Abstract: Aspects include metrology methods and systems for determining characteristics of conical shaft portions, such as angle of taper and crown height. In an example, a metrology system includes a fixture for supporting a workpiece. The fixture provides for translation in a longitudinal dimension, and rotation about an axis of symmetry. The system may include a sensor mounted for scanning lines including sections of the workpiece as well as control logic for coordinating translation of the workpiece to provide for an approximately constant ratio of longitudinal translation and lines scanned during scanning operations. The system may include image logic for assembling an image from image data generated during each scanning operation, edge detection logic for detecting an edge shape in each assembled image, and slope and crown height calculation logic for calculating a slope and a crown height of each of the detected edge shapes.
Abstract: An alignment mark on a wafer is described, including at least one dense pattern and at least one block-like pattern adjacent thereto and shown as at least one dark image and at least one bright image adjacent thereto. A method of getting a position reference for a wafer is also described. An above alignment mark is formed. The alignment mark, which is shown as at least one dark image and at least one bright image adjacent thereto that are formed by the at least one dense pattern and the at least one block-like pattern, is then detected.
Abstract: The surface detection system includes a source of an optical interrogating signal (44) which accompanies a droplet spray in an oral cleaning device directed to an oral surface (46). The interrogating optical signal is reflected from the oral surface which the spray impacts and detected (48). A selected characteristic of the reflected signal, such as intensity, is indicative of the nature of the oral surface, such as either gum tissue or a tooth surface. The detected reflected signal is then processed to determine the nature of the oral reflecting surface. The processor (50) then provides a resulting output signal which can be used to either warn the user concerning the nature of the oral surface or to change the characteristics of the spray appropriately according to the surface (51).
Type:
Grant
Filed:
June 25, 2007
Date of Patent:
March 29, 2011
Assignee:
Koninklijke Philips Electronics N.V.
Inventors:
Paulus Cornelis Duineveld, Joseph W. Grez
Abstract: A method of developing a multivariate optical element for an optical analysis system includes forming an optically absorptive spectral element having an optically absorptive material, the optically absorptive material being absorbing in a predetermined spectral region; and utilizing the optically absorptive spectral element in the optical analysis system.
Type:
Grant
Filed:
November 27, 2006
Date of Patent:
March 22, 2011
Assignee:
Halliburton Energy Services, Inc.
Inventors:
Michael L. Myrick, Robert P. Freese, Jonathan H. James, Ryan J. Priore, John C. Blackburn
Abstract: An improved Raman microspectrometer system extends the optical reach and analysis range of an existing Raman microspectrometer to allow analysis and/or repair of an oversized sample. The improved Raman microspectrometer system includes an extender for extending the optical reach of the existing microspectrometer and a supplemental stage which extends the analysis range of the existing microspectrometer by providing travel capabilities for non-destructive analysis of an entire oversized sample. Such an arrangement decreases manufacturing costs associated with testing oversized samples such as mammography panels, enabling analysis and/or repair to be performed without destruction.
Abstract: A miniaturized spectrometer/spectrophotometer system and methods are disclosed. A probe tip including one or more light sources and a plurality of light receivers is provided. A first spectrometer system receives light from a first set of the plurality of light receivers. A second spectrometer system receives light from a second set of the plurality of light receivers. A processor, wherein the processor receives data generated by the first spectrometer system and the second spectrometer system, wherein an optical measurement of a sample under test is produced based on the data generated by the first and second spectrometer systems.
Type:
Grant
Filed:
July 26, 2010
Date of Patent:
March 15, 2011
Assignee:
Vita Zahnfabrik H. Rauter GmbH & Co. KG
Inventors:
Wayne D. Jung, Russell W. Jung, Walter W. Sloan, Alan R. Loudermilk
Abstract: A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
Type:
Grant
Filed:
November 4, 2008
Date of Patent:
March 15, 2011
Assignee:
J.A. Woollam Co., Inc.
