Patents Examined by Joel Horning
  • Patent number: 9297066
    Abstract: The film formation method comprises the steps of: unrolling and feeding an elongated substrate wound in a roll form from a first roll chamber in a direction from the first roll chamber toward a second roll chamber, using a first surface as a surface for film formation; degassing the fed substrate; forming a first material film on the first surface of the degassed substrate in a first film formation chamber; forming a second material film on the first material film in a second film formation chamber; taking up the substrate in a roll form in the second roll chamber, the substrate having the material films formed thereon; unrolling and feeding the taken up substrate from the first roll chamber in the direction, using a second surface opposite the first surface of the substrate as a surface for film formation; and repeating all the above treatments.
    Type: Grant
    Filed: July 26, 2012
    Date of Patent: March 29, 2016
    Assignee: NITTO DENKO CORPORATION
    Inventors: Tomotake Nashiki, Yoshimasa Sakata, Hideo Sugawara, Kenkichi Yagura, Akira Hamada, Yoshihisa Ito, Kuniaki Ishibashi
  • Patent number: 9290837
    Abstract: A technique for forming an organic polymer thin film on a surface of a substrate with high film formation efficiency and excellent reproducibility and stability is provided. When a vacuum deposition polymerization for forming an organic polymer thin film is performed on a surface of a substrate repeatedly, in which a plurality of kinds of monomers evaporated in a plurality of evaporation source containers in vacuum state are introduced into a deposition chamber in a vacuum state and polymerized on a surface of the substrate arranged in the deposition chamber, each of the monomers in a liquid form is present in the evaporation source containers in a constant amount every time, at the beginning of the evaporation operation of monomers.
    Type: Grant
    Filed: October 13, 2010
    Date of Patent: March 22, 2016
    Assignees: Kojima Press Industry Co., Ltd., ULVAC, INC.
    Inventors: Masumi Noguchi, Ken Momono, Hagane Irikura
  • Patent number: 9249508
    Abstract: There is described a process for depositing carbon on a surface, comprising, while contacting a mixture of CO2 and Br2 with a polar substrate presenting apposed surfaces, exposing a sufficient area of said mixture in the region of said apposed surfaces to light of sufficient intensity and frequency to result in deposition of carbon on at least some of said apposed surfaces. Other embodiments are also described.
    Type: Grant
    Filed: September 11, 2012
    Date of Patent: February 2, 2016
    Inventor: Mark S. Braiman
  • Patent number: 9238868
    Abstract: Systems and methods for atomic layer deposition (ALD) on a flexible substrate involve guiding the substrate back and forth between spaced-apart first and second precursor zones, so that the substrate transits through each of the precursor zones multiple times. Systems may include a series of turning guides, such as rollers, spaced apart along the precursor zones for supporting the substrate along an undulating transport path. As the substrate traverses back and forth between precursor zones, it passes through a series of flow-restricting passageways of an isolation zone into which an inert gas is injected to inhibit migration of precursor gases out of the precursor zones. Also disclosed are systems and methods for utilizing more than two precursor chemicals and for recycling precursor gases exhausted from the precursor zones.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: January 19, 2016
    Assignee: Lotus Applied Technology, LLC
    Inventors: Eric R. Dickey, William A. Barrow
  • Patent number: 9234284
    Abstract: An electrical discharge surface treatment method for forming a coating film by generating a pulsed electrical discharge between an electrode and a workpiece in working fluid or gas using a green compact obtained by molding metal powder or metal alloy powder or a molded body obtained by heating the green compact as the electrode, and by melting an electrode material by an energy of the pulsed electrical discharge, forming a coating of the electrode material or a coating of a material obtained by a reaction of the electrode material by the energy of the pulsed electrical discharge on a surface of the workpiece, the electrical discharge surface treatment method includes generating the pulsed electrical discharge by mixing together two or more types of pulsed electrical discharges having different energies.
