Abstract: Lignin concentrations from wood pulp samples are measured by applying an excitation light at a selected wavelength to the samples in order to cause the lignin to emit fluorescence. A spectral distribution of the fluorescence emission is then determined. The lignin concentration is then calculated based on the spectral distribution signal. The spectral distribution is quantified by either a wavelength centroid method or a band ratio method.

Abstract: A spectrometer using Zeeman background correction is disclosed which has a sample producer (100) for producing a cloud of atoms, an electromagnetic radiation source (102) for irradiating the atom cloud, a detector (104) for detecting the radiation after it passes through the atom cloud and an electromagnet (14) for applying a magnetic field to the atom cloud. A power supply and switching unit (106) for powering the electromagnet and switching the electromagnet on and off to create a Zeeman effect are provided. The switching unit has transistors (16-22, 40, 42, 50, 52) controlled by a control circuit (25), and the power supply includes a rectifier (10) and one or more capacitors (12, 12a, 12b). The switching time is typically on the order of 1-1.5 ms or less and the high voltage which is applied is on the order of 400-800 V.

Abstract: An atomic emission spectrometer includes an induction coupled plasma generator and a detector system for detecting the radiation relative to spectral wavelength. A first mirror is on the longitudinal axis of the generator to receive axial radiation therefrom. A second mirror is disposed laterally from the generator so as to reflect radial radiation therefrom parallel to the longitudinal axis toward a third mirror disposed laterally from the longitudinal axis. The third mirror passes the radiation to a fourth mirror positioned adjacent to the axial radiation without interfering therewith so as to reflect the radial radiation to the first mirror. The first mirror is rotated to a first orientation to reflect the axial radiation into the detector system, or to a second orientation to reflect the radial radiation into the detector system.

Abstract: A method of detecting a relative positional deviation of a first object having a first grating mark with an optical power and a second object having a second grating mark with an optical power, is disclosed, wherein a projected radiation beam is diffracted by the first and second grating marks in sequence and, on the basis of a position of convergence on a light receiving surface of plural diffraction beams produced by the diffraction through the first and second grating marks and including a signal beam having been diffracted at a predetermined order by each of the first and second grating marks, the relative positional deviation is determined, a detection zone is defined on the light receiving surface, the signal beam is converged upon the detection zone, and a predetermined diffraction beam of the plural diffraction beams which, for a relative positional deviation of the first and second objects, shows displacement different from that of the signal beam is substantially prevented from being converged upon

Abstract: An apparatus for projecting a mask pattern (MA) on a substrate (W) by means of a projection lens system (PL) is described, which apparatus comprises a device for aligning a mask alignment mark (M.sub.1, M.sub.2) with respect to a substrate alignment mark (P.sub.1, P.sub.2). Means (WE.sub.1, WE.sub.2) preventing phase differences due to reflections at the mask plate (MA) from occurring within the alignment beam portions received by a detection system (13, 13') are arranged in the path of selected alignment beam portions (b.sub.1, b.sub.1 ').

Abstract: Microwave-induced plasma for continuous, real time trace element monitoring under harsh and variable conditions. The sensor includes a source of high power microwave energy and a shorted waveguide made of a microwave conductive, refractory material communicating with the source of the microwave energy to generate a plasma. The high power waveguide is constructed to be robust in a hot, hostile environment. It includes an aperture for the passage of gases to be analyzed and a spectrometer is connected to receive light from the plasma. Provision is made for real time in situ calibration. The spectrometer disperses the light, which is then analyzed by a computer. The sensor is capable of making continuous, real time quantitative measurements of desired elements, such as the heavy metals lead and mercury.

Abstract: A spectrophotometer useful for spectral analysis of light emanating from one or more targets within an image is described. The apparatus comprises a diffractive lens having an optical axis, a planar array of photodetector elements (pixels), a means for changing the distance between the photodetector array and the diffractive lens along the optical axis and a signal processor. If either the photodetector array or the lens is moved along the optical axis, different wavelengths of light from each target within the image come into and out of focus on particular photodetector elements in the plane of the photodetector array generating sequential images corresponding to different wavelengths. By tracking each pixel's output in the photodetector array as a function of lens position relative to the photodetector array, the spectral composition of each target within the image is generated.

Abstract: In a spectrophotometer, a light source is provided in the form of a multiplicity of light emitting diodes which transmit light through an entrance slit to irradiate an oscillating grating. The light is dispersed by the grating toward an exit slit which transmits a narrow bandwidth of light to irradiate a sample. As the grating oscillates, the wavelength transmitted through the exit slit is scanned through a selected spectrum. The diodes in the array each emit light in a different wavelength band so that the diodes as a group emit light throughout the selected spectrum. As the grating oscillates, the diodes are energized and extinguished in sequence so that no more than two diodes will be energized at any given instant of time and the energized diode will be emitting light at the wavelength dispersed by the grating to the exit slit.

Abstract: In a method for evaluating thickness of a semiconductor layer epitaxially growing on a main surface of a substrate, a parallel stripe-shaped ridges extending are formed on the surface of the substrate, and a semiconductor layer is epitaxially grown on the surface of the substrate including the stripe-shaped ridges while irradiating the stripe-shaped ridges with light and monitoring from the stripe-shaped ridges to evaluate the thickness of the epitaxially growing semiconductor layer. The thickness of the epitaxial layer is evaluated with high precision during the epitaxial growth process.

Abstract: An object extracting method of extracting a position of an object in a to-be-inspected region through an image processing, includes the steps of obtaining a plurality of density values of brightness from the to-be-inspected region, converting the density value which is larger or smaller than a preset threshold value into a specified value, integrating the density values at an X or Y coordinate on a Y or X axis, projecting the integrated density values at the X or Y axis, and extracting the position of the object present in the to-be-inspected region based on change of the integrated density values.

