Patents Examined by Julio Maldonado
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Patent number: 9793182Abstract: A semiconductor device arrangement includes a semiconductor substrate which includes a semiconductor substrate front side and a semiconductor substrate back side. The semiconductor substrate includes at least one electrical element formed at the semiconductor substrate front side. The semiconductor device arrangement further includes at least one porous semiconductor region formed at the semiconductor substrate back side.Type: GrantFiled: September 12, 2014Date of Patent: October 17, 2017Assignee: Infineon Technologies AGInventor: Francisco Javier Santos Rodriguez
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Patent number: 9057836Abstract: A glass wafer is provided that is made of a copper ions containing phosphate or fluorophosphate glass. The glass wafer has a diameter greater than 15 centimeters and a thickness of less than 0.4 millimeters. The glass wafer has two plane-parallel surfaces at least one of which is polished.Type: GrantFiled: March 18, 2013Date of Patent: June 16, 2015Assignee: SCHOTT AGInventors: Bianca Schreder, Jochen Freund, Ute Woelfel, Claude Martin, Christophe Baur, Steffen Reichesl, Marc Clement
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Patent number: 9059211Abstract: At least one layer including a scavenging material and a dielectric material is deposited over a gate stack, and is subsequently anisotropically etched to form a oxygen-scavenging-material-including gate spacer. The oxygen-scavenging-material-including gate spacer can be a scavenging-nanoparticle-including gate spacer or a scavenging-island-including gate spacer. The scavenging material is distributed within the oxygen-scavenging-material-including gate spacer in a manner that prevents an electrical short between a gate electrode and a semiconductor material underlying a gate dielectric. The scavenging material actively scavenges oxygen that diffuses toward the gate dielectric from above, or from the outside of, a dielectric gate spacer that can be formed around the oxygen-scavenging-material-including gate spacer.Type: GrantFiled: October 3, 2011Date of Patent: June 16, 2015Assignee: International Business Machines CorporationInventors: Michael P. Chudzik, Deleep R. Nair, Vijay Narayanan, Carl J. Radens, Jay M. Shah
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Patent number: 9059426Abstract: An organic light emitting display device can prevent a voltage dropping in a cathode electrode. The organic light emitting display device includes a substrate, cathode wiring arranged on a surface of the substrate, an anode electrode arranged on the substrate and electrically insulated from the cathode wiring, an organic layer arrangement arranged on the anode electrode to form a plurality of unit pixels, a cathode electrode covering the organic layer arrangement and at least one electrical connection unit to electrically connect the cathode wiring to the cathode electrode.Type: GrantFiled: April 5, 2011Date of Patent: June 16, 2015Assignee: Samsung Display Co., Ltd.Inventor: Chi-Wook An
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Patent number: 8829553Abstract: Example embodiments are directed to a light emitting package having a structure that prevents variance in a depth of a cavity in which a chip is mounted and a method of fabricating the same. A light emitting package includes a package body including a first body including the cavity and a second body bonded to the first body. The cavity penetrates the first body. A first electrode and a second electrode separate from each other are on the package body. A first dielectric layer is between the package body and the first electrode and between the package body and the second electrode. A light emitting element is placed in the cavity and electrically connected to the first electrode and the second electrode. A method of fabricating the light emitting package includes forming the first body and the second body bonded to the first body through a dielectric layer, forming the cavity in the first body and forming the light emitting element in the cavity.Type: GrantFiled: July 12, 2010Date of Patent: September 9, 2014Assignee: Samsung Electronics Co., Ltd.Inventor: Yu-Sik Kim