    Type: Grant
    Filed: August 6, 2008
    Date of Patent: January 12, 2016
    Assignee: Mitsubishi Electric Corporation
    Inventors: Akihiro Goto, Kazushi Nakamura, Masahiro Okane, Hiroyuki Teramoto
  • Patent number: 9216908
    Abstract: A method for making a strip shaped graphene layer includes the following steps. First, a graphene film is located on a surface of a substrate is provided. Second, a carbon nanotube structure is disposed on the graphene film. The carbon nanotube structure includes a plurality of carbon nanotube segments and a number of strip-shaped gaps between the adjacent carbon nanotube segments. Third, the graphene film exposed by the strip-shaped gaps is removed by applying a voltage to the carbon nanotube segments and heating the substrate.
    Type: Grant
    Filed: December 29, 2012
    Date of Patent: December 22, 2015
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Xiao-Yang Lin, Kai-Li Jiang, Shou-Shan Fan
  • Patent number: 9206050
    Abstract: The present invention relates to a continuous process for producing carbon nanotubes (herein after also referred to as “CNTS”) of single, double and/or multi-wall type, with any possible desired diameter and with high purity. The preferred embodiment provides means for continuous supply of a catalyst during the process for producing the carbon nanotubes, according to which one can achieve the advantageous continuity of the process.
    Type: Grant
    Filed: March 20, 2007
    Date of Patent: December 8, 2015
    Assignee: RESEARCH INSTITUTE OF PETROLEUM INDUSTRY (RIPI)
    Inventors: Alimorad Rashidi, Bahman Amini Horri, Ali Mohajeri, Sasan Sadraei, Khairolah Jafari Jozani, Ali Nakhaeipor
  • Patent number: 9200370
    Abstract: A ceramic layer is fabricated on a substrate by coating the substrate with a material containing chemical precursors of a ceramic. The precursors are transformed by a heat treatment into the ceramic to be fabricated. Different methods for heat insertion may be used for individual layers by absorbing particles, which are utilized in different concentrations or different chemical compositions. A targeted heat insertion even in lower layer regions, for example, by microwave animation, or ultraviolet or infrared light insertion is therefore possible. Beneficially, as a result, comparatively thick layers in particular can be fabricated by a single heat treatment layer.
    Type: Grant
    Filed: May 12, 2010
    Date of Patent: December 1, 2015
    Assignee: SIEMENS AKTIENGESELLSCHAFT
    Inventors: Christian Doye, Jens Dahl Jensen, Ursus Krüger, Kathrin Kunert, Raymond Ullrich, Gabriele Winkler
  • Patent number: 9168613
    Abstract: A vertical laser cladding system is particularly effective for the interior surfaces of tube-like structures. The vertical cladding process works from bottom to top, so that previously clad layers form a shelf for subsequent application of cladding powder. This system is also particularly effective for handling double-bore plasticating barrels.
    Type: Grant
    Filed: October 17, 2011
    Date of Patent: October 27, 2015
    Inventors: Paul T. Colby, David Hotchkiss, James W. Sears, Joshua J. Hammell, James L. Tomich
  • Patent number: 9169557
    Abstract: Processes are provided for producing bismuth-containing oxide thin films by atomic layer deposition. In preferred embodiments an organic bismuth compound having at least one monodentate alkoxide ligand is used as a bismuth source material. Bismuth-containing oxide thin films can be used, for example, as ferroelectric or dielectric materials in integrated circuits and as superconductor materials.
    Type: Grant
    Filed: May 10, 2010
    Date of Patent: October 27, 2015
    Assignee: ASM INTERNATIONAL N.V.
    Inventors: Timo Hatanpaa, Marko Vehkamaki, Mikko Ritala, Markku Leskela
  • Patent number: 9150951
    Abstract: A low friction top coat over a multilayer metal/ceramic bondcoat provides a conductive substrate, such as a rotary tool, with wear resistance and corrosion resistance. The top coat further provides low friction and anti-stickiness as well as high compressive stress. The high compressive stress provided by the top coat protects against degradation of the tool due to abrasion and torsional and cyclic fatigue. Substrate temperature is strictly controlled during the coating process to preserve the bulk properties of the substrate and the coating. The described coating process is particularly useful when applied to shape memory alloys.
