Abstract: Mass spectrometers ionize samples by matrix-assisted laser desorption (MALDI). The samples are located on a moveable support plate, and irradiated by a pulsed laser. A fast positional control of laser spots is provided via a system of rotatable mirrors to relieve strain on a support plate motion drive. If the spot position is finely adjusted by the mirror system and follows the movement of the sample support plate, the intermittent movement of the sample support can be replaced with a continuous uniform motion. The fast positional control allows more uniform ablation of a sample area. Galvo mirrors with low inertia may be used between the beam generation and a Kepler telescope in the housing of the laser. The positional control can also provide a fully automatic adjustment of MALDI time-of-flight mass spectrometers, at least if the ion-optical elements are equipped with movement devices.

Abstract: Electromagnetic radiation barriers and waveguides, including barriers and waveguides for light, are disclosed. The barriers and waveguides are fabricated by directing charged particles, for example, ions, into crystalline substrates, for example, single-crystal sapphire substrates, to modify the crystal structure and produce a region of varying refractive index. These substrates are then heated to temperatures greater than 200 degrees C. to stabilize the modified crystal structure and provide the barrier to electromagnetic radiation. Since the treatment stabilizes the crystal structure at elevated temperature, for example, above 500 degrees C. or above 1000 degrees C., the barriers and waveguides disclosed are uniquely adapted for use in detecting conditions in harsh environments, for example, at greater than 200 degrees C. Sensors, systems for using sensors, and methods for fabricating barriers and waveguides are also disclosed.

Abstract: An atmospheric pressure ion source, employing the principle of electrospray ionization, chemical ionization, or photo-ionization, comprises a spray probe for spraying a liquid into an ionization chamber and has an exhaust port through which residual spray mist and waste gas, such as evaporated solvent, are extracted. The ion source further comprises an exhaust system comprising a conduit which is connected to the exhaust port. The conduit has a transition from a first cross-section to a second cross section at a point downstream of the exhaust port wherein the second cross section is reduced in relation to the first cross section. Gas is injected via a gas injector into the conduit in a region of the transition to create a low pressure region that removes unwanted material from the chamber.

Abstract: A method of screening a sample for the presence of one or more known compounds of interest is disclosed. A fragmentation device is repeatedly switched between a fragmentation mode of operation and a non-fragmentation mode of operation. A determination is made whether a candidate parent ion of interest is present in a non-fragmentation data set and whether one or more corresponding fragment ions of interest are present in a fragmentation data set. A further determination is made to check if the candidate parent ion of interest and the one or more corresponding fragment ions of interest have substantially similar elution or retention times and/or ion mobility drift times.

Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

Abstract: Methods and devices enable shaping of a charged particle beam. A modified dielectric wall accelerator includes a high gradient lens section and a main section. The high gradient lens section can be dynamically adjusted to establish the desired electric fields to minimize undesirable transverse defocusing fields at the entrance to the dielectric wall accelerator. Once a baseline setting with desirable output beam characteristic is established, the output beam can be dynamically modified to vary the output beam characteristics. The output beam can be modified by slightly adjusting the electric fields established across different sections of the modified dielectric wall accelerator. Additional control over the shape of the output beam can be excreted by introducing intentional timing de-synchronization offsets and producing an injected beam that is not fully matched to the entrance of the modified dielectric accelerator.

Abstract: An aperture unit for a particle beam device, in particular an electron beam device, is disclosed. Deposit supporting units are arranged at the aperture unit, with which deposit supporting units contaminations can be bound in such a way that the contaminations can no longer deposit at an aperture opening of the aperture unit. Coatings which can be arranged on the aperture unit make it possible to reduce interactions which cause contaminations to deposit at the aperture opening.

Abstract: Provided are methods for determining the amount of lacosamide in a sample using mass spectrometry. The methods generally involve ionizing lacosamide in a sample and detecting and quantifying the amount of the ion to determine the amount of lacosamide in the sample.

Abstract: An ion guide that transports ions from an ion source at generally a high-pressure level to a mass analyzer at generally a low-pressure level has a plurality of identical electrodes fabricated with protruding elements that forming an ion tunnel or an ion funnel, when the electrodes are assembled around a common longitudinal axis. The protruding elements allow the generation of the radio frequency field necessary to radially confine ions. Each electrode may be machined from a solid block of conductive material, such as metal. The disclosed arrangement greatly simplifies the manufacturing process, reducing cost, and improving robustness and reliability of the ion guide itself.

Abstract: A reticle positioning apparatus for actinic EUV reticle inspection including a sealed inspection chamber containing a reticle stage for holding a reticle. The reticle stage has a magnetically suspended upper stage with a long travel in a “y” direction and a magnetically suspended lower stage with a long travel in an “x” direction; and a cable stage chamber isolated from the inspection chamber by a cable chamber wall. The cable stage chamber has a cable stage movable in the “y” direction; and a tube connected at one end to the reticle stage and to the cable stage at the other end. The tube passes from the cable stage through the inspection chamber through a seal in the chamber wall and opening into the cable entry chamber for entry of cables and hoses within the cable stage chamber, which cables and hoses pass through the tube to the reticle stage.

