Abstract: A charged particle beam writing apparatus includes an area density calculation unit to calculate a pattern area density weighted using a dose modulation value, which has previously been input from an outside and in which an amount of correction of a dimension variation due to a proximity effect has been included, a fogging correction dose coefficient calculation unit to calculate a fogging correction dose coefficient for correcting a dimension variation due to a fogging effect by using the pattern area density weighted using the dose modulation value having been input from the outside, a dose calculation unit to calculates a dose of a charged particle beam by using the fogging correction dose coefficient and the dose modulation value, and a writing unit to write a pattern on a target object with the charged particle beam of the dose.

Abstract: Disclosed herein is a micro stage using a piezoelectric element that can be reliably operated even in a vacuum environment. In a particle column requiring a high precision, for example, a microelectronic column, the micro stage can be used as a stage with micro or nano degree precision for alignment of parts of the column, or for moving a sample, and so on.

Abstract: The present invention provides for a disinfecting radiation base for working in conjunction with a storage case for an ophthalmic lens. The disinfecting radiation base provides disinfecting radiation for disinfecting a surface of the storage case. The disinfecting radiation base may also include a processor and digital memory for automated functions associated with the base.

Abstract: A radiation imaging apparatus has a plurality of pixels including a plurality of imaging pixels for obtaining a radiation image and a detecting pixel for detecting radiation, a plurality of column signal lines, and a detection signal line corresponding to the detecting pixel. Each of the imaging pixels includes a first conversion element configured to convert radiation into an electrical signal, and a first switch arranged between the first conversion element and a corresponding column signal line among the plurality of column signal lines. The detecting pixel includes a second conversion element configured to convert radiation into an electrical signal, and a second switch arranged between the second conversion element and the detection signal line.

Abstract: A method of Fourier transform ion mobility spectrometry is disclosed wherein an absorption spectrum of the complex spectral data is used to determine the ion mobilities of ions.

Abstract: The subject matter described herein includes methods, systems, and computer readable media for measuring and correcting drift distortion in images obtained using the scanning microscope. One method includes obtaining an image series of a sample acquired using scanning-microscope by rotating scan coordinates of the microscope between successive image frames. The method further includes determining at least one measurement of an angle or a distance associated with an image feature as a function of rotation angle from the series of rotated images. The method further includes using the at least one measurement to determine a model for drift distortion in the series of images. The method further includes using the drift distortion model to generate a drift corrected image from the series of images.

Abstract: A device and associated method are disclosed for interfacing an ion trap to a pulsed mass analyzer (such as a time-of-flight analyzer) in a mass spectrometer. The device includes a plurality of separate confinement cells and structures for directing ions into a selected one of the confinement cells. Ions are ejected from the ion trap in a series of temporally successive ion packets. Each ion packet (which may consist of ions of like mass-to-charge ratio), is received by the ion interface device, fragmented to form product ions, and then stored and cooled in the selected confinement cell. Storage and cooling of the ion packet occurs concurrently with the receipt and storage of at least one later-ejected ion packet. After a predetermined cooling period, the ion packet is released to the mass analyzer for acquisition of a mass spectrum.

Abstract: Ion sources for use in mass spectrometry (MS) systems are described. The ion sources each comprise an ion funnel and an ionization source configured to ionize neutral analyte molecules.

Abstract: In the present invention, at the time of measuring, using a CD-SEM, a length of a resist that shrinks when irradiated with an electron beam, in order to highly accurately estimate a shape and dimensions of the resist before shrink, a shrink database with respect to various patterns is previously prepared, said shrink database containing cross-sectional shape data obtained prior to electron beam irradiation, a cross-sectional shape data group and a CD-SEM image data group, which are obtained under various electron beam irradiation conditions, and models based on such data and data groups, and a CD-SEM image of a resist pattern to be measured is obtained (S102), then, the CD-SEM image and data in the shrink database are compared with each other (S103), and the shape and dimensions of the pattern before the shrink are estimated and outputted (S104).

Abstract: A radiographic apparatus includes: a plurality of detection elements arranged in a two-dimensional fashion; at least one radiation sensor configured to change a signal value to be output, when radiation is emitted thereto; and an irradiation start detecting unit configured to determine whether X-ray emission from an X-ray generator has been started based on the signal value output from the radiation sensor, wherein, when the signal value output from the radiation sensor moves out of a predetermined range, the irradiation start detecting unit does not determine whether the signal value output from the radiation sensor is a signal value outside the predetermined range at least, and when the number of times the signal value output from the radiation sensor moves out of the predetermined range reaches a predetermined number, the irradiation start detecting unit detects a start of X-ray emission from the X-ray generator.

Abstract: Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal (512) associated with light emitted from a light-emitting member (500) that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample (6). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal (518) caused by reflected charged particles or secondary charged particles (517) from the sample (6).

