Patents Examined by Joseph Miller, Jr.
  • Patent number: 10557193
    Abstract: The present invention presents a method for manufacturing tight and porous coatings from metallic, ceramic and organic materials by utilizing composite targets manufactured of two or several materials, which are disintegrated, and producing in this way material flow towards the object to be coated by utilizing short laser pulses directed to the target material. With the method it is possible to produce material structures in a controlled manner, minimizing the needed energy of the laser pulses and heat generation, and with the method it is also possible to improve productivity by correctly choosing the components for the target material.
    Type: Grant
    Filed: December 4, 2015
    Date of Patent: February 11, 2020
    Assignee: Pulsedeon Oy
    Inventors: Jari Liimatainen, Ville Kekkonen
  • Patent number: 10550471
    Abstract: A mixed gas multiple line supply system includes a flow splitter connected to a common mixed gas supplying passage, the flow splitter configured to split a mixed gas into a plurality of supply lines while adjusting a ratio of flow rates in the plurality of supply lines, and an least one injector including a gas introducing port and a gas discharge hole for each of a plurality of regions in the processing container and configured to supply the mixed gas to each of the plurality of regions. The plurality of supply lines of the flow splitter are connected in one-to-one correspondence to the respective gas introducing ports provided for the plurality of regions in the processing container.
    Type: Grant
    Filed: March 1, 2017
    Date of Patent: February 4, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Shinobu Kawamorita, Satoru Koike
  • Patent number: 10546730
    Abstract: A method may include providing a cavity in a surface of a substrate, the cavity comprising a sidewall portion and a lower surface; directing depositing species to the surface of the substrate, wherein the depositing species condense to form a fill material on the sidewall portion and lower surface; and directing angled ions at the cavity at a non-zero angle of incidence with respect to a perpendicular to a plane defined by the substrate, wherein the angled ions strike an exposed part of the sidewall portion and do not strike the lower surface, and wherein the cavity is filled by the fill material in a bottom-up fill process.
    Type: Grant
    Filed: May 16, 2016
    Date of Patent: January 28, 2020
    Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC
    Inventors: Simon Ruffell, John Hautala
  • Patent number: 10529568
    Abstract: Methods of forming a tungsten film comprising forming a boron seed layer on an oxide surface, an optional tungsten initiation layer on the boron seed layer and a tungsten containing film on the boron seed layer or tungsten initiation layer are described. Film stack comprising a boron seed layer on an oxide surface with an optional tungsten initiation layer and a tungsten containing film are also described.
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: January 7, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Susmit Singha Roy, Pramit Manna, Rui Cheng, Abhijit Basu Mallick
  • Patent number: 10526708
    Abstract: A method and apparatus are provided for plasma-based processing of a substrate based on a plasma source having a first, second and third electrodes disposed above a pedestal. The second electrode is disposed between the first and third electrodes. A first gap is formed between the first electrode and the pedestal and between the third electrode and the pedestal. A second gap is formed between the first and second electrodes, and a third gap is formed between the second and third electrodes. A first radio frequency (RF) power supply is connected to the first and third electrodes and is configured to predominantly deliver power to plasmas located in the first gap. A second RF power supply is connected to the second electrode and is configured to predominantly deliver power to plasmas located in the second and third gaps.
    Type: Grant
    Filed: March 12, 2018
    Date of Patent: January 7, 2020
    Assignee: AIXTRON SE
    Inventors: Stephen E. Savas, Carl Galewski, Hood Chatham, Sai Mantripragada, Allan Wiesnoski, Sooyun Joh
  • Patent number: 10522333
    Abstract: A vacuum processing apparatus includes a vacuum processing chamber, an upper electrode, a lower electrode, a first high-frequency power source, a second high-frequency power source, a first matching box, a second matching box, a copper plate for connecting an electrode shaft of the lower electrode with the second matching box, a drive base on which the electrode shaft of the lower electrode and the second matching box are mounted, a drive unit for ascending or descending the drive base, and an exhaust unit disposed at a position equally distanced from an exhaust outlet by a distance.
