includes a ball grid array.Type: GrantFiled: November 10, 2004Date of Patent: December 12, 2006Assignee: Micron Technology, Inc.Inventors: Larry Kinsman, Richard Wensel, Jeff Reeder
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Patent number: 7148529Abstract: A semiconductor package includes (a) an interposer, (b) a wiring layer containing conductors formed adjacent to each other at intervals that cause no short circuit among the conductors, the wiring layer covering a given area of the interposer, to block light from passing through the given area, (c) a light blocking layer covering a no-wiring area of the interposer not covered by the wiring layer, to block light from passing through the no-wiring area, (d) a semiconductor chip electrically connected to the wiring layer, and (e) a resin mold sealing the wiring layer, the light blocking layer, and the semiconductor chip.Type: GrantFiled: March 20, 2002Date of Patent: December 12, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Mitsuru Oida, Masatoshi Fukuda, Yasuhiro Koshio, Hiroshi Funakura
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Patent number: 7148125Abstract: A semiconductor device, which has a relatively low ON resistance, is manufactured using the following steps. First, a semiconductor wafer that includes a semiconductor layer and a semiconductor element layer, which is located on the semiconductor layer, is formed. Then, the wafer is ground evenly to a predetermined thickness from the side where the semiconductor layer is located. Next, the wafer is etched to a predetermined thickness from the side where the semiconductor layer is located while the periphery of the wafer is masked against the etchant to form a rim at the periphery. The wafer is reinforced by the rim at the periphery, so even if the wafer is relatively large, the wafer is prevented from breaking or warping at the later steps after the wafer is thinned by etching.Type: GrantFiled: December 5, 2002Date of Patent: December 12, 2006Assignee: Denso CorporationInventors: Mikimasa Suzuki, Chikage Noritake
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Patent number: 7148127Abstract: A method of repairing a defective one of devices mounted on substrate is provided. Devices are arrayed on a substrate and electrically connected to wiring lines connected to a drive circuit, to be thus mounted on the substrate. The devices mounted on the substrate are then subjected to an emission test. If a defective device is detected in this test, a repair device is mounted at a position corresponding to a position of the defective device. At this time, after wiring lines connected to the defective device are cut off, the repair device is electrically connected to portions of the wiring lines, the portions of the wiring lines being located at positions nearer to the drive circuit side than the cut-off positions of the wiring lines.Type: GrantFiled: June 6, 2002Date of Patent: December 12, 2006Assignee: Sony CorporationInventors: Toyoharu Oohata, Toshiaki Iwafuchi, Hisashi Ohba
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Patent number: 7145187Abstract: In a multiple input ESD protection structure, the inputs are isolated from the substrate by highly doped regions of opposite polarity to the input regions. Dual polarity is achieved by providing a symmetrical structure with n+ and p+ regions forming each dual polarity input. The inputs are formed in a p-well which, in turn, is formed in a n-well. Each dual polarity input is isolated by a PBL under the p-well, and a NISO underneath the n-well. An isolation ring separates and surrounds the inputs. The isolation ring comprises a p+ ring or a p+ region, n+ region, and p+ region formed into adjacent rings.Type: GrantFiled: December 12, 2003Date of Patent: December 5, 2006Assignee: National Semiconductor CorporationInventors: Vladislav Vashchenko, Peter J. Hopper, Philipp Lindorfer
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Patent number: 7145254Abstract: A semiconductor device includes a semiconductor chip that generates heat in operation, a pair of heat sinks for cooling the chip, and a mold resin, in which the chip and the heat sinks are embedded. The thickness t1 of the chip and the thickness t2 of one of heat sinks that is joined to the chip using a solder satisfy the equation of t2/t1?5. Furthermore, the thermal expansion coefficient ?1 of the heat sinks and the thermal expansion coefficient ?2 of the mold resin satisfy the equation of 0.5??2/?1?1.5. In addition, the surface of the chip that faces the solder has a roughness Ra that satisfies the equation of Ra?500 nm. Moreover, the solder is a Sn-based solder to suppress relaxation of a compressive stress in the chip, which is caused by the creeping of the solder.Type: GrantFiled: July 24, 2002Date of Patent: December 5, 2006Assignee: Denso CorporationInventors: Naohiko Hirano, Takanori Teshima, Yoshimi Nakase, Kenji Yagi, Yasushi Ookura, Kuniaki Mamitsu, Kazuhito Nomura, Yutaka Fukuda
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Patent number: 7138302Abstract: An exemplary embodiment relates to a method of FinFET channel structure formation. The method can include providing a compound semiconductor layer above an insulating layer, providing a trench in the compound semiconductor layer, and providing a strained semiconductor layer above the compound semiconductor layer and within the trench. The method can also include removing the strained semiconductor layer from above the compound semiconductor layer, thereby leaving the strained semiconductor layer within the trench and removing the compound semiconductor layer to leave the strained semiconductor layer and form the fin-shaped channel region.Type: GrantFiled: January 12, 2004Date of Patent: November 21, 2006Assignee: Advanced Micro Devices, Inc.Inventors: Qi Xiang, James N. Pan, Jung-Suk Goo
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Patent number: 7138653Abstract: Stabilizers to be disposed on a surface of a semiconductor device or test substrate and methods of fabricating and disposing the stabilizers on semiconductor devices and test substrates. Semiconductor devices and test substrates including the stabilizers are also disclosed, as well as assemblies wherein the stabilizers are disposed between a semiconductor device and a test substrate. One or more of the stabilizers are disposed on the surface of a semiconductor device or test substrate prior to bonding the semiconductor device face-down upon the test substrate. Upon assembly of the semiconductor device face-down upon a test substrate and establishing electrical communication between contact pads of the semiconductor device and test pads of the test substrate, such as with conductive structures, the stabilizers prevent the semiconductor device from tipping or tilting relative to the test substrate.Type: GrantFiled: June 8, 2000Date of Patent: November 21, 2006Assignee: Micron Technology, Inc.Inventor: Salman Akram