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Patent number: 8698183Abstract: A light emitting device includes a substrate having a top surface and an bottom surface and a light emitting structure on the substrate, disposed closer to the substrate top surface than the substrate bottom surface, having an n-type conductive type semiconductor layer, a p-type conductive type semiconductor layer, and an active layer. The light emitting device also includes a transparent electrode layer, a first electrode, and a second electrode. The substrate has side surfaces extending from the substrate bottom surface to the substrate top surface, the side surfaces inclined outwardly as the substrate extends in a direction from the substrate bottom surface to the substrate top surface. The transparent electrode layer overlaps more than 50% of a total area of the substrate bottom surface, and a part of light generated by the light emitting structure is emitted to outside via the transparent electrode layer.Type: GrantFiled: July 2, 2013Date of Patent: April 15, 2014Assignee: LG Innotek Co., Ltd.Inventor: Sang Youl Lee
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Patent number: 8692287Abstract: According to one embodiment, a nitride semiconductor device includes: a stacked foundation layer, and a functional layer. The stacked foundation layer is formed on an AlN buffer layer formed on a silicon substrate. The stacked foundation layer includes AlN foundation layers and GaN foundation layers being alternately stacked. The functional layer includes a low-concentration part, and a high-concentration part provided on the low-concentration part. A substrate-side GaN foundation layer closest to the silicon substrate among the plurality of GaN foundation layers includes first and second portions, and a third portion provided between the first and second portions. The third portion has a Si concentration not less than 5×1018 cm?3 and has a thickness smaller than a sum of those of the first and second portions.Type: GrantFiled: August 31, 2011Date of Patent: April 8, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Tomonari Shioda, Hung Hung, Jongil Hwang, Taisuke Sato, Naoharu Sugiyama, Shinya Nunoue
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Patent number: 8680597Abstract: A method of fabricating a semiconductor device includes providing a substrate having a first surface, forming an isolation structure disposed partly in the substrate and having an second surface higher than the first surface by a step height, removing a portion of the isolation structure to form a recess therein having a bottom surface disposed below the first surface, and forming a contact engaging the gate structure over the recess. A different aspect involves an apparatus that includes a substrate having a first surface, an isolation structure disposed partly in the substrate and having a second surface higher than the first surface by a step height, a recess extending downwardly from the second surface, the recess having a bottom surface disposed below the first surface, a gate structure, and a contact engaging the gate structure over the recess.Type: GrantFiled: August 16, 2013Date of Patent: March 25, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Harry-Hak-Lay Chuang, Chih-Yang Yeh, Bao-Ru Young, Yuh-Jier Mii
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Patent number: 8680596Abstract: There is provided a method for manufacturing a semiconductor device, including, forming a first insulating film on a semiconductor substrate, forming a capacitor on the first insulating film, forming a second insulating film covering the capacitor, forming a metal wiring on the second insulating film, forming a first capacitor protective insulating film covering the metal wiring and the second insulating film, forming an insulating sidewall on a side of the metal wiring, forming a third insulating film on the insulating sidewall, forming a hole by etching the third insulating film under a condition that an etching rate of the insulating sidewall would be lower than that of the third insulating film, and forming a conductive plug inside the hole.Type: GrantFiled: December 3, 2012Date of Patent: March 25, 2014Assignee: Fujitsu Semiconductor LimitedInventors: Hideaki Kikuchi, Kouichi Nagai
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Patent number: 8664115Abstract: A passivation layer is formed on inlaid Cu for protection against oxidation and removal during subsequent removal of an overlying metal hardmask. Embodiments include treating an exposed upper surface of inlaid Cu with hydrofluoric acid and a copper complexing agent, such as benzene triazole, to form a passivation monolayer of a copper complex, etching to remove the metal hardmask, removing the passivation layer by heating to at least 300° C., and forming a barrier layer on the exposed upper surface of the inlaid Cu.Type: GrantFiled: June 10, 2011Date of Patent: March 4, 2014Inventors: Christin Bartsch, Susanne Leppack