    Type: Grant
    Filed: May 9, 2011
    Date of Patent: October 6, 2015
    Assignee: G & H Technologies LLC
    Inventors: Vladimir Gorokhovsky, Brad B. Heckerman, Yuhang Cheng
  • Patent number: 9139910
    Abstract: A method of depositing a thin film on a substrate in a deposition system is described. The method includes disposing a gas heating device comprising a plurality of heating element zones in a deposition system, and independently controlling a temperature of each of the plurality of heating element zones, wherein each of the plurality of heating element zones having one or more resistive heating elements. Additionally, the method includes providing a substrate on a substrate holder in the deposition system, wherein the substrate holder has one or more temperature control zones. The method further includes providing a film forming composition to the gas heating device coupled to the deposition system, pyrolyzing one or more constituents of the film forming composition using the gas heating device, and introducing the film forming composition to the substrate in the deposition system to deposit a thin film on the substrate.
    Type: Grant
    Filed: June 11, 2010
    Date of Patent: September 22, 2015
    Assignee: Tokyo Electron Limited
    Inventors: Eric M. Lee, Jacques Faguet, Eric J. Strang
  • Patent number: 9129913
    Abstract: The configuration of one or more barrier layers for encapsulating a device is controlled by setting parameters of atomic layer deposition (ALD). A substrate formed with the device is placed on a susceptor and exposed to multiple cycles of source precursor gas and reactant precursor gas injected by reactors of a deposition device. By adjusting one or more of (i) the relative speed between the susceptor and the reactors, (ii) configuration of the reactors, and (iii) flow rates of the gases injected by the reactors, the configuration of the layers deposited on the device can be controlled. By controlling the configuration of the deposited layers, defects in the deposited layers can be prevented or reduced.
    Type: Grant
    Filed: October 18, 2011
    Date of Patent: September 8, 2015
    Assignee: Veeco ALD Inc.
    Inventor: Sang In Lee
  • Patent number: 9123509
    Abstract: Techniques for plasma processing a substrate are disclosed. In one particular exemplary embodiment, the technique may be realized with a method comprising introducing a feed gas proximate to a plasma source, where the feed gas may comprise a first and second species, where the first and second species have different ionization energies; providing a multi-level RF power waveform to the plasma source, where the multi-level RF power waveform has at least a first power level during a first pulse duration and a second power level during a second pulse duration, where the second power level may be different from the first power level; ionizing the first species of the feed gas during the first pulse duration; ionizing the second species during the second pulse duration; and providing a bias to the substrate during the first pulse duration.
    Type: Grant
    Filed: June 9, 2011
    Date of Patent: September 1, 2015
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: George D. Papasouliotis, Kamal Hadidi, Helen L. Maynard, Ludovic Godet, Vikram Singh, Timothy J. Miller, Bernard Lindsay
  • Patent number: 8999438
    Abstract: The field of the invention relates to systems and methods for surface treatments, and more particularly to systems and methods for surface treatments, modifications or coatings using micro- and nano-structure particles for both super-hydrophobic and super-oleophobic properties. In one embodiment, a method of treating surfaces to impart both super-hydrophobic and super-oleophobic properties includes the steps of pre-treating a substrate surface; assembling dual-scale nanoparticles onto the surface of the substrate; and treating the dual-scale nanoparticle coated surface with SiCl4 to cross-link the nanoparticles to each other and to the surface of the substrate creating a robust nano-structured topographic surface having both super-hydrophobic and super-oleophobic properties.
    Type: Grant
    Filed: September 9, 2011
    Date of Patent: April 7, 2015
    Inventors: Weixing Lu, Allan Roberts
  • Patent number: 8986793
    Abstract: A method of producing a metal element of an electronic device on a substrate, including the steps of: forming a mixture of a material comprising metal atoms with a liquid, depositing the material from the liquid mixture onto a substrate, and then irradiating at least part of the deposited material with light to increase the electrical conductivity of the deposited material.
