Abstract: A micromechanical rotation rate sensor, comprising at least one substrate, wherein the rotation rate sensor has at least a first and a second seismic mass which are coupled to one another by means of at least one coupling beam, and wherein the rotation rate sensor is embodied in such a way that it can detect rotation rates about at least a first and a second sensitive axis, wherein each seismic mass is assigned at least one actuator unit with which the deflection behavior of the seismic mass can be influenced.

Abstract: The invention relates to a micromechanical Coriolis rate of rotation sensor for detecting rates of rotation with components around measuring axes in three spatial directions which are orthogonal to one another. The Coriolis rate of rotation sensor has a substrate, a detection mass and at least two drive masses, wherein the drive masses can each be driven to perform a primary movement relative to the substrate. The direction of the primary movement of one of the at least two drive masses is perpendicular to the direction of the primary movement of another of the at least two drive masses. The detection mass is coupled to the drive masses. The invention also relates to an Inertial Measurement Unit (IMU) and to a method for detecting rates of rotation in three spatial directions which are orthogonal to one another.

Abstract: Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies connecting a connection bridge so as to support the driving masses; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.

Abstract: Disclosed herein is an inertial sensor including: a driving part displaceably supported by a support; a driving electrode vibrating the driving part; and a detecting electrode detecting a force acting on the driving part in a predetermined direction, wherein the driving part includes: a center driving mass positioned at the center of the inertial sensor; side driving masses connected to and interlocking with the center driving mass and positioned at four sides based on the center driving mass; and connection bridges connecting the center driving mass, the side driving masses, and the support to each other.

Abstract: An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.

Abstract: The invention relates to a surface-type MEMS resonant sensor, comprising a resonator (4) with excitation in a plane, which sensor comprises: a first, so-called thick area (2), having a first thickness (E1), forming a seismic mass; and a second, thin area (4), having a second thickness (E2), lower than the first, for detection.

Abstract: Error sources relating to the drive signal applied to the resonator of an inertial sensor, such as in-phase offset errors relating to the drive signal and/or electronic pass-through of the drive signal to accelerometer sense electronics, are detected by modulating the drive signal and sensing accelerometer signals that are induced by the modulated drive signal. Error sources related to aerodynamics of an inertial sensor resonator are detected by modulating the distance between the resonator and the underlying substrate and sensing accelerometer signals that are induced by such modulation. Compensating signals may be provided to substantially cancel errors caused by such error sources.

Abstract: The acceleration sensor according to the present invention includes a circuit chip having a prescribed circuit built into a front surface thereof; a sensor chip bonded to the front surface of the circuit chip; and a resin package for sealing the circuit chip and the sensor chip, while the sensor chip includes: a membrane arranged to oppose to the front surface of the circuit chip and having a plurality of openings; a piezoresistor formed on a surface of the membrane opposed to the circuit chip; a support section provided on a side opposite to the circuit chip with respect to the membrane and supporting a peripheral edge portion of the membrane; and a weight section provided on the side opposite to the circuit chip with respect to the membrane and integrally held on a central portion of the membrane.

Abstract: A fiber optic accelerometer has a hollow body that supports an optical fiber therein so as to form a cantilever section, a fiber optic splitter coupled to a first end of the optical fiber and a light source for directing light into the optical fiber via a first branch of the optical splitter. A photo detector receives light conveyed through the optical fiber via a second branch of the optical splitter and measures an intensity of the received light. A reflective target supported at a second end of the hollow body is axially aligned with the second end of the optical fiber in the absence of force. Upon acceleration the cantilever section moves such that its position relative to the reflective target changes thereby reducing the instantaneous intensity of light reflected by the target into the second end of the optical fiber and measured by the photo detector.

Abstract: A method and apparatus for non-destructive testing. An embodiment of the present disclosure provides a non-destructive inspection system comprising a capacitive acoustic transducer and a control unit connected to the capacitive transducer.

Abstract: A vibratory gyroscope utilizing a frequency-based measurement and providing a frequency output.

Abstract: There is provided an angular velocity sensor, including: a flexible part connecting a fixing part to an oscillation unit; a driving unit formed on the flexible part or the oscillation unit to oscillate the oscillation unit; a sensing unit formed on the flexible part or the oscillation unit to sense a displacement of the oscillation unit according to an angular velocity input; a control piezoelectric element formed on the flexible part to control rigidity of a motion of the oscillation unit; and an impedance element electrically connected to the control piezoelectric element to apply impedance to the control piezoelectric element.

Abstract: In a micromechanical system having a substrate and an electrode situated over the substrate, the electrode is connected to the substrate via a vertical spring. The vertical spring is sectionally provided in a first conductive layer and sectionally provided in a second conductive layer, the second conductive layer being situated over the first conductive layer and the first conductive layer being situated over the substrate. The electrode is provided in a third conductive layer, which is situated over the second conductive layer.

Abstract: The invention provides a device for the gravimetric detection of particles in a fluid medium, comprising a flat electromechanical oscillator (1), means for supporting the oscillator, means (15a, 15b, 15c, 15d) for actuating said oscillator and, on either side of the plane of the oscillator (1), two cavities (3, 5) enabling the oscillator (1) to vibrate when it is activated by the actuation means (15a, 15b, 15c, 15d), characterized in that at least one of the two cavities (3, 5) forms an integral part of a channel (2, 4) for the passage of a fluid over at least one of the faces (1a, 1b) of the oscillator and in that said actuation means (15a, 15b, 15c, 15d) take the form of at least one electrode (15a, 15b, 15c, 15d) lying in the same plane as that of the electromechanical oscillator and at a defined distance (g) from the oscillator, so as to ensure that the oscillator vibrates in its plane.

Abstract: Failures can be detected with high accuracy even the ambient temperature changes or background vibration is applied.

Abstract: A micromechanical acceleration sensor is described which includes a substrate and a seismic mass which is movably situated with respect to the substrate in a detection direction. The micromechanical sensor includes at least one damping device for damping motions of the seismic mass perpendicular to the detection direction.

Abstract: An inertial sensor includes a plate-like substrate layer, a mass body, a support frame, a limit stop extending in the central direction of the mass body from the support frame, and a detection unit detecting the displacement of the displacement part. The inertial sensor adopts the limit stop limiting the downward displacement of the mass body to prevent the support portion of the mass body from being damaged.

Abstract: An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

Abstract: An embodiment is a method and apparatus for coherent ultrasonic imaging. A receiver array has a plurality of receiver elements on a substrate to detect in-phase and quadrature components of a received signal corresponding to a transmit signal. Each of the receiver elements includes a receiver transducer and a thin-film transistor (TFT) receiver circuit. The TFT receiver circuit includes a quadrature detector having a mixer to mix a received signal with a reference signal in a composite bias signal that is distributed across the plurality of receiver elements. A transmitter is acoustically coupled to the plurality of receiver elements to generate the transmit signal through an imaging medium.

Abstract: Gyroscopes that can compensate frequency mismatch are provided. In this regard, a representative gyroscope, among others, includes a top substrate including an outermost structure, a first driving structure and a first sensing structure. The first driving structure and the first sensing structure are disposed within the outermost structure. The first driving structure and the first sensing structure include a first driving electrode and a first sensing electrode that are disposed on a bottom surface of the first driving structure and first sensing structure, respectively. A portion of the mass on the top surface of the first sensing structure is removed. The gyroscope further includes a bottom substrate that is disposed below the top substrate. The bottom substrate includes a second driving electrode and a second sensing electrode that are disposed on a top surface of the bottom substrate and below the first driving electrode and the first sensing electrode.