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Patent number: 8558301Abstract: There is provided a semiconductor device in which degradation of reliability originating in the interface between an upper insulating layer and an element isolation insulating layer is suppressed. The semiconductor device includes: a semiconductor region; a plurality of stacked structures each of which is disposed on the semiconductor region and has a tunnel insulating film, a charge storage layer, an upper insulating layer, and a control electrode stacked sequentially; an element isolation insulating layer disposed on side faces of the plurality of stacked structures; and a source-drain region disposed on the semiconductor region and among the plurality of stacked structures.Type: GrantFiled: August 12, 2011Date of Patent: October 15, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Masao Shingu, Akira Takashima, Koichi Muraoka
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Patent number: 8551868Abstract: A method of fabricating quantum confinements is provided. The method includes depositing, using a deposition apparatus, a material layer on a substrate, where the depositing includes irradiating the layer, before a cycle, during a cycle, and/or after a cycle of the deposition to alter nucleation of quantum confinements in the material layer to control a size and/or a shape of the quantum confinements. The quantum confinements can include quantum wells, nanowires, or quantum dots. The irradiation can be in-situ or ex-situ with respect to the deposition apparatus. The irradiation can include irradiation by photons, electrons, or ions. The deposition is can include atomic layer deposition, chemical vapor deposition, MOCVD, molecular beam epitaxy, evaporation, sputtering, or pulsed-laser deposition.Type: GrantFiled: March 24, 2011Date of Patent: October 8, 2013Assignees: The Board of Trustees of the Leland Stanford Junior Universit, Honda Patents & Technologies North America, LLCInventors: Timothy P. Holme, Andrei Iancu, Hee Joon Jung, Michael C Langston, Munekazu Motoyama, Friedrich B. Prinz, Takane Usui, Hitoshi Iwadate, Neil Dasgupta, Cheng-Chieh Chao
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Patent number: 7511356Abstract: A voltage-controlled semiconductor inductor and method is provided. According to various embodiments, the voltage-controlled inductor includes a conductor configured with a number of inductive coils. The inductor also includes a semiconductor material having a contact with at least a portion of at least one of the coils. The semiconductor material is doped to form a diode with a first doped region of first conductivity type, a second doped region of second conductivity type, and a depletion region. A voltage across the diode changes lengths of the first doped region, the second doped region and the depletion region, and adjacent coils in contact with at least one of the doped regions are electrically shorted, thereby varying the inductance of the inductor. In various embodiments, the inductor is electrically connected to a resistor and a capacitor to provide a tunable RLC circuit. Other aspects and embodiments are provided herein.Type: GrantFiled: August 31, 2005Date of Patent: March 31, 2009Assignee: Micron Technology, Inc.Inventor: Krupakar M. Subramanian
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Patent number: 7274109Abstract: A semiconductor die includes a plurality of drivers and a plurality of bonding pads. Each driver is formed by a plurality of interconnected modules and has an associated bonding pad to which at least one of the modules of the driver is electrically connected. The modules of some of the drivers are positioned outside of the associated bonding pad toward a periphery of the die. The bonding pads may be arranged, for example, in a double- or triple-staggered pattern around the periphery of the die.Type: GrantFiled: September 23, 2005Date of Patent: September 25, 2007Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.Inventors: James R. Emmert, Charles Evans, Michael Alvin Rencher, Haoran Duan
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Patent number: 7253865Abstract: A display device has an array 40 of pixels and row and column driver circuitry comprising row driver circuit portions R and column driver circuit portions C, each pixel being addressed by a row driver circuit portion R and a column driver circuit portion C which connect to respective row and column conductor lines. The array of pixels has a non-rectangular outer shape, and the device comprises at least three row driver circuit portions R and at least three column driver circuit portions C disposed alternately around the outer periphery of the array. This arrangement enables row and column drivers to be divided into portions which are arranged in such a way that addressing can be provided for complicated display shapes.Type: GrantFiled: May 21, 2003Date of Patent: August 7, 2007Assignee: Koninklijke Philips Electronics N. V.Inventor: Stephen J. Battersby