    Type: Grant
    Filed: September 19, 2017
    Date of Patent: December 31, 2019
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yusaku Sakka, Hiromichi Kawasaki, Tsutomu Iida, Hiromitsu Terauchi, Masahiro Nagatani, Yasushi Sonoda
  • Patent number: 10518438
    Abstract: An additive manufacturing apparatus for forming a ceramic part includes a platform to support the ceramic part to be formed and a dispenser to dispense successive layers of feed material over the platform. The feed material includes a curable component. The apparatus further includes a radiation source to emit a radiation toward a top surface of the platform and a microwave source to apply microwaves directed toward the successive layers on the platform. The radiation is configured to cure the curable component of the feed material as or after each layer is dispensed. The microwaves are configured to vaporize the curable component of the feed material and to cause crystallization of the feed material to form the ceramic part.
    Type: Grant
    Filed: March 23, 2017
    Date of Patent: December 31, 2019
    Assignee: Applied Materials, Inc.
    Inventor: Zeng Jie
  • Patent number: 10519548
    Abstract: A film forming apparatus includes: process container to generate vacuum atmosphere; mounting part to mount substrate; heating part to heat the substrate mounted on the mounting part; gas supply part installed at rear side of the substrate mounted on the mounting part and configured to supply film forming gas toward front side of the substrate along surface of the substrate and flow rate of the film forming gas becomes uniform in width direction of flow of the film forming gas; rotation mechanism to rotate the mounting part about axis orthogonal to the substrate when the film forming gas is supplied to the substrate; film thickness adjustment part to adjust film thickness distribution of film on the substrate in flow direction of the film forming gas when viewed in state where the mounting part is stopped; and exhaust port provided at the front side of the substrate.
    Type: Grant
    Filed: September 22, 2016
    Date of Patent: December 31, 2019
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Naotaka Noro
  • Patent number: 10515795
    Abstract: A method of depositing a thin film includes: repeating a first gas supply cycle a first plurality of times, the first gas supply cycle including supplying a source gas to a reaction space; supplying first plasma while supplying a reactant gas to the reaction space; repeating a second gas supply cycle a second plurality of times, the second gas supply cycle including supplying the source gas to the reaction space; and supplying second plasma while supplying the reactant gas to the reaction space, wherein the supplying of the first plasma includes supplying remote plasma, and the supplying of the second plasma includes supplying direct plasma.
    Type: Grant
    Filed: January 2, 2017
    Date of Patent: December 24, 2019
    Assignee: ASM IP Holding B.V.
    Inventors: Young Hoon Kim, Dae Youn Kim, Sang Wook Lee
  • Patent number: 10513052
    Abstract: [Problem] The present invention relates to a manufacturing method for obtaining a molded article having an expanded layer in the molded article, wherein an expanding agent and device used to manufacture a resin having expansion properties, and a means for increasing expansion ratio are provided. [Solution] In the present invention, an expanding agent placed in a heating cylinder of a molding machine is configured as a liquid, the volume of the expanding agent is controlled, and the expanding agent is injected into a molten resin in the heating cylinder of the molding machine. The volume of the injected expanding agent can thereby be accurately measured each time. When a low-boiling liquid such as water, an alcohol, or an ether is used as the injected expanding agent, all of the liquid is vaporized by the temperature of the heating cylinder of the molding machine, and no residue thereof is therefore left in the molded article.