    Type: Grant
    Filed: September 2, 2004
    Date of Patent: March 24, 2015
    Assignee: Plastic Logic Limited
    Inventors: Paul Cain, Anoop Menon, Henning Sirringhaus, James D. Watts, Tim Von Werne, Thomas M. Brown
  • Patent number: 8932666
    Abstract: A method is for producing an active matrix organic EL display element by an inkjet method to eject droplets (12) of a liquid via an ejection hole of a nozzle so as to form an organic EL layer. The liquid contains an organic EL layer material. An electrostatic attraction type inkjet apparatus (15) is used whose ejection hole (1b) has a diameter smaller than a diameter of the droplets (12). The droplets are ejected from the nozzle of the electrostatic attraction type inkjet apparatus (15) in such a manner that each of the droplets is 1 pl or less in amount. With this arrangement, the landed droplet dries quickly, and movement of the landed droplet is restricted. This makes it possible to form an organic EL layer accurately with low cost.
    Type: Grant
    Filed: September 24, 2003
    Date of Patent: January 13, 2015
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventors: Toshio Tahira, Yasuo Nishi, Kazuhiro Murata, Hiroshi Yokoyama
  • Patent number: 8927051
    Abstract: A method for manufacturing a compound film comprising a substrate and at least one additional layer is disclosed. The method comprising the steps of depositing at least two chemical elements on the substrate and/or on the at least one additional layer using depositions sources, maintaining depositing of the at least two chemical elements while the substrate and the deposition sources are being moved relative to each other, measuring the compound film properties, particularly being compound film thickness, compound-film overall composition, and compound-film composition in one or several positions of the compound film, comparing the predefined values for the compound film properties to the measured compound film properties, and adjusting the deposition of the at least two chemical elements in case the measured compound film properties do not match the predefined compound film properties.
    Type: Grant
    Filed: September 12, 2007
    Date of Patent: January 6, 2015
    Assignee: FLISOM AG
    Inventors: Dominik Rudmann, Marc Kaelin, Thomas Studer, Felix Budde
  • Patent number: 8895100
    Abstract: A method for manufacturing a compound film comprising a substrate and at least one additional layer is disclosed. The method comprising the steps of depositing at least two chemical elements on the substrate and/or on the at least one additional layer using depositions sources, maintaining depositing of the at least two chemical elements while the substrate and the deposition sources are being moved relative to each other, measuring the compound film properties, particularly being compound film thickness, compound-film overall composition, and compound-film composition in one or several positions of the compound film, comparing the predefined values for the compound film properties to the measured compound film properties, and adjusting the deposition of the at least two chemical elements in case the measured compound film properties do not match the predefined compound film properties.
    Type: Grant
    Filed: September 12, 2007
    Date of Patent: November 25, 2014
    Assignee: FLISOM AG
    Inventors: Dominik Rudmann, Marc Kaelin, Thomas Studer, Felix Budde
  • Patent number: 8895111
    Abstract: A printed nonwoven web having improved oil crockfastness when an ink composition is applied to an outer surface of the nonwoven is generally disclosed. For example, an ink composition that has improved resistance to rub off of the web, even if the ink composition contacts an oily substance (e.g., baby oil, lotion, etc.), can be printed on a surface of the web. The nonwoven web can be a layer in a laminate having at least a film layer and the nonwoven web layer. For example, the printed laminate can be used as the outercover of an absorbent article.
    Type: Grant
    Filed: March 14, 2007
    Date of Patent: November 25, 2014
    Assignee: Kimberly-Clark Worldwide, Inc.
    Inventors: Simon Poruthoor, Lisa Sanabria, Ali Yahiaoui, Kelly Branham, Hue Scott Snowden, Olesya Sukhareva