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Patent number: 7211864Abstract: A fully depleted castellated-gate MOSFET device is disclosed along with a method of making the same. The device has robust I/O applications, and includes a semiconductor substrate body having an upper portion with an upper end surface and a lower portion with a lower end surface. A source region, a drain region, and a channel-forming region between the source and drain regions are all formed in the semiconductor substrate body. trench isolation insulator islands surround the source and drain regions as well as the channel-forming region. The channel-forming region is made up of a plurality of thin, spaced, vertically-orientated conductive channel elements that span longitudinally along the device between the source and drain regions. A gate structure is also provided in the form of a plurality of spaced, castellated gate elements interposed between the channel elements.Type: GrantFiled: September 13, 2004Date of Patent: May 1, 2007Inventor: John J. Seliskar
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Patent number: 7122436Abstract: Fabrication of electronic devices in the “metal layers” of semiconductor devices. Each metal layer includes a dielectric layer that supports a conductive layer, which includes electrically conductive pathways and electronic devices. The metal layers are stacked on top of each other such that the dielectric layers separate the adjacent conductive layers. The electronic devices may be passive devices such as resistors. The resistors are formed by depositing metal onto the dielectric layer and then implanting the metal with oxygen. The conductive layer may be formed of materials such as copper and aluminum.Type: GrantFiled: September 16, 2004Date of Patent: October 17, 2006Assignee: LSI Logic CorporationInventors: Santosh S. Menon, Hemanshu D. Bhatt
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Patent number: 7101768Abstract: As disclosed herein, a method is provided, in an integrated circuit, for forming an enhanced capacitance trench capacitor. The method includes forming a trench in a semiconductor substrate and forming an isolation collar on a sidewall of the trench. The collar has at least an exposed layer of oxide and occupies only a “collar” portion of the sidewall, while a “capacitor” portion of the sidewall is free of the collar. A seeding layer is then selectively deposited on the capacitor portion of the sidewall. Then, hemispherical silicon grains are deposited on the seeding layer on the capacitor portion of the sidewall. A dielectric material is deposited, and then a conductor material, in that order, over the hemispherical silicon grains on the capacitor portion of the sidewall.Type: GrantFiled: September 27, 2002Date of Patent: September 5, 2006Assignee: International Business Machines CorporationInventors: Kenneth T. Settlemyer, Jr., Porshia Shane Wrschka
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Patent number: 7081409Abstract: In a method for forming a gate electrode, a dielectric layer having a high dielectric constant is formed on a substrate. Tantalum amine derivatives represented by a chemical formula Ta(NR1)(NR2R3)3 in which R1, R2 and R3 represent H or C1–C6 alkyl group are introduced onto the dielectric layer to form a tantalum nitride layer. A capacitor metal layer or a gate metal layer is formed on the tantalum nitride layer. The capacitor metal layer or the gate metal layer and the tantalum nitride layer are patterned to form a capacitor electrode or a gate electrode. The tantalum amine derivatives are used in forming a dual gate electrode.Type: GrantFiled: June 25, 2004Date of Patent: July 25, 2006Assignee: Samsung Electronics Co., Ltd.Inventors: Sang-Bom Kang, Jong-Myeong Lee, Kyung-In Choi, Gil-Heyun Choi, You-Kyoung Lee, Seong-Geon Park, Sang-Woo Lee
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Patent number: 7071061Abstract: A method of fabricating a non-volatile memory is described. A substrate is provided and a first dielectric layer, an electron trapping layer and a second dielectric layer are sequentially formed thereon. Each of the stacked gate structures includes a first gate and a cap layer having a gap between every two stacked gate structures. An oxide layer is formed on the sidewalls of the first gate. A portion of the second dielectric layer not covered by the stacked gate structures is removed. A third dielectric layer is further formed on the substrate. A second conductive layer is formed over the substrate, and a portion thereof to form second gates. The second gates and the stacked gate structures form a column of memory cells. A source region and a drain region are formed in the substrate adjacent to two sides of the column of memory cells.Type: GrantFiled: September 26, 2005Date of Patent: July 4, 2006Assignee: Powerchip Semiconductor Corp.Inventor: Saysamone Pittikoun