    Type: Grant
    Filed: April 24, 2015
    Date of Patent: December 24, 2019
    Inventor: Yasuhiro Suzuki
  • Patent number: 10504701
    Abstract: Disclosed is an apparatus and method of processing substrate, wherein the apparatus comprises a process chamber; a substrate supporter for supporting at least one of substrates, wherein the substrate supporter is provided in the process chamber, and is rotated at a predetermined direction; a chamber lid confronting with the substrate supporter, the chamber lid for covering the process chamber; and a gas distributor having a plurality of gas distribution modules for distributing gas to the substrate, wherein the plurality of gas distribution modules are connected to the chamber lid, wherein each of the gas distribution modules includes a power source electrode and a ground electrode confronting each other, a plasma discharge space is formed between the power source electrode and the ground electrode, and the plasma discharge space is not overlapped with a thin film formation region of the substrate supported by the substrate supporter.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: December 10, 2019
    Assignee: JUSUNG ENGINEERING CO., LTD.
    Inventors: Jeung Hoon Han, Chul Joo Hwang, Seung Hoon Seo, Sang Don Lee
  • Patent number: 10493745
    Abstract: The invention provides a method for height difference measurement between the print heads and a 3D printer using the method. The 3D printer includes a printing module, a contact sensor, a movement sensor and a controller. The controller makes a 3D print head and the contact sensor contact to each other vertically for generating a contact signal, and obtains a first height value according to a vertical movement distance between the printing module and the contact sensor. The controller makes a color head and the contact sensor contact to each other vertically for generating the contact signal, and obtains a second height value according to a vertical movement distance between the printing module and the contact sensor. The controller obtains a height difference between the 3D print head and the color head according to the first height value and the second height value.
    Type: Grant
    Filed: March 17, 2017
    Date of Patent: December 3, 2019
    Assignees: XYZprinting, Inc., Kinpo Electronics, Inc.
    Inventor: Yu-Jie Yang
  • Patent number: 10486414
    Abstract: A print system and a method for curing marking material on an object using an active transparent display in a three dimensional (3D) object printer are disclosed. For example, the print system includes a plurality of printheads, a curing light source, a movable member to hold an object, an active transparent display and a controller to control movement of the movable member to move the object past the array of printheads, to operate the plurality of printheads to eject the marking material onto the object as the object passes the two-dimensional array of printheads, to control movement of the movable member, to control the active transparent display and to operate the curing light source to apply energy to cure the marking material, wherein the amount of energy that is applied to the object is controlled by a mask that is displayed on the active transparent display.
    Type: Grant
    Filed: March 29, 2017
    Date of Patent: November 26, 2019
    Assignee: Xerox Corporation
    Inventors: Douglas K. Herrmann, Michael Jon Levy, Seemit Praharaj, Paul McConville, Jason Matthew LeFevre
  • Patent number: 10479068
    Abstract: There is provided an additive manufacturing system comprising a vertical stage (also known as a z-stage) that moves the object being created along an axis of motion that is not perpendicular to the image plane (non-parallel to the z-axis of the image plane). By moving the build platform, upon which the additively manufactured object is being supported, along a predetermined axis of motion, such as one adapted to the dominant axis of the object design, the additive manufacturing system is capable of making larger objects, shortening build times, improving part resolution, and/or reducing the volume of photocurable material needed, among other benefits.
    Type: Grant
    Filed: March 23, 2017
    Date of Patent: November 19, 2019
    Assignee: 3D Systems, Inc.
    Inventors: Patrick Dunne, Peter Scott Turner, Seth Astle
  • Patent number: 10464814
    Abstract: The invention shows a production apparatus for producing carbon nanotubes by the gas-phase catalysis process, comprising: a first chamber having a growth region that is a region in which carbon nanotubes are formed; a first temperature adjustment device capable of adjusting a temperature of the growth region in the first chamber; a pressure adjustment device capable of adjusting a pressure in the first chamber; a first feed device capable of feeding a carbon source to the growth region in the first chamber; a second temperature adjustment device capable of adjusting a temperature of a solid-phase iron family element-containing material disposed in the production apparatus; and a second feed device capable of feeding a gas-phase halogen-containing substance into the production apparatus so that the iron family element-containing material of which the temperature is adjusted to a predetermined temperature by the second temperature adjustment device can react with the halogen-containing substance.