Inventors:
Blaine D. Johs, Steven E. Green, Craig M. Herzinger, Duane E. Meyer, Martin M. Liphardt
Abstract: A microdissection method for separating and taking a target zone of a biological preparation, disposed on a carrier device with a laser light-absorbent incisable layer and a carrier means, comprises cutting the preparation and the incisable layer along an edge segment of the target zone and removing of a non-excised segment of the incisable layer from the carrier means.
Abstract: An optical device includes an aperture stop that limits an angular extent of light from an illuminated sample. A first lens is positioned between the aperture stop and a detector plane. A second lens is positioned between the first lens and the detector plane and is operable to map light from the aperture stop to the detector plane such that the light is averaged at the detector plane.
Type:
Grant
Filed:
January 10, 2008
Date of Patent:
February 22, 2011
Assignee:
Hewlett-Packard Development Company, L.P.
Abstract: An overlay measuring apparatus includes a light source which generates visible light with a plurality of wavelengths, an optical module which selects visible light with a single wavelength from the visible light generated by the light source, makes the visible light with a single wavelength incident on a plurality of overlay patterns, and uses visible light reflected from the plurality of overlay patterns to project the overlay patterns with a predetermined color, an imaging unit which acquires images of the plurality of overlay patterns according to individual wavelengths of the visible light and acquires corresponding image signals, and a control unit which outputs a control signal to the optical module so that the optical module can project the overlay pattern with a specific color using information associated with the individual wavelengths of the visible light that is used to project the overlay pattern image selected by a selection unit.
Abstract: A physical quantity measuring apparatus utilizing optical frequency domain reflectometry of the invention includes a tunable laser; a first polarization-maintaining fiber; a polarization-maintaining coupler; a second polarization-maintaining fiber; a third polarization-maintaining fiber; a sensor consists of fiber Bragg gratings formed at a core of the third polarization-maintaining fiber; a fourth polarization-maintaining fiber; a photodiode detects Bragg reflected light from the sensor and reference light from the referential reflecting end; a controller detects a modulation of an interference intensity between the Bragg reflected light and the reference light, based on an intensity change of multiplexed light of the Bragg reflected light and the reference light; an incidence part inputs the measuring light; and an optical path-length adjuster arranged on the third polarization-maintaining fiber; the incidence part provided on the first polarization-maintaining fiber, or on both the second and third polariz
Type:
Grant
Filed:
February 12, 2010
Date of Patent:
February 15, 2011
Assignee:
Fujikura Ltd.
Inventors:
Koji Omichi, Akira Sakamoto, Shunichirou Hirafune
Abstract: Surface-enhanced Raman spectroscopic (SERS) systems and methods for detecting biomolecules of interest, such as a bacterium or virus are provided.
Type:
Grant
Filed:
June 16, 2008
Date of Patent:
February 15, 2011
Assignee:
University of Georgia Research Foundation, Inc.
Inventors:
Duncan C. Krause, Suzanne Marie Larkin Hennigan, Richard A. Dluhy, Jeremy Driskell, Yiping Zhao, Ralph A. Tripp
Abstract: A light source for an atomizing device, specifically an atom absorption spectrometer comprising one, two, or more lamps, whose ray can be selected by means of at least one two-dimensionally moveable optical selection element, and which can be directed in the direction of atomizing device. Fine-tuning is thereby achieved quickly with little constructive expenditure and with low costs. A very high degree of accuracy is possible from the selector through a rotational and highly adjustable rotation spindle.
Type:
Grant
Filed:
March 24, 2008
Date of Patent:
January 18, 2011
Assignee:
PerkinElmer Singapore Pte. Ltd.
Inventors:
David H. Tracy, Bernhard H. Radziuk, Klaus Fischer
Abstract: A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
Type:
Grant
Filed:
November 25, 2008
Date of Patent:
January 18, 2011
Assignee:
J.A. Woollam Co., Inc.