Abstract: An exposure apparatus includes a supplying portion for supplying a radiation beam; a detector; an optical arrangement operable to amplitude-divide the radiation beam from the supplying portion to produce first and second beams, the optical arrangement being effective to direct the first beam to a workpiece to expose the same with the first beam and also to direct the second beam to the detector to cause the same to produce a signal; wherein the optical arrangement is arranged so that, independently of a change in the state of polarization of the radiation beam, the signal from the detector is substantially proportional to the intensity of the first beam.

Abstract: A spectrophotometer using a charge coupled device array as an image receiver characterised in that an image of its entrance slit is tilted with respect to columns of pixels in the charge coupled device array and in which the height of the image of the entrance slit on the charge coupled device array is arranged to extend over two or more rows of pixels so that the image of the entrance slit is skewed over pixels in two adjacent columns. Means are provided to analyse the output of the pixels to provide information on the intensity distribution of each spectral line with respect to wavelength having a resolution greater than that of the pitch of the pixels in each row of the charge coupled device array.

Abstract: An illumination system is provided having one or more light sources, opaque baffles, and mirrors for illuminating indicia on a substrate, such as a semiconductor wafer, for viewing by a camera aligned parallel with or at an angle to the substrate. The light sources include light emitting diodes (LEDs) for illuminating soft marks and broad spectrum incandescent lamps for illuminating hard marks. Dark field and light field illuminators are provided for enhanced reading of light indicia on a dark background and dark indicia on a light background, respectively. A light control unit allows for manual or automated control of light source selection and light intensity.

Abstract: A testing apparatus includes a receiver for holding a plurality of textile samples and an automatic feed mechanism disposed adjacent to the receiver for selectively engaging and removing samples from the receiver and transporting them to a processor where the textile material is processed to produce textile entities in an individualized condition. The entities are then transported to a sensor that produces signals corresponding to characteristics of the entities. A control means detects the presence or absence of a sample in the automatic feed mechanism and controls it accordingly. Analog and digital components analyze the characteristic signals to identify segments of the characteristic signals that correspond to neps, trash and fibers.

Abstract: An optical measurement apparatus in which a reaction vessel is formed on a surface of at least one side of an optical waveguide, and which apparatus includes a signal light outgoing section for outgoing a signal light which is obtained by introducing a measurement light in the optical waveguide, and a detection section for detecting the signal light from the signal light outgoing section is described. The optical measurement apparatus for preventing stray light further includes a preventing device, positioned near the signal light outgoing section, for preventing stray light, which is outgone from an interior of the reaction vessel to an edge section of the signal outgoing section, from being guided to a detection region of the detection section. The stray light, which has a same wavelength to that of the signal light, is thus prevented from reaching the detection device by the preventing device.

Abstract: Apparatus for analyzing a spectral signature, including: a light source; a spatial light modulator connected to the light source, the spatial light modulator modulating light from the light source in accordance with spatial features of the spectral signature; an optic system upon which modulated light from the spatial light modulator is incident, the optic system filtering the modulated light; a hologram illuminated with filtered, modulated light from the optic system, the hologram outputting an optical identification of the spectral signature; and a detector upon which the optical identification is incident, the detector detecting the optical identification.

Abstract: A modular particle detecting device is disclosed for nonintrusive in-situ detection of particles passing through a sensing region. The device is particularly useful for microcontamination control in semiconductor processing environments, and includes, as separate components, a viewing unit and a sensing unit. The viewing unit has a detecting window and heated illuminating and discharge windows for condensation control. A fluid passage connectable to a flow line enables particle-carrying fluid to pass through a sensing region within the passage. The sensing unit has illuminating circuitry for providing light through the illuminating window to the sensing region, and has detecting circuitry to receive, through the detecting window, light scattered at the sensing region to thereby detect particles in fluid then at the sensing region without physical intrusion of the sensing unit into the sensing region.

Abstract: Liquid crystal display panels are mounted to a beam combining prism such that each display panel can flex in the place of the display panel as a result of thermal stresses. Mirrors having a cover glass plate substantially equivalent to the cover glass on the display panels are used to establish the image planes. A three-point clip mount for each display panel is then positioned based on the respective image plane. The mirrors are then replaced with the actual display panels and the optical system is then finely adjusted. After the fine adjustments, the mounting clips are bonded to the display panels.

Abstract: A monocular telescope having a constant length includes a lens mounted in a tube and interchangeable eyepieces to vary the magnification. Focusing is performed using a positioning member to move a focusing unit axially in the tube. The rate of focus adjustment is adaptable to the selected magnification due to the provision of a transmission gear having different diameter gear wheels arranged along the positioning member. The transmission gear can be operatively coupled to the interchangeable eyepiece.

Abstract: A system which uses a random noise test target 16 to align sensors 10 and 12 by performing mathematical cross correlations between sensors 10 and 12. The system 48 includes a computer 58 rotating one of the images, computing a correlation between the rotated image and a reference image and determining the peak in the correlation. A global maximum is used to interpolate a true subpixel peak. The interpolated rotational cross correlation peak is used to determine values of two dimensional and rotational movement of one of the sensors 10 and 12 necessary to align the sensors. The values are used to move the sensor 10 or 12 and it is fixed in place. Once the sensors have been aligned and fixed in place, the system 118 computes the cross correlation of segments of the image to determine delay values and an interpolation filter coefficient values which are stored in a permanent storage device 120.