    Type: Grant
    Filed: December 11, 2017
    Date of Patent: November 5, 2019
    Assignees: NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY, JNC CORPORATION
    Inventors: Yoku Inoue, Takayuki Nakano, Tauto Nakanishi
  • Patent number: 10457034
    Abstract: A three-dimensional object printer has a controller that operates pluralities of ejectors ejecting drops of different materials having different colors, at least one color of which is white, to produce objects with different levels of color saturation. The controller operates the pluralities of ejectors with reference to a function of a sum of an average number of drops per voxel in each layer, a target value of an average number of drops per voxel of colorants other than white in each layer, and a distance from a closest surface of the object for each material ejected by the ejectors. At a predetermined distance from a closest surface and greater, the controller operates the pluralities of ejectors to form voxels in layers of the object with only clear and white drops. At distances less than the predetermined distance, the number of clear drops increases and the number of white drops decreases.
    Type: Grant
    Filed: February 16, 2017
    Date of Patent: October 29, 2019
    Assignee: Xerox Corporation
    Inventors: David A. Mantell, Stuart A. Schweid
  • Patent number: 10453657
    Abstract: Embodiments of a gas delivery apparatus for use in a radio frequency (RF) processing apparatus are provided herein. In some embodiments, a gas delivery apparatus for use in a radio frequency (RF) processing apparatus includes: a conductive gas line having a first end and a second end; a first flange coupled to the first end; a second flange coupled to the second end, wherein the conductive gas line extends through and between the first and second flanges; and a block of ferrite material surrounding the conductive gas line between the first and second flanges.
    Type: Grant
    Filed: July 5, 2017
    Date of Patent: October 22, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Daping Yao, Hyman W. H. Lam, John C. Forster, Jiang Lu, Can Xu, Dien-Yeh Wu, Paul F. Ma, Mei Chang
  • Patent number: 10449710
    Abstract: An additive manufacturing device and method for delivering a flowable material from a nozzle of a programmable computer numeric control (CNC) machine, and compressing the flowable material with a compression roller. In one embodiment, the device includes a nozzle configured to deposit a flowable material on a surface; and a roller configured to compress the deposited flowable material, wherein the roller comprises: a flat center portion having a constant diameter; and opposed end portions, wherein each end portion extends outwardly from the flat center portion, and wherein a radially outermost surface of each end portion is angled relative a rotational axis of the roller.
    Type: Grant
    Filed: February 17, 2017
    Date of Patent: October 22, 2019
    Assignee: Thermwood Corporation
    Inventors: Kenneth J. Susnjara, Scott G. Vaal
  • Patent number: 10450645
    Abstract: A coating system for coating a part (10), such as a turbine blade or vane, has a mask (14) positioned adjacent to a first portion (16) of the part (10) to be coated and a mechanism (30) for moving the mask (14) relative to the part (10). The mechanism (30) may be a gear mechanism or a magnetic mechanism.
    Type: Grant
    Filed: September 22, 2017
    Date of Patent: October 22, 2019
    Assignee: United Technologies Corporation
    Inventors: James W. Neal, David A. Litton, Russell A. Beers, Benjamin Joseph Zimmerman, Michael J. Maloney
  • Patent number: 10443124
    Abstract: A process and an apparatus for densifying a porous structure is disclosed. The porous structure comprises a first surface, a second surface, an inner diameter surface and an outer diameter surface. The process may comprise progressive densification in conjunction with thermal gradient and/or pressure gradient densification processes.
    Type: Grant
    Filed: September 9, 2010
    Date of Patent: October 15, 2019
    Assignee: GOODRICH CORPORATION
    Inventors: Mark James Purdy, John Edgar Finley, Mark Russell Wolke, James Warren Rudolph, Timothy Patrick Smith