Inventors:
Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
Abstract: A method for evaluating three-dimensional (3-D) coordinate system measurement accuracy of an optical 3-D measuring system using targeted artifacts is provided. In this regard, an exemplary embodiment of a method for evaluating 3-D coordinate system measurement accuracy using targeted artifacts comprises: taking a series of measurements from different positions and orientations using target dots on a targeted artifact with an optical 3-D measuring system; and calculating measurement errors using the series of measurements. An exemplary embodiment of a targeted artifact used with the method includes a base and target dots located on the base.
Type:
Grant
Filed:
December 21, 2007
Date of Patent:
January 11, 2011
Assignee:
United Technologies Corp.
Inventors:
Jesse R. Boyer, Jeffry K. Pearson, Randall W. Joyner, Joseph D Drescher
Abstract: In a substrate supporting apparatus of a surface potential measuring apparatus, a first fluid is ejected around a target region on an upper surface of a substrate from a circular-shaped first porous member of a first fluid ejection part and a second fluid is ejected onto a lower surface of the substrate from a circular-shaped second porous member of a second fluid ejection part which is opposite to the first fluid ejection part. The substrate can be supported and flattened between the first fluid ejection part and the second fluid ejection part. Also, it is possible to keep the distance between the substrate and the first porous member, with a simple construction. As a result, a probe can be positioned above a flatted target region with leaving a predetermined spacing, to perform measurement of a surface potential of the target region on the substrate with high accuracy.
Abstract: In one general aspect, a spectroscopic method for monitoring heterogeneity of a sample is disclosed. In this method, sampled spectroscopic measurements are acquired over a range of different micro locations in a macro-sample of the sample. This step is repeated for micro-locations in further macro-samples of the sample, and a statistical measure of chemical heterogeneity is derived from the acquisitions. In another general aspect, differently sized samples are acquired, and a statistical measure of chemical heterogeneity is derived from these acquisitions.
Abstract: A method for estimating color measurements of color samples includes printing a color sample based on input data, measuring a color of the printed color sample with an in-line spectral sensor at a first temperature, and estimating a color of the printed color sample which would be output by a reference spectral sensor at a second temperature. The estimation is based on a thermochromatic model which represents relationships between measured colors of printed color samples on the in-line spectral sensor at the first temperature and the reference spectral sensor at the second temperature. The reference spectral sensor is a different type of sensor from the in-line spectral sensor, so the color response of the two spectral sensors is different, even when the measurement conditions are identical. Consequently, a set of printed spot color samples generate different measured colors at the second temperature on the in-line spectral sensor from the reference spectral sensor.
Type:
Grant
Filed:
September 3, 2008
Date of Patent:
January 4, 2011
Assignee:
Xerox Corporation
Inventors:
Paul S. Bonino, Lalit Keshav Mestha, Gary W. Skinner
Abstract: The present invention is a flow cytometry-based hematology system useful in the analysis of biological samples, particularly whole blood or blood-derived samples. The system is capable of determining at least a complete blood count (CBC), a five-part white blood cell differential, and a reticulocyte count from a whole blood sample. The system preferably uses a laser diode that emits a thin beam to illuminate cells in a flow cell and a lensless optical detection system to measure one or more of axial light loss, low-angle forward scattered light, high-angle forward scattered light, right angle scattered light, and time-of-flight measurements produced by the cells. The lensless optical detection system contains no optical components, other than photoreactive elements, and does not include any moving parts. Finally, the system uses a unique system of consumable reagent tubes that act as reaction chambers, mixing chambers, and waste chambers for the blood sample analyses.
Type:
Grant
Filed:
March 6, 2007
Date of Patent:
February 15, 2011
Assignee:
IDEXX Laboratories, Inc.
Inventors:
John W. Roche, Peter W. Hansen, Michelle L. Coleman, Harold R. Crews