Abstract: The objective is to obtain a charged particle accelerator where the amount of pattern data for operating an acceleration cavity and electromagnets based on time clocks is reduced and the pattern data communication time is shortened. An accelerator control apparatus provided in a charged particle accelerator of the present invention is characterized by including a clock generation unit that generates an acceleration cavity clock and an electromagnet clock that is synchronized with the acceleration cavity clock and has a frequency lower than that of the acceleration cavity clock; a high-frequency control unit that controls an acceleration cavity, based on an acceleration cavity pattern stored in a first pattern memory and the acceleration cavity clock; and a deflection electromagnet control unit that controls a deflection electromagnet, based on a deflection electromagnet pattern stored in a second pattern memory and the electromagnet clock.

Abstract: A drawing apparatus include: a charged particle optical system configured to generate M×N charged particle beams; a limiting device configured to limit number of charged particle beams that the charged particle optical system emits toward a substrate; and a controller configured, if an abnormal beam that does not satisfy a use condition is present among the M×N charged particle beams, to control the limiting device such that only m rows, each of the m rows including n charged particle beams that are successive without intervention of the abnormal beam.

Abstract: Charged particle system are disclosed and include a first voltage source, a second voltage source electrically isolated from the first voltage source, a charged particle source electrically connected to the first voltage source, and an extractor electrically connected to the second voltage source. Methods relating to the charged particle systems are also disclosed.

Abstract: A scintillator 21 is disposed on an incidence side 23a of a photomultiplier 23. A scintillator cap 22 for introducing electrons into the scintillator 21 is disposed around the scintillator 21. The photomultiplier 23 is disposed in a sample chamber 17 with a vacuum seal formed around the photomultiplier 23. An insulating member 25 made of an opaque material is disposed between the scintillator cap 22 and the photomultiplier 23. The insulating member 25 provides insulation between the scintillator cap 22 and the photomultiplier 23. The lateral circumference of the photomultiplier 23 is covered to prevent light from entering the photomultiplier 23. A band filter 27 for blocking the illumination light of an optical microscope 30 is disposed between the scintillator 21 and the incidence side 23a of the photomultiplier 23 to make it possible to conduct simultaneous observations by using the electrons and the optical microscope.

Abstract: A method and apparatus for performing a slice and view technique with a dual beam system. The feature of interest in an image of a sample is located by machine vision, and the area to be milled and imaged in a subsequent slice and view iteration is determined through analysis of data gathered by the machine vision at least in part. A determined milling area may be represented as a bounding box around a feature, which dimensions can be changed in accordance with the analysis step. The FIB is then adjusted accordingly to slice and mill a new face in the subsequent slice and view iteration, and the SEM images the new face. Because the present invention accurately locates the feature and determines an appropriate size of area to mill and image, efficiency is increased by preventing the unnecessary milling of substrate that does not contain the feature of interest.

Abstract: A method of investigating a sample using a charged-particle microscope is disclosed. By directing an imaging beam of charged particles at a sample, a resulting flux of output radiation is detected from the sample. At least a portion of the output radiation is examined using a detector, the detector comprising a Solid State Photo-Multiplier. The Solid State Photo-Multiplier is biased so that its gain is matched to the magnitude of output radiation flux.

Abstract: An electrostatic Kingdon ion trap in which ions can oscillate harmonically in the longitudinal direction, decoupled from their motions in the transverse direction is formed from at least three inner electrodes located inside a hollow outer housing electrode. The inner surface of the housing electrode and the outer surfaces of the inner electrodes are formed so that when a potential is applied between the housing and the inner electrodes, the potential distribution inside the housing contains not only a term for a harmonic potential well in the axial direction, but also a term for the potential distribution in the radial direction, that contains, independent of the axial coordinate, the equations for a family of Cassini curves of at least the third order.

Abstract: In or for a dual source mass spectrometry system (10), an ion source housing (16) for detachable connection to a mass spectrometer of the system. The ion source housing comprises a source chamber (22) having an outlet port for connection to a vacuum region of a mass spectrometer, a sample port for receiving a gas chromatography [GC] column and means for charging analyte molecules discharged from said GC column, wherein the housing comprises a docking means by which a GC interface probe can be releasably engaged with the housing.

Abstract: The present invention relates to a method of improving detection sensitivity of an ion mobility spectrometer, comprising: inserting a sample into a sample receiving device of the ion mobility spectrometer; triggering an operation of spectra acquisition through an optocoupler; when the number of the acquired spectra reaches the level required to contain enough information for accurate detection of explosives with relatively high vapor pressure, adding a dopant instantly to the ionization region by controlling the ON/OFF-state of an electromagnetic valve; when the number of the acquired spectra reaches the level required to contain enough information for accurate detection of explosives with relatively low vapor pressure, stopping the acquisition operation, and turning off the electromagnetic valve so as to stop adding the dopant to the ionization region; analyzing all of the acquired spectra to obtain the detection result.

Abstract: The invention provides a method and apparatus for trapping, releasing and/or separating sample components in solution passing through a channel with or without packing material present by passing ion current through the channel driven by an electric field. A portion of the ion current comprises cation and/or anion species generated from second solution flows separated from the sample solution flow path by semipermeable membranes. Cation and/or Anion ion species generated in the second solution flow regions are transferred into the sample solution flow path through ion selective semipermeable membranes. Ion current moving along the sample solution flow path is controlled by varying the composition of the second solutions and/or changing the voltage between membrane sections for a given sample solution composition. The sample composition may also be varied separately or in parallel to enhance trapping, release and/or separation efficiency and range.