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Patent number: 7138328Abstract: A packaged IC including insulated wire for electrically connecting conductive structures of the packaged IC. In some embodiments, the packaged IC includes an IC die attached to a package substrate, where bond pads of the IC die are electrically connected to bond fingers of the substrate with insulated wire. The insulated wire has a conductive core and an insulator coating. In some examples, the insulator coating includes an inorganic covalently-bonded substance that is not an oxide of the electrically conductive core such as, e.g., silicon nitride or silicon oxide. In one example, the insulator coating is applied to a conductive core by a chemical vapor deposition (CVD) process such as a plasma enhanced chemical vapor deposition (PECVD).Type: GrantFiled: May 18, 2004Date of Patent: November 21, 2006Assignee: Freescale Semiconductor, Inc.Inventors: Susan H. Downey, Peter R. Harper
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Patent number: 7135396Abstract: Methods of making a semiconductor structure are disclosed. A refractory metal layer containing W, TiW, Ta, or TaN and semiconductor layer are formed on a substrate that contains copper in, for example, a via therein. A portion of the refractory metal layer and semiconductor layer is removed by etching using a fluorine-containing compound. By using W, TiW, Ta, or TaN as the refractory metal layer material and employing fluorine-based etching, the copper portion in the substrate is not substantially etched, thus preventing corrosion of the copper portion.Type: GrantFiled: September 13, 2004Date of Patent: November 14, 2006Assignees: Spansion LLC, Advanced Micro Devices, Inc.Inventors: Calvin T. Gabriel, Jeffrey Shields
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Patent number: 7132698Abstract: A compression assembled semiconductor package for housing a power semiconductor die which includes two major pole pieces in intimate electrical contact with respective major electrodes of a power semiconductor die. The package includes a plastic molded insulation ring disposed around the power semiconductor die. The pole pieces are secured to respective ends of the plastic molded insulation ring. One of the pole pieces may include an annular flange that penetrates the plastic molded insulation ring from an interior wall thereof and is embedded in its body. The annular flange preferably comprises a projection having a squared tab and circular distal end that is received by a receiving groove having a notch (to receive the squared tab) and a cavity (to receive the distal end).Type: GrantFiled: October 7, 2003Date of Patent: November 7, 2006Assignee: International Rectifier CorporationInventors: Mario Merlin, Aldo Torti
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Patent number: 7129578Abstract: A lead frame comprises a lead frame body having cut-away portions cut away from the side surfaces of the lead frame body, a die pad for securing a semiconductor chip, bonding electrodes surrounding the die pad, external electrodes for allowing the lead frame to be mounted, wiring for surface treatment extending on the lead frame body with its end being located at a portion of each of the side surfaces of the lead frame body, the portion being opposed to the cut-away portions. The bonding electrode and the wiring for surface treatment, as well as the external electrode and the wiring for surface treatment, are electrically connected, respectively. Even when the lead frame is electrostatically charged by friction with a transfer unit, the semiconductor chip on the lead frame avoids electrostatic damage.Type: GrantFiled: May 23, 2002Date of Patent: October 31, 2006Assignee: Sony CorporationInventor: Miyoshi Togawa
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Patent number: 7129562Abstract: A standard cell architecture with a basic cell that spans multiple rows of the standard cell. This multi-row basic cell may be a dual-height cell that spans two rows, or it may span more than two rows. The multi-row basic cell may be intermixed in a standard cell design with smaller, single-height cells for high-density applications. The single-height cells may be used where possible and higher-drive dual-height basic cells where larger transistors are desired. Other multiple height cells may also be included if even more current is desirable. The power rail may include conductors of varying width.Type: GrantFiled: October 1, 2004Date of Patent: October 31, 2006Assignee: Virage Logic CorporationInventors: Tushar R. Gheewala, Michael J. Colwell, Henry H. Yang, Duane G. Breid
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Patent number: 7125741Abstract: A rework process of patterned photo-resist layer is provided. First, a substrate is provided with a first DARC, a first primer and a first patterned photo-resist layer being sequentially formed thereon. Next, remove the first patterned photo-resist layer and the first primer from the first DARC. After that, form a second DARC on the first DARC; form a second primer on the second DARC. Last, form a second patterned photo-resist layer on the second primer.Type: GrantFiled: November 24, 2003Date of Patent: October 24, 2006Assignee: Macronix International Co., Ltd.Inventors: Yu-Lin Yen, Ching-Yu Chang
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Patent number: 7126216Abstract: The invention provides a two part mold for forming wafer scale caps. The mold has a first half and a second half. The first half and second half, when brought together defining mold cavities for wafer scale caps. The caps have central areas surrounded by sidewalls and the side walls having free edges. In preferred embodiments, the mold is made from a semiconductor material.Type: GrantFiled: December 8, 2003Date of Patent: October 24, 2006Assignee: Silverbrook Research Pty LtdInventor: Kia Silverbrook