Abstract: The invention relates to an ionization chamber for connection to a mass spectrometer. The ionization chamber has a temperature-control block with a gas inlet and a gas channel which starts at the gas inlet and leads into a gas outlet. A temperature-control device is positioned along the gas channel and ensures that a gas flowing in the gas channel is brought to a specific temperature, i.e. it is heated or cooled, before it enters the ionization chamber. The temperature-control block has a formed part into which a structure of the gas channel is incorporated and which is fabricated by means of a sol-gel process, for example out of a glass or ceramic material.

Abstract: An initial pulse of radiation is generated; a section of the initial pulse of radiation is extracted to form a modified pulse of radiation, the modified pulse of radiation including a first portion and a second portion, the first portion being temporally connected to the second portion, and the first portion having a maximum energy that is less than a maximum energy of the second portion; the first portion of the modified pulse of radiation is interacted with a target material to form a modified target; and the second portion of the modified pulse of radiation is interacted with the modified target to generate plasma that emits extreme ultraviolet (EUV) light.

Abstract: A device and appliance is provided for the high-speed decontamination of objects by means of pulsed light, including: an illuminating structure suitable for illuminating a decontamination area in which the objects are arranged, the illuminating structure being suitable for producing streams of light pulses having wavelengths of 200 nm to 300 nm and an adjustable pulse rate; and a positioner suitable for positioning the objects in the decontamination area according to a predetermined arrangement, also including a cooler suitable for maintaining the temperature of the decontamination area substantially below a predetermined temperature when the decontamination area is illuminated, the cooler including an apparatus for circulating a cooling fluid built into the positioner.

Abstract: Systems and methods are provided for time-of-flight analysis of a continuous beam of ions by a detector array. A sample is ionized using an ion source to produce a continuous beam of ions. An electric field is applied to the continuous beam of ions using an accelerator to produce an accelerated beam of ions. A rotating magnetic and/or electric field is applied to the accelerated beam to separate ions with different mass-to-charge ratios over an area of a two-dimensional detector using a deflector located between the accelerator and the two-dimensional detector. An arrival time and a two-dimensional arrival position of each ion of the accelerated beam are recorded using the two-dimensional detector. Alternatively, an electric field that is periodic with time is applied in order to sweep the accelerated beam over a periodically repeating path on the two-dimensional rectangular detector.

Abstract: The present invention is concerned with a device for charged particle transportation and manipulation. Embodiments provide a capability of combining positively and negatively charged particles in a single transported packet. Embodiments contain an aggregate of electrodes arranged to form a channel for transportation of charged particles, as well as a source of power supply that provides supply voltage to be applied to the electrodes, the voltage to ensure creation, inside the said channel, of a non-uniform high-frequency electric field, the pseudopotential of which field has one or more local extrema along the length of the channel used for charged particle transportation, at least, within a certain interval of time, whereas, at least one of the said extrema of the pseudopotential is transposed with time, at least within a certain interval of time, at least within a part of the length of the channel used for charged particle transportation.

Abstract: An electron beam sterilization unit for processing food packaging material, the unit having a frame; at least one electron beam emitter fitted to the frame, along the path of the material for processing, and having a flange for connection to the frame; and a locking device, which is fitted to the frame, and has thrust devices for exerting a lock force on the flange in a given first direction, and for locking the emitter, with respect to the frame, in a given work position, and actuating devices for activating the thrust devices and which are defined by toggle devices.

Abstract: The purpose of the present invention is to provide a pattern measurement device for quantitatively evaluating a pattern formed using a directed self-assembly (DSA) method with high accuracy. The present invention is a pattern measurement device for measuring distances between patterns formed in a sample, wherein the centroids of a plurality of patterns included in an image are determined; the inter-centroid distances, and the like, of the plurality of centroids are determined; and on the basis of the inter-centroid distances, and the like, of the plurality of centroids, a pattern meeting a specific condition is distinguished from patterns different from the pattern meeting the specific condition or information is calculated about the number of the patterns meeting the specific condition, the size of an area including the patterns meeting the specific condition, and the number of imaginary lines between the patterns meeting the specific condition.

Abstract: In a charged particle beam apparatus that applies a retarding voltage to a sample through a contact terminal and executes measurement or inspection of a surface of the sample, potential variation of the sample when changing the retarding voltage applied to the contact terminal is measured by a surface potential meter, a time constant of the potential variation of the sample is obtained, and it is determined whether execution of measurement or inspection by a charged particle beam continues or stops based on the time constant, or a conduction ensuring process between the sample and the contact terminal is executed.

Abstract: A cold trap is provided to reduce contamination gases that react with the beam during operations that use a process gas. The cold trap is set to a temperature that condenses the contamination gas but does not condense the process gas. Cold traps may be used in the sample chamber and in the gas line.